Download or read book Scanning Electron Microscopy written by Ludwig Reimer and published by Springer. This book was released on 2013-11-11 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this book is to outline the physics of image formation, electron specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec tron beam can be blanked at high frequencies for time-resolving exper iments and what problems have tobe taken into account when focusing.
Download or read book Advanced Scanning Electron Microscopy and X Ray Microanalysis written by Patrick Echlin and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book has its origins in the intensive short courses on scanning elec tron microscopy and x-ray microanalysis which have been taught annually at Lehigh University since 1972. In order to provide a textbook containing the materials presented in the original course, the lecturers collaborated to write the book Practical Scanning Electron Microscopy (PSEM), which was published by Plenum Press in 1975. The course con tinued to evolve and expand in the ensuing years, until the volume of material to be covered necessitated the development of separate intro ductory and advanced courses. In 1981 the lecturers undertook the project of rewriting the original textbook, producing the volume Scan ning Electron Microscopy and X-Ray Microanalysis (SEMXM). This vol ume contained substantial expansions of the treatment of such basic material as electron optics, image formation, energy-dispersive x-ray spectrometry, and qualitative and quantitative analysis. At the same time, a number of chapters, which had been included in the PSEM vol ume, including those on magnetic contrast and electron channeling con trast, had to be dropped for reasons of space. Moreover, these topics had naturally evolved into the basis of the advanced course. In addition, the evolution of the SEM and microanalysis fields had resulted in the devel opment of new topics, such as digital image processing, which by their nature became topics in the advanced course.
Download or read book Scanning Electron Microscopy and X Ray Microanalysis written by Joseph Goldstein and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 708 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text provides students as well as practitioners with a comprehensive introduction to the field of scanning electron microscopy (SEM) and X-ray microanalysis. The authors emphasize the practical aspects of the techniques described. Topics discussed include user-controlled functions of scanning electron microscopes and x-ray spectrometers and the use of x-rays for qualitative and quantitative analysis. Separate chapters cover SEM sample preparation methods for hard materials, polymers, and biological specimens. In addition techniques for the elimination of charging in non-conducting specimens are detailed.
Download or read book Advances in Electronics and Electron Physics written by L. Marton and published by . This book was released on 1956 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ultrastructure Techniques for Microorganisms written by H. C. Aldrich and published by . This book was released on 1986-08-31 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Image Formation in Low voltage Scanning Electron Microscopy written by Ludwig Reimer and published by SPIE Press. This book was released on 1993 with total page 162 pages. Available in PDF, EPUB and Kindle. Book excerpt: While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions.
Download or read book Scanning Electron Microscopy written by Ludwig Reimer and published by Springer. This book was released on 2013-11-11 with total page 538 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Download or read book Springer Handbook of Microscopy written by Peter W. Hawkes and published by Springer Nature. This book was released on 2019-11-02 with total page 1561 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book features reviews by leading experts on the methods and applications of modern forms of microscopy. The recent awards of Nobel Prizes awarded for super-resolution optical microscopy and cryo-electron microscopy have demonstrated the rich scientific opportunities for research in novel microscopies. Earlier Nobel Prizes for electron microscopy (the instrument itself and applications to biology), scanning probe microscopy and holography are a reminder of the central role of microscopy in modern science, from the study of nanostructures in materials science, physics and chemistry to structural biology. Separate chapters are devoted to confocal, fluorescent and related novel optical microscopies, coherent diffractive imaging, scanning probe microscopy, transmission electron microscopy in all its modes from aberration corrected and analytical to in-situ and time-resolved, low energy electron microscopy, photoelectron microscopy, cryo-electron microscopy in biology, and also ion microscopy. In addition to serving as an essential reference for researchers and teachers in the fields such as materials science, condensed matter physics, solid-state chemistry, structural biology and the molecular sciences generally, the Springer Handbook of Microscopy is a unified, coherent and pedagogically attractive text for advanced students who need an authoritative yet accessible guide to the science and practice of microscopy.
Download or read book Handbook of Silicon Semiconductor Metrology written by Alain C. Diebold and published by CRC Press. This book was released on 2001-06-29 with total page 703 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
Download or read book Handbook of Photomask Manufacturing Technology written by Syed Rizvi and published by CRC Press. This book was released on 2018-10-03 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it becomes increasingly important for new technologies to keep apace with these demands. Photomask technology is one of the key areas to achieving this goal. Although brief overviews of photomask technology exist in the literature, the Handbook of Photomask Manufacturing Technology is the first in-depth, comprehensive treatment of existing and emerging photomask technologies available. The Handbook of Photomask Manufacturing Technology features contributions from 40 internationally prominent authors from industry, academia, government, national labs, and consortia. These authors discuss conventional masks and their supporting technologies, as well as next-generation, non-optical technologies such as extreme ultraviolet, electron projection, ion projection, and x-ray lithography. The book begins with an overview of the history of photomask development. It then demonstrates the steps involved in designing, producing, testing, inspecting, and repairing photomasks, following the sequences observed in actual production. The text also includes sections on materials used as well as modeling and simulation. Continued refinements in the photomask-making process have ushered in the sub-wavelength era in nanolithography. This invaluable handbook synthesizes these refinements and provides the tools and possibilities necessary to reach the next generation of microfabrication technologies.
Download or read book Biological Low Voltage Scanning Electron Microscopy written by James Pawley and published by Springer Science & Business Media. This book was released on 2007-12-03 with total page 323 pages. Available in PDF, EPUB and Kindle. Book excerpt: Major improvements in instrumentation and specimen preparation have brought SEM to the fore as a biological imaging technique. Although this imaging technique has undergone tremendous developments, it is still poorly represented in the literature, limited to journal articles and chapters in books. This comprehensive volume is dedicated to the theory and practical applications of FESEM in biological samples. It provides a comprehensive explanation of instrumentation, applications, and protocols, and is intended to teach the reader how to operate such microscopes to obtain the best quality images.
Download or read book Scanning Electron Microscopy written by and published by . This book was released on 1986 with total page 486 pages. Available in PDF, EPUB and Kindle. Book excerpt: Vols. for 1968-77 include the proceedings of the annual Scanning Electron Microscope Symposium, sponsored by the IIT Research Institute, and other workshops.
Download or read book Handbook of Charged Particle Optics written by Jon Orloff and published by CRC Press. This book was released on 2017-12-19 with total page 938 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.
Download or read book Scanning Electron Microscopy for the Life Sciences written by Heide Schatten and published by Cambridge University Press. This book was released on 2013 with total page 275 pages. Available in PDF, EPUB and Kindle. Book excerpt: A guide to modern scanning electron microscopy instrumentation, methodology and techniques, highlighting novel applications to cell and molecular biology.
Download or read book Microscopy of Semiconducting Materials 1987 Proceedings of the Institute of Physics Conference Oxford University April 1987 written by A.G. Cullis and published by CRC Press. This book was released on 2021-01-31 with total page 819 pages. Available in PDF, EPUB and Kindle. Book excerpt: The various forms of microscopy and related microanalytical techniques are making unique contributions to semiconductor research and development that underpin many important areas of microelectronics technology. Microscopy of Semiconducting Materials 1987 highlights the progress that is being made in semiconductor microscopy, primarily in electron probe methods as well as in light optical and ion scattering techniques. The book covers the state of the art, with sections on high resolution microscopy, epitaxial layers, quantum wells and superlattices, bulk gallium arsenide and other compounds, properties of dislocations, device silicon and dielectric structures, silicides and contacts, device testing, x-ray techniques, microanalysis, and advanced scanning microscopy techniques. Contributed by numerous international experts, this volume will be an indispensable guide to recent developments in semiconductor microscopy for all those who work in the field of semiconducting materials and research development.
Download or read book Advances in Electronics and Electron Physics written by and published by Academic Press. This book was released on 1992-08-17 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Electronics and Electron Physics
Download or read book Advances in Imaging and Electron Physics written by Peter W. Hawkes and published by Elsevier. This book was released on 2004-12-18 with total page 605 pages. Available in PDF, EPUB and Kindle. Book excerpt: * A special volume devoted principally to therole of the late Sir Charles Oatley in the development of the scanning electron microscopeings* It contains historical articles and reminiscences by most of the scientists who have worked on the scanning electron microscope in Oatley's laboratory * Emphasizes broad and in depth article collaborations between world-renowned scientists in the field of image and electron physicsAlthough the scanning electron microscope had a prehistory in Germany and the USA, its real champion was Charles Oatley, who launched his projectin the Cambridge University Engineering Department shortly after the end of World War II. A first microscope was built successfully by D. McMullan, oneof the Guest Editors of this volume and a succession of progressively improved instruments followed. One in particular, built by K.C.A. Smith was commissioned specially for the Canadian Pulp and Paper Research Institute for use in their Montreal laboratories. All these efforts culminated in the commercial model built by the Cambridge Instrument Company and marketed in 1965 under the trade name, Stereoscan.Although this story has been told on several occasions, in particular in these Advances, it seemed appropriate, in the centenary year of the birth of Sir Charles Oatley, that more details should be published to celebrate these achievements. This volume is the result. It contains not only historical articles and reminiscences by most of the scientists who have worked on the scanning electron microscope in Oatley's laboratory but also full or partial reproductions of many of the key publications, beginning with McMullan's early paper of 1953 and including Oatley's own "Early history of the scanning electron microscope" (1982). A website has been created, in which supplementary material is collected.This volume is a tribute to a bold pioneering scientist and a vivid record of the creation of the first commercial scanning electron microscopes and of subsequent developments. * A special volume devoted principally to therole of the late Sir Charles Oatley in the development of the scanning electron microscopeings* It contains historical articles and reminiscences by most of the scientists who have worked on the scanning electron microscope in Oatley's laboratory* Emphasizes broad and in depth article collaborations between world-renowned scientists in the field of image and electron physics