Download or read book Radio frequency Induction Heating of Low pressure Plasmas written by Ronald J. Sovie and published by . This book was released on 1967 with total page 68 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Radio frequency Induction Heating of Low pressure Plasmas written by Ronald J. Sovie and published by . This book was released on 1967 with total page 60 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book NASA Technical Note written by and published by . This book was released on 1967 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Physics of Radio Frequency Plasmas written by Pascal Chabert and published by Cambridge University Press. This book was released on 2011-02-24 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Download or read book Radiofrequency Heating of Plasmas written by R. A. Cairns and published by CRC Press. This book was released on 1991 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: Cross and Manheimer/Lashmore-Davies sell steadily in the export market - potential for Cairns here. This book provides a concise introduction to the basic physics of radiofrequency heating. Most existing literature on the subject is at the research level, aimed at specialists in the field. It provides a survey of theoretical and experimental results with a large number of references to help the reader wishing for more detail. Provides a concise and readable account/ Basic physical principles are emphasised and more complicated mathematical ideas are explained in outline. Radiofrequency current drive is discussed in detail. "One criticsm may be lack of detail. I have deliberatly avoided including a lot of mathematical and experimental detail in order to keep the book short and to concentrate on the essential ideas. Enough references are given to lead anyone wishing more detail to the appropriate literature" - comment from the author? Export Market: Japan, USA, CERN, all important centres for fusion research Tokamaks - supercolliders for particle acceleration - particles are bombarded by extremely powerful lasers the beams of which are split many times through kms of piping - massive structurees largest currently in Japan but also important structure in US.
Download or read book Low Pressure Plasmas and Microstructuring Technology written by Gerhard Franz and published by Springer Science & Business Media. This book was released on 2009-04-09 with total page 743 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the semiconductor industry is inconceivable wi- outthegiantprogressintheplasmatechnology.Moore’slawisnotcarvedinto 1 stone, and not only the ITRS map is subject to change every ?ve years but also new branches develop and others mingle together. Moreover, the quality of conventional materials can be improved by plasma treatment:Cottonbecomesmorecrease-resistant,leathermoredurable,andthe shrinking of wool ?bers during the washing process can be signi?cantly reduced. To cut a long story short: More than 150 years after the discovery of the sputtering e?ect by Grove, plasma-based processes are about to spread out into new ?elds of research and application [1]—no wonder that the market for etching machines kept growing by an annual rate of 17 % up to the burst of the internet bubble, and it took only some years of recovery to continue the voyage [2].
Download or read book Handbook of Physical Vapor Deposition PVD Processing written by D. M. Mattox and published by Cambridge University Press. This book was released on 2014-09-19 with total page 947 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1974 with total page 992 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Applied Mechanics Reviews written by and published by . This book was released on 1968 with total page 700 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Official Gazette of the United States Patent and Trademark Office written by and published by . This book was released on 1987 with total page 1734 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book NASA Scientific and Technical Reports written by United States. National Aeronautics and Space Administration Scientific and Technical Information Division and published by . This book was released on 1968 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book A Selected Listing of NASA Scientific and Technical Reports written by United States. National Aeronautics and Space Administration. Scientific and Technical Information Division and published by . This book was released on 1968 with total page 436 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Government Reports Announcements written by and published by . This book was released on 1973 with total page 984 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Experimental Investigation of a Variable length Constant velocity Traveling Magnetic Wave Plasma Accelerator written by Raymond W. Palmer and published by . This book was released on 1967 with total page 28 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Theoretical Investigations of R F Induction Heated Plasmas written by Arthur E. Mensing and published by . This book was released on 1969 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The Efficient Utilization of an Rf Power Oscillator for Producing Low pressure Plasmas written by Melvin J. KOFOID and published by . This book was released on 1966 with total page 23 pages. Available in PDF, EPUB and Kindle. Book excerpt: In an ordinary arrangement for high-frequency plasma heating a discharge tube is placed inside an RF coil and the coil is simply connected to a standard power oscillator. If a low-pressure plasma is to be produced, i.e., in gas at 0.1 - 500 microns pressure, the energy transferred to the plasma then will be only a small fraction of the generator capacity, because of the low power factor of the load. Simple expedients are described which result in the attainment of a much increased RF magnetic flux density in the discharge tube. The resulting increase in the plasma conductivity, hence in the load power factor, is sufficient to effect high and efficient loading. The discussion centers around the use of a 15 kW 450 kc/sec oscillator for plasma research studies. The usefullness of the generator is considerably increased by electronic control which allows times of operation as brief as 0.05 sec. Short-time operation and low average loading permit the exceeding of normal oscillator current limits to obtain high RF fields for starting and maintaining low pressure plasmas-- extending the possible range of operation. Comprehensive performance data are presented. (Author).
Download or read book Thermal Energy written by Yatish T. Shah and published by CRC Press. This book was released on 2018-01-12 with total page 1112 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book details sources of thermal energy, methods of capture, and applications. It describes the basics of thermal energy, including measuring thermal energy, laws of thermodynamics that govern its use and transformation, modes of thermal energy, conventional processes, devices and materials, and the methods by which it is transferred. It covers 8 sources of thermal energy: combustion, fusion (solar) fission (nuclear), geothermal, microwave, plasma, waste heat, and thermal energy storage. In each case, the methods of production and capture and its uses are described in detail. It also discusses novel processes and devices used to improve transfer and transformation processes.
