Download or read book Plasma Electronics Second Edition written by Toshiaki Makabe and published by CRC Press. This book was released on 2014-08-27 with total page 414 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory. Emphasizing computational algorithms and techniques, this updated edition of a popular monograph supplies a complete and up-to-date picture of plasma physics, computational methods, applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. A helpful resource for anyone learning about collisional plasma structure, function, and applications, this edition reflects the latest progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process. Filled with new figures, tables, problems, and exercises, it includes a new chapter on the development of atmospheric-pressure plasma, in particular microcell plasma, with a discussion of its practical application to improve surface efficiency. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor. Integrating physics, numerical methods, and practical applications, this book equips you with the up-to-date understanding required to scale up lab breakthroughs into industrial innovations.
Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2006-03-27 with total page 355 pages. Available in PDF, EPUB and Kindle. Book excerpt: Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,
Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2006-03-27 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory. Beginning with an overview of the basic characteristics and applications of low-temperature plasma, preeminent experts Makabe and Petrovic explore the physics underlying the complex behavior of non-equilibrium (or low temperature) plasma. They discuss charged particle transport in general and in detail as well as macroscopic plasma characteristics and elementary processes in gas phase and on surfaces. After laying this groundwork, the book examines state-of-the-art computational methods for modeling plasma and reviews various important applications including inductively and capacitively coupled plasma, magnetically enhanced plasma, and various processing techniques, while numerous problems and worked examples reinforce the concepts. Uniquely combining physics, numerical methods, and practical applications, Plasma Electronics: Applications in Microelectronic Device Fabrication equips you with the knowledge necessary to scale up lab bench breakthroughs into industrial innovations.
Download or read book Plasma Physics and Plasma Electronics written by L. M. Kovrizhnykh and published by . This book was released on 1989 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fourteen technical reports of research activity at (what used to the called) the Lebedev Physics Institute. Most of the research derives from stellarator work. The Russian edition appeared in 1985. Production work acceptable, though the crispness of the printing is surpassed by most newspapers. (NW)
Download or read book Plasma Physics and Engineering written by Alexander Fridman and published by CRC Press. This book was released on 2004-04-15 with total page 888 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma engineering is a rapidly expanding area of science and technology with increasing numbers of engineers using plasma processes over a wide range of applications. An essential tool for understanding this dynamic field, Plasma Physics and Engineering provides a clear, fundamental introduction to virtually all aspects of modern plasma science and technology, including plasma chemistry and engineering, combustion, chemical physics, lasers, electronics, methods of material treatment, fuel conversion, and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics, many helpful numerical formulas for practical calculations, and an array of problems and concept questions.
Download or read book Introduction to Plasma Physics and Controlled Fusion written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and nonlinear plasma theory. At the same time, the energy shortage on the one hand and the exploration of Jupiter and Saturn on the other have increased the national awareness of the important applications of plasma physics to energy production and to the understanding of our space environment. In magnetic confinement fusion, this period has seen the attainment 13 of a Lawson number nTE of 2 x 10 cm -3 sec in the Alcator tokamaks at MIT; neutral-beam heating of the PL T tokamak at Princeton to KTi = 6. 5 keV; increase of average ß to 3%-5% in tokamaks at Oak Ridge and General Atomic; and the stabilization of mirror-confined plasmas at Livermore, together with injection of ion current to near field-reversal conditions in the 2XIIß device. Invention of the tandem mirror has given magnetic confinement a new and exciting dimension. New ideas have emerged, such as the compact torus, surface-field devices, and the EßT mirror-torus hybrid, and some old ideas, such as the stellarator and the reversed-field pinch, have been revived. Radiofrequency heat ing has become a new star with its promise of dc current drive. Perhaps most importantly, great progress has been made in the understanding of the MHD behavior of toroidal plasmas: tearing modes, magnetic Vll Vlll islands, and disruptions.
Download or read book The Fourth State of Matter written by Yaffa Eliezer and published by Institute of Physics Publishing (GB). This book was released on 1989 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for the general science reader, this study explains the nature and properties of the fourth state of matter, known as plasma, the conditions under which it can form and some of the uses to which it might be put.
Download or read book Plasma Waves written by Donald Gary Swanson and published by Taylor & Francis. This book was released on 2020-07-14 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: Extended and revised, Plasma Waves, 2nd Edition provides essential information on basic formulas and categorizes the various possible types of waves and their interactions. The book includes modern and complete treatments of electron cyclotron emission, collisions, relativistic effects, Landau damping, quasilinear and nonlinear wave theory, and tunneling equations. The broad scope encompasses waves in cold, warm, and hot plasmas and relativistic plasma waves. Special chapters deal with the effects of boundaries, inhomogeneities, and nonlinear effects. The author derives all formulae and describes several fundamental wave experiments, allowing for a greater appreciation of the subject.
Download or read book Plasma Antennas Second Edition written by Theodore Anderson and published by Artech House. This book was released on 2020-11-30 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: This updated edition of an Artech House classic contains steering, focusing, and spreading of antenna beams using the physics of refraction of electromagnetic waves through a plasma. Pulsing circuitry for ionizing plasma antennas with low power requirements are covered. New and improved smart plasma antenna and applications to wi-fi and the applications of plasma antennas are discussed. Experimental work on plasma antenna noise and new progress on ruggedization and custom-made plasma tubes are also presented. This unique resource provides readers with a solid understanding of the efficient design and prototype development of plasma antennas to meet the challenge of reducing the power required to ionize the gas at various plasma densities. Thorough coverage of the technical underpinnings of plasma antennas, as well as important discussions on current markets and applications are discussed. Additionally, the book presents experimental work in this cutting-edge area and reveals the latest developments in the field.
Download or read book Introduction to Plasma Physics written by Donald A. Gurnett and published by Cambridge University Press. This book was released on 2017-02-20 with total page 535 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introducing the principles and applications of plasma physics, this new edition is ideal as an advanced undergraduate or graduate-level text.
Download or read book Fundamentals of Plasma Physics written by Paul M. Bellan and published by Cambridge University Press. This book was released on 2008-07-31 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt: This rigorous explanation of plasmas is relevant to diverse plasma applications such as controlled fusion, astrophysical plasmas, solar physics, magnetospheric plasmas, and plasma thrusters. More thorough than previous texts, it exploits new powerful mathematical techniques to develop deeper insights into plasma behavior. After developing the basic plasma equations from first principles, the book explores single particle motion with particular attention to adiabatic invariance. The author then examines types of plasma waves and the issue of Landau damping. Magnetohydrodynamic equilibrium and stability are tackled with emphasis on the topological concepts of magnetic helicity and self-organization. Advanced topics follow, including magnetic reconnection, nonlinear waves, and the Fokker–Planck treatment of collisions. The book concludes by discussing unconventional plasmas such as non-neutral and dusty plasmas. Written for beginning graduate students and advanced undergraduates, this text emphasizes the fundamental principles that apply across many different contexts.
Download or read book Plasma Engineering written by Michael Keidar and published by Academic Press. This book was released on 2018-08-06 with total page 587 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Engineering, Second Edition, applies the unique properties of plasmas (ionized gases) to improve processes and performance over many fields, such as materials processing, spacecraft propulsion and nanofabrication. The book considers this rapidly expanding discipline from a unified standpoint, addressing fundamentals of physics and modeling, as well as new and real-word applications in aerospace, nanotechnology and bioengineering. This updated edition covers the fundamentals of plasma physics at a level suitable for students using application examples and contains the widest variety of applications of any text on the market, spanning the areas of aerospace engineering, nanotechnology and nanobioengineering. This is highly useful for courses on plasma engineering or plasma physics in departments of Aerospace Engineering, Electrical Engineering and Physics. It is also useful as an introduction to plasma engineering and its applications for early career researchers and practicing engineers. - Features new material relevant to application, including emerging areas of plasma nanotechnology and medicine - Contains a new chapter on plasma-based control, as well as a description of RF and microwave-based plasma applications, plasma lighting, reforming and other most recent application areas - Provides a technical treatment of the fundamental and engineering principles used in plasma applications
Download or read book Plasma Confinement written by R. D. Hazeltine and published by Courier Corporation. This book was released on 2013-02-20 with total page 484 pages. Available in PDF, EPUB and Kindle. Book excerpt: Graduate-level text examines the essential physics underlying international research in magnetic confinement fusion with accounts of fundamental concepts behind methods of confining plasma at or near thermonuclear conditions. 1992 edition.
Download or read book Applications of Laser Plasma Interactions written by Shalom Eliezer and published by CRC Press. This book was released on 2008-12-22 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent advances in the development of lasers with more energy, power, and brightness have opened up new possibilities for exciting applications. Applications of Laser-Plasma Interactions reviews the current status of high power laser applications. The book first explores the science and technology behind the ignition and burn of imploded fusion fue
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Download or read book Introduction to Plasma Physics written by R.J Goldston and published by CRC Press. This book was released on 2020-07-14 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction to Plasma Physics is the standard text for an introductory lecture course on plasma physics. The text’s six sections lead readers systematically and comprehensively through the fundamentals of modern plasma physics. Sections on single-particle motion, plasmas as fluids, and collisional processes in plasmas lay the groundwork for a thorough understanding of the subject. The authors take care to place the material in its historical context for a rich understanding of the ideas presented. They also emphasize the importance of medical imaging in radiotherapy, providing a logical link to more advanced works in the area. The text includes problems, tables, and illustrations as well as a thorough index and a complete list of references.
Download or read book Plasma Medicine written by M. Laroussi and published by Cambridge University Press. This book was released on 2012-05-24 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first book dedicated exclusively to plasma medicine for graduate students and researchers in physics, engineering, biology, medicine and biochemistry.
