Download or read book High Density Plasma Sources written by Oleg A. Popov and published by . This book was released on 1995 with total page 445 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing.
Download or read book Plasmas at High Temperature and Density written by Heinrich Hora and published by Springer Science & Business Media. This book was released on 2008-11-09 with total page 455 pages. Available in PDF, EPUB and Kindle. Book excerpt: "New physics" is an appealing new keyword, not yet devalued by the ravages of inflation. But what has this to do with such an ugly field as plasma physics, steeped in classical physics, mostly outworn, with all its unsolved and ambiguous technological problems and its messy and open ended numerical studies? "New physics" is concerned with quarks, Higgs particles, grand unified theory, super strings, gravitational waves, and the profound basics of cosmology and black holes. It is the field of astonishing quantum effects, demonstrated by the von Klitzing effect and high temperature superconductors. But what can plasma physicists offer, after so many years of expensive and frustrating research to solve the problem of fusion energy? One may suggest that the fascinating research ofchaos with applications to plasma, or the achievements of statistical mechanics applied to plasmas, has something to offer and should be the subject of attention. However, this is not the aim of this book. Complementing the traditional aim of physics, which is to interpret the phenomena of nature by generalizing laws such that exact predictions about new properties and effects can be drawn, this book demonstrates how new physics has been derived over the last 30 years from the state of matter which exists at high temperatures (plasma).
Download or read book High Density Plasma Sources written by Oleg A. Popov and published by Elsevier. This book was released on 1996-12-31 with total page 467 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
Download or read book High Energy Density Physics written by R Paul Drake and published by Springer. This book was released on 2018-01-02 with total page 671 pages. Available in PDF, EPUB and Kindle. Book excerpt: The raw numbers of high-energy-density physics are amazing: shock waves at hundreds of km/s (approaching a million km per hour), temperatures of millions of degrees, and pressures that exceed 100 million atmospheres. This title surveys the production of high-energy-density conditions, the fundamental plasma and hydrodynamic models that can describe them and the problem of scaling from the laboratory to the cosmos. Connections to astrophysics are discussed throughout. The book is intended to support coursework in high-energy-density physics, to meet the needs of new researchers in this field, and also to serve as a useful reference on the fundamentals. Specifically the book has been designed to enable academics in physics, astrophysics, applied physics and engineering departments to provide in a single-course, an introduction to fluid mechanics and radiative transfer, with dramatic applications in the field of high-energy-density systems. This second edition includes pedagogic improvements to the presentation throughout and additional material on equations of state, heat waves, and ionization fronts, as well as problem sets accompanied by solutions.
Download or read book Physics of Intense Beams in Plasmas written by M.V Nezlin and published by CRC Press. This book was released on 1993-01-01 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: Physics of Intense Beams in Plasmas is a comprehensive description of the interaction between extremely intense particle beams and plasmas. The emphasis is on experimental beam-plasma physics, but the necessary theory is also explained-much of which is innovative and original. Central to the book is the discussion of beam instabilities, emphasizing their hydrodynamic nature.
Download or read book Physics of High Density Z Pinch Plasmas written by Michael A. Liberman and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 285 pages. Available in PDF, EPUB and Kindle. Book excerpt: A "z pinch" is a deceptively simple plasma configuration in which a longitudinal current produces a magnetic field that confines the plasma. Z-pinch research is currently one of the fastest growing areas of plasma physics, with revived interest in z-pinch controlled fusion reactors along with investigations of new z-pinch applications, such as very high power x-ray sources, high-energy neutrons sources, and ultra-high magnetic fields generators. This book provides a comprehensive review of the physics of dense z pinches and includes many recent experimental results.
Download or read book Plasmas at High Temperature and Density written by Heinrich Hora and published by Springer Science & Business Media. This book was released on 1991-08-28 with total page 455 pages. Available in PDF, EPUB and Kindle. Book excerpt: This advanced textbook on fundamental macroscopic plasma physics emphasizes the nonlinear and relativistic effects due to laser-plasma interactions. Experiments with lasers of high intensity helped to discover new quantum effects and the longitudinal components of optical radiation in vacuum, and this in turn led to an extension of basic plasma physics, which is presented here together with its impact on classical topics such asinstabilities, solitons, resonance absorpption, etc. The reader will also find sections on energy problems and nuclear fusion.
Download or read book Introduction to Plasma Physics and Controlled Fusion written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and nonlinear plasma theory. At the same time, the energy shortage on the one hand and the exploration of Jupiter and Saturn on the other have increased the national awareness of the important applications of plasma physics to energy production and to the understanding of our space environment. In magnetic confinement fusion, this period has seen the attainment 13 of a Lawson number nTE of 2 x 10 cm -3 sec in the Alcator tokamaks at MIT; neutral-beam heating of the PL T tokamak at Princeton to KTi = 6. 5 keV; increase of average ß to 3%-5% in tokamaks at Oak Ridge and General Atomic; and the stabilization of mirror-confined plasmas at Livermore, together with injection of ion current to near field-reversal conditions in the 2XIIß device. Invention of the tandem mirror has given magnetic confinement a new and exciting dimension. New ideas have emerged, such as the compact torus, surface-field devices, and the EßT mirror-torus hybrid, and some old ideas, such as the stellarator and the reversed-field pinch, have been revived. Radiofrequency heat ing has become a new star with its promise of dc current drive. Perhaps most importantly, great progress has been made in the understanding of the MHD behavior of toroidal plasmas: tearing modes, magnetic Vll Vlll islands, and disruptions.
Download or read book Transport Phenomena in Partially Ionized Plasma written by V.A. Rozhansky and published by CRC Press. This book was released on 2001-11-22 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: Transport phenomena in plasmas are the relatively slow processes of particle momentum and energy transport systems in a state of mechanical equilibrium. In contrast to neutral gases, these phenomena in plasmas are greatly influenced by self-consistent fields, in particular electric fields. These can produce particle and energy fluxes, in addition t
Download or read book Plasma Physics written by Alexander Piel and published by Springer Science & Business Media. This book was released on 2010-06-14 with total page 405 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an outgrowth of courses in plasma physics which I have taught at Kiel University for many years. During this time I have tried to convince my students that plasmas as different as gas dicharges, fusion plasmas and space plasmas can be described in a uni ed way by simple models. The challenge in teaching plasma physics is its apparent complexity. The wealth of plasma phenomena found in so diverse elds makes it quite different from atomic physics, where atomic structure, spectral lines and chemical binding can all be derived from a single equation—the Schrödinger equation. I positively accept the variety of plasmas and refrain from subdividing plasma physics into the traditional, but arti cially separated elds, of hot, cold and space plasmas. This is why I like to confront my students, and the readers of this book, with examples from so many elds. By this approach, I believe, they will be able to become discoverers who can see the commonality between a falling apple and planetary motion. As an experimentalist, I am convinced that plasma physics can be best understood from a bottom-up approach with many illustrating examples that give the students con dence in their understanding of plasma processes. The theoretical framework of plasma physics can then be introduced in several steps of re nement. In the end, the student (or reader) will see that there is something like the Schrödinger equation, namely the Vlasov-Maxwell model of plasmas, from which nearly all phenomena in collisionless plasmas can be derived.
Download or read book Electron Plasma Density Determinations with a 50 GHz Fabry perot Interferometer written by M. L. Andrews and published by . This book was released on 1973 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Download or read book Plasma Science written by National Research Council and published by National Academies Press. This book was released on 2008-01-20 with total page 281 pages. Available in PDF, EPUB and Kindle. Book excerpt: As part of its current physics decadal survey, Physics 2010, the NRC was asked by the DOE, NSF, and NASA to carry out an assessment of and outlook for the broad field of plasma science and engineering over the next several years. The study was to focus on progress in plasma research, identify the most compelling new scientific opportunities, evaluate prospects for broader application of plasmas, and offer guidance to realize these opportunities. The study paid particular attention to these last two points. This "demand-side" perspective provided a clear look at what plasma research can do to help achieve national goals of fusion energy, economic competitiveness, and nuclear weapons stockpile stewardship. The report provides an examination of the broad themes that frame plasma research: low-temperature plasma science and engineering; plasma physics at high energy density; plasma science of magnetic fusion; space and astrophysical science; and basic plasma science. Within those themes, the report offers a bold vision for future developments in plasma science.
Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2024-10-15 with total page 837 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential. Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields. Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find: Extensive figures and tables to facilitate understanding A new chapter covering the recent development of processes involving high-pressure capacitive discharges New subsections on discharge and processing chemistry, physics, and diagnostics Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.
Download or read book Measuring the Plasma Density of a Ferroelectric Plasma Source in an Expanding Plasma written by and published by . This book was released on 2003 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The initial density and electron temperature at the surface of a ferroelectric plasma source were deduced from floating probe measurements in an expanding plasma. The method exploits negative charging of the floating probe capacitance by fast flows before the expanding plasma reaches the probe. The temporal profiles of the plasma density can be obtained from the voltage traces of the discharge of the charged probe capacitance by the ion current from the expanding plasma. The temporal profiles of the plasma density, at two different distances from the surface of the ferroelectric plasma source, could be further fitted by using the density profiles for the expanding plasma. This gives the initial values of the plasma density and electron temperature at the surface. The method could be useful for any pulsed discharge, which is accompanied by considerable electromagnetic noise, if the initial plasma parameters might be deduced from measurements in expanding plasma.
Download or read book Plasma Physics written by and published by Academic Press. This book was released on 1971-02-27 with total page 493 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Physics
Download or read book Density Matrix Theory and Applications written by Karl Blum and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 217 pages. Available in PDF, EPUB and Kindle. Book excerpt: Quantum mechanics has been mostly concerned with those states of systems that are represented by state vectors. In many cases, however, the system of interest is incompletely determined; for example, it may have no more than a certain probability of being in the precisely defined dynamical state characterized by a state vector. Because of this incomplete knowledge, a need for statistical averaging arises in the same sense as in classical physics. The density matrix was introduced by J. von Neumann in 1927 to describe statistical concepts in quantum mechanics. The main virtue of the density matrix is its analytical power in the construction of general formulas and in the proof of general theorems. The evaluation of averages and probabilities of the physical quantities characterizing a given system is extremely cumbersome without the use of density matrix techniques. The representation of quantum mechanical states by density matrices enables the maximum information available on the system to be expressed in a compact manner and hence avoids the introduction of unnecessary vari ables. The use of density matrix methods also has the advantage of providing a uniform treatment of all quantum mechanical states, whether they are completely or incom~'\etely known. Until recently the use of the density matrix method has been mainly restricted to statistical physics. In recent years, however, the application of the density matrix has been gaining more and more importance in many other fields of physics.