Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Download or read book CMOS MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-26 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

Download or read book Position Navigation and Timing Technologies in the 21st Century written by Y. Jade Morton and published by John Wiley & Sons. This book was released on 2020-12-17 with total page 896 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covers the latest developments in PNT technologies, including integrated satellite navigation, sensor systems, and civil applications Featuring sixty-four chapters that are divided into six parts, this two-volume work provides comprehensive coverage of the state-of-the-art in satellite-based position, navigation, and timing (PNT) technologies and civilian applications. It also examines alternative navigation technologies based on other signals-of-opportunity and sensors and offers a comprehensive treatment on integrated PNT systems for consumer and commercial applications. Volume 1 of Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications contains three parts and focuses on the satellite navigation systems, technologies, and engineering and scientific applications. It starts with a historical perspective of GPS development and other related PNT development. Current global and regional navigation satellite systems (GNSS and RNSS), their inter-operability, signal quality monitoring, satellite orbit and time synchronization, and ground- and satellite-based augmentation systems are examined. Recent progresses in satellite navigation receiver technologies and challenges for operations in multipath-rich urban environment, in handling spoofing and interference, and in ensuring PNT integrity are addressed. A section on satellite navigation for engineering and scientific applications finishes off the volume. Volume 2 of Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications consists of three parts and addresses PNT using alternative signals and sensors and integrated PNT technologies for consumer and commercial applications. It looks at PNT using various radio signals-of-opportunity, atomic clock, optical, laser, magnetic field, celestial, MEMS and inertial sensors, as well as the concept of navigation from Low-Earth Orbiting (LEO) satellites. GNSS-INS integration, neuroscience of navigation, and animal navigation are also covered. The volume finishes off with a collection of work on contemporary PNT applications such as survey and mobile mapping, precision agriculture, wearable systems, automated driving, train control, commercial unmanned aircraft systems, aviation, and navigation in the unique Arctic environment. In addition, this text: Serves as a complete reference and handbook for professionals and students interested in the broad range of PNT subjects Includes chapters that focus on the latest developments in GNSS and other navigation sensors, techniques, and applications Illustrates interconnecting relationships between various types of technologies in order to assure more protected, tough, and accurate PNT Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications will appeal to all industry professionals, researchers, and academics involved with the science, engineering, and applications of position, navigation, and timing technologies. pnt21book.com

Download or read book Proceedings written by and published by . This book was released on 2000 with total page 690 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book System level Modeling of MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2012-12-20 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Download or read book Handbook of Modern Sensors written by Jacob Fraden and published by Springer Science & Business Media. This book was released on 2006-04-29 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Seven years have passed since the publication of the previous edition of this book. During that time, sensor technologies have made a remarkable leap forward. The sensitivity of the sensors became higher, the dimensions became smaller, the sel- tivity became better, and the prices became lower. What have not changed are the fundamental principles of the sensor design. They are still governed by the laws of Nature. Arguably one of the greatest geniuses who ever lived, Leonardo Da Vinci, had his own peculiar way of praying. He was saying, “Oh Lord, thanks for Thou do not violate your own laws. ” It is comforting indeed that the laws of Nature do not change as time goes by; it is just our appreciation of them that is being re?ned. Thus, this new edition examines the same good old laws of Nature that are employed in the designs of various sensors. This has not changed much since the previous edition. Yet, the sections that describe the practical designs are revised substantially. Recent ideas and developments have been added, and less important and nonessential designs were dropped. Probably the most dramatic recent progress in the sensor technologies relates to wide use of MEMS and MEOMS (micro-electro-mechanical systems and micro-electro-opto-mechanical systems). These are examined in this new edition with greater detail. This book is about devices commonly called sensors. The invention of a - croprocessor has brought highly sophisticated instruments into our everyday lives.

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.

Download or read book FUNDAMENTALS OF NAVIGATION AND INERTIAL SENSORS written by AMITAVA BOSE and published by PHI Learning Pvt. Ltd.. This book was released on 2014-01-01 with total page 341 pages. Available in PDF, EPUB and Kindle. Book excerpt: Navigation fundamentally provides information on position, velocity and direction which are needed for travel in ocean, land, air and in space. The myriad forms of navigation developed so far are collectively called modern navigation. This recent text discusses new promising developments that will assist the students when they enter their future professional career. It is the outcome of authors’ wide experience in teaching, research and development in the field of navigation and inertial sensors. The content of the book is designed to impart adequate knowledge to the students in the area of navigation and related sensors. The text discusses inertial navigation, inertial sensors, MEMS based inertial sensors, satellite navigation, integrated inertial navigation, signal processing of inertial sensors and their applications. The chapters introduce all the topics in an easy to understand manner so that an appreciative understanding of the text matter can be made without resorting to equations and mathematics. Considerable references have been provided to enable both the students and the professors to dwell and learn more on the topics of their interest. This textbook is primarily intended to meet the academic needs of undergraduate and postgraduate students of aerospace engineering and avionics.

Download or read book Mems Packaging written by Yung-cheng Lee and published by World Scientific. This book was released on 2018-01-03 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical activities to design and manufacture reliable MEMS. A unique challenge to MEMS packaging is how to protect moving MEMS devices during manufacturing and operation. With the introduction of wafer level capping and encapsulation processes, this barrier is removed successfully. In addition, MEMS devices should be integrated with their electronic chips with the smallest footprint possible. As a result, 3D packaging is applied to connect the devices vertically for the most effective integration. Such 3D packaging also paves the way for further heterogenous integration of MEMS devices, electronics, and other functional devices.This book consists of chapters written by leaders developing products in a MEMS industrial setting and faculty members conducting research in an academic setting. After an introduction chapter, the practical issues are covered: through-silicon vias (TSVs), vertical interconnects, wafer level packaging, motion sensor-to-CMOS bonding, and use of printed circuit board technology to fabricate MEMS. These chapters are written by leaders developing MEMS products. Then, fundamental issues are discussed, topics including encapsulation of MEMS, heterogenous integration, microfluidics, solder bonding, localized sealing, microsprings, and reliability.

Download or read book Humanoid Robotics A Reference written by Prahlad Vadakkepat and published by Springer. This book was released on 2017-02-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Humanoid Robotics provides a comprehensive compilation of developments in the conceptualization, design and development of humanoid robots and related technologies. Human beings have built the environment they occupy (living spaces, instruments and vehicles) to suit two-legged systems. Building systems, especially in robotics, that are compatible with the well-established, human-based surroundings and which could naturally interact with humans is an ultimate goal for all researches and engineers. Humanoid Robots are systems (i.e. robots) which mimic human behavior. Humanoids provide a platform to study the construction of systems that behave and interact like humans. A broad range of applications ranging from daily housework to complex medical surgery, deep ocean exploration, and other potentially dangerous tasks are possible using humanoids. In addition, the study of humanoid robotics provides a platform to understand the mechanisms and offers a physical visual of how humans interact, think, and react with the surroundings and how such behaviors could be reassembled and reconstructed. Currently, the most challenging issue with bipedal humanoids is to make them balance on two legs, The purportedly simple act of finding the best balance that enables easy walking, jumping and running requires some of the most sophisticated development of robotic systems- those that will ultimately mimic fully the diversity and dexterity of human beings. Other typical human-like interactions such as complex thought and conversations on the other hand, also pose barriers for the development of humanoids because we are yet to understand fully the way in which we humans interact with our environment and consequently to replicate this in humanoids.

Download or read book MEMS Linear and Nonlinear Statics and Dynamics written by Mohammad I. Younis and published by Springer Science & Business Media. This book was released on 2011-06-27 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

Download or read book Wearable Robots written by José L. Pons and published by John Wiley & Sons. This book was released on 2008-04-15 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: A wearable robot is a mechatronic system that is designed around the shape and function of the human body, with segments and joints corresponding to those of the person it is externally coupled with. Teleoperation and power amplification were the first applications, but after recent technological advances the range of application fields has widened. Increasing recognition from the scientific community means that this technology is now employed in telemanipulation, man-amplification, neuromotor control research and rehabilitation, and to assist with impaired human motor control. Logical in structure and original in its global orientation, this volume gives a full overview of wearable robotics, providing the reader with a complete understanding of the key applications and technologies suitable for its development. The main topics are demonstrated through two detailed case studies; one on a lower limb active orthosis for a human leg, and one on a wearable robot that suppresses upper limb tremor. These examples highlight the difficulties and potentialities in this area of technology, illustrating how design decisions should be made based on these. As well as discussing the cognitive interaction between human and robot, this comprehensive text also covers: the mechanics of the wearable robot and it’s biomechanical interaction with the user, including state-of-the-art technologies that enable sensory and motor interaction between human (biological) and wearable artificial (mechatronic) systems; the basis for bioinspiration and biomimetism, general rules for the development of biologically-inspired designs, and how these could serve recursively as biological models to explain biological systems; the study on the development of networks for wearable robotics. Wearable Robotics: Biomechatronic Exoskeletons will appeal to lecturers, senior undergraduate students, postgraduates and other researchers of medical, electrical and bio engineering who are interested in the area of assistive robotics. Active system developers in this sector of the engineering industry will also find it an informative and welcome resource.

Download or read book Toward Inertial Navigation on Chip written by Haoran Wen and published by Springer Nature. This book was released on 2019-09-14 with total page 134 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

Download or read book Global Positioning Systems Inertial Navigation and Integration written by Mohinder S. Grewal and published by John Wiley & Sons. This book was released on 2007-03-05 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: An updated guide to GNSS and INS, and solutions to real-world GPS/INS problems with Kalman filtering Written by recognized authorities in the field, this second edition of a landmark work provides engineers, computer scientists, and others with a working familiarity with the theory and contemporary applications of Global Navigation Satellite Systems (GNSS), Inertial Navigational Systems (INS), and Kalman filters. Throughout, the focus is on solving real-world problems, with an emphasis on the effective use of state-of-the-art integration techniques for those systems, especially the application of Kalman filtering. To that end, the authors explore the various subtleties, common failures, and inherent limitations of the theory as it applies to real-world situations, and provide numerous detailed application examples and practice problems, including GNSS-aided INS, modeling of gyros and accelerometers, and SBAS and GBAS. Drawing upon their many years of experience with GNSS, INS, and the Kalman filter, the authors present numerous design and implementation techniques not found in other professional references. This Second Edition has been updated to include: GNSS signal integrity with SBAS Mitigation of multipath, including results Ionospheric delay estimation with Kalman filters New MATLAB programs for satellite position determination using almanac and ephemeris data and ionospheric delay calculations from single and dual frequency data New algorithms for GEO with L1 /L5 frequencies and clock steering Implementation of mechanization equations in numerically stable algorithms To enhance comprehension of the subjects covered, the authors have included software in MATLAB, demonstrating the working of the GNSS, INS, and filter algorithms. In addition to showing the Kalman filter in action, the software also demonstrates various practical aspects of finite word length arithmetic and the need for alternative algorithms to preserve result accuracy.