Download or read book Model based Control Applied to Rapid Thermal Processing written by Paul Gyugyi and published by . This book was released on 1993 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Model based control applied to rapid thermal processing thesis written by Paul John Gyugyi and published by . This book was released on 1993 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Model identification and nonlinear predictive control of rapid thermal processing systems written by Terence Breedijk and published by . This book was released on 1994 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Download or read book Control System Applications written by William S. Levine and published by CRC Press. This book was released on 2018-10-24 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: Control technology permeates every aspect of our lives. We rely on them to perform a wide variety of tasks without giving much thought to the origins of the technology or how it became such an important part of our lives. Control System Applications covers the uses of control systems, both in the common and in the uncommon areas of our lives. From the everyday to the unusual, it's all here. From process control to human-in-the-loop control, this book provides illustrations and examples of how these systems are applied. Each chapter contains an introduction to the application, a section defining terms and references, and a section on further readings that help you understand and use the techniques in your work environment. Highly readable and comprehensive, Control System Applications explores the uses of control systems. It illustrates the diversity of control systems and provides examples of how the theory can be applied to specific practical problems. It contains information about aspec ts of control that are not fully captured by the theory, such as techniques for protecting against controller failure and the role of cost and complexity in specifying controller designs.
Download or read book Soft Computing written by Luigi Fortuna and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 275 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book presents a clear understanding of a new type of computation system, the Cellular Neural Network (CNN), which has been successfully applied to the solution of many heavy computation problems, mainly in the fields of image processing and complex partial differential equations. The text describes how CNN will improve the soft-computation toolbox, and examines the many applications of soft computing to complex systems.
Download or read book A Model for Rapid Thermal Processing written by Terrence J. Riley and published by . This book was released on 1989 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Proceedings of the Symposium Om Process Control Diagnostics and Modeling in Semiconductor Manufacturing written by M. Meyyappan and published by The Electrochemical Society. This book was released on 1995 with total page 644 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Modeling control and temperature measurement in rapid thermal processing written by John Douglas Stuber and published by . This book was released on 1996 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book CVD XV written by Mark Donald Allendorf and published by The Electrochemical Society. This book was released on 2000 with total page 826 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Modeling of Emissivity Effects for Use in Control of Rapid Thermal Processing Equipment written by J. Michael Reid and published by . This book was released on 1990 with total page 112 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Methods of Model Based Process Control written by R. Berber and published by Springer Science & Business Media. This book was released on 1995-05-31 with total page 846 pages. Available in PDF, EPUB and Kindle. Book excerpt: Model based control has emerged as an important way to improve plant efficiency in the process industries, while meeting processing and operating policy constraints. The reader of Methods of Model Based Process Control will find state of the art reports on model based control technology presented by the world's leading scientists and experts from industry. All the important issues that a model based control system has to address are covered in depth, ranging from dynamic simulation and control-relevant identification to information integration. Specific emerging topics are also covered, such as robust control and nonlinear model predictive control. In addition to critical reviews of recent advances, the reader will find new ideas, industrial applications and views of future needs and challenges. Audience: A reference for graduate-level courses and a comprehensive guide for researchers and industrial control engineers in their exploration of the latest trends in the area.
Download or read book Inverse Problems Design and Optimization vol 1 written by and published by Editora E-papers. This book was released on with total page 365 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Trends in Control written by Alberto Isidori and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains the text of the plenary lectures and the mini-courses of the European Control Conference (ECC 95) held in Rome, Italy, September 5-September 8, 1995. In particular, the book includes nine essays in which a selected number of prominent authorities present their views on some of the most recent developments in the theory and practice of control systems design and three self-contained sets of lecture notes. Some of the essays are focused on the topic of robust control. The article by J. Ackermann describes how to robustly control the rotational motions of a vehicle, to the purpose of simplifying the driver's task. The contribution by H. K wakernaak presents a detailed discussion of the requirements that performance and robustness impose on control systems design and of the symmetric roles of sensitivity and complementary sensitivity functions. The article by P. Boulet, B. A. Francis, P. C . Hughes and T. Hong describes an experimental testbed facility, called Daisy, whose dynamics emulate those of a real large flexible space structure and whose purpose is to test advanced identification and control design methods. The article of K. Glover discusses recent advances in uncertain system modeling, analysis and design, with ref erence to a flight control case study that has been test flown. The other essays describe advances in fundamental problems of control theory. The article by V. A. Yakubovich is a survey of certain new infinite horizon linear-quadratic optimization problems. The contribution by A. S.
Download or read book Subspace Identification for Linear Systems written by Peter van Overschee and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 263 pages. Available in PDF, EPUB and Kindle. Book excerpt: Subspace Identification for Linear Systems focuses on the theory, implementation and applications of subspace identification algorithms for linear time-invariant finite- dimensional dynamical systems. These algorithms allow for a fast, straightforward and accurate determination of linear multivariable models from measured input-output data. The theory of subspace identification algorithms is presented in detail. Several chapters are devoted to deterministic, stochastic and combined deterministic-stochastic subspace identification algorithms. For each case, the geometric properties are stated in a main 'subspace' Theorem. Relations to existing algorithms and literature are explored, as are the interconnections between different subspace algorithms. The subspace identification theory is linked to the theory of frequency weighted model reduction, which leads to new interpretations and insights. The implementation of subspace identification algorithms is discussed in terms of the robust and computationally efficient RQ and singular value decompositions, which are well-established algorithms from numerical linear algebra. The algorithms are implemented in combination with a whole set of classical identification algorithms, processing and validation tools in Xmath's ISID, a commercially available graphical user interface toolbox. The basic subspace algorithms in the book are also implemented in a set of Matlab files accompanying the book. An application of ISID to an industrial glass tube manufacturing process is presented in detail, illustrating the power and user-friendliness of the subspace identification algorithms and of their implementation in ISID. The identified model allows for an optimal control of the process, leading to a significant enhancement of the production quality. The applicability of subspace identification algorithms in industry is further illustrated with the application of the Matlab files to ten practical problems. Since all necessary data and Matlab files are included, the reader can easily step through these applications, and thus get more insight in the algorithms. Subspace Identification for Linear Systems is an important reference for all researchers in system theory, control theory, signal processing, automization, mechatronics, chemical, electrical, mechanical and aeronautical engineering.
