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Book Micromachined Gyroscope with Integrated Electronics

Download or read book Micromachined Gyroscope with Integrated Electronics written by Per Bo Ljung and published by . This book was released on 1997 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Whole Angle MEMS Gyroscopes

Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Book MEMS Vibratory Gyroscopes

Download or read book MEMS Vibratory Gyroscopes written by Cenk Acar and published by Springer Science & Business Media. This book was released on 2008-12-16 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Book Dual Mass Linear Vibration Silicon Based MEMS Gyroscope

Download or read book Dual Mass Linear Vibration Silicon Based MEMS Gyroscope written by Huiliang Cao and published by Springer Nature. This book was released on 2023-04-17 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

Book Non driven Micromechanical Gyroscopes and Their Applications

Download or read book Non driven Micromechanical Gyroscopes and Their Applications written by Fuxue Zhang and published by Springer. This book was released on 2017-11-09 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively and systematically introduces readers to the theories, structures, performance and applications of non-driven mechanical and non-driven micromechanical gyroscopes. The book is divided into three parts, the first of which mainly addresses mathematic models, precision, performance and operating error in non-driven mechanical gyroscopes. The second part focuses on the operating theory, error, phase shift and performance experiments involving non-driven micromechanical gyroscopes in rotating flight carriers, while the third part shares insights into the application of non-driven micromechanical gyroscopes in control systems for rotating flight carriers. The book offers a unique resource for all researchers and engineers who are interested in the use of inertial devices and automatic control systems for rotating flight carriers. It can also serve as a reference book for undergraduates, graduates and instructors in related fields at colleges and universities.

Book Integrated Surface Micromachined Frame Microgyroscopes

Download or read book Integrated Surface Micromachined Frame Microgyroscopes written by Moorthi Palaniapan and published by . This book was released on 2002 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Micromachined Dual Input Axis Rate Gyroscope

Download or read book Micromachined Dual Input Axis Rate Gyroscope written by Thor Nelson Juneau and published by . This book was released on 1997 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Whole Angle MEMS Gyroscopes

Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-06-16 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Book CMOS   MEMS

Download or read book CMOS MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-26 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

Book Advances in Gyroscope Technologies

Download or read book Advances in Gyroscope Technologies written by Mario N. Armenise and published by Springer Science & Business Media. This book was released on 2010-11-22 with total page 123 pages. Available in PDF, EPUB and Kindle. Book excerpt: This monograph collects and critically reviews the main results obtained by the scientific community in gyroscope technologies research field. It describes architectures, design techniques and fabrication technology of angular rate sensors proposed in literature. MEMS, MOEMS, optical and mechanical technologies are discussed together with achievable performance. The book also consideres future research trends aimed to cover special applications. The book is intended for researchers and Ph.D. students interested in modelling, design and fabrication of gyros. The book may be a useful education support in some university courses focused on gyro technologies.

Book Design and Fabrication of a Micromechanical Gyroscope

Download or read book Design and Fabrication of a Micromechanical Gyroscope written by Richard Michael Kuhns and published by . This book was released on 1995 with total page 147 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Micromachined Vibratory Rate Gyroscopes

Download or read book Micromachined Vibratory Rate Gyroscopes written by William Albert Clark and published by . This book was released on 1997 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Vibratory Gyroscopes Based on Micro Electro Mechanical and non Micro Electro Mechanical Systems

Download or read book Vibratory Gyroscopes Based on Micro Electro Mechanical and non Micro Electro Mechanical Systems written by Valeri V. Chikovani and published by Cambridge Scholars Publishing. This book was released on 2023-12-15 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a unified approach for the two versions of Coriolis vibratory gyroscopes: Micro-Electro-Mechanical System (MEMS) and non-MEMS. It describes a new, differential mode of operation, analyzing the new triple mode gyro—rate, rate-integrating, and differential. The latter provides the gyro with an increased versatility by providing the maximum possible accuracy under changeable motion parameters and environmental conditions. The book also presents computer simulation, experiments, and test results on the rejection of external disturbances, and considers the fabrication processes of MEMS, metallic and quartz resonators. It will interest researchers, scientists, engineers, and students specializing in the field of inertial sensors, as well as engineers of digital control systems, and inertial sensors test-engineers. It can also be used as a reference book when designing vibratory gyros.

Book Springer Handbook of Nanotechnology

Download or read book Springer Handbook of Nanotechnology written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2010-04-23 with total page 1968 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since 2004 and with the 2nd edition in 2006, the Springer Handbook of Nanotechnology has established itself as the definitive reference in the nanoscience and nanotechnology area. It integrates the knowledge from nanofabrication, nanodevices, nanomechanics, Nanotribology, materials science, and reliability engineering in just one volume. Beside the presentation of nanostructures, micro/nanofabrication, and micro/nanodevices, special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects. In its 3rd edition, the book grew from 8 to 9 parts now including a part with chapters on biomimetics. More information is added to such fields as bionanotechnology, nanorobotics, and (bio)MEMS/NEMS, bio/nanotribology and bio/nanomechanics. The book is organized by an experienced editor with a universal knowledge and written by an international team of over 150 distinguished experts. It addresses mechanical and electrical engineers, materials scientists, physicists and chemists who work either in the nano area or in a field that is or will be influenced by this new key technology.

Book Microengineering Aerospace Systems

Download or read book Microengineering Aerospace Systems written by Henry Helvajian and published by AIAA. This book was released on 1999 with total page 748 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microengineering Aerospace Systems is a textbook tutorial encompassing MEMS (micro-electromechanical systems), nanoelectronics, packaging, processing, and materials characterization for developing miniaturized smart instruments for aerospace systems (i.e., ASIM application-specific integrated microinstrument), satellites, and satellite subsystems. Third in a series of Aerospace Press publications covering this rapidly advancing technology, this work presents fundamental aspects of the technology and specific aerospace systems applications through worked examples.

Book Silicon Sensors and Actuators

Download or read book Silicon Sensors and Actuators written by Benedetto Vigna and published by Springer Nature. This book was released on 2022-04-12 with total page 988 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.