Download or read book Micromachined Devices and Components written by and published by . This book was released on 1999 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Micromachined Circuits and Devices written by Shiban Kishen Koul and published by Springer Nature. This book was released on 2022-02-07 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications.

Download or read book Optomechatronic Micro nano Devices and Components written by and published by . This book was released on 2006 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Fabrication and Design of Resonant Microdevices written by Behraad Bahreyni and published by William Andrew. This book was released on 2008-10-20 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. - Offers numerous academic and industrial examples of resonant MEMS - Provides an analytic model of device behaviour - Explains two-port systems in detail - Devotes ample space to excitation and signal detection methods - Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Download or read book Materials and Device Characterization in Micromachining written by and published by . This book was released on 2000 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book An Introduction to Surface Micromachining written by Robert W. Johnstone and published by Springer Science & Business Media. This book was released on 2004-06-03 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Download or read book Micromachining written by and published by BoD – Books on Demand. This book was released on 2024-05-29 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this volume, Micromachining - New Trends and Applications, researchers from distant parts of the world have combined efforts and contributed their ideas and research work on micromachining. Their chapters will give you the opportunity to learn about materials, techniques, applications, challenges, and recent advancements in micromachining technology as well as about the state of the current micromachining market. Chapters also discuss concepts of micro-scale electronic component manufacturing, advancements in micromachining techniques of micro-electromechanical system (MEMS) piezoresistive pressure sensors to minimize offset drift due to humidity and temperature, the principles and classifications of force measuring systems with zero-compliance suspension, and triangular microcavity fabrication using micro-electrical discharge machining.

Download or read book Handbook of Microlithography Micromachining and Microfabrication Micromachining and microfabrication written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contains useful process details, recipes, tables, charts and includes numerous device applications.

Download or read book Fundamentals of Micro Optics written by Hans Zappe and published by Cambridge University Press. This book was released on 2010-09-30 with total page 646 pages. Available in PDF, EPUB and Kindle. Book excerpt: From optical fundamentals to advanced applications, this comprehensive guide to micro-optics covers all the key areas for those who need an in-depth introduction to micro-optic devices, technologies, and applications. Topics covered range from basic optics, optical materials, refraction, and diffraction, to micro-mirrors, micro-lenses, diffractive optics, optoelectronics, and fabrication. Advanced topics, such as tunable and nano-optics, are also discussed. Real-world case studies and numerous worked examples are provided throughout, making complex concepts easier to follow, whilst an extensive bibliography provides a valuable resource for further study. With exercises provided at the end of each chapter to aid and test understanding, this is an ideal textbook for graduate and advanced undergraduate students taking courses in optics, photonics, micro-optics, microsystems, and MEMs. It is also a useful self-study guide for research engineers working on optics development.

Download or read book Electrochemical Micromachining for Nanofabrication MEMS and Nanotechnology written by Bijoy Bhattacharyya and published by William Andrew. This book was released on 2015-04-10 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. - Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications - Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM - Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

Download or read book Non traditional Micromachining Processes written by Golam Kibria and published by Springer. This book was released on 2017-03-07 with total page 431 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

Download or read book Silicon Carbide Micro Electromechanical Systems for Harsh Environments written by Rebecca Cheung and published by Imperial College Press. This book was released on 2006 with total page 193 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996OCo2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research."

Download or read book Engineering Medicine written by Lawrence S. Chan and published by CRC Press. This book was released on 2019-05-15 with total page 393 pages. Available in PDF, EPUB and Kindle. Book excerpt: This transformative textbook, first of its kind to incorporate engineering principles into medical education and practice, will be a useful tool for physicians, medical students, biomedical engineers, biomedical engineering students, and healthcare executives. The central approach of the proposed textbook is to provide principles of engineering as applied to medicine and guide the medical students and physicians in achieving the goal of solving medical problems by engineering principles and methodologies. For the medical students and physicians, this proposed textbook will train them to “think like an engineer and act as a physician”. The textbook contains a variety of teaching techniques including class lectures, small group discussions, group projects, and individual projects, with the goals of not just helping students and professionals to understand the principles and methods of engineering, but also guiding students and professionals to develop real-life solutions. For the biomedical engineers and biomedical engineering students, this proposed textbook will give them a large framework and global perspective of how engineering principles could positively impact real-life medicine. To the healthcare executives, the goal of this book is to provide them general guidance and specific examples of applying engineering principles in implementing solution-oriented methodology to their healthcare enterprises. Overall goals of this book are to help improve the overall quality and efficiency of healthcare delivery and outcomes.

Download or read book Radio Frequency Micromachined Switches Switching Networks and Phase Shifters written by Shiban Kishen Koul and published by CRC Press. This book was released on 2019-05-03 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt: Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters discusses radio frequency microelectromechanical systems (RF MEMS)-based control components and will be useful for researchers and R&D engineers. It offers an in-depth study, performance analysis, and extensive characterization on micromachined switches and phase shifters. The reader will learn about basic design methodology and techniques to carry out extensive measurements on MEMS switches and phase shifters which include electrical, mechanical, power handling, linearity, temperature stability, reliability, and radio frequency performance. Practical examples included in the book will help readers to build high performance systems/subsystems using micromachined circuits. Key Features Provides simple design methodology of MEMS switches and switching networks including SPST to SP16T switches Gives an in-depth performance study of micromachined phase shifters. Detailed study on reliability and power handling capability of RF MEMS switches and phase shifters presented Proposes reconfigurable micromachined phase shifters Verifies a variety of MEMS switches and phase shifters experimentally

Download or read book Emerging Trends in Science Engineering and Technology written by S Sathiyamoorthy and published by Springer Science & Business Media. This book was released on 2012-12-14 with total page 766 pages. Available in PDF, EPUB and Kindle. Book excerpt: The present book is based on the research papers presented in the International Conference on Emerging Trends in Science, Engineering and Technology 2012, held at Tiruchirapalli, India. The papers presented bridges the gap between science, engineering and technology. This book covers a variety of topics, including mechanical, production, aeronautical, material science, energy, civil and environmental energy, scientific management, etc. The prime objective of the book is to fully integrate the scientific contributions from academicians, industrialists and research scholars.

Download or read book Microfabricated Systems and MEMS written by and published by . This book was released on 2000 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt: