Download or read book Mechanical Design Dynamics and Control of Micro Vibratory Gyroscopes written by Seyed Parsa Taheri Tehrani and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-machined vibratory gyroscopes are very small devices (up to a few millimeters in dimension) that work based on Coriolis force coupling between two resonance modes. The small size, low power consumption, and cheap price make these sensors popular in automotive, gaming, smart phones, and robotics industries. These sensors referred to as MEMS (microelectromechanical system) gyroscopes are currently not used for navigation applications because due to their miniature size and imperfections in fabrication methods they do not have enough accuracy. In this thesis, we present methods in design and control algorithms for MEMS vibratory gyroscopes to cancel the effect of imperfections in fabrication and improve gyroscopes' performance. First chapter of this thesis is an introduction on MEMS vibratory gyroscopes and their principles and standard operations modes.The second chapter presents the structural design and analysis of a single-structure 3-axis MEMS gyroscope. The gyroscope has four resonant modes of interest and uses a decoupling mechanism whereby auxiliary masses are used to actuate the drive mode of the gyroscope in order to reduce drive-force coupling to sense modes' motion (one of the sources of errors in MEMS gyroscopes). The use of auxiliary masses results in a two degree-of-freedom (DOF) mechanism of the drive mode. To compare the effectiveness of using auxiliary masses two gyroscope types has been design one actuated from auxiliary masses (type A) and one actuated from major masses (type B). The two designs are simulated analytically to study the displacement of each mass in each design while comparing the force required to achieve that displacement for drive mode. Experimental data from fabricated devices show how using auxiliary masses will decrease drive force coupling and as a result improve the gyroscope's performance. Third chapter describes the operation of a high quality factor gyroscope in various regimes where electromechanical nonlinearities introduce different forms of amplitude-frequency (A-f) dependence. Experiments are conducted using an epitaxially-encapsulated 2 x 2 mm2 quad-mass gyroscope (QMG) with a quality factor of 85,000. The device exhibits third-order Duffing nonlinearity at low bias voltages (15 V) due to the mechanical nonlinearity in the flexures and at high bias voltages (35 V) due to third-order electrostatic nonlinearity. At intermediate voltages (26 V), these third-order nonlinearities cancel and the amplitude-frequency dependence is greatly reduced. A model is developed to demonstrate the connection between the electromechanical nonlinearities and the amplitude-frequency dependence, also known as the backbone curve. Gyroscope operation is demonstrated in each nonlinear operating regime and the key performance measures of the gyroscope's performance, angle random walk (ARW) and bias instability, are measured as a function of drive-mode vibration amplitude. While the bias instability is nearly independent of the drive-mode’s nonlinearity, we find that ARW increases when the third-order nonlinearities are minimized, and the decrease in ARW due to increase of amplitude is independent of drive mode's type of nonlinearity.In the fourth chapter we present a direct angle measurement method in gyroscopes. Towards the objective of direct angle measurement using a rate integrating gyroscope (RIG) without a minimum rate threshold and performance limited only by electrical and mechanical thermal noise, in this chapter we present the implementation of a generalized electronic feedback method for the compensation of MEMS gyroscope damping asymmetry (anisodamping) and stiffness asymmetry (anisoelasticity) on a stand-alone digital signal processing (DSP) platform. Using the new method, the precession angle dependent bias error and minimum rate threshold, two issues identified by Lynch for a MEMS RIG due to anisodamping are overcome. To minimize angle dependent bias, we augment the electronic feedback force of the amplitude regulator with a non-unity gain output distribution matrix selected to correct for anisodamping. Using this method, we have decreased the angle dependent bias error by a factor of 30, resulting a minimum rate threshold of 2.5 dps. To further improve RIG performance, an electronically-induced self-precession rate is incorporated and successfully demonstrated to lower the rate threshold.
Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.
Download or read book MEMS Vibratory Gyroscopes written by Cenk Acar and published by Springer Science & Business Media. This book was released on 2008-12-16 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Download or read book Cylindrical Vibratory Gyroscope written by Xuezhong Wu and published by Springer Nature. This book was released on 2021-06-19 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces readers to the shell structure, operating principle, manufacturing process, and control theory for cylindrical vibratory gyroscopes. The cylindrical vibratory gyroscope is an important type of Coriolis vibratory gyroscope that holds considerable potential for development and application. The main aspects addressed include: operating principle and structure, theoretical analysis and modeling, dynamic analysis and modeling, manufacturing process, parameter testing methods, closed-loop control, and the error compensation mechanism in cylindrical vibratory gyroscopes.
Download or read book Coriolis Vibratory Gyroscopes written by Vladislav Apostolyuk and published by Springer. This book was released on 2015-08-12 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the latest theoretical analysis and design methodologies of different types of Coriolis vibratory gyroscopes (CVG). Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance characteristics, and signal processing and control. Essential aspects of numerical simulation of CVG using Simulink® are also covered. This is an ideal book for graduate students, researchers, and engineers working in fields that require gyroscope application, including but not limited to: inertial sensors and systems, automotive and consumer electronics, small unmanned aircraft control systems, personal mobile navigation systems and related software development, and augmented and virtual reality systems.
Download or read book Advanced Control Design of MEMS Vibratory Gyroscopes written by Juntao Fei and published by . This book was released on 2011-10 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilisation. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and advanced control design of MEMS gyroscope for the problem of angular velocity measurement and minimisation of the cross coupling between two axes.
Download or read book Mechanical Analysis and Design of Vibratory Micromachined Gyroscopes written by Wyatt Owen Davis and published by . This book was released on 2001 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Vibratory Gyroscopes Based on Micro Electro Mechanical and non Micro Electro Mechanical Systems written by Valeri V. Chikovani and published by Cambridge Scholars Publishing. This book was released on 2023-12-15 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a unified approach for the two versions of Coriolis vibratory gyroscopes: Micro-Electro-Mechanical System (MEMS) and non-MEMS. It describes a new, differential mode of operation, analyzing the new triple mode gyro—rate, rate-integrating, and differential. The latter provides the gyro with an increased versatility by providing the maximum possible accuracy under changeable motion parameters and environmental conditions. The book also presents computer simulation, experiments, and test results on the rejection of external disturbances, and considers the fabrication processes of MEMS, metallic and quartz resonators. It will interest researchers, scientists, engineers, and students specializing in the field of inertial sensors, as well as engineers of digital control systems, and inertial sensors test-engineers. It can also be used as a reference book when designing vibratory gyros.
Download or read book IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design written by Marian Wiercigroch and published by Springer Science & Business Media. This book was released on 2013-01-11 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nonlinear dynamics has been enjoying a vast development for nearly four decades resulting in a range of well established theory, with the potential to significantly enhance performance, effectiveness, reliability and safety of physical systems as well as offering novel technologies and designs. By critically appraising the state of the art, it is now time to develop design criteria and technology for new generation products/processes operating on principles of nonlinear interaction and in the nonlinear regime, leading to more effective, sensitive, accurate, and durable methods than what is currently available. This new approach is expected to radically influence the design, control and exploitation paradigms, in a magnitude of contexts. With a strong emphasis on experimentally calibrated and validated models, contributions by top-level international experts will foster future directions for the development of engineering technologies and design using robust nonlinear dynamics modelling and analysis.
Download or read book Vibration Dynamics and Control written by Giancarlo Genta and published by Springer Science & Business Media. This book was released on 2008-12-17 with total page 864 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanical engineering,and engineering discipline born of the needs of the industrial revolution, is once again asked to do its substantial share in the call for industrial renewal. The general call is urgent as we face p- found issues of productivity and competitiveness that require engineering solutions, among others. The Mechanical Engineering Series is a series f- turing graduate texts and research monographs intended to address the need for information in contemporary areas of mechanical engineering. The series is conceived as a comprehensive one that covers a broad range of concentrations important to mechanical engineering graduate - ucation and research. We are fortunate to have a distinguished roster of series editors, each an expert in one of the areas of concentration. The names of the series editors are listed on page vi of this volume. The areas of concentration are applied mechanics, biomechanics, computational - chanics, dynamic systems and control, energetics, mechanics of materials, processing, thermal science, and tribology. Preface After15yearssincethepublicationofVibrationofStructuresandMachines and three subsequent editions a deep reorganization and updating of the material was felt necessary. This new book on the subject of Vibration dynamics and control is organized in a larger number of shorter chapters, hoping that this can be helpful to the reader. New materialhas been added and many points have been updated. A larger number of examples and of exercises have been included.
Download or read book Dual Mass Linear Vibration Silicon Based MEMS Gyroscope written by Huiliang Cao and published by Springer Nature. This book was released on 2023-04-17 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Download or read book Design and Development of a Micromachined Vibratory Gyroscope with Enhanced Mechanical Sensitivity written by Leow Kok Wah and published by . This book was released on 2000 with total page 175 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Adaptive Control for a Simulated Micro Electro Mechanical Vibrating Gyroscope written by Qais A. Khasawneh and published by . This book was released on 2002 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Mems Nems written by Cornelius T. Leondes and published by Springer Science & Business Media. This book was released on 2007-10-08 with total page 2142 pages. Available in PDF, EPUB and Kindle. Book excerpt: This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Download or read book Advanced Materials and Technologies for Micro Nano Devices Sensors and Actuators written by Evgeni Gusev and published by Springer. This book was released on 2010-03-03 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Download or read book Journal of Micro nanolithography MEMS and MOEMS written by and published by . This book was released on 2008 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Design Dynamics and Control of an Adaptive Singularity free Control Moment Gyroscope Actuator for Microspacecraft Attitude Determination and Control System written by Sasi Prabhakaran Viswanathan and published by . This book was released on 2015 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Design dynamics, control and implementation of a novel spacecraft attitude control actuator called the "Adaptive Singularity-free Control Moment Gyroscope" (ASCMG) is presented in this dissertation. To construct a comprehensive attitude dynamics model of a spacecraft with internal actuators, the dynamic of a spacecraft with an ASCMG is obtained in the framework of geometric mechanics using the principles of variational mechanics. The resulting dynamics is a general and complete model, as it relaxes the simplifying assumptions made in prior literature on Control Moment Gyroscopes (CMGs) and it also addresses the adaptive parameters in the dynamics formulation. The simplifying assumptions include perfect axisymmetry of the rotor and gimbal structures, perfect alignment of the centers of mass of the gimbal and the rotor, etc. These set of simplifying assumptions imposed on the design and dynamics of CMGs leads to adverse effects on their performance and results in high manufacturing cost. The dynamics so obtained shows the complex nonlinear coupling between the internal degrees of freedom associated with an ASCMG and the spacecraft bus's attitude motion. By default, an ASCMG function as a Variable Speed Control Moment Gyroscope (VSCMG), and it is reduced to operate as a singularity-free CMG by spinning the rotor at a constant speed. This dynamics model is then extended to include the effects of multiple ASCMGs placed on the spacecraft bus, and sufficient conditions for non-singular ASCMG cluster configurations are obtained to operate the cluster both in VSCMG and CMG modes. The general dynamics model of the ASCMG is then reduced to that of conventional VSCMGs and CMGs by imposing the standard set of simplifying assumptions used in prior literature. The adverse effects of the simplifying assumptions that lead to the complexities in conventional CMG design, and how they result in CMG singularities, are described.
