Download or read book Advanced Strategies in Thin Film Engineering by Magnetron Sputtering written by Alberto Palmero and published by MDPI. This book was released on 2020-12-10 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: The science behind them appears in most of the cases as a "terra incognita", fascinating both the fundamentalist, who imagines new concepts, and the experimenter, who is able to create and study new films with as of yet unprecedented performances. These scientific and technological challenges, along with the existence of numerous scientific issues that have yet to be clarified in classical magnetron sputtering depositions (e.g., process control and stability, nanostructuration mechanisms, connection between film morphology and properties or upscaling procedures from the laboratory to industrial scales) have motivated us to edit a specialized volume containing the state-of-the art that put together these innovative fundamental and applied research topics. These include, but are not limited to: • Nanostructure-related properties; • Atomistic processes during film growth; • Process control, process stability, and in situ diagnostics; • Fundamentals and applications of HiPIMS; • Thin film nanostructuration phenomena; • Tribological, anticorrosion, and mechanical properties; • Combined procedures based on the magnetron sputtering technique; • Industrial applications; • Devices.

Download or read book Ionized Physical Vapor Deposition written by and published by Academic Press. This book was released on 1999-10-14 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume provides the first comprehensive look at a pivotal new technology in integrated circuit fabrication. For some time researchers have sought alternate processes for interconnecting the millions of transistors on each chip because conventional physical vapor deposition can no longer meet the specifications of today's complex integrated circuits. Out of this research, ionized physical vapor deposition has emerged as a premier technology for the deposition of thin metal films that form the dense interconnect wiring on state-of-the-art microprocessors and memory chips. For the first time, the most recent developments in thin film deposition using ionized physical vapor deposition (I-PVD) are presented in a single coherent source. Readers will find detailed descriptions of relevant plasma source technology, specific deposition systems, and process recipes. The tools and processes covered include DC hollow cathode magnetrons, RF inductively coupled plasmas, and microwave plasmas that are used for depositing technologically important materials such as copper, tantalum, titanium, TiN, and aluminum. In addition, this volume describes the important physical processes that occur in I-PVD in a simple and concise way. The physical descriptions are followed by experimentally-verified numerical models that provide in-depth insight into the design and operation I-PVD tools. Practicing process engineers, research and development scientists, and students will find that this book's integration of tool design, process development, and fundamental physical models make it an indispensable reference. Key Features: The first comprehensive volume on ionized physical vapor deposition Combines tool design, process development, and fundamental physical understanding to form a complete picture of I-PVD Emphasizes practical applications in the area of IC fabrication and interconnect technology Serves as a guide to select the most appropriate technology for any deposition application *This single source saves time and effort by including comprehensive information at one's finger tips *The integration of tool design, process development, and fundamental physics allows the reader to quickly understand all of the issues important to I-PVD *The numerous practical applications assist the working engineer to select and refine thin film processes

Download or read book High Power Impulse Magnetron Sputtering written by Daniel Lundin and published by . This book was released on 2019-09-13 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution. Includes a comprehensive description of the HiPIMS process from fundamental physics to applications Provides a distinctive link between the process plasma and thin film communities Discusses the industrialization of HiPIMS and its real world applications

Download or read book Design Fabrication and Characterization of a Compact Magnetron Sputtering System for Micro nano Fabrication written by Mitchell David Hsing and published by . This book was released on 2019 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt: A general rule of thumb for new semiconductor fabrication facilities (fabs) is that revenues from the first year of production must match the capital cost of building the fab itself. With modem fabs routinely exceeding $1 billion to build, this rule serves as a significant barrier to entry for groups seeking to commercialize new semiconductor devices aimed at smaller market segments which require a dedicated process. To address this gap in the industry, we are developing a I" Fab line of dedicated tools which processes small 1-2" wafers and feature the same functionality as large-scale commercial micro/nano fabrication tools, but with a significant reduction in cost and footprint. To enable the envisioned 1" Fab a reality, this thesis describes the design, development and testing of a sputtering physical vapor deposition tool, a critical tool in the 1" Fab line of tools. The tool is designed to be compatible with the 1" Fab's four-module, modular tool infrastructure, and also to allow for sharing of its peripheral equipment with other components of the 1" Fab. The modularity feature allows for multiple tools be created using an interchangeable tool platform while the shared backend equipment feature allows for a sizable cost-saving benefit, as the cost of peripheral equipment for any given tool is up to 70% of the tool's total cost. Our developed sputtering tool features the successful implementation of these two design components with a final build cost of around $25k - roughly one-seventh of the cost of a commercial tool. The sputtering tool's performance was fully characterized for both reactive and nonreactive sputtering processes. The tool's non-reactive metal depositions were examined in detail using a design of experiment response surface model. Deposition rates of up to 5.5 A/s were observed while maintaining a uniformity of ~3% across the wafer. Utilizing a direct sputter technique, this represents a deposition rate that is 4x faster than state of the practice tools while also attaining the same level of uniformity. Alongside the development of metal depositions processes, the reactive sputtering capabilities of the tool were also demonstrated through successful process development for the deposition of Aluminum Nitride (AlN). Three unique operation regions, for AlN reactive sputtering were discovered with the highest quality AlN depositions observed in transition region. Stable and repeatable depositions were achieved via the development of two control methods - voltage control and flow control. Using this optimized process, highly c-axis aligned films with columnar growth structures were observed indicating the production of high quality AlN films. This successfully developed tool alongside its optimized processes is well suited for integration into the 1" Fab, further enabling the realization of our envisioned low-cost micro/nano fabrication platform.

Download or read book Thin Film Materials Technology written by Kiyotaka Wasa and published by . This book was released on 2004 with total page 518 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Protective Coatings and Thin Films written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 1996-12-31 with total page 694 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume entitled "Protective Coatings and Thin Films : Synthesis, Characterization and Applications" contains the Proceedings of the NATO Advanced Research Workshop (ARW) held in Alvor, Portugal from May 30 to June 5, 1996. This NATO-ARW was an expert meeting on the surface protection and modification of solid materials subjected to interactions with the environment. The meeting attracted 10 key speakers, 40 contributing speakers and 3 observers from various countries. The existing knowledge and current status of the science and technology related to protective coatings and thin films were assessed through a series of oral presentations, key notes (titles underlined in the volume content) and contributed papers distributed over various sessions dealing with: (a) plasma-assisted physical and chemical vapor deposition processes to enhance wear and corrosion protection of materials, (b) low friction coatings operating in hostile environment (vacuum, space, extreme temperatures, . . . ), (c) polymer films for protection against mechanical damage and chemical attack, (d) characterization of the structure of films and correlations with mechanical properties, (e) wear and corrosion resistant thermal spray coatings, (f) functional gradient ceramic/metallic coatings produced by high energy laser beam and energetic deposition processes for high temperature applications, (g) protective coatings for optical systems, and (h) ion beam assisted deposition of coatings for protection of materials against aqueous corrosion.

Download or read book Non Thermal Plasma Technology for Polymeric Materials written by Sabu Thomas and published by Elsevier. This book was released on 2018-10-08 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: Non-Thermal Plasma Technology for Polymeric Materials: Applications in Composites, Nanostructured Materials and Biomedical Fields provides both an introduction and practical guide to plasma synthesis, modification and processing of polymers, their composites, nancomposites, blends, IPNs and gels. It examines the current state-of-the-art and new challenges in the field, including the use of plasma treatment to enhance adhesion, characterization techniques, and the environmental aspects of the process. Particular attention is paid to the effects on the final properties of composites and the characterization of fiber/polymer surface interactions. This book helps demystify the process of plasma polymerization, providing a thorough grounding in the fundamentals of plasma technology as they relate to polymers. It is ideal for materials scientists, polymer chemists, and engineers, acting as a guide to further research into new applications of this technology in the real world. Enables materials scientists and engineers to deploy plasma technology for surface treatment, characterization and analysis of polymeric materials Reviews the state-of-the-art in plasma technology for polymer synthesis and processing Presents detailed coverage of the most advanced applications for plasma polymerization, particularly in medicine and biomedical engineering, areas such as implants, biosensors and tissue engineering

Download or read book VLSI Design and Test written by S. Rajaram and published by Springer. This book was released on 2019-01-24 with total page 722 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book constitutes the refereed proceedings of the 22st International Symposium on VLSI Design and Test, VDAT 2018, held in Madurai, India, in June 2018. The 39 full papers and 11 short papers presented together with 8 poster papers were carefully reviewed and selected from 231 submissions. The papers are organized in topical sections named: digital design; analog and mixed signal design; hardware security; micro bio-fluidics; VLSI testing; analog circuits and devices; network-on-chip; memory; quantum computing and NoC; sensors and interfaces.

Download or read book Handbook of Sputter Deposition Technology written by Kiyotaka Wasa and published by William Andrew. This book was released on 2012-12-31 with total page 657 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

Download or read book Nanostructured Surfaces and Thin Films Synthesis by Physical Vapor Deposition written by Rafael Alvarez and published by MDPI. This book was released on 2021-04-22 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Special Issue deals with the synthesis of nanostructured surfaces and thin films by means of physical vapor deposition techniques such as pulsed laser deposition, magnetron sputtering, HiPIMS, or e-beam evaporation, among others. The nanostructuration of the surface modifies the way a material interacts with the environment, changing its optical, mechanical, electrical, tribological, or chemical properties. This can be applied in the development of photovoltaic cells, tribological coatings, optofluidic sensors, or biotechnology to name a few. This issue includes research presenting novel or improved applications of nanostructured thin films, such as photovoltaic solar cells, thin-film transistors, antibacterial coatings or chemical and biological sensors, while also studying the nanostructuration mechanisms, from a fundamental point of view, that produce rods, columns, helixes or hexagonal grids at the nanoscale.

Download or read book Research in Materials and Manufacturing Technologies written by Prasad Yarlagadda and published by Trans Tech Publications Ltd. This book was released on 2013-10-31 with total page 2162 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume is indexed by Thomson Reuters CPCI-S (WoS). Collection of selected, peer reviewed papers from the 3rd International Conference on Materials and Products Manufacturing Technology (ICMPMT 2013), September 25-26, 2013, Guangzhou, China. The 402 papers are grouped as follows: Chapter 1: Micro/Nano Materials and Films; Chapter 2: Polymer Materials; Chapter 3: Composites; Chapter 4: Ceramic; Chapter 5: Metal, Alloys and Mining Engineering; Chapter 6: Chemical Materials; Chapter 7: Biomaterials and Technology; Chapter 8: Surface Engineering/Coatings; Chapter 9: Building Materials, Construction and Architecture; Chapter 10: Material Processing Technology; Chapter 11: Sensors and Detecting Technology; Chapter 12: Signal and Intelligent Information Processing; Chapter 13: Electronic, Optoelectronic and Automation; Chapter 14: Industrial Robotics and Mechatronics; Chapter 15: Mechanical Design and Modeling; Chapter 16: CAD/CAM/CAE; Chapter 17: Product Design and Manufacture; Chapter 18: Advanced Manufacturing Technology; Chapter 19: Computer Applications and Mathematical Modeling; Chapter 20: Industrial Engineering and System Analysis; Chapter 21: Engineering Management and Engineering Education

Download or read book VLSI Design and Test written by Brajesh Kumar Kaushik and published by Springer. This book was released on 2017-12-21 with total page 820 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book constitutes the refereed proceedings of the 21st International Symposium on VLSI Design and Test, VDAT 2017, held in Roorkee, India, in June/July 2017. The 48 full papers presented together with 27 short papers were carefully reviewed and selected from 246 submissions. The papers were organized in topical sections named: digital design; analog/mixed signal; VLSI testing; devices and technology; VLSI architectures; emerging technologies and memory; system design; low power design and test; RF circuits; architecture and CAD; and design verification.

Download or read book Silicon Nitride Silicon Dioxide and Emerging Dielectrics 10 written by R. Ekwal Sah and published by The Electrochemical Society. This book was released on 2009 with total page 871 pages. Available in PDF, EPUB and Kindle. Book excerpt: The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.

Download or read book Fundamentals of Nanotechnology written by Gabor L. Hornyak and published by CRC Press. This book was released on 2018-12-14 with total page 812 pages. Available in PDF, EPUB and Kindle. Book excerpt: WINNER 2009 CHOICE AWARD OUTSTANDING ACADEMIC TITLE! Nanotechnology is no longer a subdiscipline of chemistry, engineering, or any other field. It represents the convergence of many fields, and therefore demands a new paradigm for teaching. This textbook is for the next generation of nanotechnologists. It surveys the field’s broad landscape, exploring the physical basics such as nanorheology, nanofluidics, and nanomechanics as well as industrial concerns such as manufacturing, reliability, and safety. The authors then explore the vast range of nanomaterials and systematically outline devices and applications in various industrial sectors. This color text is an ideal companion to Introduction to Nanoscience by the same group of esteemed authors. Both titles are also available as the single volume Introduction to Nanoscience and Nanotechnology Qualifying instructors who purchase either of these volumes (or the combined set) are given online access to a wealth of instructional materials. These include detailed lecture notes, review summaries, slides, exercises, and more. The authors provide enough material for both one- and two-semester courses.

Download or read book Study of crystallography and erosion behavior of single and multilayer coatings used for applications in aero engines written by Muhammad Naveed and published by Cuvillier Verlag. This book was released on 2015-07-28 with total page 108 pages. Available in PDF, EPUB and Kindle. Book excerpt: Der Wunsch der Menschen nach steigender Mobilität erfordert den weltweiten Ausbau/die weltweite Expansion des Flugbetriebs. Dabei ist nicht immer auszuschließen, dass Flugzeuge und Helikopter auch staubbelastetete Gebiete durchqueren müssen. Staub-/Sandansammlungen, wie sie bei/nach Vulkanausbrüchen oder z.B. durch Sand-Transport aus der Sahara und aus industriellen Quellen in der Atmosphäre vorkommen, stellen eines der Hauptprobleme für den vorzeitigen Verschleiß von Triebwerkskomponenten dar. Der Durchsatz scharfkantiger kristalliner Staub- und Sandpartikel erodiert die Oberflächen der Turbinenschaufeln und verändert Symmetrie und Abstimmung und somit die Effizienz des Triebwerks. Ziel dieser Doktorarbeit war die Entwicklung, Herstellung und experimentelle Untersuchung aufgedampfter Schichten (PVD = Physical Vapor Deposition) zur Anwendung hinsichtlich der Verlängerung der Lebensdauer von Komponenten in Gasturbinen. In einer Vakuum-Aufdampfanlage (PVD-Anlage) wurden ein- und mehrlagige Schichten auf ein Target aufgebracht und dieses anschließend in einem Erosionsprüfstand mit unterschiedlichen Parametern getestet. Aus der Analyse von Phasenentwicklung und der mechanischen Eigenschaften für die hergestellten Beschichtungen wurde versucht, eine Prognose über das Verschleißverhalten der Beschichtung zu erstellen. Die erodierten Schichten wurden im Raster-Elektronenmikroskop (REM) untersucht und unterschiedliche Verschleißmechanismen während des Erosionsprozesses besprochen. Die Ergebnisse werden ferner anhand theoretischer Modelle und der Nano-Indentierungs-Methode diskutiert.

Download or read book Comprehensive Materials Processing written by and published by Newnes. This book was released on 2014-04-07 with total page 5485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive Materials Processing, Thirteen Volume Set provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources

Download or read book Tribology and Surface Engineering written by Aleksander Lisiecki and published by MDPI. This book was released on 2020-01-15 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book covers very important issues, not only scientific in nature but, ultimately, for industry and the economy. Wear and deterioration of surface properties during operation is a natural and unavoidable phenomenon. However, minimizing the degree of wear is of great importance for the entire economy, as illustrated by the example of the US economy, for which the loss of natural resources as a direct cause of friction and wear exceeds 6% of the Gross National Product. This book showcases the valuable knowledge revealed from both theoretical and practical research results in the field of advanced technologies of coatings and surface modification, as well as wear and tribological characteristics of advanced materials and surface layers. Therefore, it is hoped that this book will be a valuable resource and helpful tool for scientists, engineers, and students in the field of surface engineering, materials science, and manufacturing engineering.