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Book Lecture Notes on Principles of Plasma Processing

Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Book Space Plasma Simulation

    Book Details:
  • Author : Jörg Büchner
  • Publisher : Springer Science & Business Media
  • Release : 2003-04-09
  • ISBN : 3540006982
  • Pages : 363 pages

Download or read book Space Plasma Simulation written by Jörg Büchner and published by Springer Science & Business Media. This book was released on 2003-04-09 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this book is twofold: to provide an introduction for newcomers to state of the art computer simulation techniques in space plasma physics and an overview of current developments. Computer simulation has reached a stage where it can be a highly useful tool for guiding theory and for making predictions of space plasma phenomena, ranging from microscopic to global scales. The various articles are arranged, as much as possible, according to the - derlying simulation technique, starting with the technique that makes the least number of assumptions: a fully kinetic approach which solves the coupled set of Maxwell’s equations for the electromagnetic ?eld and the equations of motion for a very large number of charged particles (electrons and ions) in this ?eld. Clearly, this is also the computationally most demanding model. Therefore, even with present day high performance computers, it is the most restrictive in terms of the space and time domain and the range of particle parameters that can be covered by the simulation experiments. It still makes sense, therefore, to also use models, which due to their simp- fying assumptions, seem less realistic, although the e?ect of these assumptions on the outcome of the simulation experiments needs to be carefully assessed.

Book Lecture notes on plasma physics

Download or read book Lecture notes on plasma physics written by H. L. Pécseli and published by . This book was released on 1983 with total page 150 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Plasma Physics

    Book Details:
  • Author : Andreas Dinklage
  • Publisher : Springer Science & Business Media
  • Release : 2005-06-09
  • ISBN : 9783540252740
  • Pages : 524 pages

Download or read book Plasma Physics written by Andreas Dinklage and published by Springer Science & Business Media. This book was released on 2005-06-09 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Physics: Confinement, Transport and Collective Effects provides an overview of modern plasma research with special focus on confinement and related issues. Beginning with a broad introduction, the book leads graduate students and researchers – also those from related fields - to an understanding of the state-of-the-art in modern plasma physics. Furthermore, it presents a methodological cross section ranging from plasma applications and plasma diagnostics to numerical simulations, the latter providing an increasingly important link between theory and experiment. Effective references guide the reader from introductory texts through to contemporary research. Some related exercises in computational plasma physics are supplied on a special web site

Book Introduction to Plasma Physics and Controlled Fusion

Download or read book Introduction to Plasma Physics and Controlled Fusion written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and nonlinear plasma theory. At the same time, the energy shortage on the one hand and the exploration of Jupiter and Saturn on the other have increased the national awareness of the important applications of plasma physics to energy production and to the understanding of our space environment. In magnetic confinement fusion, this period has seen the attainment 13 of a Lawson number nTE of 2 x 10 cm -3 sec in the Alcator tokamaks at MIT; neutral-beam heating of the PL T tokamak at Princeton to KTi = 6. 5 keV; increase of average ß to 3%-5% in tokamaks at Oak Ridge and General Atomic; and the stabilization of mirror-confined plasmas at Livermore, together with injection of ion current to near field-reversal conditions in the 2XIIß device. Invention of the tandem mirror has given magnetic confinement a new and exciting dimension. New ideas have emerged, such as the compact torus, surface-field devices, and the EßT mirror-torus hybrid, and some old ideas, such as the stellarator and the reversed-field pinch, have been revived. Radiofrequency heat ing has become a new star with its promise of dc current drive. Perhaps most importantly, great progress has been made in the understanding of the MHD behavior of toroidal plasmas: tearing modes, magnetic Vll Vlll islands, and disruptions.

Book Plasma Physics

    Book Details:
  • Author : George Schmidt
  • Publisher :
  • Release : 1960
  • ISBN :
  • Pages : 160 pages

Download or read book Plasma Physics written by George Schmidt and published by . This book was released on 1960 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Introduction to Plasma Physics

Download or read book Introduction to Plasma Physics written by R.J Goldston and published by CRC Press. This book was released on 2020-07-14 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction to Plasma Physics is the standard text for an introductory lecture course on plasma physics. The text’s six sections lead readers systematically and comprehensively through the fundamentals of modern plasma physics. Sections on single-particle motion, plasmas as fluids, and collisional processes in plasmas lay the groundwork for a thorough understanding of the subject. The authors take care to place the material in its historical context for a rich understanding of the ideas presented. They also emphasize the importance of medical imaging in radiotherapy, providing a logical link to more advanced works in the area. The text includes problems, tables, and illustrations as well as a thorough index and a complete list of references.

Book Lectures in Magnetohydrodynamics

Download or read book Lectures in Magnetohydrodynamics written by Dalton D. Schnack and published by Springer. This book was released on 2009-08-11 with total page 317 pages. Available in PDF, EPUB and Kindle. Book excerpt: Magnetohydrodynamics, or MHD, is a theoretical way of describing the statics and dynamics of electrically conducting uids. The most important of these uids occurring in both nature and the laboratory are ionized gases, called plasmas. These have the simultaneous properties of conducting electricity and being electrically charge neutral on almost all length scales. The study of these gases is called plasma physics. MHD is the poor cousin of plasma physics. It is the simplest theory of plasma dynamics. In most introductory courses, it is usually afforded a short chapter or lecture at most: Alfven ́ waves, the kink mode, and that is it. (Now, on to Landau damping!) In advanced plasma courses, such as those dealing with waves or kinetic theory, it is given an even more cursory treatment, a brief mention on the way to things more profound and interesting. (It is just MHD! Besides, real plasma phy- cists do kinetic theory!) Nonetheless, MHD is an indispensable tool in all applications of plasma physics.

Book Lecture Notes in Physics  Introduction to Plasma Physics

Download or read book Lecture Notes in Physics Introduction to Plasma Physics written by Michael Gedalin and published by . This book was released on 2014-09-27 with total page 78 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma is usually said to be a gas of charged particles. Taken as it is, this definition isnot especially useful and, in many cases, proves to be wrong. Yet, two basic necessary(but not sufficient) properties of the plasma are: a) presence of freely moving chargedparticles, and b) large number of these particles. Plasma does not have to consists ofcharged particles only, neutrals may be present as well, and their relative number wouldaffect the features of the system. For the time being, we, however, shall concentrate onthe charged component only

Book The Physics of the Quark Gluon Plasma

Download or read book The Physics of the Quark Gluon Plasma written by Sourav Sarkar and published by Springer Science & Business Media. This book was released on 2009-12-16 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this book is to offer to the next generation of young researchers a broad and largely self-contained introduction to the physics of heavy ion collisions and the quark-gluon plasma, providing material beyond that normally found in the available textbooks. For each of the main aspects - QCD thermodynamics and global features of the QGP, collision hydrodynamics, electromagnetic probes, jet and quarkonium production, color glass condensate, and the gravity connection - the present volume provides extensive and pedagogical lectures, surveying the present status of both theory and experiment. A particular feature of this volume is that all lectures have been written with the active assistance of selected students present at the course in order to ensure the adequate level and coverage for the intended readership.

Book Quantum Plasmadynamics

    Book Details:
  • Author : D. B. Melrose
  • Publisher : Springer Science & Business Media
  • Release : 2008
  • ISBN : 0387739025
  • Pages : 481 pages

Download or read book Quantum Plasmadynamics written by D. B. Melrose and published by Springer Science & Business Media. This book was released on 2008 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of quantum plasmas has a long and diverse tradition. The subject is becoming of increasing interest. This book synthesizes two fields: classical kinetic theory of collisionless plasmas and quantum electrodynamics. The whole approach is new and not seen in other texts. The book therefore provides a comprehensive introduction to a more general formalism for plasma kinetic and dispersion theory.

Book Introduction to Plasma Physics

Download or read book Introduction to Plasma Physics written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book grew out of lecture notes for an undergraduate course in plasma physics that has been offered for a number of years at UCLA. With the current increase in interest in controlled fusion and the wide spread use of plasma physics in space research and relativistic as trophysics, it makes sense for the study of plasmas to become a part of an undergraduate student's basic experience, along with subjects like thermodynamics or quantum mechanics. Although the primary purpose of this book was to fulfill a need for a text that seniors or juniors can really understand, I hope it can also serve as a painless way for scientists in other fields-solid state or laser physics, for instance to become acquainted with plasmas. Two guiding principles were followed: Do not leave algebraic steps as an exercise for the reader, and do not let the algebra obscure the physics. The extent to which these opposing aims could be met is largely due to the treatment of a plasma as two interpenetrating fluids. The two-fluid picture is both easier to understand and more accurate than the single-fluid approach, at least for low-density plasma phe nomena.

Book Fundamentals of Plasma Physics

Download or read book Fundamentals of Plasma Physics written by J. A. Bittencourt and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 700 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamentals of Plasma Physics is a general introduction designed to present a comprehensive, logical and unified treatment of the fundamentals of plasma physics based on statistical kinetic theory, with applications to a variety of important plasma phenomena. Its clarity and completeness makes the text suitable for self-learning and for self-paced courses. Throughout the text the emphasis is on clarity, rather than formality, the various derivations are explained in detail and, wherever possible, the physical interpretations are emphasized. The mathematical treatment is set out in great detail, carrying out the steps which are usually left to the reader. The problems form an integral part of the text and most of them were designed in such a way as to provide a guideline, stating intermediate steps with answers.

Book Introduction to Plasma Physics

Download or read book Introduction to Plasma Physics written by D. A. Gurnett and published by Cambridge University Press. This book was released on 2005-01-06 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced undergraduate/beginning graduate text on space and laboratory plasma physics.

Book Waves And Instabilities In Plasmas

Download or read book Waves And Instabilities In Plasmas written by Liu Chen and published by World Scientific. This book was released on 1987-10-01 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: The topics covered in these notes are selective and tend to emphasize more on kinetic-theory approaches to waves and instabilities in both uniform and non-uniform plasmas, students are assumed to have some basic knowledge of plasma dynamics in terms of single-particle and fluid descriptions.

Book Computational Many Particle Physics

Download or read book Computational Many Particle Physics written by Holger Fehske and published by Springer. This book was released on 2007-12-10 with total page 774 pages. Available in PDF, EPUB and Kindle. Book excerpt: Looking for the real state of play in computational many-particle physics? Look no further. This book presents an overview of state-of-the-art numerical methods for studying interacting classical and quantum many-particle systems. A broad range of techniques and algorithms are covered, and emphasis is placed on their implementation on modern high-performance computers. This excellent book comes complete with online files and updates allowing readers to stay right up to date.

Book Topics in Plasma Physics

Download or read book Topics in Plasma Physics written by Reimar Lüst and published by . This book was released on 1962 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt: