Download or read book Laser Diagnostics and Photochemical Processing for Semiconductor Devices written by R. M. Osgood and published by North Holland. This book was released on 1983 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Extended Abstracts Laser Chemical Processing of Semiconductor Devices Proceedings of Symposium B 1984 Fall Meeting of the Materials Research Society Held on 27 29 November 1984 at Boston Massachusetts written by F. A. Houle and published by . This book was released on 1984 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt: The conference emphasized the following areas: Fundamental mechanisms, laser-assisted growth of semiconductor films, process diagnostics, metallization from thin films and gases, photochemical etching, fundamental processes, and dielectric photoformation. Keywords: Semiconductor devices; Laser diagnostics; Lasers; Metallization; Photochemical Etching; Dielectric Photoformation. (Author).
Download or read book Laser Processing and Diagnostics written by D. Bäuerle and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 561 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.
Download or read book Chemical Processing with Lasers written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 253 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials processing with lasers is a rapidly expanding field which is increasingly captivating the attention of scientists, engineers and manufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not only make manufacturing cheaper, faster, cleaner and more accurate but which also opens up entirely new technologies and manufacturing methods that are simply not available using existing techniques. Actual and potential applications range from laser machining to laser-induced materials transformation, coating, patterning, etc. , opening up the prospect of exciting new processing methods for micromechanics, metallurgy, integrated optics, semiconductor manufacture and chemical engineering. This book concentrates on the new and interdisciplinary field of 1 aser-i nduced chemicaZ process i ng of materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a few tenths of a micrometer up to several centimeters. Moreover, materials removal or synthesis, or surface modifications, such as oxidation, nitridation, reduction, metallization and doping, are also possible within similar dimensions. This book is meant as an introduction. It attempts to cater for the very broad range of specific interests which different groups of readers will have, and this thinking underlies the way in which the material has been arranged.
Download or read book Semiconductors Probed by Ultrafast Laser Spectroscopy Pt II written by Robert R. Alfano and published by Elsevier. This book was released on 2012-12-02 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors Probed by Ultrafast Laser Spectroscopy, Volume II discusses the use of ultrafast laser spectroscopy in studying fast physics in semiconductors. It reviews progress on the experimental and theoretical understanding of ultrafast events that occur on a picosecond and nanosecond time scale. This volume discusses electronic relaxation in amorphous semiconductors and the physical mechanisms during and after the interaction of an intense laser pulse with a semiconductor. It also covers the relaxation of carriers in semiconductors; transient optical pulse propagation; and methods of time-resolved spectroscopy. Scientists, engineers, and graduate students will find this book invaluable.
Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2011-09-02 with total page 846 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This fourth edition has been revised and enlarged to cover new topics such as 3D microfabrication, advances in nanotechnology, ultrafast laser technology and laser chemical processing (LCP). Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
Download or read book Laser Microfabrication written by Daniel J. Ehrlich and published by Elsevier. This book was released on 1989-06-21 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Download or read book Proceedings of the Second International Symposium on Electrochemical Processing of Tailored Materials written by R. C. Alkire and published by . This book was released on 1993 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Emerging Technologies for In Situ Processing written by D.J. Ehrlich and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the NATO Advanced Research Workshop, Cargèse, France, May 4-8, 1987
Download or read book Proceedings of the Symposium on Reduced Temperature Processing for VLSI written by Rafael Reif and published by . This book was released on 1986 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Spectroscopy and Photochemistry on Metal Surfaces written by Hai-Lung Dai and published by World Scientific. This book was released on 1995 with total page 819 pages. Available in PDF, EPUB and Kindle. Book excerpt: Using lasers to induce and probe surface processes has the advantages of quantum state specificity, species selectivity, surface sensitivity, fast time-resolution, high frequency resolution, and accessibility to full pressure ranges. These advantages make it highly desirable to use light to induce, control, or monitor surface chemical and physical processes. Recent applications of laser based techniques in studying surface processes have stimulated new developments and enabled the understanding of fundamental problems in energy transfer and reactions. This volume will include discussions on spectroscopic techniques, energy transfer, desorption dynamics, and photochemistry.
Download or read book Atomic and Molecular Spectroscopy written by Sune Svanberg and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 603 pages. Available in PDF, EPUB and Kindle. Book excerpt: A wide-ranging review of modern spectroscopic techniques such as X-ray, photoelectron, optical and laser spectroscopy, and radiofrequency and microwave techniques. On the fundamental side the book focuses on physical principles and the impact of spectroscopy on our understanding of the building blocks of matter, while in the area of applications particular attention is given to those in chemical analysis, photochemistry, surface characterisation, environmental and medical diagnostics, remote sensing and astrophyscis. The Fourth Edition also provides the reader with an update on laser cooling and trapping, Bose-Einstein condensation, ultra-fast spectroscopy, high-power laser/matter interaction, satellite-based astronomy and spectroscopic aspects of laser medicine.
Download or read book Laser Technology in Chemistry written by Hans Medin and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Processing of Thin Films and Microstructures written by Ian W. Boyd and published by Springer Science & Business Media. This book was released on 2013-03-08 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro cessing of thin films, particularly, though by no means exclu sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.
Download or read book Excimer Lasers written by L.D. Laude and published by Springer Science & Business Media. This book was released on 1994-04-30 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the NATO Advanced Study Institute on `Excimer Lasers: the Tools, Fundamental Processes and Applications', Elounda, Crete, Greece, September 6--17, 1993
Download or read book Emergent Process Methods for High Technology Ceramics written by Robert F. Davis and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 835 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume constitutes the Proceedings of the November 8-10, 1982 Conference on EMERGENT PROCESS METHODS FOR HIGH TECHNOLOGY CERAMICS, held at North Carolina State University in Raleigh. It was the nineteenth in a series of "University Conferences on Ceramic Sci ence" initiated in 1964 by four institutions of which North Carolina State University is a charter member, along with the University of California at Berkeley, Notre Dame University, and the New York State College of Ceramics at Alfred University. More recently, ceramic oriented faculty in departments at the Pennsylvania State University and Case-Western Reserve University have joined the four initial institutions as permanent members of the consortium. These research oriented conferences, each uniquely concerned with a timely ceramic theme, have been well attended by audiences which typically were both international and interdisciplinary in character; their published Proceedings have been well received and are frequently cited. This three day conference addressed the fundamental scientific background as well as the technological state-of-the-art of several novel methods which are beginning to influence present and future directions for non-traditional ceramic processing, thus affecting many of the advanced ceramic materials needed for a wide variety of research and industrial applications. The number, the importance and the application of new ceramic processing techniques have expanded considerably during the last ten years.
Download or read book Reduced Thermal Processing for ULSI written by R.A. Levy and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt: As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices. Furthermore, due to the relatively low melting point of the first aluminum metallization level, such restrictions extend to the fabrication of multilevel structures that are now essential in increasing packing density of interconnect lines. The fabrication of ultra large scale integrated (ULSI) devices under thermal budget restrictions requires the reassessment of existing and the development of new microelectronic materials and processes. This book addresses three broad but interrelated areas. The first area focuses on the subject of rapid thermal processing (RTP), a technology that allows minimization of processing time while relaxing the constraints on high temperature. Initially developed to limit dopant redistribution, current applications of RTP are shown here to encompass annealing, oxidation, nitridation, silicidation, glass reflow, and contact sintering. In a second but complementary area, advances in equipment design and performance of rapid thermal processing equipment are presented in conjunction with associated issues of temperature measurement and control. Defect mechanisms are assessed together with the resulting properties of rapidly deposited and processed films. The concept of RTP integration for a full CMOS device process is also examined together with its impact on device characteristics.
