Download or read book Laser Chemical Processing for Microelectronics written by K. G. Ibbs and published by . This book was released on 1989-01 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nine expert contributors describe the application of laser processing techniques in the fabrication of semiconductor materials & devices for the microelectronics industry. This book comprises a carefully edited collection of specially written reviews by leading figures in all aspects of this important area of high technology. This subject matter should interest anyone involved with a semiconductor fabrication facility or a development laboratory with an interest in modern advances in processing technology, especially those people working in the larger electrical & electronics companies. In addition, it will be of value to university groups in engineering & physics departments involved in laser processing of materials, & of subsidiary interest to microfilm technologists working in optics fabrication.
Download or read book Advanced Laser Chemical Processing For Microelectronics and Integrated Optics written by and published by . This book was released on 1992 with total page 23 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report summarizes a three-year research effort to explore advanced laser-chemical processing for microelectronics and integrated optics. The main goals of the work have been: (a) to develop techniques for fabrication of integrated optical devices in GaAs multilayer and quantum well structures, and (b) to explore new and novel techniques of advanced semiconductor processing for microelectronics and optoelectronics.
Download or read book Laser and Particle beam Chemical Processing for Microelectronics written by Daniel J. Ehrlich and published by . This book was released on 1988 with total page 763 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Download or read book Proceedings of the Symposium on Laser Processes for Microelectronic Applications written by J. J. Ritsko and published by . This book was released on 1988 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 649 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser--matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas--solid, liquid--solid, and solid--solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. Students, engineers, and manufacturers alike will find this book an invaluable reference work for the state of the art in laser processing.
Download or read book Laser Chemical Processing of Semiconductor Devices Extended Abstracts written by and published by . This book was released on 1984 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser and Particle Beam Chemical Processing for Microelectronics written by Daniel J. Ehrlich and published by Cambridge University Press. This book was released on 2014-06-05 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Theory and Application of Laser Chemical Vapor Deposition written by J. Mazumder and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Download or read book Beam Processing and Laser Chemistry written by I.W. Boyd and published by Elsevier. This book was released on 1990-02-01 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume discusses both the practical and theoretical aspects of energy beam materials processing. It highlights the recent advances in the use of beams and incoherent light sources to enhance or modify chemical processes at solid surfaces. Special attention is given to the latest developments in the use of ion, electron and photon beams, and on laser-assisted process chemistry. Thin film and surface and interface reactions as well as bulk phase transformations are discussed. Practical technological details and the criteria for present and future applications are also reviewed. The papers collected in this volume reflect the continuing strong interest and variety of development in this field.
Download or read book Chemical Processing with Lasers written by Dieter Bauerle and published by . This book was released on 1986-12-01 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Surface Processing and Laser Assisted Chemistry written by E. Fogarassy and published by Elsevier. This book was released on 1990-12-01 with total page 495 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers in this volume cover all aspects of laser assisted surface processing ranging from the preparation of high-Tc superconducting layer structures to industrial laser applications for device fabrication. The topics presented give recent results in organometallic chemistry and laser photochemistry, and novel surface characterization techniques. The ability to control the surface morphology by digital deposition and etching shows one of the future directions for exciting applications of laser surface processing, some of which may apply UV and VUV excitation. The understanding of elementary proceses is essential for the design of novel deposition methods, with diamond CVD being an outstanding example. The high quality of these contributions once again demonstrates that the E-MRS is an efficient forum for interaction between research workers and industry.
Download or read book Chemical Processing with Lasers written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 1986-01-01 with total page 245 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Fundamentals of Laser Assisted Micro and Nanotechnologies written by Vadim P. Veiko and published by Springer. This book was released on 2014-05-19 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the state of the art of laser micro- and nanotechnology. The physical fundamentals of different processes and the application are presented. The book deals with different materials like phase change and memory alloys, thin films, polymers etc. New phenomena and mechanisms of laser-matter interaction in nano-domains are explained. This book is helpful for students, postgraduates, engineers and researches working not only in the field of laser microtechnology but also in high-tech industry, like photonics, microelectronics, information technology.
Download or read book Laser Precision Microfabrication written by Koji Sugioka and published by Springer. This book was released on 2010-08-13 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.
Download or read book Laser Processing and Chemistry written by and published by Springer. This book was released on 2011-09-02 with total page 876 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Applications in Physical Chemistry written by D.K. Evans and published by CRC Press. This book was released on 2020-11-26 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an introduction on applications of lasers in Chemistry. It describes laser as a tool for chemistry, the consideration involved in describing a laser beam and what happens to beam as it is propagated through a gas. The book is useful for graduates and advanced undergraduates.
