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Book Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications

Download or read book Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications written by Der-Song Lin and published by Stanford University. This book was released on 2011 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive micromachined ultrasonic transducers (CMUTs), have been widely studied in academia and industry over the last decade. CMUTs provide many benefits over traditional piezoelectric transducers including improvement in performance through wide bandwidth, and ease of electronics integration, with the potential to batch fabricate very large 2D arrays with low-cost and high-yield. Though many aspects of CMUT technology have been studied over the years, packaging the CMUT into a fully practical system has not been thoroughly explored. Two important interfaces of packaging that this thesis explores are device encapsulation (the interface between CMUTs and patients) and full electronic integration of large scale 2D arrays (the interface between CMUTs and electronics). In the first part of the work, I investigate the requirements for the CMUT encapsulation. For medical usage, encapsulation is needed to electrically insulate the device, mechanically protect the device, and maintain transducer performance, especially the access of the ultrasound energy. While hermetic sealing can protect many other MEMS devices, CMUTs require mechanical interaction to a fluid, which makes fulfilling the previous criterion very challenging. The proposed solution is to use a viscoelastic material with the glass-transition-temperature lower than room temperature, such as Polydimethylsiloxane (PDMS), to preserve the CMUT static and dynamic performance. Experimental implementation of the encapsulated imaging CMUT arrays shows the device performance was maintained; 95 % of efficiency, 85% of the maximum output pressure, and 91% of the fractional bandwidth (FBW) can be preserved. A viscoelastic finite element model was also developed and shows the performance effects of the coating can be accurately predicted. Four designs, providing acoustic crosstalk suppression, flexible substrate, lens focusing, and blood flow monitoring using PDMS layer were also demonstrated. The second part of the work, presents contributions towards the electronic integration and packaging of large-area 2-D arrays. A very large 2D array is appealing for it can enable advanced novel imaging applications, such as a reconfigurable array, and a compression plate for breast cancer screening. With these goals in mind, I developed the first large-scale fully populated and integrated 2D CMUTs array with 32 by 192 elements. In this study, I demonstrate a flexible and reliable integration approach by successfully combining a simple UBM preparation technique and a CMUTs-interposer-ASICs sandwich design. The results show high shear strength of the UBM (26.5 g), 100% yield of the interconnections, and excellent CMUT resonance uniformity ([lowercase Sigma] = 0.02 MHz). As demonstrated, this allows for a large-scale assembly of a tile-able array by using an interposer. Interface engineering is crucial towards the development of CMUTs into a practical ultrasound system. With the advances in encapsulation technique with a viscoelastic polymer and the combination of the UBM technique to the TSV fabrication for electronics integration, a fully integrated CMUT system can be realized.

Book Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications

Download or read book Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications written by Der-Song Lin and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive micromachined ultrasonic transducers (CMUTs), have been widely studied in academia and industry over the last decade. CMUTs provide many benefits over traditional piezoelectric transducers including improvement in performance through wide bandwidth, and ease of electronics integration, with the potential to batch fabricate very large 2D arrays with low-cost and high-yield. Though many aspects of CMUT technology have been studied over the years, packaging the CMUT into a fully practical system has not been thoroughly explored. Two important interfaces of packaging that this thesis explores are device encapsulation (the interface between CMUTs and patients) and full electronic integration of large scale 2D arrays (the interface between CMUTs and electronics). In the first part of the work, I investigate the requirements for the CMUT encapsulation. For medical usage, encapsulation is needed to electrically insulate the device, mechanically protect the device, and maintain transducer performance, especially the access of the ultrasound energy. While hermetic sealing can protect many other MEMS devices, CMUTs require mechanical interaction to a fluid, which makes fulfilling the previous criterion very challenging. The proposed solution is to use a viscoelastic material with the glass-transition-temperature lower than room temperature, such as Polydimethylsiloxane (PDMS), to preserve the CMUT static and dynamic performance. Experimental implementation of the encapsulated imaging CMUT arrays shows the device performance was maintained; 95 % of efficiency, 85% of the maximum output pressure, and 91% of the fractional bandwidth (FBW) can be preserved. A viscoelastic finite element model was also developed and shows the performance effects of the coating can be accurately predicted. Four designs, providing acoustic crosstalk suppression, flexible substrate, lens focusing, and blood flow monitoring using PDMS layer were also demonstrated. The second part of the work, presents contributions towards the electronic integration and packaging of large-area 2-D arrays. A very large 2D array is appealing for it can enable advanced novel imaging applications, such as a reconfigurable array, and a compression plate for breast cancer screening. With these goals in mind, I developed the first large-scale fully populated and integrated 2D CMUTs array with 32 by 192 elements. In this study, I demonstrate a flexible and reliable integration approach by successfully combining a simple UBM preparation technique and a CMUTs-interposer-ASICs sandwich design. The results show high shear strength of the UBM (26.5 g), 100% yield of the interconnections, and excellent CMUT resonance uniformity ([lowercase Sigma] = 0.02 MHz). As demonstrated, this allows for a large-scale assembly of a tile-able array by using an interposer. Interface engineering is crucial towards the development of CMUTs into a practical ultrasound system. With the advances in encapsulation technique with a viscoelastic polymer and the combination of the UBM technique to the TSV fabrication for electronics integration, a fully integrated CMUT system can be realized.

Book Medical Imaging

    Book Details:
  • Author : Troy Farncombe
  • Publisher : CRC Press
  • Release : 2017-12-19
  • ISBN : 1466582634
  • Pages : 740 pages

Download or read book Medical Imaging written by Troy Farncombe and published by CRC Press. This book was released on 2017-12-19 with total page 740 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book has two intentions. First, it assembles the latest research in the field of medical imaging technology in one place. Detailed descriptions of current state-of-the-art medical imaging systems (comprised of x-ray CT, MRI, ultrasound, and nuclear medicine) and data processing techniques are discussed. Information is provided that will give interested engineers and scientists a solid foundation from which to build with additional resources. Secondly, it exposes the reader to myriad applications that medical imaging technology has enabled.

Book Fabrication of Capacitive Micromachined Ultrasonic Transducers Based on Adhesive Wafer Bonding

Download or read book Fabrication of Capacitive Micromachined Ultrasonic Transducers Based on Adhesive Wafer Bonding written by Zhenhao Li and published by . This book was released on 2017 with total page 107 pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive micromachined ultrasonic transducers (CMUTs) can be used for medical imaging, non-destructive testing or medical treatment applications. It can also be used as gravimetric sensors for gas sensing or immersion bio-sensing. Although various CMUT fabrication methods have been reported, there are still many challenges to address. Conventional fabrication methods can be categorized as either surface micromachining or the wafer bonding method. These methods have design trade-offs and limitations associated with process complexity, structural parameter optimization and wafer materials selection. For example, surface micromachining approaches can suffer from complicated fabrication processes. In addition, structural parameters cannot be fully optimized due to feasibility concerns during fabrication. In contrast, the development of wafer bonding techniques enabled CMUTs to be fabricated in a straightforward way and structural parameters can be easily optimized when compared with a surface micromachining approach. However, the yield of the traditional wafer bonded CMUTs is very sensitive to contaminations and the surface quality at the bonding interface. Although the difficulties of the wafer bonding process are not always reported, they definitely exist for every researcher who wants to fabricate their own CMUTs. As a result, this dissertation work aims to develop a CMUT fabrication process with fewer fabrication constraints, low-cost and low process temperature for CMOS integration. The developed CMUT fabrication processes reported in the thesis applied photosensitive polymer adhesive for wafer bonding in order to make a process with good tolerance to contaminations and defects on the wafer surface, present a wide range of material selection at the bonding interface and require low process temperature (less than 250°C). These features can benefit CMUT fabrication with increased yield better design flexibility and lower cost. Having maximum process temperature of 250°C, the developed processes can also be CMOS compatible. Furthermore, a novel CMUT structure, which can only be achieved by the reported technique, was developed showing more than doubled ultrasound receive sensitivity when compared with conventional CMUT structures. The fabrication processes were developed systematically and the details of process development will be presented in this thesis.

Book The Design  Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers for Imaging Applications

Download or read book The Design Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers for Imaging Applications written by Andrew Stephan Logan and published by . This book was released on 2010 with total page 155 pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive micromachined ultrasonic transducers (CMUTs) have proven themselves to be excellent candidates for medical ultrasonic imaging applications. The use of semiconductor fabrication techniques facilitates the fabrication of high quality arrays of uniform cells and elements, broad acoustic bandwidth, the potential to integrate the transducers with the necessary electronics, and the opportunity to exploit the benefits of batch fabrication. In this thesis, the design, fabrication and testing of one- and two-dimensional CMUT arrays using a novel wafer bonding process whereby the membrane and the insulation layer are both silicon nitride is reported. A user-grown insulating membrane layer avoids the need for expensive SOI wafers, permits optimization of the electrode size, and allows more freedom in selecting the membrane thickness, while also enjoying the benefits of wafer bonding fabrication. Using a row-column addressing scheme for an NxN two-dimensional array permits three-dimensional imaging with a large reduction in the complexity of the array when compared to a conventional 2D array with connections to all N2 elements. Only 2N connections are required and the image acquisition rate has the potential to be greatly increased. A simplification of the device at the imaging end will facilitate the integration of a three-dimensional imaging CMUT array into either an endoscope or catheter which is the ultimate purpose of this research project. To date, many sizes of transducers which operate at different frequencies have been successfully fabricated. Initial characterization in terms of resonant frequency and, transmission and reception in immersion has been performed on most of the device types. Extensive characterization has been performed with a linear 32 element array transducer and a 32x32 element row-column transducer. Two- and three-dimensional phased array imaging has been demonstrated.

Book Capacitive Micromachined Ultrasonic Transducers with Substrate embedded Springs

Download or read book Capacitive Micromachined Ultrasonic Transducers with Substrate embedded Springs written by Byung Chul Lee and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: After the first capacitive micromachined ultrasonic transducer (CMUT) was invented in 1994, it became one of the candidate technologies to advance the state-of-the-art of medical ultrasound imaging. Benefiting from its fabrication technique based on the semiconductor industry, CMUT technology has broadened the medical and therapeutic applications such as real-time volumetric ultrasound imaging, catheter-based forward-looking intravascular ultrasound (IVUS), photoacoustic imaging, high-intensity focused ultrasound (HIFU) and so on. In spite of many advantages, however, CMUT technology has been criticized with its relatively low transmit sensitivity (~10 kPa/V) or low average volume displacement efficiency (0.1 nm/V) as well as large drive and bias voltage requirements (in a range of a few hundreds of volts). In order to resolve these issues and open up new potential of clinical applications, this dissertation describes the design, fabrication, and system implementation of CMUTs with substrate-embedded springs, so-called post-CMUT (PCMUT). Since PCMUT structure resembles an ideal piston transducer, the improvements in performance mainly stem from the higher average displacement of the top plate for a given gap height. The overview of the first generation PCMUT is introduced and two main issues in simulation and fabrication aspects of the first generation PCMUT is discussed. To further improve the PCMUT device, a 3D finite element analysis (FEA) model of the PCMUT is demonstrated to predict the performance of the first generation PCMUT. In addition, the design guideline of the second generation PCMUT is proposed for achieving the maximum fractional bandwidth (100 %) as well as with the highest transmit sensitivity (~28 kPa/V). The second generation PCMUT is fabricated by using three combination MEMS processes: usage of two silicon-on-insulator (SOI) wafers, wafer bonding process, and wafer polishing process. The second generation PCMUT achieves high transmit sensitivity (~21 kPa/V) or large average volume displacement efficiency (1.1 nm/V) with a low bias voltage (55 V). Compared to a commercial piezoelectric transducer, the second generation PCMUT improves 2.75 times of the maximum output pressure and 5.25 times of the average volume displacement efficiency with respect to the same voltage. After fabrication and performance characterization of the second generation PCMUT, this dissertation demonstrates the feasibility of PCMUT to use it in medical imaging system by integrating PCMUT with a custom-built integrated circuit (IC). Photoacoustic imaging is also presented for one of its application examples.

Book Micromachined Ultrasonic Transducers

Download or read book Micromachined Ultrasonic Transducers written by and published by . This book was released on 1997 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabricated ultrasonic transducers have been generated which operate in both liquids and gases. Air coupled through transmission of aluminum was observed for the first time using a pair of 2.3 MHz transducers. The dynamic range of the transducers was 110 dB, and the received signal had an SNR of 30 dB. Air coupled through transmission of steel and glass has also been observed. A theoretical model for the transducers has been refined and agrees well with experimental results. A robust microfabrication process has been developed and was used to generate air transducers which resonate from 2 to 12 MHz, as well as immersion transducers that operate in water from 1 to 20 MHz with a 60 dB dynamic range. Optimized immersion and air transducers have been designed and a dynamic range above 110 dB is anticipated. This development effort finds applications in hydrophones, medical ultrasound, nondestructive evaluation, ranging, flow metering, and scanning tip force sensing and lithography.

Book Dual electrode Capacitive Micromachined Ultrasonic Transducers for Medical Ultrasound Applications

Download or read book Dual electrode Capacitive Micromachined Ultrasonic Transducers for Medical Ultrasound Applications written by Rasim Oytun Guldiken and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive Micromachined Ultrasonic Transducers (CMUTs) have been introduced as a viable alternative to piezoelectric transducers in medical ultrasound imaging in the last decade. CMUTs are especially suitable for applications requiring small size such as catheter based cardiovascular applications. Despite these advantages and their broad bandwidth, earlier studies indicated that the overall sensitivity of CMUTs need to be improved to match piezoelectric transducers. This dissertation addresses this issue by introducing the dual-electrode CMUT concept. Dual electrode configuration takes advantage of leveraged bending in electrostatic actuators to increase both the pressure output and receive sensitivity of the CMUTs. Static and dynamic finite element based models are developed to model the behavior of dual-electrode CMUTs. The devices are then successfully fabricated and characterized. Experiments illustrate that the pulse echo performance is increased by more than 15dB with dual-electrode CMUTs as compared to single electrode conventional CMUT. Further device optimization is explored via membrane shape adjustment by adding a center mass to the design. Electromechanical coupling coefficient (kc2) is investigated as a figure of merit to evaluate performance improvement with non-uniform/uniform membrane dual-electrode CMUTs. When the center mass is added to the design, the optimized non-uniform membrane increases the electromechanical coupling coefficient from 0.24 to 0.85 while increasing one-way 3dB fractional bandwidth from 80% to 140% and reducing the DC bias requirement from 160V to 132V. The results of this modeling study are successfully verified by experiments. With this membrane shape adjustment, significant performance improvement (nearly 20dB) is achieved with the dual-electrode CMUT structure that enables the CMUT performance to exceed that of piezoelectric transducers for many applications.

Book Ultrasonics

    Book Details:
  • Author : Dale Ensminger
  • Publisher : CRC Press
  • Release : 2024-02-21
  • ISBN : 1000994953
  • Pages : 904 pages

Download or read book Ultrasonics written by Dale Ensminger and published by CRC Press. This book was released on 2024-02-21 with total page 904 pages. Available in PDF, EPUB and Kindle. Book excerpt: Updated, revised, and restructured to reflect the latest advances in science and applications, the fourth edition of this best-selling industry and research reference covers the fundamental physical acoustics of ultrasonics and transducers, with a focus on piezoelectric and magnetostrictive modalities. It then discusses the full breadth of ultrasonics applications involving low power (sensing) and high power (processing) for research, industrial, and medical use. This book includes new content covering computer modeling used for acoustic and elastic wave phenomena, including scattering, mode conversion, transmission through layered media, Rayleigh and Lamb waves and flexural plates, modern horn design tools, Langevin transducers, and material characterization. There is more attention on process monitoring and advanced nondestructive testing and evaluation (NDT/NDE), including phased array ultrasound (PAUT), long-range inspection, using guided ultrasonic waves (GUW), internally rotary inspection systems (IRIS), time-of-flight diffraction (TOFD), and acoustic emission (AE). These methods are discussed and applied to both metals and nonmetals using illustrations in various industries, including now additionally for food and beverage products. The topics of defect sizing, capabilities, and limitations, including the probability of detection (POD), are introduced. Three chapters provide a new treatment of high-power ultrasonics, for both fluids and solids, and again, with examples of industrial engineering, food and beverage, pharmaceuticals, petrochemicals, and other process applications. Expanded coverage is given to medical and biological applications, covering diagnostics, therapy, and, at the highest powers, surgery. Key Features Provides an overview of fundamental analysis and transducer technologies needed to design and develop both measurement and processing systems Considers applications in material characterization and metrology Covers ultrasonic nondestructive testing and evaluation and high-power ultrasonics, which involves interactions that change the state of material Highlights medical and biomedical applications of ultrasound, focusing on the physical acoustics and the technology employed for diagnosis, therapy, surgery, and research This book is intended for both the undergraduate and graduate scientists and engineers, as well as the working professional, who seeks to understand the fundamentals together with a holistic treatment of the field of ultrasonics and its diversity of applications.

Book Capacitive Micromachined Ultrasonic Transducer  CMUT  Chemical Sensor and Its Interface Circuits

Download or read book Capacitive Micromachined Ultrasonic Transducer CMUT Chemical Sensor and Its Interface Circuits written by Hyunjoo Jenny Lee and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Miniaturized chemical sensors based on microelectromechanical-systems (MEMS) offer competitive advantages over existing bench-top chemical analyzers, such as small size, low power consumption, low cost due to batch fabrication, and CMOS compatibility. The potential for system integration of these chemical sensors with on-chip CMOS circuitry expands the spectrum of use, including consumer, industrial, and homeland security applications. This thesis introduces a miniaturized resonant chemical sensor based on a 50-MHz capacitive micromachined ultrasonic transducer (CMUT). With a high mass sensitivity of 4.3 ag/Hz, this CMUT-based chemical sensor achieves excellent volume sensitivity of 21.2 ppt/Hz to dimethyl methylphosphonate (DMMP), a common simulant for Sarin gas. In addition, a direct application of a mesoporous silica thin-film on a CMUT for relative humidity and carbon dioxide detection is presented. Using a mesoporous silica thin-film with a pore size of ~11 nm, this sensor achieves one of the lowest volume resolutions and a sensitive detection of 5.1 × 10-4%RH/Hz to water vapor in nitrogen. In addition, a mesoporous thin-film that is functionalized with an amino-group is directly applied on the resonant sensor, which exhibits a volume sensitivity of 1.6 × 10-4%/Hz and a volume resolution of 1.82 × 10-4% to carbon dioxide in nitrogen. Lastly, this thesis describes the sensor interface circuitry for CMUT and discusses the frequency noise analysis of CMUT-based oscillators. Specifically, a multi-channel interface integrated circuit (IC) implemented using 0.18-um CMOS technology, which results in reduced area and power consumption for each channel is presented. Two-channel detection of relative humidity is demonstrated using this circuit.

Book Diagnostic Ultrasound Imaging  Inside Out

Download or read book Diagnostic Ultrasound Imaging Inside Out written by Thomas L. Szabo and published by Academic Press. This book was released on 2013-12-05 with total page 829 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diagnostic Ultrasound Imaging provides a unified description of the physical principles of ultrasound imaging, signal processing, systems and measurements. This comprehensive reference is a core resource for both graduate students and engineers in medical ultrasound research and design. With continuing rapid technological development of ultrasound in medical diagnosis, it is a critical subject for biomedical engineers, clinical and healthcare engineers and practitioners, medical physicists, and related professionals in the fields of signal and image processing. The book contains 17 new and updated chapters covering the fundamentals and latest advances in the area, and includes four appendices, 450 figures (60 available in color on the companion website), and almost 1,500 references. In addition to the continual influx of readers entering the field of ultrasound worldwide who need the broad grounding in the core technologies of ultrasound, this book provides those already working in these areas with clear and comprehensive expositions of these key new topics as well as introductions to state-of-the-art innovations in this field. Enables practicing engineers, students and clinical professionals to understand the essential physics and signal processing techniques behind modern imaging systems as well as introducing the latest developments that will shape medical ultrasound in the future Suitable for both newcomers and experienced readers, the practical, progressively organized applied approach is supported by hands-on MATLAB® code and worked examples that enable readers to understand the principles underlying diagnostic and therapeutic ultrasound Covers the new important developments in the use of medical ultrasound: elastography and high-intensity therapeutic ultrasound. Many new developments are comprehensively reviewed and explained, including aberration correction, acoustic measurements, acoustic radiation force imaging, alternate imaging architectures, bioeffects: diagnostic to therapeutic, Fourier transform imaging, multimode imaging, plane wave compounding, research platforms, synthetic aperture, vector Doppler, transient shear wave elastography, ultrafast imaging and Doppler, functional ultrasound and viscoelastic models

Book Novel Applications of Capacitive Micromachined Ultrasonic Transducers

Download or read book Novel Applications of Capacitive Micromachined Ultrasonic Transducers written by and published by . This book was released on 2007 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Capacitive Micromachined Ultrasonic Transducers for Non destructive Testing Applications

Download or read book Capacitive Micromachined Ultrasonic Transducers for Non destructive Testing Applications written by Lawrence Lai Pong Wong and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasound is a popular technique for industrial non-destructive testing (NDT) applications. By sending ultrasonic waves into an object and observing the amplitude and the delay of the reflected or transmitted waves, one can characterize the material, measure the thickness of the object, and detect discontinuities (flaws) as well as the size, location, and orientation of the defects in the object. Traditionally, ultrasonic transducers for NDT are made with piezoelectric crystals. Meanwhile, another class of ultrasonic transducers known as capacitive micromachined ultrasonic transducers (CMUTs) have become popular in medical ultrasound research because of their large bandwidths and other attributes that allow them to be integrated into the tip of a catheter. However, CMUTs have not been widely adopted in ultrasonic NDT applications. In this thesis, three important CMUTs characteristics that could potentially make them attractive for NDT applications are introduced and demonstrated. First, CMUTs can be beneficial to NDT because the fabrication techniques of CMUTs can easily be used to implement high-frequency, high-density phased arrays, which are essential for high resolution scanning. Surface scanning using a 2-D row-column addressed CMUT array was demonstrated. Secondly, CMUTs can be integrated with supporting microelectronic circuits, thus one can implement a highly integrated transducer system, which can be useful in structural health monitoring NDT applications. Front-end microelectronic circuits that include a transmit pulser and a receive amplifier were designed, tested, and characterized. Thirdly, CMUTs are suitable for air-coupled applications because of their low acoustic impedance at resonance. Air-coupled CMUTs fabricated in a standard RF-MEMS process were characterized and tested. This thesis concludes with an analysis of the potential usefulness of CMUTs for ultrasonic NDT. While many ultrasonic NDT applications are better off being performed using conventional piezoelectric transducers, CMUTs can and should be used in certain NDT applications that can take advantage of the beneficial characteristics of this exciting transducer technology.

Book Row column Capacitive Micromachined Ultrasonic Transducers for Medical Imaging

Download or read book Row column Capacitive Micromachined Ultrasonic Transducers for Medical Imaging written by Albert I-Hsiang Chen and published by . This book was released on 2016 with total page 151 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasound imaging plays an important role in modern medical diagnosis. Recent progress in real-time 3-D ultrasound imaging can offer critical information such as the accurate estimation of organ, cyst, or tumour volumes. However, compared to conventional 2-D ultrasound imaging, the large amount of data and circuit complexity found in 3-D ultrasound imaging results in very expensive systems. Therefore, a simplification scheme for 3-D ultrasound imaging technology is needed for a more wide-spread use and to advance clinical development of volumetric ultrasound. Row-column addressing 2-D array is one particular simplification scheme that requires only N + N addressing lines to activate each element in an N x N array. As a result, the fabrication, circuit, and processing complexity dramatically decrease. Capacitive micromachined ultrasonic transducer (CMUT) technology was chosen to fabricate the array as it offers micro-precision fabrication and a wide bandwidth, which make it an attractive transducer technology. The objective of this thesis is to investigate and demonstrate the imaging potential of row-column CMUT arrays for RT3D imaging. First, the motivation, physics, and modelling of both CMUTs and row-column arrays are described, followed by the demonstration of a customized row-column CMUT pseudo-real-time 3-D imaging system. One particular limitation about row-column arrays discovered as part of this dissertation work is the limited field-of-view of the row-column arrays' imaging performance. A curved row-column CMUT array was proposed to improve the field-of-view, and the resulting modelling of the acoustic field and simulated reconstructed image are presented. Furthermore, a new fabrication process was proposed to construct a curved row-column CMUT array. The resulting device was tested to demonstrate its flexibility to achieve the necessary curvature. Finally, a new wafer bonding process is introduced to tackle the next generation of RC-CMUT fabrication. Many of the new fabrication techniques reported in this work are useful for CMUT fabrication engineers. The analysis on row-column array also provides additional insights for 2-D array simplification research.

Book Image guided Focused Ultrasound Therapy

Download or read book Image guided Focused Ultrasound Therapy written by Feng Wu and published by CRC Press. This book was released on 2024-07-31 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasound has been widely used in diagnostic imaging for a long time. In the past 10 years, image-guided focused ultrasound therapy has seen rapid growth, in biomedical science and engineering, and in clinical medicine. The purpose of this book is to bring internationally renowned authorities and experts in this field together to provide up-to-date and comprehensive reviews of basic physics, biomedical engineering, and clinical applications of focused ultrasound therapy in a widely accessible fashion. Focusing on applications in cancer treatment, this book covers basic principles, practical aspects, and clinical applications of focused ultrasound therapy. It reviews the medical physics and bio-effects of focused ultrasound beams on living tissues, dosimetric methods and measurements, transducer engineering, image guidance and monitoring (including magnetic resonance imaging -- MRI -- and ultrasound), treatment delivery systems, and clinical applications. The book also gives practical guidelines on patient setup, target localisation, treatment planning and image-guided procedures for the treatment in various sites, including the prostate, liver, pancreas, breast, kidney, uterus, bone, and brain. The book discusses major challenges for the use of focused ultrasound energy on living tissues and explores the cellular and physiological responses that can be employed in the fight against cancer from biological, physics and engineering perspectives. It also highlights recent advances, including the treatment of solid tumours using image-guided drug delivery, and the exploitation of microbubbles, nanoparticles, and other cutting-edge techniques. Readers who are interested in learning more about the technique and the clinical applications described in each chapter can find more information in the comprehensive bibliographies provided. This book is suitable for anyone involved in, or looking to become involved in, the research and clinical applications of focused ultrasound therapy, including medical professionals, physicists, biomedical engineers, graduate students and others working in this multidisciplinary field. It offers a balanced and critical assessment of state-of-the-art technologies, major challenges, and an outlook on the future of focused ultrasound therapy. It presents a thorough introduction for those new to the field while providing helpful, up-to-date information and guidelines for readers already using this therapy in clinical and pre-clinical settings. Key Features: Brings together a wide range of world-leading experts in this new field, presenting the latest clinical outcomes of using focused ultrasound for the treatment of benign and malignant diseases Covers the fundamental physics of focused ultrasound therapy and ultrasound-mediated drug delivery, including chapters on the mechanism of sonoporation, microbubble and ultrasound interaction, and their potential clinical applications Introduces clinical guidelines for focused ultrasound therapy, including indications and contraindications, treatment goals, the selection of patients, clinical observation during treatment procedure and follow-up, and characteristics of image changes after treatment