Download or read book High Mobility Single crystalline like Si and Ge Thin Films on Flexible Substrates by Roll to roll Vapor Deposition Processes written by Ying Gao and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The widespread use of high efficiency III–V multi-junction solar cells is limited by the cost and brittleness of Ge wafers that are used as templates for epitaxial growth. In order to provide an affordable and scalable bottom template, this work aims to achieve epitaxial growth of Ge and Si films on inexpensive and flexible substrates by roll-to-roll continuous deposition. These single-crystalline-like Si and Ge thin films on metal substrates can also be utilized in high mobility thin film transistors (TFTs) well beyond the realm of present-day TFTs based on amorphous Si and organic materials. The strategy of “seed and epitaxy” was employed for epitaxial growth of Ge and Si films. It consists of an initial growth of biaxially-textured seed layer on a flexible non-crystalline substrate by ion beam assisted deposition (IBAD) followed by a deposition of lattice and thermally-matched epitaxial layers. In epi-Ge growth, the epitaxial buffer stack of “CeO2/LaMnO3/MgO” was grown on IBAD MgO seed template by roll-to-roll magnetron sputtering. Single-crystalline-like Ge films was epitaxially grown on the CeO2-buffered templates by medium frequency magnetron sputtering or plasma enhanced chemical vapor deposition with carrier mobility values as high as 1100 cm2/V·s, which is about 1000 times higher than that of amorphous Ge. These epi-Ge templates were successfully utilized to grown n- or p-type single-crystalline GaAs thin films by metal organic chemical vapor deposition which have been used to fabricate solar cells. Moreover, the epi-Si thin films were also grown on this Ge template. The resulting n-type Si film is highly oriented along (004) direction with an electron mobility of 230 cm2/V-s. High performance TFTs fabricated on both single-crystalline-like n-Si channel on flexible metal substrate, and p-Ge on flexible glass substrate confirm the superior electronic quality of the grown films. The flexible TFT of n-Si (p-Ge) exhibits an on/off ratio of ~10E6 (10E6), a field-effect mobility of ~200 (105) cm2/V-s, and a threshold voltage of -0.7 (1.0) V. These devices with superior performance open up a new era toward the next-generation flexible electronics and optoelectronics.
Download or read book Handbook of Thin Film Deposition written by Krishna Seshan and published by William Andrew. This book was released on 2012-12-06 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. - A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications - Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries - The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics - Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM - Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned 'Moore's Law' relating to the technology development cycle in the semiconductor industry
Download or read book Inorganic Flexible Optoelectronics written by Zhenqiang Ma and published by John Wiley & Sons. This book was released on 2019-08-26 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensively covering inorganic flexible optoelectronics and their applications This highly application-oriented book provides an overview of the vibrant research field of inorganic flexible optoelectronics ? from materials to applications ? covering bulk materials as well as nanowires, thin films, nanomembranes for application in light emitting diodes, photodetectors, phototransistors, and solar cells. Edited and written by world-leading experts in the field, Inorganic Flexible Optoelectronics: Materials and Applications begins by covering flexible inorganic light emitting diodes enabled by new materials and designs, and provides examples of their use in neuroscience research. It then looks at flexible light-emitting diodes based on inorganic semiconductor nanostructures ? from thin films to nanowires. Next, the book examines flexible photodetectors with nanomembranes and nanowires; 2-D material based photodetectors on flexible substrates; and IV group materials based solar cells and their flexible photovoltaic technologies. Following that, it presents readers with a section on thin-film III-V single junction and multijunction solar cells and demonstrates their integration onto heterogeneous substrates. Finally, the book finishes with in-depth coverage of novel materials based flexible solar cells. -A must-have book that provides an unprecedented overview of the state of the art in flexible optoelectronics -Supplies in-depth information for new and already active researchers in the field of optoelectronics -Lays down the undiluted knowledge on inorganic flexible optoelectronics ? from materials to devices -Focuses on materials and devices for high-performance applications such as light-emitting diodes, solar cells, and photodetectors Inorganic Flexible Optoelectronics: Materials and Applications appeals to materials scientists, electronics engineers, electrical engineers, inorganic chemists, and solid state physicists.
Download or read book Handbook of Deposition Technologies for Films and Coatings written by Peter M. Martin and published by William Andrew. This book was released on 2009-12-01 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.
Download or read book Glancing Angle Deposition of Thin Films written by Matthew M. Hawkeye and published by John Wiley & Sons. This book was released on 2014-07-03 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a highly practical treatment of Glancing Angle Deposition (GLAD), a thin film fabrication technology optimized to produce precise nanostructures from a wide range of materials. GLAD provides an elegant method for fabricating arrays of nanoscale helices, chevrons, columns, and other porous thin film architectures using physical vapour deposition processes such as sputtering or evaporation. The book gathers existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers: Development and description of GLAD techniques for nanostructuring thin films Properties and characterization of nanohelices, nanoposts, and other porous films Design and engineering of optical GLAD films including fabrication and testing, and chiral films Post-deposition processing and integration to optimize film behaviour and structure Deposition systems and requirements for GLAD fabrication A patent survey, extensive relevant literature, and a survey of GLAD's wide range of material properties and diverse applications.
Download or read book Thin film materials technology written by Kiyotaka Wasa and published by Springer Science & Business Media. This book was released on 2004-09-24 with total page 538 pages. Available in PDF, EPUB and Kindle. Book excerpt: This title contains rich historical coverage of the basics and new experimental and technological information about ceramic thin film and large-area functional coating. Included are principles and examples of making thin-film materials and devices.
Download or read book Sputtering Materials for VLSI and Thin Film Devices written by Jaydeep Sarkar and published by William Andrew. This book was released on 2010-12-13 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . - Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements - Practical information on technology trends, role of sputtering and major OEMs - Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. - Practical case-studies on target performance and troubleshooting - Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry
Download or read book Thin Film Silicon Solar Cells written by Arvind Victor Shah and published by CRC Press. This book was released on 2010-08-19 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photovoltaic technology has now developed to the extent that it is close to fulfilling the vision of a "solar-energy world," as devices based on this technology are becoming efficient, low-cost and durable. This book provides a comprehensive treatment of thin-film silicon, a prevalent PV material, in terms of its semiconductor nature, startin
Download or read book Near Single crystalline High carrier mobility Silicon Thin Film on a Polycrystalline written by and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A template article including a base substrate including: (i) a base material selected from the group consisting of polycrystalline substrates and amorphous substrates, and (ii) at least one layer of a differing material upon the surface of the base material; and, a buffer material layer upon the base substrate, the buffer material layer characterized by: (a) low chemical reactivity with the base substrate, (b) stability at temperatures up to at least about 800.degree. C. under low vacuum conditions, and (c) a lattice crystal structure adapted for subsequent deposition of a semiconductor material; is provided, together with a semiconductor article including a base substrate including: (i) a base material selected from the group consisting of polycrystalline substrates and amorphous substrates, and (ii) at least one layer of a differing material upon the surface of the base material; and, a buffer material layer upon the base substrate, the buffer material layer characterized by: (a) low chemical reactivity with the base substrate, (b) stability at temperatures up to at least about 800.degree. C. under low vacuum conditions, and (c) a lattice crystal structure adapted for subsequent deposition of a semiconductor material, and, a top-layer of semiconductor material upon the buffer material layer.
Download or read book Thin Films by Chemical Vapour Deposition written by C. E. Moroșanu and published by . This book was released on 1990 with total page 724 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thin Films and Coatings written by B. M. Caruta and published by Nova Publishers. This book was released on 2005 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: The broad field of thin film technology is based first of all on the film growth processes in general. The concepts of crystal structure and defects in crystalline thin films such as grain boundaries, dislocations and vacancies are examined. The general nature of film growth from atoms equilibrating with the service, through the initial stages of growth to film coalescence and zone models is also within the scope of this book as are evaporation, sputter deposition and chemical vapour deposition. Thin films are widely used in microelectronics, chemistry and a wide array of related fields. This book offers new research in this exploding field.
Download or read book Vacuum Deposition onto Webs Films and Foils written by Charles Bishop and published by William Andrew. This book was released on 2011-06-21 with total page 545 pages. Available in PDF, EPUB and Kindle. Book excerpt: Roll-to-roll vacuum deposition is the technology that applies an even coating to a flexible material that can be held on a roll and provides a much faster and cheaper method of bulk coating than deposition onto single pieces or non-flexible surfaces, such as glass. This technology has been used in industrial-scale applications for some time, including a wide range of metalized packaging (e.g. snack packets). Its potential as a high-speed, scalable process has seen an increasing range of new products emerging that employ this cost-effective technology: - solar energy products are moving from rigid panels onto flexible substrates, which are cheaper and more versatile - in a similar way, electronic circuit 'boards' can be produced on a flexible polymer, creating a new range of 'flexible electronics' products - flexible displays are another area of new technology in vacuum coating, with flexible display panels and light sources emerging Charles Bishop has written this book to meet the need he identified, as a trainer and consultant to the vacuum coatings industry, for a non-mathematical guide to the technologies, equipment, processes and applications of vacuum deposition. His book is aimed at a wide audience of engineers, technicians and production management. It also provides a guide to the subject for sectors in which vacuum deposition is a novel technology, such as solar energy and flexible electronics. - Bishop's non-mathematical explanation of vacuum deposition technologies will empower a wide range of technicians, production managers and engineers in related disciplines to improve performance and maximize productivity from vacuum coating systems - Provides the knowledge and understanding needed to specify systems more effectively and enhance the dialogue between non-specialists and suppliers / engineers - Provides those in the rapidly expanding fields of solar energy, display panels and flexible electronics with the know-how to unlock the potential of vacuum coating to transform their processes and products
Download or read book Principles of Vapor Deposition of Thin Films written by Professor K.S. K.S Sree Harsha and published by Elsevier. This book was released on 2005-12-16 with total page 1173 pages. Available in PDF, EPUB and Kindle. Book excerpt: The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.* Offers detailed derivation of important formulae.* Thoroughly covers the basic principles of materials science that are important to any thin film preparation.* Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.
Download or read book Handbook of Thin Film Deposition Techniques Principles Methods Equipment and Applications Second Editon written by Krishna Seshan and published by CRC Press. This book was released on 2002-02-01 with total page 72 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec
Download or read book Thin Films written by Dongfang Yang and published by BoD – Books on Demand. This book was released on 2023-03-29 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. Thin films have been employed in many applications to provide surfaces that possess specific optical, electronic, chemical, mechanical and thermal properties. Through ten chapters consisting of original research studies and literature reviews written by experts from the international scientific community, this book covers the deposition and application of thin films.
Download or read book Handbook of Sputter Deposition Technology written by Kiyotaka Wasa and published by William Andrew. This book was released on 2012-12-31 with total page 657 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. - A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available - All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique - 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere
Download or read book Vapor Phase Deposition of Organic Semiconductors written by Cédric Rolin and published by LAP Lambert Academic Publishing. This book was released on 2010-09 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: The coming of age of organic circuits requires the development of high-performance and cost-effective processing techniques. In this work, the Organic Vapor Phase Deposition (OVPD ) is investigated for the production of thin semiconducting films used as the active layer of circuits. Two OVPD systems are described: A Static system that is inspired from a chemical vapor phase deposition tool and an In-line system that accommodates a linearly moving substrate and is roll-to-roll compatible. These two tools are tested for the growth of pentacene and PTCDI-C13, two high-mobility organic semiconductors. State of the art transistors and circuits on flexible substrates based on films of these materials are demonstrated. By means of transport and growth modeling supported by experimental results, it is shown how growth parameters can be optimized to lead to high material utilization efficiencies, to high thickness uniformities and to record film growth speeds. As a conclusion, this work shows that OVPD is a very promising candidate for the low-cost production of high-performance organic semiconducting thin films.
