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Book Characterization of Perovskite Oxide semiconductor Heterostructures

Download or read book Characterization of Perovskite Oxide semiconductor Heterostructures written by HsinWei Wu and published by . This book was released on 2018 with total page 137 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated oxide/semiconductor heterostructures have attracted intense interest for device applications which require sharp interfaces and controlled defects. The research of this dissertation has focused on the characterization of perovskite oxide/oxide and oxide/semiconductor heterostructures, and the analysis of interfaces and defect structures, using scanning transmission electrom microscopy (STEM) and related techniques. The SrTiO3/Si system was initially studied to develop a basic understanding of the integration of perovskite oxides with semiconductors, and successful integration with abrupt interfaces was demonstrated. Defect analysis showed no misfit dislocations but only anti-phase boundaries (APBs) in the SrTiO3 (STO) films. Similar defects were later observed in other perovskite oxide heterostructures. Ferroelectric BaTiO3 (BTO) thin films deposited directly onto STO substrates, or STO buffer layers with Ge substrates, were grown by molecular beam epitaxy (MBE) in order to control the polarization orientation for field-effect transistors (FETs). STEM imaging and elemental mapping by electron energy-loss spectroscopy (EELS) showed structurally and chemically abrupt interfaces, and the BTO films retained the c-axis-oriented tetragonal structure for both BTO/STO and BTO/STO/Ge heterostructures. The polarization displacement in the BTO films of TiN/BTO/STO heterostructures was investigated. The Ti4+ atomic column displacements and lattice parameters were measured directly using HAADF images. A polarization gradient, which switched from upwards to downwards, was observed in the BTO thin film, and evidence was found for positively-charged oxygen vacancies. Heterostructures grown on Ge substrates by atomic layer deposition (ALD) were characterized and compared with MBE-grown samples. A two-step process was needed to overcome interlayer reaction at the beginning of ALD growth. A-site-rich oxide films with thicknesses of at least 2-nm had to be deposited and then crystallized before initiating deposition of the following perovskite oxide layer in order to suppress the formation of amorphous oxide layers on the Ge surface. BTO/STO/Ge, BTO/Ge, SrHfTiO3/Ge and SrZrO3/Ge thin films with excellent crystallinity were grown using this process. Metal-insulator-metal (MIM) heterostructures were fabricated as ferroelectric capacitors and then electrically stressed to the point of breakdown to correlate structural changes with electrical and physical properties. BaTiO3 on Nb:STO was patterned with different top metal electrodes by focused-ion-beam milling, Au/Ni liftoff, and an isolation-defined approach.

Book Perovskite Oxide Thin Film Growth  Characterization  and Stability

Download or read book Perovskite Oxide Thin Film Growth Characterization and Stability written by Andrew Izumi and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Studies into a class of materials known as complex oxides have evoked a great deal of interest due to their unique magnetic, ferroelectric, and superconducting properties. In particular, materials with the ABO3 perovskite structure have highly tunable properties because of the high stability of the structure, which allows for large scale doping and strain. This also allows for a large selection of A and B cations and valences, which can further modify the material's electronic structure. Additionally, deposition of these materials as thin films and superlattices through techniques such as pulsed laser deposition (PLD) results in novel properties due to the reduced dimensionality of the material. The novel properties of perovskite oxide heterostructures can be traced to a several sources, including chemical intermixing, strain and defect formation, and electronic reconstruction. The correlations between microstructure and physical properties must be investigated by examining the physical and electronic structure of perovskites in order to understand this class of materials. Some perovskites can undergo phase changes due to temperature, electrical fields, and magnetic fields. In this work we investigated Nd0.5Sr0.5MnO3 (NSMO), which undergoes a first order magnetic and electronic transition at T=158K in bulk form. Above this temperature NSMO is a ferromagnetic metal, but transitions into an antiferromagnetic insulator as the temperature is decreased. This rapid transition has interesting potential in memory devices. However, when NSMO is deposited on (001)-oriented SrTiO3 (STO) or (001)-oriented (LaAlO3)0.3-(Sr2AlTaO6)0.7 (LSAT) substrates, this transition is lost. It has has been reported in the literature that depositing NSMO on (110)-oriented STO allows for the transition to reemerge due to the partial epitaxial growth, where the NSMO film is strained along the [001] surface axis and partially relaxed along the [11̄0] surface axis. This allows the NSMO film enough freedom of movement to undergo a shear strain along the [11̄0] axes, allowing the NSMO film to switch phases. It was found that the desired magnetic and electrical properties were closely tied to the structural properties, which were highly sensitive to the precise growth conditions. These perovskite oxides can be further geometrically constrained by patterning, resulting in additional novel magnetic and electrical properties. One such method of patterning involves implanting Ar into a film to locally destabilize the ordered perovskite structure, therefore suppress the magnetic and electrical properties. However, to fully integrate this technique into devices which require multi-planar processes, the ability for a patterned perovskite film to withstand high temperature anneals is crucial in creating more advanced structures. The stability of Ar-implanted La0.7Sr0.3MnO3 (LSMO) thin films was studied upon annealing at 400°C, 500°C, and 600°C. The LSMO retained its amorphous structure with little ferromagnetism after a 400°C anneal, but anneals at 500°C and 600°C resulted in partial recrystallization and a return of the ferromagnetic properties. This recrystallized film displayed semiconducting properties with a lower Curie temperature than the as deposited film. The deposition of an La0.7Sr0.3FeO3 (LSFO) film onto an Ar implanted LSMO film at 400°C caused the LSMO film to almost fully recrystallize, suggesting that the deposition process also recrystallizes the Ar-implanted film. In conclusion, two perovskites films were explored in this thesis. NSMO films proved to be very sensitive to growth conditions, and Ar-implanted LSMO films quickly recrystallized past 400°C or a subsequent film deposition. These studies provide useful information on the structural and electronic transformations these films go through during heat treatment and strain engineering.

Book Growth Mechanism and Interface Effects on Microstructure of Perovskite type Barium Titanate based Epitaxial Films

Download or read book Growth Mechanism and Interface Effects on Microstructure of Perovskite type Barium Titanate based Epitaxial Films written by Jie He and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This work was motivated and focused on the growth mechanism, microstructures and interfaces of barium titanate, BaTiO3 (BTO), based epitaxial thin films. Transimission electron microscopy (TEM), high resolution TEM (HRTEM), electron diffraction (ED) have been mainly employed in this study for microstructure investigations of BTO-based epitaxial thin films with the assistance of other materials characterization methods, such as X-ray diffraction (XRD), atomic force microscopy (AFM), Nanoindentation testing, etc. As a basic studying model, epitaxial BTO films were first deposited on the (001) MgO substrate using RF magnetron sputtering to provide fundamental knowledge of the film growth for BTO based thin films. The epitaxial BTO films show a tetragonal crystal structure (a = 4.02 Å and c = 4.11 Å) with epitaxial nanodomains induced from the rough film/substrate interface due to the modification of the substrate surface characteristics (steps, terraces, and kinks) during the deposition process. Two new phases of - calculus [gamma]y (Ba10TiO26) and Hß (BaTi8O24) were formed on the MgO substrate using RF magnetron sputtering. The atomic structures of the two new phases were determined and examined. The [gamma]y phase has a monoclinic structure, Cm, a=16.49 Å̊̊, b=8.94 Å, c=3.94 Å, y=77°. The Hß phase has a monoclinic structure, Cm, a = 17.88̊Å̊, b = 7.21Å, c = 3.94 Å̊̊̊, y =82°. Both [gamma]y and Hß phases have four different oriented domains. The orientation relationship between domains and MgO substrate is discussed. Initail study shows that these new phases possess novel and interesting properties. The doped BTO films with different dopant (Sr2 and Zr4) fabricated using pulsed laser deposition (PLD) have been studied for doping effects, interface effects and film growth mechanism. The (Ba, Sr)TiO3 (BST) epitaxial films grown on 1.2° and 5.3° miscut substrates consist of lager commensurate domains, and correspondly show higher dielectric constant and dielectric tunability, and lower average modulus and hardness than those of the films grown on the 3.5° miscut substrate. The results suggest that the differences on the interfacial structure have a tremendous effect on the properties of the films. The investigation on epitaxial Ba(Zr, Ti)O3 (BZT) and 2% Mn doped Ba(Zr, Ti)O3 (Mn:BZT) thin films grown on MgO substrate revealed the formation of twin-coupled domains on the epilayer by sharing their {111}/{110} planes as common planes. The structure evolution from epilayer to nanopillars is accomplished by alternatively introducing {111} and {110} twin boundaries, resulting in gradual shrinking or enlarging of the lateral size of the epitaxial grains/twin coupled nanopillars. The formations of twin domains, sharing planes and structure transition mechasim have been discussed in detail. Eventually, the microstructures and layer interfaces of [Mn:BZT//Mn:BST]N multilayer films consisting of 2% Mn doped (Ba, Sr)TiO3 (Mn:BST) and Mn:BZT layers on MgO (001) substrates with various deposition rates, deposition period numbers N were studied to provide an integral view of the formation of multilayer films in BTO system. All the [Mn:BZT//Mn:BST]N multilayer films present epitaxial quality and induced {111}/{110} twin-coupled domains initially formed at different film thickness/layers. The film/substrate interface has an important role for the formation of twin domains and the proportion of twin domain structures in the entire films. The layer interfaces between Mn:BST and Mn:BZT with period compression and extension strains were observed and discussed. The microstructure evolution and structure-related nano-mechanical properties of the multilayer films have been systematically investigated.

Book Growth and characterization of perovskite thin films

Download or read book Growth and characterization of perovskite thin films written by and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Characterization of Perovskite Thin Films

Download or read book Characterization of Perovskite Thin Films written by Shang Hsien Rou and published by . This book was released on 1990 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Chemical Abstracts

Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2668 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Atomic Layer Deposition for Semiconductors

Download or read book Atomic Layer Deposition for Semiconductors written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Book Ceramic Abstracts

Download or read book Ceramic Abstracts written by and published by . This book was released on 1998 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Comprehensive Semiconductor Science and Technology

Download or read book Comprehensive Semiconductor Science and Technology written by and published by Newnes. This book was released on 2011-01-28 with total page 3572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors are at the heart of modern living. Almost everything we do, be it work, travel, communication, or entertainment, all depend on some feature of semiconductor technology. Comprehensive Semiconductor Science and Technology, Six Volume Set captures the breadth of this important field, and presents it in a single source to the large audience who study, make, and exploit semiconductors. Previous attempts at this achievement have been abbreviated, and have omitted important topics. Written and Edited by a truly international team of experts, this work delivers an objective yet cohesive global review of the semiconductor world. The work is divided into three sections. The first section is concerned with the fundamental physics of semiconductors, showing how the electronic features and the lattice dynamics change drastically when systems vary from bulk to a low-dimensional structure and further to a nanometer size. Throughout this section there is an emphasis on the full understanding of the underlying physics. The second section deals largely with the transformation of the conceptual framework of solid state physics into devices and systems which require the growth of extremely high purity, nearly defect-free bulk and epitaxial materials. The last section is devoted to exploitation of the knowledge described in the previous sections to highlight the spectrum of devices we see all around us. Provides a comprehensive global picture of the semiconductor world Each of the work's three sections presents a complete description of one aspect of the whole Written and Edited by a truly international team of experts

Book Electrical   Electronics Abstracts

Download or read book Electrical Electronics Abstracts written by and published by . This book was released on 1997 with total page 2304 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Oxide Electronics

Download or read book Oxide Electronics written by Asim K. Ray and published by John Wiley & Sons. This book was released on 2021-04-12 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt: Oxide Electronics Multiple disciplines converge in this insightful exploration of complex metal oxides and their functions and properties Oxide Electronics delivers a broad and comprehensive exploration of complex metal oxides designed to meet the multidisciplinary needs of electrical and electronic engineers, physicists, and material scientists. The distinguished author eschews complex mathematics whenever possible and focuses on the physical and functional properties of metal oxides in each chapter. Each of the sixteen chapters featured within the book begins with an abstract and an introduction to the topic, clear explanations are presented with graphical illustrations and relevant equations throughout the book. Numerous supporting references are included, and each chapter is self-contained, making them perfect for use both as a reference and as study material. Readers will learn how and why the field of oxide electronics is a key area of research and exploitation in materials science, electrical engineering, and semiconductor physics. The book encompasses every application area where the functional and electronic properties of various genres of oxides are exploited. Readers will also learn from topics like: Thorough discussions of High-k gate oxide for silicon heterostructure MOSFET devices and semiconductor-dielectric interfaces An exploration of printable high-mobility transparent amorphous oxide semiconductors Treatments of graphene oxide electronics, magnetic oxides, ferroelectric oxides, and materials for spin electronics Examinations of the calcium aluminate binary compound, perovoksites for photovoltaics, and oxide 2Degs Analyses of various applications for oxide electronics, including data storage, microprocessors, biomedical devices, LCDs, photovoltaic cells, TFTs, and sensors Suitable for researchers in semiconductor technology or working in materials science, electrical engineering, and physics, Oxide Electronics will also earn a place in the libraries of private industry researchers like device engineers working on electronic applications of oxide electronics. Engineers working on photovoltaics, sensors, or consumer electronics will also benefit from this book.

Book Pulsed Laser Deposition of Thin Films

Download or read book Pulsed Laser Deposition of Thin Films written by Douglas B. Chrisey and published by Wiley-Interscience. This book was released on 1994-06-21 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of what is required to set up and begin research in this newly developing technology and understand the basics of the process. Internationally recognized experts in their fields cover such fundamentals as history, theory, film characteristics, surface modification, laser technology, materials and applications including excellent reviews regarding the entire areas of semiconductor buffer layers, thin-film ferroelectrics and ferrites along with the work involving films deposited by PLD.

Book Ferroelectric Materials for Energy Applications

Download or read book Ferroelectric Materials for Energy Applications written by Haitao Huang and published by John Wiley & Sons. This book was released on 2019-01-04 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides a comprehensive overview of the emerging applications of ferroelectric materials in energy harvesting and storage Conventional ferroelectric materials are normally used in sensors and actuators, memory devices, and field effect transistors, etc. Recent progress in this area showed that ferroelectric materials can harvest energy from multiple sources including mechanical energy, thermal fluctuations, and light. This book gives a complete summary of the novel energy-related applications of ferroelectric materials?and reviews both the recent advances as well as the future perspectives in this field. Beginning with the fundamentals of ferroelectric materials, Ferroelectric Materials for Energy Applications offers in-depth chapter coverage of: piezoelectric energy generation; ferroelectric photovoltaics; organic-inorganic hybrid perovskites for solar energy conversion; ferroelectric ceramics and thin films in electric energy storage; ferroelectric polymer composites in electric energy storage; pyroelectric energy harvesting; ferroelectrics in electrocaloric cooling; ferroelectric in photocatalysis; and first-principles calculations on ferroelectrics for energy applications. -Covers a highly application-oriented subject with great potential for energy conversion and storage applications. -Focused toward a large, interdisciplinary group consisting of material scientists, solid state physicists, engineering scientists, and industrial researchers -Edited by the "father of integrated ferroelectrics" Ferroelectric Materials for Energy Applications is an excellent book for researchers working on ferroelectric materials and energy materials, as well as engineers looking to broaden their view of the field.

Book Japanese Journal of Applied Physics

Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2000 with total page 1312 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Advanced Nano Deposition Methods

Download or read book Advanced Nano Deposition Methods written by Yuan Lin and published by John Wiley & Sons. This book was released on 2016-08-29 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in detail. Following an introduction to this rapidly developing field, the authors present a variety of organic and inorganic materials along with new deposition techniques, and conclude with an overview of applications and considerations for their technology deployment.

Book Handbook of Laser Micro  and Nano Engineering

Download or read book Handbook of Laser Micro and Nano Engineering written by KOJI SUGIOKA. and published by . This book was released on 2019 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook provides a comprehensive review of the entire field of laser micro and nano processing, including not only a detailed introduction to individual laser processing techniques but also the fundamentals of laser-matter interaction and lasers, optics, equipment, diagnostics, as well as monitoring and measurement techniques for laser processing. Consisting of 11 sections, each composed of 4 to 6 chapters written by leading experts in the relevant field. Each main part of the handbook is supervised by its own part editor(s) so that high-quality content as well as completeness are assured. The book provides essential scientific and technical information to researchers and engineers already working in the field as well as students and young scientists planning to work in the area in the future. Lasers found application in materials processing practically since their invention in 1960, and are currently used widely in manufacturing. The main driving force behind this fact is that the lasers can provide unique solutions in material processing with high quality, high efficiency, high flexibility, high resolution, versatility and low environmental load. Macro-processing based on thermal process using infrared lasers such as CO2 lasers has been the mainstream in the early stages, while research and development of micro- and nano-processing are becoming increasingly more active as short wavelength and/or short pulse width lasers have been developed. In particular, recent advances in ultrafast lasers have opened up a new avenue to laser material processing due to the capabilities of ultrahigh precision micro- and nanofabrication of diverse materials. This handbook is the first book covering the basics, the state-of-the-art and important applications of the dynamic and rapidly expanding discipline of laser micro- and nanoengineering. This comprehensive source makes readers familiar with a broad spectrum of approaches to solve all relevant problems in science and technology. This handbook is the ultimate desk reference for all people working in the field.