Download or read book Fabrication Testing and Characterization of MEMS Gyroscope written by Ridha Almikhlafi and published by . This book was released on 2017 with total page 50 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis presents the design, fabrication and characterization of two Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes fabricated using the Silicon-On-Insulator-Multi-User-MEMS Process (SOIMUMPs) and Polysilicon Multi-User-MEMS-Process (Poly-MUMPs). Firstly, relevant literature and background on static and dynamic analysis of MEMS gyroscopes are described. Secondly, the gyroscope analytical model is presented and numerically solved using Mathematica software. The lumped mass model was used to analytically design the gyroscope and predict their performance. Finite element analysis was carried out on the gyroscopes to verify the proposed designs. Thirdly, gyroscope fabrication using MEMSCAP's SOIMUMPs and PolyMUMPs processes is described. For the former, post-processing was carried out at the Quantum Nanofab Center (QNC) on a die-level in order to create the vibratory structural elements (cantilever beam). Following this, the PolyMUMPs gyroscopes are characterized optically by measuring their resonance frequencies and quality factor using a Laser Doppler Vibrometer (LDV). The drive resonance frequency was measured at 40 kHz and the quality factor as Q = 1. For the sense mode, the resonance frequency was measured at 55 kHz and the unity quality factor as Q = 1. The characterization results show large drive direction motions of 100 um/s in response to a voltage pulse of 10 V. The drive pull-in voltage was measured at 19 V. Finally, the ratio of the measured drive to sense mode velocities in response to a voltage pulse of 10 V was calculated at 1.375.

Download or read book MEMS Vibratory Gyroscopes written by Cenk Acar and published by Springer Science & Business Media. This book was released on 2008-12-16 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Download or read book Design Fabrication and Characterization of MEMS Gyroscopes Based on Frequency Modulation written by Dawit Effa and published by . This book was released on 2018 with total page 153 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Fabrication Characterization and Analysis of a DRIE CMOS MEMS Gyroscope written by and published by . This book was released on 2003 with total page 11 pages. Available in PDF, EPUB and Kindle. Book excerpt: A gyroscope with a measured noise floor of 0.02 degrees /s/Hz1/2 at 5 Hz is fabricated by post-CMOS micromachining that uses interconnect metal layers to mask the structural etch steps. The 1x1 mm lateral-axis angular rate sensor employs in-plane vibration and out-of-plane Coriolis acceleration detection with on-chip CMOS circuitry. The resultant device incorporates a combination of 1.8- micrometers-thick thin-film structures for springs with out-of-plane compliance and 60- micrometers-thick bulk silicon structures defined by deep reactive-ion etching for the proof mass and springs with out-of-plane stiffness. The microstructure is flat and avoids excessive curling, which exists in prior thin-film CMOS-microelectromechanical systems gyroscopes. Complete etch removal of selective silicon regions provides electrical isolation of bulk silicon to obtain individually controllable comb fingers. Direct motion coupling is observed and analyzed.

Download or read book MEMS Vibratory Gyroscopes written by Cenk Acar and published by Springer. This book was released on 2008-12-16 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Download or read book To Study the Modeling Analysis and Design of MEMS Gyroscope written by Amandeep Sharma and published by LAP Lambert Academic Publishing. This book was released on 2013 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a study of various MEMS Gyroscopes available in the world, their working principles/phenomenon and respective applications.It covers the various processes involved in the fabrication of MEMS gyroscopes.The book will help as a tutorial to model, simulate and thus analyse a MEMS Gyroscope using Coventorware 2010 MEMS+2(MEMS design tool). It will also elaborate the actual working principle of MEMS Gyroscopes used in the sensors, gadgets and instruments with intrinsic propertie

Download or read book Analysis and Modeling of Capacitive MEMS Gyroscopes with Feedback Control written by Wei Cui and published by . This book was released on 2010 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

Download or read book Design and Dynamic Analysis of MEMS Gyroscopes written by Surender Reddy Poreddy and published by . This book was released on 2004 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this thesis, a novel design for a vibratory wheel micro gyroscope is presented. A DRIE thick structure has been realized. Thicker structure enables the proof masses to have more mass and hence more inertia and better performance. For the highest sensitivity of the gyroscope angular deflection is very important. The angular deflection achieved initially was very low. Using design optimization techniques a new gyro is developed with improved design and we could improve the angular deflection by an order of magnitude. Fabrication of MEMS devices is the most challenging part; hence an idea is put forth for the fabrication of the current model. While fabrication itself is challenging, fabrication defects are inevitably present. The effects of fabrication and the compensation methods are studied using a tuning fork gyro. Dynamic analysis has been carried out and we studied the effect of imperfect flexures on the gyroscopes performance. It has been found that, even if there are imperfections in the flexures the gyro can closely match the ideal gyroscope with some trade-offs in the design part of it.

Download or read book Reliability Testing and Characterization of MEMS MOEMS written by and published by . This book was released on 2001 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advanced Control Design of MEMS Vibratory Gyroscopes written by Juntao Fei and published by . This book was released on 2011-10 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilisation. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and advanced control design of MEMS gyroscope for the problem of angular velocity measurement and minimisation of the cross coupling between two axes.

Download or read book MEMS Design Fabrication Characterization and Packaging written by Uwe F. W. Behringer and published by SPIE-International Society for Optical Engineering. This book was released on 2001 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Electrical Stimulus based Characterization for Calibration and Testing of MEMS Accelerometer and Gyroscope written by Lingfei Deng and published by . This book was released on 2012 with total page 60 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-Electro Mechanical System (MEMS) is the micro-scale technology applying on various fields. Traditional testing strategy of MEMS requires physical stimulus, which leads to high cost specified equipment. Also there are a large number of wafer-level measurements for MEMS. A method of estimation calibration coefficient only by electrical stimulus based wafer level measurements is included in the thesis. Moreover, a statistical technique is introduced that can reduce the number of wafer level measurements, meanwhile obtaining an accurate estimate of unmeasured parameters. To improve estimation accuracy, outlier analysis is the effective technique and merged in the test flow. Besides, an algorithm for optimizing test set is included, also providing numerical estimated prediction error.

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Download or read book Cylindrical Vibratory Gyroscope written by Xuezhong Wu and published by Springer Nature. This book was released on 2021-06-19 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces readers to the shell structure, operating principle, manufacturing process, and control theory for cylindrical vibratory gyroscopes. The cylindrical vibratory gyroscope is an important type of Coriolis vibratory gyroscope that holds considerable potential for development and application. The main aspects addressed include: operating principle and structure, theoretical analysis and modeling, dynamic analysis and modeling, manufacturing process, parameter testing methods, closed-loop control, and the error compensation mechanism in cylindrical vibratory gyroscopes.

Download or read book Design Fabrication and Characterization of Microring Resonators Used in Micro Gyroscopes written by Binglin Miao and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical gyroscopes have been of great interest in navigation fields due to their wide dynamic range, high accuracy, and immunization of the mechanical abrasion, friction and stress. Optical gyroscopes include ring laser gyroscopes, interferometric fiber-optic gyroscopes, and micro sensor inertial measurement units. In which, micro sensor inertial measurement units are attracting more and more attention due to their low cost, small size, and great potential in military and commercial applications where shock, resistance, and compact measurement condition are required. To this end, my work focuses on studying one of the important micro sensor inertial measurement units, microring optical gyro. In this thesis, I first describe the working principle of the microiring optical gyros. Then, I analyze the properties of microring resonators, which are the key elements of microring optical gyros, using the finite-difference time-domain method and the coupled mode theory. After that, I present the fabrication of microring resonators. Finally, I characterize the fabricated structures and compare them with the theoretical results.