Download or read book Electron Beam Technology in Microelectronic Fabrication written by George Brewer and published by Elsevier. This book was released on 2012-12-02 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.
Download or read book Electron Beam Testing Technology written by John T. L. Thong and published by . This book was released on 2014-01-15 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Technology written by Siegfried Schiller and published by John Wiley & Sons. This book was released on 1982 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Pasteurization and Complementary Food Processing Technologies written by Suresh Pillai and published by Elsevier. This book was released on 2014-11-28 with total page 355 pages. Available in PDF, EPUB and Kindle. Book excerpt: Food safety is a constant challenge for the food industry, and food irradiation technology has developed significantly since its introduction, moving from isotope irradiation to the use of electron beam technology. Electron Beam Pasteurization and Complementary Food Processing Technologies explores the application of electron beam pasteurization in conjunction with other food processing technologies to improve the safety and quality of food. Part one provides an overview of the issues surrounding electron beam pasteurization in food processing. Part two looks at different thermal and non-thermal food processing technologies that complement irradiation. Finally, a case study section on the commercial applications of e-beam processing provides examples from industry.
Download or read book Applications of Radiation Chemistry in the Fields of Industry Biotechnology and Environment written by Margherita Venturi and published by Springer. This book was released on 2017-03-06 with total page 309 pages. Available in PDF, EPUB and Kindle. Book excerpt: The series Topics in Current Chemistry Collections presents critical reviews from the journal Topics in Current Chemistry organized in topical volumes. The scope of coverage is all areas of chemical science including the interfaces with related disciplines such as biology, medicine and materials science. The goal of each thematic volume is to give the non-specialist reader, whether in academia or industry, a comprehensive insight into an area where new research is emerging which is of interest to a larger scientific audience. Each review within the volume critically surveys one aspect of that topic and places it within the context of the volume as a whole. The most significant developments of the last 5 to 10 years are presented using selected examples to illustrate the principles discussed. The coverage is not intended to be an exhaustive summary of the field or include large quantities of data, but should rather be conceptual, concentrating on the methodological thinking that will allow the non-specialist reader to understand the information presented. Contributions also offer an outlook on potential future developments in the field.
Download or read book Introduction to Electron Beam Technology written by Robert A. Bakish and published by . This book was released on 1962 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The History of Electron beam Technology written by Rointan F. Bunshah and published by . This book was released on 1961 with total page 40 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Testing Technology written by John T.L. Thong and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 467 pages. Available in PDF, EPUB and Kindle. Book excerpt: Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.
Download or read book Plasma Electron and Laser Beam Technology written by Yoshiaki Arata and published by ASM International(OH). This book was released on 1986 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Proceedings of the Fourth Symposium on Electron Beam Technology March 29 and 30 1962 Boston Massachusetts written by Symposium on Electron Beam Technology and published by . This book was released on 1962 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book High Voltage Environmental Applications Inc Electron Beam Technology written by and published by . This book was released on 1997 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Proceedings of the Symposium on Electron and Ion Beam Science and Technology International Conference written by and published by . This book was released on 1972 with total page 1048 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Welding written by H Schultz and published by Elsevier. This book was released on 1994-01-01 with total page 245 pages. Available in PDF, EPUB and Kindle. Book excerpt: Translated from the German, this is a practical book for engineers which explains the trials, development and manufacturing processes involved in electron beam welding.
Download or read book Industrial Accelerators and Their Applications written by Robert Wray Hamm and published by World Scientific. This book was released on 2012 with total page 436 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique new book is a comprehensive review of the many current industrial applications of particle accelerators, written by experts in each of these fields. Readers will gain a broad understanding of the principles of these applications, the extent to which they are employed, and the accelerator technology utilized. The book also serves as a thorough introduction to these fields for non-experts and laymen. Due to the increased interest in industrial applications, there is a growing interest among accelerator physicists and many other scientists worldwide in understanding how accelerators are used in various applications. The government agencies that fund scientific research with accelerators are also seeking more information on the many commercial applications that have been or can be developed with the technology developments they are funding. Many industries are also doing more research on how they can improve their products or processes using particle beams
Download or read book Beam Technologies for Integrated Processing written by National Research Council and published by National Academies Press. This book was released on 1992-02-01 with total page 102 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components. This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.
Download or read book Radiation Sterilization for Health Care Products written by Barry P. Fairand and published by CRC Press. This book was released on 2001-09-26 with total page 162 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on how the radiation process works and how it is applied in sterilizing medical devices and healthcare products, this book provides the latest developments in radiation technology in the form of e-beams, gamma rays, and x-rays. It covers the design and operation of irradiators as well as factors that affect cost and efficiency. It offers readers practical insights on this critical step in healthcare product manufacturing, its current uses, and its related cost concerns. Bringing all the information into one source, Radiation Sterilization for Health Care Products is a uniquely comprehensive resource.
Download or read book ASME 64 PROD 21 written by Wolfgang Dietrich and published by . This book was released on 1964 with total page 8 pages. Available in PDF, EPUB and Kindle. Book excerpt:
