Download or read book Electron Beam Induced Chemistry written by Anthony Dominic Garetto and published by . This book was released on 2007 with total page 121 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: chemical vapor deposition, nanofabrication, electron beam induced deposition, Electron Beam Induced Chemistry.
Download or read book Focused Electron Beam Induced Chemistry and Its Application in Microelectronics written by University of Cambridge and published by . This book was released on 1994 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Induced Chemistry written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The purpose of this research has been to investigate the mechanisms and develop techniques for electron beam induced chemistry. Applications for electron beam chemistry include repair and fabrication of lithographic masks, integrated circuit repair and rewiring, nanofabrication of functional nanoscale tools and scanned probe microscopy tips and damage free transmission electron microscope sample preparation. The use of hydrocarbon contamination as a precursor has been investigated and complex three dimensional nanostructures have been successfully fabricated. Accelerating voltage and scan speed can be used to control the morphology of the deposits. The development and implementation of an internal precursor reservoir and introduction device that is transferable to various scanning electron microscope and focused ion beam instruments has been performed. The effects of beam and scan parameters on the deposition efficiency of carbon structures utilizing a phenanthrene precursor has been investigated. Deposition efficiency is maximized for low beam current, large scan areas exposed for short times using the experimental conditions in this work. However, the use of a focused ion beam provides a significantly higher deposition efficiency (over 45 times) than that of an electron beam.
Download or read book Liquid Cell Electron Microscopy written by Frances M. Ross and published by Cambridge University Press. This book was released on 2017 with total page 529 pages. Available in PDF, EPUB and Kindle. Book excerpt: 2.6.2 Electrodes for Electrochemistry
Download or read book Low Energy Electrons written by Oddur Ingólfsson and published by CRC Press. This book was released on 2019-04-23 with total page 254 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-energy electrons are ubiquitous in nature and play an important role in natural phenomena as well as many potential and current industrial processes. Authored by 16 active researchers, this book describes the fundamental characteristics of low-energy electron–molecule interactions and their role in different fields of science and technology, including plasma processing, nanotechnology, and health care, as well as astro- and atmospheric physics and chemistry. The book is packed with illustrative examples, from both fundamental and application sides, features about 130 figures, and lists over 800 references. It may serve as an advanced graduate-level study course material where selected chapters can be used either individually or in combination as a basis to highlight and study specific aspects of low-energy electron–molecule interactions. It is also directed at researchers in the fields of plasma physics, nanotechnology, and radiation damage to biologically relevant material (such as in cancer therapy), especially those with an interest in high-energy-radiation-induced processes, from both an experimental and a theoretical point of view.
Download or read book Low Energy Electron Beam Induced Selective Area Chemical Modification written by Terrence J. Stark and published by . This book was released on 1993 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by Oxford University Press. This book was released on 2012-05-01 with total page 840 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabrication and nanocharacterization. Limitations of the FIB/FEB techniques, especially important when nanoscale resolution is considered, as well as possible ways to overcome the experimental difficulties in creating new nanodevices and improving resolution of processing, are outlined. Chapters include tutorials describing fundamental aspects of the interaction of beams (FIB/FEB) with surfaces, nanostructures and adsorbed molecules; electron and ion beam chemistries; basic theory, design and configuration of equipment; simulations of processes; basic solutions for nanoprototyping. Emerging technologies as processing by cluster beams are also discussed. In addition, the book considers numerous applications of these techniques (milling, etching, deposition) for nanolithography, nanofabrication and characterization, involving different nanostructured materials and devices. Its main focus is on practical details of using focused ion and electron beams with gas assistance (deposition and etching) and without gas assistance (milling/cutting) for fabrication of devices from the fields of nanoelectronics, nanophotonics, nanomagnetics, functionalized scanning probe tips, nanosensors and other types of NEMS (nanoelectromechanical systems). Special attention is given to strategies designed to overcome limitations of the techniques (e.g., due to damaging produced by energetic ions interacting with matter), particularly those involving multi-step processes and multi-layer materials. Through its thorough demonstration of fundamental concepts and its presentation of a wide range of technologies developed for specific applications, this volume is ideal for researches from many different disciplines, as well as engineers and professors in nanotechnology and nanoscience.
Download or read book Low Energy Electrons written by Oddur Ingólfsson and published by CRC Press. This book was released on 2019-04-23 with total page 434 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-energy electrons are ubiquitous in nature and play an important role in natural phenomena as well as many potential and current industrial processes. Authored by 16 active researchers, this book describes the fundamental characteristics of low-energy electron–molecule interactions and their role in different fields of science and technology, including plasma processing, nanotechnology, and health care, as well as astro- and atmospheric physics and chemistry. The book is packed with illustrative examples, from both fundamental and application sides, features about 130 figures, and lists over 800 references. It may serve as an advanced graduate-level study course material where selected chapters can be used either individually or in combination as a basis to highlight and study specific aspects of low-energy electron–molecule interactions. It is also directed at researchers in the fields of plasma physics, nanotechnology, and radiation damage to biologically relevant material (such as in cancer therapy), especially those with an interest in high-energy-radiation-induced processes, from both an experimental and a theoretical point of view.
Download or read book C H N and O in Si and Characterization and Simulation of Materials and Processes written by A. Borghesi and published by Newnes. This book was released on 2012-12-02 with total page 580 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing over 200 papers, this volume contains the proceedings of two symposia in the E-MRS series. Part I presents a state of the art review of the topic - Carbon, Hydrogen, Nitrogen and Oxygen in Silicon and in Other Elemental Semiconductors. There was strong representation from the industrial laboratories, illustrating that the topic is highly relevant for the semiconductor industry. The second part of the volume deals with a topic which is undergoing a process of convergence with two concerns that are more particularly application oriented. Firstly, the advanced instrumentation which, through the use of atomic force and tunnel microscopies, high resolution electron microscopy and other high precision analysis instruments, now allows for direct access to atomic mechanisms. Secondly, the technological development which in all areas of applications, particularly in the field of microelectronics and microsystems, requires as a result of the miniaturisation race, a precise mastery of the microscopic mechanisms.
Download or read book Electron Beam Interactions with Solids written by Maurizio Dapor and published by Springer Science & Business Media. This book was released on 2003-04-23 with total page 118 pages. Available in PDF, EPUB and Kindle. Book excerpt: The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.
Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. - Assembles up-to-date information from the world's premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation - Includes information on processing and metrology techniques - Brings together multiple approaches to litho pattern recording from academia and industry in one place
Download or read book Laser Induced Chemical Processes written by Jeffrey I. Steinfeld and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 283 pages. Available in PDF, EPUB and Kindle. Book excerpt: The possibility of initiating chemical reactions by high-intensity laser exci tation has captured the imagination of chemists and physicists as well as of industrial scientists and the scientifically informed public in general ever since the laser first became available. Initially, great hopes were held that laser-induced chemistry would revolutionize synthetic chemistry, making possible "bond-specific" or "mode-specific" reactions that were impos sible to achieve under thermal equilibrium conditions. Indeed, some of the early work in this area, typically employing high-power continuous-wave sources, was interpreted in just this way. With further investigation, however, a more conservative picture has emerged, with the laser taking its place as one of a number of available methods for initiation of high-energy chemical transformations. Unlike a number of these methods, such as flash photolysis, shock tubes, and electron-beam radiolysis, the laser is capable of a high degree of spatial and molecular localization of deposited energy, which in turn is reflected in such applications as isotope enrichment or localized surface treatments. The use of lasers to initiate chemical processes has led to the discovery of several distinctly new molecular phenomena, foremost among which is that of multiple-photon excitation and dissociation of polyatomic molecules. This research area has received the greatest attention thus far and forms the focus of the present volume.
Download or read book The Chemistry of Metal CVD written by Toivo T. Kodas and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.
Download or read book Environmental TEM Study of Electron Beam Induced Electro chemistry of Pr0 64Ca0 36MnO3 Catalysts for Oxygen Evolution written by and published by . This book was released on 2015 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt: Environmental Transmission Electron Microscopy (ETEM) studies offer great potential for gathering atomic scale information on the electronic state of electrodes in contact with reactants but also pose big challenges due to the impact of the high energy electron beam. In this article, we present an ETEM study of a Pr0̣64Ca0̣36MnO3 (PCMO) thin film electro-catalyst for water splitting and oxygen evolution in contact with water vapor. We show by means of off-axis electron holography and electrostatic modeling that the electron beam gives rise to a positive electric sample potential due to secondary electron emission. The value of the electric potential depends on the primary electron flux, the sample -conductivity and grounding, and gas properties. We present evidence that two observed electro-chemical reactions are driven by a beam induced electrostatic potential of the order of a volt. The first reaction is an anodic electrochemical oxidation reaction of oxygen depleted amorphous PCMO which results in recrystallization of the perovskite structure. The second reaction is oxygen evolution which can be detected by the oxidation of a silane additive and formation of SiO2-x at catalytically active surfaces. Recently published in-situ XANES observation of subsurface oxygen vacancy formation during oxygen evolution at a positive potential [32] is confirmed in this work. The quantification of beam induced potentials is an important step for future controlled electro-chemical experiments in an ETEM.
Download or read book Electron Beam Modification of Solids written by Sergey V. Mjakin and published by . This book was released on 2009 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The effect of electron beam treatment upon various materials (oxides, sulfides, ceramics, polymers) is studied to clarify the general features of chemical reactions involving surface functional groups in correlation with the processing parameters and optimise the potential applications of electron beam technologies. Particularly, pre-treatment with accelerated electrons under the optimal conditions provides: control of the surface functionality (ratios between various types of Lewis and Brensted sites); improvement of the properties of cements using electron beam modification of fillers and aqueous phase; enhancement of ceramic materials strength by their electron beam modification of fillers and aqueous phase; increase of sorbents activity by electron beam activation to form specific adsorption sites; improvement of ZnS based electroluminescent phosphors due to the modification of their components and raw materials; control of the surface properties of polymers such as poly(ethylene terephthalate) affording their compatibility with other materials. The mechanisms responsible for electron beam induced surface chemical transformations in solids depending on electron beam processing parameters and common features of these reactions for different compounds are revealed on the basis of a thorough surface functionality analysis. The considered data are confirmed by theoretical simulations and supported by the overview of the modern equipment for electron beam processing.
Download or read book The Analytical Expression of the Results of the Theory of Space Groups written by Ralph W G 1897- Wyckoff and published by Franklin Classics. This book was released on 2018-10-13 with total page 196 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work has been selected by scholars as being culturally important and is part of the knowledge base of civilization as we know it. This work is in the public domain in the United States of America, and possibly other nations. Within the United States, you may freely copy and distribute this work, as no entity (individual or corporate) has a copyright on the body of the work. Scholars believe, and we concur, that this work is important enough to be preserved, reproduced, and made generally available to the public. To ensure a quality reading experience, this work has been proofread and republished using a format that seamlessly blends the original graphical elements with text in an easy-to-read typeface. We appreciate your support of the preservation process, and thank you for being an important part of keeping this knowledge alive and relevant.
Download or read book Study of Resist Chemistry with Electron Beam Exposure written by Michelle Brown and published by . This book was released on 1996 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt:
