EBookClubs

Read Books & Download eBooks Full Online

EBookClubs

Read Books & Download eBooks Full Online

Book UV assisted Thermal Annealing of PECVD Low k Silicon Carbonitride Films

Download or read book UV assisted Thermal Annealing of PECVD Low k Silicon Carbonitride Films written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Preparation and Post Annealing Effects on the Optical Properties of Indium Tin Oxide Thin Films

Download or read book Preparation and Post Annealing Effects on the Optical Properties of Indium Tin Oxide Thin Films written by Rongxin Wang and published by Open Dissertation Press. This book was released on 2017-01-26 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation, "Preparation and Post-annealing Effects on the Optical Properties of Indium Tin Oxide Thin Films" by Rongxin, Wang, 王榮新, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. Abstract: Abstract of thesis entitled PREPARATION AND POST-ANNEALING EFFECTS ON THE OPTICAL PROPERTIES OF INDIUM TIN OXIDE THIN FILMS Submitted by WANG Rong Xin for the degree of Doctor of Philosophy at The University of Hong Kong in April 2005 Many opto-electronic devices, such as III-V compound devices, liquid crystal displays, solar cells, organic and inorganic light emitting devices, and ultraviolet photodetectors, demand transparent electrode materials simultaneously having high electrical conductance. To meet the requirements for particular applications, a great deal of basic research and studies have been carried out on the electrical and optical properties of these materials. As a most promising candidate for such materials, indium tin oxide (ITO) has attracted interest in recent years. Furthermore, ITO has many unique properties such as excellent adhesion on the substrate, thermal stability and ease of patterning. The deposition of high-quality ITO thin films is a key step for successful application of ITO thin films as transparent electrode materials. To obtain optimal electrical and optical properties of ITO films, the growth parameters and conditions must be determined. Moreover, the optical and electrical properties of ITO contact layers, which can either be on the top side or the bottom side of a device, are influenced by various post-deposition treatments. For the present work, ITO thin films were deposited on glass and quartz substrates using e-beam evaporation with different deposition rates. The influence of substrate material, deposition rate, deposition gas environment and post-deposition annealing on the optical properties of the films was investigated in detail. Atomic force microscopy, X-ray diffraction and X-ray photoemission spectroscopy was employed to obtain information on the chemical state and crystallization of the films. Analysis of these data suggests that the substrate material, deposition rate, deposition gas environment and post-deposition annealing conditions strongly affect the chemical composition and the microstructure of the ITO films and these in turn influence the optical properties of the film. Oxygen incorporation transfers the In O phase to the In O phase and removes metallic In to form both indium oxide 2 3-x 2 3 phases. Both of these reactions are beneficial for the optical transmittance of ITO thin films. Moreover, it was found that the incorporation and decomposition reactions of oxygen can be controlled so as to change the optical properties of the ITO thin films reversibly. DOI: 10.5353/th_b3154617 Subjects: Thin films - Optical properties Indium compounds Annealing of metals

Book Electrical and Optical Properties of Diamond Like Amorphous Carbon Films

Download or read book Electrical and Optical Properties of Diamond Like Amorphous Carbon Films written by F. W. Smith and published by . This book was released on 1982 with total page 13 pages. Available in PDF, EPUB and Kindle. Book excerpt: The electrical and optical properties of diamond-like amorphous carbon films, prepared via the dc glow discharge decomposition of acetylene, show a remarkable dependence on preparation conditions. In particular, as a function of the substrate deposition temperature Td, the room temperature electrical conductivity of the films increases from 10 to the minus 16th power to 10 to the minus 6th power/ohm/cm and the optical energy gap decreases from 2.1 to 0.9eV as Td is increased from 25 to 375 C. The films would have essentially graphitic electrical and optical properties when deposited at Td> or = 400C. For possible semiconductor applications, we have shown that these diamond-like films can be doped n- or p-type via incorporation of P or B atoms during deposition. This doping effect has been confirmed via thermopower measurements. At present we are studying the thermal stability of these films. Results obtained from a study of the effects of annealing on the optical properties of these films will be presented.

Book Dependence of Optical Properties and Hardness on Carbon Content in Silicon Carbonitride Films Deposited by Plasma Ion Immersion Processing Technique

Download or read book Dependence of Optical Properties and Hardness on Carbon Content in Silicon Carbonitride Films Deposited by Plasma Ion Immersion Processing Technique written by and published by . This book was released on 2002 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials with Si-C-N composition are of great interest due to their remarkable properties such as high hardness and oxidation resistance. In this study amorphous silicon nitride and silicon carbonitride films were deposited on glass, fised silica, and carbon substrates by the plasma immersion ion processing technique. Gas pressure during the deposition was kept around 0.13 Pa (1 mTorr) and S a, N2, Ar, and C2H2 gas mixtures were used. Film hardness, composition, and UV-visible optical absorption were characterized using nanoindentati on, ion beam analysis techniques, and UV-visible spectroscopy, respectively. The films exhibit high transparency in the visible and near UV regions. Addition of the carbon to the films causes decrease in the density of the films, as well as decrease in hardness and transparency. These results suggest that in the low energy regime of PTIP the deposition of hard carbon composites with nitrogen and silicon does not take place.

Book International Aerospace Abstracts

Download or read book International Aerospace Abstracts written by and published by . This book was released on 1999 with total page 934 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Structural and Optical Properties of Hydrogenated Amorphous Carbon a C H Thin Films Deposited Using a Direct Current plasma Enhanced Chemical Vapour Deposition DC PECVD Technique

Download or read book The Structural and Optical Properties of Hydrogenated Amorphous Carbon a C H Thin Films Deposited Using a Direct Current plasma Enhanced Chemical Vapour Deposition DC PECVD Technique written by Suriani Abu Bakar and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Effect of Substrate Temperature on the Structural and Optical Properties of Diamond like Carbon Thin Film

Download or read book The Effect of Substrate Temperature on the Structural and Optical Properties of Diamond like Carbon Thin Film written by Suriany Sarmid and published by . This book was released on 2007 with total page 137 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Microstructural and Optical Properties of UV DUV Fluoride Thin Films Fabricated by Thermal Evaporation with Ion Assisted Deposition Using Sf6 as Working Gas

Download or read book Microstructural and Optical Properties of UV DUV Fluoride Thin Films Fabricated by Thermal Evaporation with Ion Assisted Deposition Using Sf6 as Working Gas written by Chen Huang-Lu and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: