Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.

Download or read book Advanced Control of Chemical Processes 1994 written by D. Bonvin and published by Elsevier. This book was released on 2014-05-23 with total page 561 pages. Available in PDF, EPUB and Kindle. Book excerpt: This publication brings together the latest research findings in the key area of chemical process control; including dynamic modelling and simulation - modelling and model validation for application in linear and nonlinear model-based control: nonlinear model-based predictive control and optimization - to facilitate constrained real-time optimization of chemical processes; statistical control techniques - major developments in the statistical interpretation of measured data to guide future research; knowledge-based v model-based control - the integration of theoretical aspects of control and optimization theory with more recent developments in artificial intelligence and computer science.

Download or read book Proceedings of the American Control Conference written by and published by . This book was released on 1992 with total page 1118 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1998 with total page 914 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Symposium Om Process Control Diagnostics and Modeling in Semiconductor Manufacturing written by M. Meyyappan and published by The Electrochemical Society. This book was released on 1995 with total page 644 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Intelligent Modeling Diagnosis And Control Of Manufacturing Processes written by B-t Chu and published by World Scientific. This book was released on 1992-08-31 with total page 273 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume demonstrates that the key to the modeling, diagnosis and control of the next generation manufacturing processes is to integrate knowledge-based systems with traditional techniques. An up-to-date study is given here of this relatively recent development.The book is for those working primarily with traditional techniques and those working in the knowledge-based systems field. Both sets of readers will find it to be a source of many specific ideas about the integration of knowledge-based systems with traditional techniques, and carrying a wealth of useful references.

Download or read book Nanoscale Luminescent Materials written by D. J. Lockwood and published by The Electrochemical Society. This book was released on 2010-04 with total page 317 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue of ECS Transactions focuses on those characteristics of nanoscale materials that relate to their luminescence properties. Topics covered include the effects of quantum confinement, the role of surface states, loss mechanisms, methods to improve luminescence efficiency, bulk vs. nanoparticle luminescence, the role of phonons in nanomaterials, nanophosphors for biophotonics and biomarkers, nanoparticles for light emitting diodes, and nanophosphors for traditional phosphor applications.

Download or read book Advanced Control of Chemical Processes written by and published by . This book was released on 1991 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Dynamics and Control of Process Systems 2004 written by Sirish Shah and published by Elsevier. This book was released on 2005-06-10 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko and published by Springer Science & Business Media. This book was released on 2013-11-22 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Download or read book Control System Applications written by William S. Levine and published by CRC Press. This book was released on 2018-10-24 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: Control technology permeates every aspect of our lives. We rely on them to perform a wide variety of tasks without giving much thought to the origins of the technology or how it became such an important part of our lives. Control System Applications covers the uses of control systems, both in the common and in the uncommon areas of our lives. From the everyday to the unusual, it's all here. From process control to human-in-the-loop control, this book provides illustrations and examples of how these systems are applied. Each chapter contains an introduction to the application, a section defining terms and references, and a section on further readings that help you understand and use the techniques in your work environment. Highly readable and comprehensive, Control System Applications explores the uses of control systems. It illustrates the diversity of control systems and provides examples of how the theory can be applied to specific practical problems. It contains information about aspec ts of control that are not fully captured by the theory, such as techniques for protecting against controller failure and the role of cost and complexity in specifying controller designs.

Download or read book Proceedings of the 33rd IEEE Conference on Decision and Control written by IEEE Control Systems Society and published by . This book was released on 1994 with total page 1086 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings written by and published by . This book was released on 1999 with total page 1252 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Journal of Research of the National Institute of Standards and Technology written by and published by . This book was released on 2000 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings written by American Association for Artificial Intelligence and published by . This book was released on 1998 with total page 1254 pages. Available in PDF, EPUB and Kindle. Book excerpt: AAAI proceedings describe innovative concepts, techniques, perspectives, and observations that present promising research directions in artificial intelligence.