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Book Development of Boron and Phosphorus Liquid Metal Ion Sources for the Focused Ion Beam System

Download or read book Development of Boron and Phosphorus Liquid Metal Ion Sources for the Focused Ion Beam System written by Ronnie Higuchi-Rusli and published by . This book was released on 1986 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book High Resolution Focused Ion Beams  FIB and its Applications

Download or read book High Resolution Focused Ion Beams FIB and its Applications written by Jon Orloff and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.

Book Focused Ion Beams from Liquid Metal Ion Sources

Download or read book Focused Ion Beams from Liquid Metal Ion Sources written by P. D. Prewett and published by John Wiley & Sons. This book was released on 1991-10-02 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides an up-to-date review and analysis of liquid metal ion sources and their applications. The contents range from a discussion of the fundamental physics underlying operation of the liquid metal ion sources, through the technical details of their construction and manufacture to their performance characteristics. Their use in focused ion beam systems is covered in detail, including a discussion of the fundamentals of ion optical focusing column design and the various microengineering applications.

Book Handbook of Charged Particle Optics

Download or read book Handbook of Charged Particle Optics written by Jon Orloff and published by CRC Press. This book was released on 2017-12-19 with total page 666 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.

Book Focused Ion Beams from Liquid Metal Ion Sources

Download or read book Focused Ion Beams from Liquid Metal Ion Sources written by Philip Doughty Prewett and published by . This book was released on 1991 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Liquid Metal Ion Source and Alloy for Ion Emission of Multiple Ionic Species

Download or read book Liquid Metal Ion Source and Alloy for Ion Emission of Multiple Ionic Species written by and published by . This book was released on 1987 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A liquid metal ion source and alloy for the simultaneous ion evaporation of arsenic and boron, arsenic and phosphorus, or arsenic, boron and phosphorus. The ionic species to be evaporated are contained in palladium-arsenic-boron and palladium-arsenic-boron-phosphorus alloys. The ion source, including an emitter means such as a needle emitter and a source means such as U-shaped heater element, is preferably constructed of rhenium and tungsten, both of which are readily fabricated. The ion sources emit continuous beams of ions having sufficiently high currents of the desired species to be useful in ion implantation of semiconductor wafers for preparing integrated circuit devices. The sources are stable in operation, experience little corrosion during operation, and have long operating lifetimes.

Book INIS Atomindex

Download or read book INIS Atomindex written by and published by . This book was released on 1987 with total page 870 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Ion Beams in Materials Processing and Analysis

Download or read book Ion Beams in Materials Processing and Analysis written by Bernd Schmidt and published by Springer Science & Business Media. This book was released on 2012-12-13 with total page 425 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.

Book Ion and Atomic Beams for Controlled Fusion and Technology

Download or read book Ion and Atomic Beams for Controlled Fusion and Technology written by M.D. Gabovich and published by Springer. This book was released on 1989-01-31 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt: Translated from the Russian. Studies the physical and technical fundamentals of modern ion sources, sputtering processes, ion implantation, and atomic beams to present their current and future technological applications. No index. Annotation copyrighted by Book News, Inc., Portland, OR

Book Enhanced wetting  Boron based Liquid metal Ion Source and Method

Download or read book Enhanced wetting Boron based Liquid metal Ion Source and Method written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A binary, boron-based alloy as a source for field-emission-type, ion-beam generating devices, wherein boron predominates in the alloy, preferably with a presence of about 60 atomic percent. The other constituent in the alloy is selected from the group of elements consisting of nickel, palladium and platinum. Predominance of boron in these alloys, during operation, promotes combining of boron with trace impurities of carbon in the alloys to form B.sub. 4 C and thus to promote wetting of an associated carbon support substrate.

Book The Properties of a Liquid Metal Ion Source and a Focused Ion Beam Modulated at High Frequency by a Focused Laser Beam and Thermal Effects

Download or read book The Properties of a Liquid Metal Ion Source and a Focused Ion Beam Modulated at High Frequency by a Focused Laser Beam and Thermal Effects written by Li Zhou and published by . This book was released on 1990 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Focused Ion Beam Systems

Download or read book Focused Ion Beam Systems written by Nan Yao and published by Cambridge University Press. This book was released on 2011-04-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.

Book A Theoretical and Experimental Study of Liquid Metal Ion Sources and Their Application to Focused Ion Beam Technology

Download or read book A Theoretical and Experimental Study of Liquid Metal Ion Sources and Their Application to Focused Ion Beam Technology written by Joseph Puretz and published by . This book was released on 1988 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Physics and Technology of Ion Sources

Download or read book The Physics and Technology of Ion Sources written by Ian G. Brown and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first edition of this title has become a well-known reference book on ion sources. The field is evolving constantly and rapidly, calling for a new, up-to-date version of the book. In the second edition of this significant title, editor Ian Brown, himself an authority in the field, compiles yet again articles written by renowned experts covering various aspects of ion source physics and technology. The book contains full chapters on the plasma physics of ion sources, ion beam formation, beam transport, computer modeling, and treats many different specific kinds of ion sources in sufficient detail to serve as a valuable reference text.

Book Handbook of Ion Sources

Download or read book Handbook of Ion Sources written by Bernhard Wolf and published by CRC Press. This book was released on 2017-07-12 with total page 558 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application. The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources. The problems related to the production of ions of non-gaseous elements are detailed, and data on useful materials for evaporation and ion source construction are summarized. Additional chapters are dedicated to extraction and beam formation, ion beam diagnosis, ion source electronics, and computer codes for extraction, acceleration, and beam transport. Emittance and brilliance are described and space charge effects and neutralization discussed. Various methods for the measurement of current, profile, emittance, and time structure are presented and compared. Intensity limits for these methods are provided for different ion energies. Typical problems related to the operation of ion source plasmas are discussed and practical examples of circuits are given. The influence of high voltage on ion source electronics and possibilities for circuit protection are covered. The generation of microwaves and various microwave equipment are described and special problems related to microwave operation are summarized. The Handbook of Ion Sources is a valuable reference on the subject, of benefit to practitioners and graduate students interested in accelerators, ion implantation, and ion beam techniques.

Book Physics Briefs

Download or read book Physics Briefs written by and published by . This book was released on 1987 with total page 898 pages. Available in PDF, EPUB and Kindle. Book excerpt: