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Book Chemical Vapour Deposition

    Book Details:
  • Author : Anthony C. Jones
  • Publisher : Royal Society of Chemistry
  • Release : 2009
  • ISBN : 0854044655
  • Pages : 600 pages

Download or read book Chemical Vapour Deposition written by Anthony C. Jones and published by Royal Society of Chemistry. This book was released on 2009 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt: "The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket

Book Handbook of Deposition Technologies for Films and Coatings

Download or read book Handbook of Deposition Technologies for Films and Coatings written by Peter M. Martin and published by William Andrew. This book was released on 2009-12-01 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.

Book Inorganic Glasses for Photonics

Download or read book Inorganic Glasses for Photonics written by Animesh Jha and published by John Wiley & Sons. This book was released on 2016-08-04 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced textbook on inorganic glasses suitable for both undergraduates and researchers. Engaging style to facilitate understanding Suitable for senior undergraduates, postgraduates and researchers entering material science, engineering, physics, chemistry, optics and photonics fields Discusses new techniques in optics and photonics including updates on diagnostic techniques Comprehensive and logically structured

Book Chemical Vapour Deposition  CVD

Download or read book Chemical Vapour Deposition CVD written by Kwang-Leong Choy and published by CRC Press. This book was released on 2019-06-07 with total page 417 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a timely and complete overview on chemical vapour deposition (CVD) and its variants for the processing of nanoparticles, nanowires, nanotubes, nanocomposite coatings, thin and thick films, and composites. Chapters discuss key aspects, from processing, material structure and properties to practical use, cost considerations, versatility, and sustainability. The author presents a comprehensive overview of CVD and its potential in producing high performance, cost-effective nanomaterials and thin and thick films. Features Provides an up-to-date introduction to CVD technology for the fabrication of nanomaterials, nanostructured films, and composite coatings Discusses processing, structure, functionalization, properties, and use in clean energy, engineering, and biomedical grand challenges Covers thin and thick films and composites Compares CVD with other processing techniques in terms of structure/properties, cost, versatility, and sustainability Kwang-Leong Choy is the Director of the UCL Centre for Materials Discovery and Professor of Materials Discovery in the Institute for Materials Discovery at the University College London. She earned her D.Phil. from the University of Oxford, and is the recipient of numerous honors including the Hetherington Prize, Oxford Metallurgical Society Award, and Grunfeld Medal and Prize from the Institute of Materials (UK). She is an elected fellow of the Institute of Materials, Minerals and Mining, and the Royal Society of Chemistry.

Book Chemical Solution Deposition of Functional Oxide Thin Films

Download or read book Chemical Solution Deposition of Functional Oxide Thin Films written by Theodor Schneller and published by Springer Science & Business Media. This book was released on 2014-01-24 with total page 801 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered.

Book Proceedings of the International Workshop on Physics and Technology of Thin Films

Download or read book Proceedings of the International Workshop on Physics and Technology of Thin Films written by Alireza Zaker Moshfegh and published by World Scientific. This book was released on 2004 with total page 549 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film science and technology plays an important role in the high-tech industries. The production of thin films for device purposes has been developed over the past 40 years. Thin films as a two-dimensional system are of great importance to many real-world problems. Their material costs are very small as compared to the corresponding bulk material and they perform the same function when it comes to surface processes. Thus, knowledge and determination of the nature, functions and new properties of thin films can be used for the development of new technologies for future applications. Some of the important applications of thin films are microelectronics, communications, optical electronics, catalysis, coating of all kinds, and energy generation and conservation strategies. This book emphasizes the importance of thin films in new technologies. It presents basic concepts, techniques, materials, processing and applications of thin films. As thin film physics and technology is a multidisciplinary filed, the book will be useful to a wide variety of readers (especially young researchers) in physics, electronic engineering, materials science and metallurgy.

Book Physics And Technology Of Thin Films  Iwtf 2003   Proceedings Of The International Workshop

Download or read book Physics And Technology Of Thin Films Iwtf 2003 Proceedings Of The International Workshop written by M Wuttig and published by World Scientific. This book was released on 2004-06-08 with total page 549 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin films science and technology plays an important role in the high-tech industries. Thin film technology has been developed primarily for the need of the integrated circuit industry. The demand for development of smaller and smaller devices with higher speed especially in new generation of integrated circuits requires advanced materials and new processing techniques suitable for future giga scale integration (GSI) technology. In this regard, physics and technology of thin films can play an important role to acheive this goal. The production of thin films for device purposes has been developed over the past 40 years. Thin films as a two dimensional system are of great importance to many real-world problems. Their material costs are very small as compared to the corresponding bulk material and they perform the same function when it comes to surface processes. Thus, knowledge and determination of the nature, functions and new properties of thin films can be used for the development of new technologies for future applications.Thin film technology is based on three foundations: fabrication, characterization and applications. Some of the important applications of thin films are microelectronics, communication, optical electronics, catalysis, coating of all kinds, and energy generation and conservation strategies.This book emphasizes the importance of thin films and their properties for the new technologies. It presents basic principles, processes techniques and applications of thin films. As thin films physics and technology is a multidisciplinary field, the book will be useful to a wide varity of readers (especially young researcher) in physics, electronic engineering, material science and metallurgy.

Book Thin Films by Chemical Vapour Deposition

Download or read book Thin Films by Chemical Vapour Deposition written by C.E. Morosanu and published by Elsevier. This book was released on 2016-06-22 with total page 720 pages. Available in PDF, EPUB and Kindle. Book excerpt: The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several unique advantages, developed into the most widely used technique for thin film preparation in electronics technology. In the last 25 years, tremendous advances have been made in the science and technology of thin films prepared by means of CVD. This book presents in a single volume, an up-to-date overview of the important field of CVD processes which has never been completely reviewed previously. Contents: Part I. 1. Evolution of CVD Films. Introductory remarks. Short history of CVD thin films. II. Fundamentals. 2. Techniques of Preparing Thin Films. Electrolytic deposition techniques. Vacuum deposition techniques. Plasma deposition techniques. Liquid-phase deposition techniques. Solid-phase deposition techniques. Chemical vapour conversion of substrate. Chemical vapour deposition. Comparison between CVD and other thin film deposition techniques. 3. Chemical Processes Used in CVD. Introduction. Description of chemical reactions used in CVD. 4. Thermodynamics of CVD. Feasibility of a CVD process. Techniques for equilibrium calculations in CVD systems. Examples of thermodynamic studies of CVD systems. 5. Kinetics of CVD. Steps and control type of a CVD heterogeneous reaction. Influence of experimental parameters on thin film deposition rate. Continuous measurement of the deposition rate. Experimental methods for studying CVD kinetics. Role of homogeneous reactions in CVD. Mechanism of CVD processes. Kinetics and mechanism of dopant incorporation. Transport phenomena in CVD. Status of kinetic and mechanism investigations in CVD systems. 6. Measurement of Thin Film Thickness. Mechanical methods. Mechanical-optical methods. Optical methods. Electrical methods. Miscellaneous methods. 7. Nucleation and Growth of CVD Films. Stages in the nucleation and growth mechanism. Regimes of nucleation and growth. Nucleation theory. Dependence of nucleation on deposition parameters. Heterogeneous nucleation and CVD film structural forms. Homogeneous nucleation. Experimental techniques. Experimental results of CVD film nucleation. 8. Thin Film Structure. Techniques for studying thin film structure. Structural defects in CVD thin films. 9. Analysis of CVD Films. Analysis techniques of thin film bulk. Analysis techniques of thin film surfaces. Film composition measurement. Depth concentration profiling. 10. Properties of CVD Films. Mechanical properties. Thermal properties. Optical properties. Photoelectric properties. Electrical properties. Magnetic properties. Chemical properties. Part III. 11. Equipment and Substrates. Equipment for CVD. Safety in CVD. Substrates. 12. Preparation and Properties of Semiconducting Thin Films. Homoepitaxial semiconducting films. Heteroepitaxial semiconducting films. 13. Preparation and Properties of Amorphous Insulating Thin Films. Oxides. Nitrides and Oxynitrides. Polymeric thin films. 14. Preparation and Properties of Conductive Thin Films. Metals and metal alloys. Resistor materials. Transparent conducting films. Miscellaneous materials. 15. Preparation and Properties of Superconducting and Magnetic Thin Films. Superconducting materials. Magnetic materials. 16. Uses of CVD Thin Films. Applications in electronics and microelectronics. Applications in the field of microwaves and optoelectronics. Miscellaneous applications. Artificial heterostructures (Quantum wells, superlattices, monolayers, two-dimensional electron gases). Part V. 17. Present and Future Importance of CVD Films.

Book Oxide Thin Films and Nanostructures

Download or read book Oxide Thin Films and Nanostructures written by Falko P. Netzer and published by Oxford University Press. This book was released on 2021 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: Oxide Thin Films and Nanostructures is an interdisciplinary approach to introduce readers to the field of oxide nano-materials, that is oxides of nano-meter size and dimensions. Emphasis is put to differentiate these nanoscale oxide objects from their solid bulk oxide parents and present their properties in a pedagogic way.

Book Chemically Deposited Nanocrystalline Metal Oxide Thin Films

Download or read book Chemically Deposited Nanocrystalline Metal Oxide Thin Films written by Fabian I. Ezema and published by Springer Nature. This book was released on 2021-06-26 with total page 926 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book guides beginners in the areas of thin film preparation, characterization, and device making, while providing insight into these areas for experts. As chemically deposited metal oxides are currently gaining attention in development of devices such as solar cells, supercapacitors, batteries, sensors, etc., the book illustrates how the chemical deposition route is emerging as a relatively inexpensive, simple, and convenient solution for large area deposition. The advancement in the nanostructured materials for the development of devices is fully discussed.

Book Chemical Vapour Deposition of Coatings

Download or read book Chemical Vapour Deposition of Coatings written by K. L. Choy and published by . This book was released on 2003 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Semiconductor Nanomaterials for Flexible Technologies

Download or read book Semiconductor Nanomaterials for Flexible Technologies written by Yugang Sun and published by William Andrew. This book was released on 2010-05-20 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an overview of the strategies to generate high-quality films of one-dimensional semiconductor nanostructures on flexible substrates (e.g., plastics) and the use of them as building blocks to fabricating flexible devices (including electronics, optoelectronics, sensors, power systems). In addition to engineering aspects, the physics and chemistry behind the fabrication and device operation will also be discussed as well. Internationally recognized scientists from academia, national laboratories, and industries, who are the leading researchers in the emerging areas, are contributing exceptional chapters according to their cutting-edge research results and expertise. This book will be an on-time addition to the literature in nanoscience and engineering. It will be suitable for graduate students and researchers as a useful reference to stimulate their research interest as well as facilitate their research in nanoscience and engineering. - Considers the physics and chemistry behind fabrication and device operation - Discusses applications to electronics, optoelectronics, sensors and power systems - Examines existing technologies and investigates emerging trends

Book Principles of Vapor Deposition of Thin Films

Download or read book Principles of Vapor Deposition of Thin Films written by Professor K.S. K.S Sree Harsha and published by Elsevier. This book was released on 2005-12-16 with total page 1173 pages. Available in PDF, EPUB and Kindle. Book excerpt: The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.* Offers detailed derivation of important formulae.* Thoroughly covers the basic principles of materials science that are important to any thin film preparation.* Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.

Book Thin Film Dielectrics

Download or read book Thin Film Dielectrics written by Frederick Vratny and published by . This book was released on 1969 with total page 669 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Handbook of Chemical Vapor Deposition

Download or read book Handbook of Chemical Vapor Deposition written by Hugh O. Pierson and published by William Andrew. This book was released on 2012-12-02 with total page 459 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.

Book Sensors for Safety and Process Control in Hydrogen Technologies

Download or read book Sensors for Safety and Process Control in Hydrogen Technologies written by Thomas Hübert and published by CRC Press. This book was released on 2018-10-09 with total page 387 pages. Available in PDF, EPUB and Kindle. Book excerpt: Understand, Select, and Design Sensors for Hydrogen-Based Applications The use of hydrogen generated from renewable energy sources is expected to become an essential component of a low-carbon, environmentally friendly energy supply, spurring the worldwide development of hydrogen technologies. Sensors for Safety and Process Control in Hydrogen Technologies provides practical, expert-driven information on modern sensors for hydrogen and other gases as well as physical parameters essential for safety and process control in hydrogen technologies. It illustrates how sensing technologies can ensure the safe and efficient implementation of the emerging global hydrogen market. The book explains the various facets of sensor technologies, including practical aspects relevant in hydrogen technologies. It presents a comprehensive and up-to-date account of the theory (physical and chemical principles), design, and implementations of sensors in hydrogen technologies. The authors also offer guidance on the development of new sensors based on the analysis of the capabilities and limitations of existing sensors with respect to current performance requirements. Suitable for both technical and non-technical personnel, the book provides a balance between detailed descriptions and simple explanations. It gives invaluable insight into the role sensors play as key enabling devices for both control and safety in established and emerging hydrogen technologies.

Book Thin Films on Glass

Download or read book Thin Films on Glass written by Hans Bach and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 445 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, entitled Thin Films on Glass, is one of a series reporting on research and development activities on products and processes conducted by the Schott Group. The scientifically founded development of new products and technical pro cesses has traditionally been of vital importance to Schott and has always been performed on a scale determined by the prospects for application of our special glasses. Since the reconstruction of the Schott Glaswerke in Mainz, the scale has increased enormously. The range of expert knowledge required could never have been supplied by Schott alone. It is also a tradition in our company to cultivate collaboration with customers, universities, and research institutes. Publications in numerous technical journals, which since 1969 we have edited to a regular schedule as Forschungsberichte - 'research reports' - describe the results of these cooperations. They contain up-to-date infor mation on various topics for the expert but are not suited as survey material for those whose standpoint is more remote. This is the point where we would like to place our series, to stimulate the exchange of thoughts, so that we can consider from different points of view the possibilities offered by those incredibly versatile materials, glass and glass ceramics. We would like to share the knowledge won through our research and development at Schott in cooperation with the users of our materials with scientists and engineers, interested customers and friends, and with the employees of our firm.