Download or read book Application Of The Phase Shifting Diffraction Interferometer For Measuring Convex Mirrors And Negative Lenses written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: To measure a convex mirror, a reference beam and a measurement beam are both provided through a single optical fiber. A positive auxiliary lens is placed in the system to give a converging wavefront onto the convex mirror under test. A measurement is taken that includes the aberrations of the convex mirror as well as the errors due to two transmissions through the positive auxiliary lens. A second measurement provides the information to eliminate this error. A negative lens can also be measured in a similar way. Again, there are two measurement set-ups. A reference beam is provided from a first optical fiber and a measurement beam is provided from a second optical fiber. A positive auxiliary lens is placed in the system to provide a converging wavefront from the reference beam onto the negative lens under test. The measurement beam is combined with the reference wavefront and is analyzed by standard methods. This measurement includes the aberrations of the negative lens, as well as the errors due to a single transmission through the positive auxiliary lens. A second measurement provides the information to eliminate this error.

Download or read book Phase Shifting Diffraction Interferometry for Measuring Extreme Ultraviolet Optics written by and published by . This book was released on 1996 with total page 7 pages. Available in PDF, EPUB and Kindle. Book excerpt: Extreme ultraviolet projection lithography operating at a wavelength of 13nm requires surface figure accuracy on each mirror to be better than 0.25nm rms. A new type of interferometry, based on the fundamental process of diffraction, is described that can intrinsically achieve the required accuracy. Applying this principle, two independent spherical wavefronts are generated - one serves as the measurement wavefront and is incident on the optic or optical system under test and the other serves as the reference wavefront. Since they are generated independently their relative amplitude and phase can be controlled, providing contrast adjustment and phase shifting capability. Using diffraction from a single mode optical fiber, different interferometers can be configured to measure individual mirrors or entire imaging systems. Measurement of an EUV projection system is described. 5 refs., 4 figs.

Download or read book Phase Shifting Diffraction Interferometer written by and published by . This book was released on 1996 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: An interferometer which has the capability of measuring optical elements and systems with an accuracy of .lambda./1000 where .lambda. is the wavelength of visible light. Whereas current interferometers employ a reference surface, which inherently limits the accuracy of the measurement to about .lambda./50, this interferometer uses an essentially perfect spherical reference wavefront generated by the fundamental process of diffraction. This interferometer is adjustable to give unity fringe visibility, which maximizes the signal-to-noise, and has the means to introduce a controlled prescribed relative phase shift between the reference wavefront and the wavefront from the optics under test, which permits analysis of the interference fringe pattern using standard phase extraction algorithms.

Download or read book Optical Interferometry written by Alexandr Banishev and published by BoD – Books on Demand. This book was released on 2017-02-15 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical methods of measurements are the most sensitive techniques of noncontact investigations, and at the same time, they are fast as well as accurate which increases reproducibility of observed results. In recent years, the importance of optical interferometry methods for research has dramatically increased, and applications range from precise surface testing to finding extrasolar planets. This book covers various aspects of optical interferometry including descriptions of novel apparatuses and methods, application interferometry for studying biological objects, surface qualities, materials characterization, and optical testing. The book includes a series of chapters in which experts share recent progress in interferometry through original research and literature reviews.

Download or read book Study of Aberrations of Stepper Lenses In situ Using Phase Shifting Point Diffraction Interferometry written by P. Venkataraman and published by . This book was released on 2002 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Stepper lenses are tested by the lens manufacturer using various interferometric methods like phase measurement interferometry (PMI), before they are assembled onto the stepper or scanner. Once the system is set up, there are a few methods to study the lens aberrations in-situ using interferometry. The methods currently used are direct ones like direct aerial image measurement (DAIM) or indirect ones in which images of lines and spaces are formed in the photoresist and the aberrations inferred from scanning electron microscope (SEM) images of these. We propose using phase shifting point diffraction interferometry (PSPDI) for the purpose of measuring aberrations in-situ. The method has the advantages of being simple, and of having relaxed coherence length requirements and applicability over a wide wavelength range. We present results from a prototype experiment done on a 436 nm optic on an optical bench using a 442 nm He-Cd laser as source."--Abstract.

Download or read book A Phase stepped Point Diffraction Interferometer Using Liquid Crystals written by and published by . This book was released on 1995 with total page 12 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Science Technology Review written by and published by . This book was released on 1995 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optical Interferometry 2e written by P. Hariharan and published by Elsevier. This book was released on 2003-10-20 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: When the first edition of Optical Interferometry was published, interferometry was regarded as a rather esoteric method of making measurements, largely confined to the laboratory. Today, however, besides its use in several fields of research, it has applications in fields as diverse as measurement of length and velocity, sensors for rotation, acceleration, vibration and electrical and magnetic fields, as well as in microscopy and nanotechnology. Most topics are discussed first at a level accessible to anyone with a basic knowledge of physical optics, then a more detailed treatment of the topic is undertaken, and finally each topic is supplemented by a reference list of more than 1000 selected original publications in total. - Historical development of interferometry - The laser as a light source - Two-beam interference - Techniques for frequency stabilization - Coherence - Electronic phase measurements - Multiple-beam interference - Quantum effects in optical interference - Extensive coverage of the applications of interferometry, such as measurements of length, optical testing, interference microscopy, interference spectroscopy, Fourier-transform spectroscopy, interferometric sensors, nonlinear interferometers, stellar interferometry, and studies of space-time and gravitation

Download or read book Phase shifting Point diffraction Interferometry at EUV Wavelengths written by and published by . This book was released on 1997 with total page 2 pages. Available in PDF, EPUB and Kindle. Book excerpt: A novel phase-shifting point-diffraction interferometer (PS/PDI) operating at the Advanced Light Source (ALS) is being used to perform wavefront-measuring metrology at 13.4-nm wavelength to characterize aberrations in a multilayer-coated 10x Schwarzschild objective designed for extreme ultraviolet (EUV) projection lithography experiments. To achieve 0.1-micron critical dimension pattern transfer with EUV projection lithography at 13.4-nm wavelength, nearly diffraction-limited all-reflective multilayer-coated optical systems with 0.1 numerical aperture are required. The EUV wavefront, determined by the mirror surfaces and the reflective multilayer coatings, is measurable only at the operational wavelength of the system. The authors goal is to measure the EUV wavefront to an accuracy of 0.01 waves rms (0.13 nm). The PS/PDI is a type of point-diffraction interferometer, modified for significantly improved throughput and phase-shifting capability. The interferometer design utilizes a grating beamsplitter and pinhole spatial filters in the object and image planes of the optical system under test. The 10x-reduction Schwarzschild objective, with image-side numerical aperture of 0.08, is illuminated by a sub-micron pinhole in the object plane. A coarse, 20-micron pitch grating placed between the illumination pinhole and the Schwarzschild system serves a dual role as a small-angle beam-splitter and a phase-shifting element. The first-order diffracted beam from the grating is spatially filtered in the image plane of the Schwarzschild with a sub-100-nm pinhole and becomes the `D reference` wave in the interferometer. The zero-order beam is the `test` wave, and it passes unobstructed through a 4.5-[mu]m window in the image plane. The test and reference beams are separated by several microns in the image plane to minimize beam overlap. The interference fringes are recorded with a CCD detector placed about 12 cm from the Schwarzschild image plane.

Download or read book Interferogram Analysis Digital Fringe Pattern Measurement Techniques written by David W. Robinson and published by CRC Press. This book was released on 1993 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: Very Good,No Highlights or Markup,all pages are intact.

Download or read book Defocus Measurement Using a Liquid Crystal Point Diffraction Interferometer written by and published by . This book was released on 1994 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Basics of Interferometry written by P. Hariharan and published by Elsevier. This book was released on 2010-07-28 with total page 249 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical interferometry is used in communications, medical imaging, astonomy, and structural measurement. With the use of an interferometer engineers and scientists are able to complete surface inspections of micromachined surfaces and semiconductors. Medical technicians are able to give more consise diagnoses with the employ of interferometers in microscopy, spectroscopy, and coherent tomography. Originating from a one-day course, this material was expanded to serve as an introduction to the topic for engineers and scientists that have little optical knowledge but a need for more in their daily work lives. The need for interferometry knowledge has crossed the boundaries of engineering fields and Dr. Hariharan has written a book that answers the questions that new practitioners to interferometry have and haven't even thought of yet. Basics of Interferometry, Second Edition includes complete updates of all material with an emphasis on applications. It also has new chapters on white-light microsopy and interference with single photons. - Outstanding introduction to the world of optical interferometry with summaries at the begining and end of each chapter, several appendices with essential information, and worked numerical problems - Practical details enrich understanding for readers new to this material - New chapters on white-light microscopy for medical imaging and interference with single photons(quantum optics)

Download or read book High accuracy Calibration of an Adaptive Optics System Using a Phase Shifting Diffraction Interferometer written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A phase-shifting diffraction interferometer (PSDI) has been integrated into an adaptive optics (AO) system developed by LLNL for use on the three meter Shane telescope at Lick Observatory. The interferometer is an all fiber optic design, which is extremely compact. It is useful for calibrating the control sensors, measuring the aberrations of the entire AO optical train, and measuring the influence functions of the individual actuators on the deformable mirror. The PSDI is particularly well suited for this application because it measures converging, quasi-spherical wavefronts, such as are produced by an AO imaging system. Thus, a PSDI can be used to measure the aberrations of the entire AO system, in-situ and without errors introduced by auxiliary optics. This provides an extremely accurate measurement ((approximately) 5 nm RMS) of the optical properties of the AO system.

Download or read book Field Guide to Interferometric Optical Testing written by Eric P. Goodwin and published by SPIE-International Society for Optical Engineering. This book was released on 2006 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on the author's course at University of Arizona, this guide covers the key fundamentals of interferometry, types of interferometers and interferograms, concepts of phase-shifting interferometry, long-wavelength interferometry, testing of aspheric surfaces, measurement of surface microstructure, flat and curved surface testing, and more.

Download or read book Interferometry VII applications written by Ryszard J. Pryputniewicz and published by SPIE-International Society for Optical Engineering. This book was released on 1995 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Sub nanometer Interferometry for Aspheric Mirror Fabrication written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Aspheric mirrors for extreme ultraviolet lithography (EUVL) at a wavelength of 13nm require surface figure accuracy approaching 0.10 nm rms. A new type of interferometry, based on the fundamental process of diffraction, is described that has the intrinsically ability to achieve this accuracy on aspherical surfaces. However, care must be taken in the design and implementation of the optical system that images the aspheric mirror onto the CCD camera. Non-common paths of the measurement and reference wavefronts within the optical system, as well as distortion of the image of aspheric mirror on the CCD, must be addressed in order to realize sub-nanometer accuracy. The phase shifting diffraction interferometer and the mitigation of potential imaging errors are described for measuring the surface figure on aspheric mirrors.

Download or read book Applications of Interferometry written by William Ewart Williams and published by . This book was released on 1930 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: