Download or read book Apparatus and Methods for Measuring Thermally Induced Reticle Distortion written by Michael Sogard and published by . This book was released on 2020-12-20 with total page 28 pages. Available in PDF, EPUB and Kindle. Book excerpt: An apparatus and method for measuring thermo-mechanically induced reticle distortion or other distortion in a lithography device enables detecting distortion at the nanometer level in situ. The techniques described use relatively simple optical detectors and data acquisition electronics that are capable of monitoring the distortion in real time, during operation of the lithography equipment. Time-varying anisotropic distortion of a reticle can be measured by directing slit patterns of light having different orientations to the reticle and detecting reflected, transmitted or diffracted light from the reticle. In one example, corresponding segments of successive time measurements of secondary light signals are compared as the reticle scans a substrate at a reticle stage speed of about 1 m/s to detect temporal offsets and other features that correspond to spatial distortion.

Download or read book Engineering and Design Structural Deformation Surveying Engineer Manual Em 1110 2 1009 written by and published by . This book was released on 2002-06-01 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: This manual provides technical guidance for performing precise structural deformation surveys of locks, dams, and other hydraulic flood control or navigation structures. Accuracy, procedural, and quality control standards are defined for monitoring displacements in hydraulic structures.

Download or read book Integrated Circuit Metrology Inspection and Process Control written by and published by . This book was released on 1994 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Theory and Methods of Optical Pyrometry written by Henry J. Kostkowski and published by . This book was released on 1962 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt: A detailed review of the theoretical methods of optical pyrometry and the application of these methods at the National Bureau of Standards in realizing, maintaining and distributing the International Practical Temperature Scale above 1063 C degrees is presented.In the theoretical presentation, the concepts of effective and mean effective wavelengths are introduced, and various equations relating these parameters to each other and other physical quantities are derived.The important features of precision visual optical pyrometers are discussed and a number of blackbody sources and tungsten strip lamps described. Detailed experimental procedures and results of primary and secondary calibrations of optical pyrometers at NBS are given.Finally, recommendations for achieving high precision and accuracy and the fundamental limitations in visual optical pyrometry are presented.(Author).

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Download or read book Official Gazette of the United States Patent Office written by United States. Patent Office and published by . This book was released on 1949 with total page 1784 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1991 with total page 1460 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.

Download or read book NBS Special Publication written by and published by . This book was released on 1968 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Some Practical Aspects of Surface Temperature Measurement by Optical and Ratio Pyrometers written by J. Robert Branstetter and published by . This book was released on 1966 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book NASA Patent Abstracts Bibliography written by United States. National Aeronautics and Space Administration. Scientific and Technical Information Program and published by . This book was released on 1992 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Ceramic Abstracts written by American Ceramic Society and published by . This book was released on 1995 with total page 1150 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Publications of the National Bureau of Standards Catalog written by United States. National Bureau of Standards and published by . This book was released on 1983 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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Download or read book Microelectronics Manufacturing Diagnostics Handbook written by Abraham Landzberg and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 663 pages. Available in PDF, EPUB and Kindle. Book excerpt: The world of microelectronics is filled with cusses measurement systems, manufacturing many success stories. From the use of semi control techniques, test, diagnostics, and fail ure analysis. It discusses methods for modeling conductors for powerful desktop computers to their use in maintaining optimum engine per and reducing defects, and for preventing de formance in modem automobiles, they have fects in the first place. The approach described, clearly improved our daily lives. The broad while geared to the microelectronics world, has useability of the technology is enabled, how applicability to any manufacturing process of similar complexity. The authors comprise some ever, only by the progress made in reducing their cost and improving their reliability. De of the best scientific minds in the world, and fect reduction receives a significant focus in our are practitioners of the art. The information modem manufacturing world, and high-quality captured here is world class. I know you will diagnostics is the key step in that process. find the material to be an excellent reference in of product failures enables step func Analysis your application. tion improvements in yield and reliability. which works to reduce cost and open up new Dr. Paul R. Low applications and technologies. IBM Vice President and This book describes the process ofdefect re of Technology Products General Manager duction in the microelectronics world.

Download or read book Electrical Electronics Abstracts written by and published by . This book was released on 1997 with total page 1860 pages. Available in PDF, EPUB and Kindle. Book excerpt: