Download or read book An Investigation Into the Fundamental Phase and Orientation Properties of Sputtered Tungsten and Tantalum Thin Films written by Jing-Yi Huang and published by . This book was released on 2003 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book In Situ Phase Evolution Study in Magnetron Sputtered Tantalum Thin Films written by and published by . This book was released on 2002 with total page 23 pages. Available in PDF, EPUB and Kindle. Book excerpt: The design and construction of a planar magnetron-sputter deposition system with a beryllium chamber was accomplished to perform in-situ x-ray diffracUon growth study of refractory coatings. The deposition system was set on top of a laboratory 26 x-ray diffractometer. A two-dimensional array detector was interfaced for observation of the Debye nngs during growth. Integration along the 20 and directions allows fast phase and texture determination. The system was built to study effects of sputter deposition parameters on the structural properties of tantalum on steel, silicon, and glass substrates without exposing the system to atmosphere pressure. Two sputter depositions of tantalum films onto glass substrate in argon gas are reported here, one was deposited at 25-mm target-detector distance, 3.9 Pascal argon gas, and the other at 108-mm target-detector distance and 1.3 Pasc% argon gas. The first film grew to 250-nm in 39 minutes at an average growth rate of 6.4-nm/minute. It consisted of 45-nm of interface layer, which showed no crystalline structure, and was most likely amorphous film. It was followed by 15-nm growth of Beta-tantalum, and then followed by 190-nm growth of alpha-tantalum. From the full-width half maximum of the plot, it was determined that the p-tantalum region was 002 textured, and the a-tantalum region was 110 textured, and grew more textured with deposition time. The second film grew to 36-nm in 22 minutes at an average growth rate of 1 .6-nm/minute. It consisted of 31-nm of layer, which showed no crystalline structure, and was most likely amorphous film. It was followed by 5-nm of surface layer of p- and a-tantalum. Ex-situ grazing incidence x-ray diffraction performed on the film surface confirmed the in-situ results. Ex-situ pole figure analysis showed 110 fiber texture in a- tantalum, and highly 002 texture in p-tantalum.
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2003 with total page 674 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1975 with total page 1146 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The Influence of Sputter Gas Pressure on the Hardness and Modulus of Tantalum Thin Films written by Shangchen Han and published by . This book was released on 2013 with total page 63 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sputter deposited tantalum (Ta) thin films can form in 2 phases: the metastable tetragonal phase ([beta]-Ta) and the bulk bcc phase ([alpha]-Ta), both of which have wide applications. Producing Ta films with desired structure and properties is important, e.g. Ta films used for x-ray masks are required to have low stress; diffusion barriers between Cu and Si for semiconductors prefer [alpha]-Ta over [beta]-Ta. Varying sputter pressure while keeping other sputter parameters constant can be an effective way to tune both structure and properties of Ta films. It has been shown that, under good control of sputter parameters, we can get consistent variations in structure (stress, grain size) in [beta]-Ta films with increasing Ar gas pressure. This thesis shows that stress has little effect on [beta]-Ta indentation properties while variations in hardness can be well explained by the variation in grain size. All the metastable [beta]-Ta films transformed into [alpha]-Ta after thermally cycled to 700[MASCULINE ORDINAL INDICATOR]C. Nanoindentation results showed that both the hardness and indentation modulus are affected by the unique film structure of [alpha]-Ta films, which is characterized as having continuous orientation gradients and discontinuous grain boundary structure.
Download or read book Investigation of the Properties of Tungsten and Its Alloys written by Union Carbide Metals Company. Metals Research Laboratories and published by . This book was released on 1960 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Metals Abstracts written by and published by . This book was released on 1994 with total page 1584 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optical Properties of Reactive Sputtered Tungsten Oxide Thin Films written by Charles Wangati and published by . This book was released on 2018-10-20 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electrical Electronics Abstracts written by and published by . This book was released on 1997 with total page 2304 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1983 with total page 1368 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book A Study of Ternary Phase Diagrams of Tungsten and Tantalum written by William Rostoker and published by . This book was released on 1960 with total page 104 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thermomechanical Behavior and Microstructure Evolution of Tantalum Thin Films During the Beta alpha Phase Transformation written by Robert Alan Knepper and published by . This book was released on 2007 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Measurement and Control of Stress in Sputtered Tungsten Thin Films written by Xiaoqin Che and published by . This book was released on 2004 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ceramic Abstracts written by and published by . This book was released on 1994 with total page 972 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Air Force Research Resum s written by and published by . This book was released on 1968 with total page 868 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book An Investigation of the Properties of Thin Films Produced by Getter Sputtering written by David Owen Spiller and published by . This book was released on 1971 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Study of Structural and Sensing Properties of Tungsten Trioxide Thin Films Deposited by Rf Sputtering written by Stella Vallejos Vargas and published by . This book was released on 2008 with total page 102 pages. Available in PDF, EPUB and Kindle. Book excerpt:
