Download or read book Actinic Mask Inspection at the ALS Initial Design Review written by and published by . This book was released on 2003 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report is the first milestone report for the actinic mask blank inspection project conducted at the VNL, which forms sub-section 3 of the Q1 2003 mask blank technology transfer program at the VNL. Specifically this report addresses deliverable 3.1.1--design review and preliminary tool design. The goal of this project is to design an actinic mask inspection tool capable of operating in two modes: high-speed scanning for the detection of multilayer defects (inspection mode), and a high-resolution aerial image mode in which the image emulates the imaging illumination conditions of a stepper system (aerial image or AIM mode). The purpose and objective of these two modes is as follows: (1) Defect inspection mode--This imaging mode is designed to scan large areas of the mask for defects EUV multilayer coatings. The goal is to detect the presence of multilayer defects on a mask blank and to store the co-ordinates for subsequent review in AIM mode, thus it is not essential that the illumination and imaging conditions match that of a production stepper. Potential uses for this imaging mode include: (a) Correlating the results obtained using actinic inspection with results obtained using other non-EUV defect inspection systems to verify that the non-EUV scanning systems are detecting all critical defects; (b) Gaining sufficient information to associate defects with particular processes, such as various stages of the multilayer deposition or different modes of operation of the deposition tool; and (c) Assessing the density and EUV impact of surface and multilayer anomalies. Because of the low defect density achieved using current multilayer coating technology it is necessary to be able to efficiently scan large areas of the mask in order to obtain sufficient statistics for use in cross-correlation experiments. Speed of operation as well as sensitivity is therefore key to operation in defect inspection mode. (2) Aerial Image Microscope (AIM) mode--In AIM mode the tool is configured so that the collected data emulates the aerial image of a stepper system, thereby enabling rapid evaluation of mask defects and patterning without the need for a resist exposure step. The main uses of the microscope in this mode would be: (a) Review of multilayer and pattern defects to determine their printability; (b) Defect review following a repair process to assess the success of the operation; (c) Investigation of the effects of illumination and NA on the printed image; (d) Process window analysis of defects and other mask features; and (e) Characterizing defects on both patterned and unpatterned masks (i.e. blanks). An essential characteristic of operation in this mode is that the illumination and imaging conditions through focus should emulate as accurately as possible that of a production stepper system. This mode is designed for local review of defects over a small sub-field of the mask; therefore it is not necessary to have the same high-speed throughput required for defect inspection mode. We first describe some technical background relating to EUV masks and defect scanning, with the aim of defining the context of the tool and experiments to be performed. We then present an overview of several candidate optical system configurations for achieve the above objectives, and analyze the ability of each system to achieve the stated project goals. Of key importance is throughput and sensitivity in inspection mode, whilst in AIM mode key points are spatial resolution and the ability to perform stepper emulation imaging. We then down-select the best candidate from this set of solutions to one system, which is then investigated in further detail with a view to producing a preliminary tool design and estimates of overall system performance.
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2007 with total page 880 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Emerging Lithographic Technologies written by and published by . This book was released on 2005 with total page 644 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book JJAP written by and published by . This book was released on 2006 with total page 1282 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book EUV Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2009 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.
Download or read book Exposure to Artificial UV Radiation and Skin Cancer written by IARC Working Group on Risk of Skin Cancer and Exposure to Artificial Ultraviolet Light and published by World Health Organization. This book was released on 2006 with total page 84 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report represents the views and expert opinions of an IARC Working Group that met in Lyon, France, 27-29 June 2005
Download or read book A Century of Innovation written by 3M Company and published by 3m Company. This book was released on 2002 with total page 246 pages. Available in PDF, EPUB and Kindle. Book excerpt: A compilation of 3M voices, memories, facts and experiences from the company's first 100 years.
Download or read book A Guide to the Preventive Conservation of Photograph Collections written by Bertrand Lavédrine and published by Getty Publications. This book was released on 2003 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: A resource for the photographic conservator, conservation scientist, curator, as well as professional collector, this volume synthesizes both the masses of research that has been completed to date and the international standards that have been established on the subject.
Download or read book Lithography Process Control written by Harry J. Levinson and published by SPIE Press. This book was released on 1999 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.
Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Download or read book Microlithography written by Bruce W. Smith and published by CRC Press. This book was released on 2018-10-03 with total page 864 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. New in the Second Edition In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including: Immersion Lithography 157nm Lithography Electron Projection Lithography (EPL) Extreme Ultraviolet (EUV) Lithography Imprint Lithography Photoresists for 193nm and Immersion Lithography Scatterometry Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.
Download or read book Textbook of Plastic and Reconstructive Surgery written by Deepak K. Kalaskar and published by UCL Press. This book was released on 2016-08-02 with total page 491 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by experts from London’s renowned Royal Free Hospital, Textbook of Plastic and Reconstructive Surgery offers a comprehensive overview of the vast topic of reconstructive plastic surgery and its various subspecialties for introductory plastic surgery and surgical science courses. The book comprises five sections covering the fundamental principles of plastic surgery, cancer, burns and trauma, paediatric plastic surgery and aesthetic surgery, and covers the breadth of knowledge that students need to further their career in this exciting field. Additional coverage of areas in which reconstructive surgery techniques are called upon includes abdominal wall reconstruction, ear reconstruction and genital reconstruction. A chapter on aesthetic surgery includes facial aesthetic surgery and blepharoplasty, aesthetic breast surgery, body contouring and the evolution of hair transplantation.The broad scope of this volume and attention to often neglected specialisms such as military plastic surgery make this a unique contribution to the field. Heavily illustrated throughout, Textbook of Plastic and Reconstructive Surgery is essential reading for anyone interested in furthering their knowledge of this exciting field. This book was produced as part of JISC's Institution as e-Textbook Publisher project. Find out more at https://www.jisc.ac.uk/rd/projects/institution-as-e-textbook-publisher
Download or read book Primer on Transplantation written by American Society of Transplantation and published by John Wiley & Sons. This book was released on 2011-03-07 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt: Produced in association with the American Society of Transplantation, this new edition is full of practical advice for the next generation of transplant professionals. In addition to 5 organ-specific chapters: kidney, pancreas, heart, lung and liver, the book includes essential information on: immunobiology pharmacology donor management infectious complications pediatric transplantation general principles of patient management Fully updated and redesigned to make it even more user-friendly, the book now contains clinical vignettes, key point boxes, and self-assessment multiple choice questions in each chapter. Primer on Transplantation, Third Edition is an invaluable resource for all health professionals in the transplant team including trainees, residents, fellows, physicians, surgeons, nurses and transplant co-ordinators. Purchasing this book entitles you to access to the companion website: www.astprimer.com The website includes: Interactive Multiple-Choice Questions for each chapter Figures from the book as Powerpoints for downloading All chapters online
Download or read book Medical Surgical Nursing written by Sharon Mantik Lewis and published by Mosby Incorporated. This book was released on 2003-12-01 with total page 2176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Package includes Medical-Surgical Nursing: Assessment and Management of Clinical Problems Two Volume text and Virtual Clinical Excursions 2.0
Download or read book A Thesaurus of English Word Roots written by Horace Gerald Danner and published by Rowman & Littlefield. This book was released on 2014-03-27 with total page 1007 pages. Available in PDF, EPUB and Kindle. Book excerpt: Horace G. Danner’s A Thesaurus of English Word Roots is a compendium of the most-used word roots of the English language. As Timothy B. Noone notes in his foreword: “Dr. Danner’s book allows you not only to build up your passive English vocabulary, resulting in word recognition knowledge, but also gives you the rudiments for developing your active English vocabulary, making it possible to infer the meaning of words with which you are not yet acquainted. Your knowledge can now expand and will do so exponentially as your awareness of the roots in English words and your corresponding ability to decode unfamiliar words grows apace. This is the beginning of a fine mental linguistic library: so enjoy!” In A Thesaurus of English Word Roots, all word roots are listed alphabetically, along with the Greek or Latin words from which they derive, together with the roots’ original meanings. If the current meaning of an individual root differs from the original meaning, that is listed in a separate column. In the examples column, the words which contain the root are then listed, starting with their prefixes, for example, dysacousia, hyperacousia. These root-starting terms then are followed by terms where the root falls behind the word, e.g., acouesthesia and acoumeter. These words are followed by words where the root falls in the middle or the end, as in such terms as bradyacusia and odynacusis.. In this manner, A Thesaurus of English Word Roots places the word in as many word families as there are elements in the word. This work will interest linguists and philologists and anyone interested in the etymological aspects of English language.
Download or read book Adult and Family Nurse Practitioner Certification Examination written by Jill E. Winland-Brown and published by F A Davis Company. This book was released on 2009-01-01 with total page 516 pages. Available in PDF, EPUB and Kindle. Book excerpt: The authors provide some excellent tools for teaching a venipuncture class though small, is complete in its coverage of topics related to phlebotomy. The unit on blood collection and venipuncture equipment is very thorough. . . Respiratory Care, review of the 1st Edition.Perfect for intensive one- or two-day phlebotomy courses! This user-friendly text concentrates on the crucial skills of blood specimen collection. . . making it a cost-effective, compact learning tool for cross training and continuing education.
Download or read book Mohs Micrographic Surgery written by Keyvan Nouri and published by Springer Science & Business Media. This book was released on 2012-02-15 with total page 558 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is written for dermatologists, otolaryngologists, facial plastic surgeons and any physician who want to provide state of the art treatment for skin cancer patients. Considering the high incidence of non-melanoma skin cancers such as Basal Cell Carcinoma and Squamous Cell Carcinoma (accounting for over one million cases per year in the United States) and since Mohs Micrographic Surgery has become the treatment of choice for these skin cancers, the popularity of this technique has been increasing dramatically, worldwide.
