Download or read book A Simple Controller for Repetitive Cycles in Atomic Layer Epitaxy written by and published by . This book was released on 1992 with total page 3 pages. Available in PDF, EPUB and Kindle. Book excerpt: A simple controller system has been designed and added to an existing deposition system in order to implement deposition of silicon by Atomic Layer Epitaxy (ALE). A Remote Plasma-enhanced Chemical Vapor Deposition (RPCVD) system has been modified for automatic control of repetitive cycles of disilane dosing and hydrogen desorption via low energy ion bombardment. The simple configuration of the input/output modules and ease of programming allowed efficient debugging of the installation and a large degree of flexibility in in situ cleaning and in both ALE and CVD experiments.
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1993 with total page 1018 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Government Reports Annual Index written by and published by . This book was released on 1994 with total page 1828 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sections 1-2. Keyword Index.--Section 3. Personal author index.--Section 4. Corporate author index.-- Section 5. Contract/grant number index, NTIS order/report number index 1-E.--Section 6. NTIS order/report number index F-Z.
Download or read book Atomic Layer Deposition for Semiconductors written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Download or read book Government Reports Announcements Index written by and published by . This book was released on 1993 with total page 1258 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Handbook of Manufacturing Engineering and Technology written by Andrew Y. C. Nee and published by Springer. This book was released on 2014-10-31 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Springer Reference Work Handbook of Manufacturing Engineering and Technology provides overviews and in-depth and authoritative analyses on the basic and cutting-edge manufacturing technologies and sciences across a broad spectrum of areas. These topics are commonly encountered in industries as well as in academia. Manufacturing engineering curricula across universities are now essential topics covered in major universities worldwide.
Download or read book Silicon Device Processing written by Charles P. Marsden and published by . This book was released on 1970 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: The objective of the Symposium was to provide an opportunity for engineers and applied scientists actively engaged in the silicon device technology field to discuss the most advanced measurement methods for process control and materials characterization.The basic theme of the meeting was to stress the interdependence of measurements techniques, facilities, and materials as they relate to the overall problems of improving and advancing silicon device sciences and technologies.(Author).
Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Download or read book Organometallic Vapor Phase Epitaxy written by Gerald B. Stringfellow and published by Elsevier. This book was released on 2012-12-02 with total page 417 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the special structures required for device applications. In addition, a comprehensive summary detailing the OMVPE results observed to date in a wide range of III-V and II-VI semiconductors is provided. This includes a comparison of results obtained through the use of other epitaxial techniques such as molecular beam epitaxy (MBE), liquid-phase epitaxy (LPE), and vapor phase epitaxy using halide transport.
Download or read book Handbook Of Solid State Batteries Second Edition written by Nancy J Dudney and published by World Scientific. This book was released on 2015-07-09 with total page 835 pages. Available in PDF, EPUB and Kindle. Book excerpt: Solid-state batteries hold the promise of providing energy storage with high volumetric and gravimetric energy densities at high power densities, yet with far less safety issues relative to those associated with conventional liquid or gel-based lithium-ion batteries. Solid-state batteries are envisioned to be useful for a broad spectrum of energy storage applications, including powering automobiles and portable electronic devices, as well as stationary storage and load-leveling of renewably generated energy. This comprehensive handbook covers a wide range of topics related to solid-state batteries, including advanced enabling characterization techniques, fundamentals of solid-state systems, novel solid electrolyte systems, interfaces, cell-level studies, and three-dimensional architectures. It is directed at physicists, chemists, materials scientists, electrochemists, electrical engineers, battery technologists, and evaluators of present and future generations of power sources. This handbook serves as a reference text providing state-of-the-art reviews on solid-state battery technologies, as well as providing insights into likely future developments in the field. It is extensively annotated with comprehensive references useful to the student and practitioners in the field.
Download or read book Complexity Theory and Network Centric Warfare written by James Moffat and published by DIANE Publishing. This book was released on 2010 with total page 201 pages. Available in PDF, EPUB and Kindle. Book excerpt: A report by the Dept. of Defense¿s Command and Control Research Program. Contents: (1) Complexity in Natural and Economic Systems; (2) Concepts for Warfare from Complexity Theory; (3) Evidence for Complex Emergent Behavior in Historical Data; (4) Mathematical Modeling of Complexity, Knowledge, and Conflict; (5) An Extended Example of the Dynamics of Local Collaboration and Clustering, and Some Final Thoughts. Appendix: Optimal Control with a Unique Control Solution. Tables and figures.
Download or read book Flexible Electronics written by Vinod Kumar Khanna and published by IOP Publishing Limited. This book was released on 2019-07-31 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book New Worlds New Horizons in Astronomy and Astrophysics written by National Research Council and published by National Academies Press. This book was released on 2011-02-04 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt: Driven by discoveries, and enabled by leaps in technology and imagination, our understanding of the universe has changed dramatically during the course of the last few decades. The fields of astronomy and astrophysics are making new connections to physics, chemistry, biology, and computer science. Based on a broad and comprehensive survey of scientific opportunities, infrastructure, and organization in a national and international context, New Worlds, New Horizons in Astronomy and Astrophysics outlines a plan for ground- and space- based astronomy and astrophysics for the decade of the 2010's. Realizing these scientific opportunities is contingent upon maintaining and strengthening the foundations of the research enterprise including technological development, theory, computation and data handling, laboratory experiments, and human resources. New Worlds, New Horizons in Astronomy and Astrophysics proposes enhancing innovative but moderate-cost programs in space and on the ground that will enable the community to respond rapidly and flexibly to new scientific discoveries. The book recommends beginning construction on survey telescopes in space and on the ground to investigate the nature of dark energy, as well as the next generation of large ground-based giant optical telescopes and a new class of space-based gravitational observatory to observe the merging of distant black holes and precisely test theories of gravity. New Worlds, New Horizons in Astronomy and Astrophysics recommends a balanced and executable program that will support research surrounding the most profound questions about the cosmos. The discoveries ahead will facilitate the search for habitable planets, shed light on dark energy and dark matter, and aid our understanding of the history of the universe and how the earliest stars and galaxies formed. The book is a useful resource for agencies supporting the field of astronomy and astrophysics, the Congressional committees with jurisdiction over those agencies, the scientific community, and the public.
Download or read book Controlled Pulmonary Drug Delivery written by Hugh D.C. Smyth and published by Springer Science & Business Media. This book was released on 2011-06-24 with total page 560 pages. Available in PDF, EPUB and Kindle. Book excerpt: The pace of new research and level of innovation repeatedly introduced into the field of drug delivery to the lung is surprising given its state of maturity since the introduction of the pressurized metered dose inhaler over a half a century ago. It is clear that our understanding of pulmonary drug delivery has now evolved to the point that inhalation aerosols can be controlled both spatially and temporally to optimize their biological effects. These abilities include controlling lung deposition, by adopting formulation strategies or device technologies, and controlling drug uptake and release through sophisticated particle technologies. The large number of contributions to the scientific literature and variety of excellent texts published in recent years is evidence for the continued interest in pulmonary drug delivery research. This reference text endeavors to bring together the fundamental theory and practice of controlled drug delivery to the airways that is unavailable elsewhere. Collating and synthesizing the material in this rapidly evolving field presented a challenge and ultimately a sense of achievement that is hopefully reflected in the content of the volume.
Download or read book Thin Film Deposition Principles and Practice written by Donald L. Smith and published by McGraw Hill Professional. This book was released on 1995-03-22 with total page 648 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.
Download or read book Fundamentals of Silicon Carbide Technology written by Tsunenobu Kimoto and published by John Wiley & Sons. This book was released on 2014-11-24 with total page 565 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive introduction and up-to-date reference to SiC power semiconductor devices covering topics from material properties to applications Based on a number of breakthroughs in SiC material science and fabrication technology in the 1980s and 1990s, the first SiC Schottky barrier diodes (SBDs) were released as commercial products in 2001. The SiC SBD market has grown significantly since that time, and SBDs are now used in a variety of power systems, particularly switch-mode power supplies and motor controls. SiC power MOSFETs entered commercial production in 2011, providing rugged, high-efficiency switches for high-frequency power systems. In this wide-ranging book, the authors draw on their considerable experience to present both an introduction to SiC materials, devices, and applications and an in-depth reference for scientists and engineers working in this fast-moving field. Fundamentals of Silicon Carbide Technology covers basic properties of SiC materials, processing technology, theory and analysis of practical devices, and an overview of the most important systems applications. Specifically included are: A complete discussion of SiC material properties, bulk crystal growth, epitaxial growth, device fabrication technology, and characterization techniques. Device physics and operating equations for Schottky diodes, pin diodes, JBS/MPS diodes, JFETs, MOSFETs, BJTs, IGBTs, and thyristors. A survey of power electronics applications, including switch-mode power supplies, motor drives, power converters for electric vehicles, and converters for renewable energy sources. Coverage of special applications, including microwave devices, high-temperature electronics, and rugged sensors. Fully illustrated throughout, the text is written by recognized experts with over 45 years of combined experience in SiC research and development. This book is intended for graduate students and researchers in crystal growth, material science, and semiconductor device technology. The book is also useful for design engineers, application engineers, and product managers in areas such as power supplies, converter and inverter design, electric vehicle technology, high-temperature electronics, sensors, and smart grid technology.
Download or read book Thermal Analysis of Polymeric Materials written by Bernhard Wunderlich and published by Springer Science & Business Media. This book was released on 2005-04-04 with total page 918 pages. Available in PDF, EPUB and Kindle. Book excerpt: Table of Contents Table of Contents 1 Atoms, small, and large molecules 2 Basics of thermal analysis 3 Dynamics of chemical and phase changes 4 Thermal analysis tools 5 Structure and properties of materials 6 Single component materials 7 Multiple component materials App. A.1 Table of thermal properties of linear macromolecules and related small molecules - the ATHAS data bank App. A.2 Radiation scattering App. A.3 Derivation of the Rayleigh ratio App. A.4 Neural network predictions App. A.5 Legendre transformations, Maxwell relations, linking of entropy and probability, and derivation of (dS/dT) App. A.6 Boltzmann distribution, harmonic vibration, complex numbers, and normal modes App. A.7 Summary of the basic kinetics of chemical reactions App. A.8 The ITS 1990 and the Krypton-86 length standard App. A.9 Development of classical DTA to DSC App. A.10 Examples of DTA and DSC under extreme conditions App. A.11 Description of an online correction of the heat-flow rate App. A.12 Derivation of the heat-flow equations App. A.13 Description of sawtooth-modulation response App. A.14 An introduction to group theory, definitions of configurations and conformations, and a summary of rational and irrational numbers App. A.15 Summary of birefringence and polarizing microscopy App. A.16 Summary of X-ray diffraction and interference effects App. A.17 Optical analog of electron double diffraction to produce Moire patterns.
