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Book Zr doped ZnO by Atomic Layer Deposition for Transparent Conducting Oxide Films

Download or read book Zr doped ZnO by Atomic Layer Deposition for Transparent Conducting Oxide Films written by 俞培偉 and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Atomic Layer Deposition of Zinc Based Transparent Conductive Oxides

Download or read book Atomic Layer Deposition of Zinc Based Transparent Conductive Oxides written by Sanjeev Kumar Gurram and published by Fraunhofer Verlag. This book was released on 2017 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this work Atomic Layer deposition of niobium and titanium doped ZnO based Transparent Conductive Oxide (TCO) coatings were developed. The fundamentals required for the deposition and doping of ZnO TCOs are discussed. The various opto-electronic properties of the niobium and titanium doped ZnO films were determined and compared. A model was proposed to explain the various changes in the opto-electronic properties of these films.

Book Zirconium Doped Zinc Oxide Thin Films Deposited by Atomic Layer Deposition

Download or read book Zirconium Doped Zinc Oxide Thin Films Deposited by Atomic Layer Deposition written by Stephania Herodotou and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Spectroscopic Ellipsometry

Download or read book Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and published by John Wiley & Sons. This book was released on 2007-09-27 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Book High Quality ZnO

    Book Details:
  • Author :
  • Publisher :
  • Release : 2009
  • ISBN :
  • Pages : 34 pages

Download or read book High Quality ZnO written by and published by . This book was released on 2009 with total page 34 pages. Available in PDF, EPUB and Kindle. Book excerpt: Aluminum-doped zinc oxide, ZnO:Al or AZO, is a well-known n-type transparent conducting oxide with great potential in a number of applications currently dominated by indium tin oxide (ITO). In this study, the optical and electrical properties of AZO thin films deposited on glass and silicon by pulsed filtered cathodic arc deposition are systematically studied. In contrast to magnetron sputtering, this technique does not produce energetic negative ions, and therefore ion damage can be minimized. The quality of the AZO films strongly depends on the growth temperature while only marginal improvements are obtained with post-deposition annealing. The best films, grown at a temperature of about 200?C, have resistivities in the low to mid 10-4 Omega cm range with a transmittance better than 85percent in the visible part of the spectrum. It is remarkable that relatively good films of small thickness (60 nm) can be fabricated using this method.

Book Transparent Conductive Zinc Oxide

Download or read book Transparent Conductive Zinc Oxide written by Klaus Ellmer and published by Springer Science & Business Media. This book was released on 2007-12-29 with total page 453 pages. Available in PDF, EPUB and Kindle. Book excerpt: Zinc oxide (ZnO) belongs to the class of transparent conducting oxides that can be used as transparent electrodes in electronic devices or heated windows. In this book the material properties of, the deposition technologies for, and applications of zinc oxide in thin film solar cells are described in a comprehensive manner. Structural, morphological, optical and electronic properties of ZnO are treated in this review.

Book Zinc Oxide Thin Films for Transparent Conducting Oxide Application

Download or read book Zinc Oxide Thin Films for Transparent Conducting Oxide Application written by Vinod Kumar and published by LAP Lambert Academic Publishing. This book was released on 2012 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: Transparent Conducting Oxides (TCOs) are unusual materials as they have to possess a high electrical conductivity with good transparency in the visible region of electromagnetic spectrum. TCOs have many applica-tions such as electrical inter-connections for window electrodes in flat panel displays, electro-optical devices and solar cells. TCOs are also receiving much attention and recognition as they are promising candidate for optoelectronic application in the ultraviolet to visible range. Other important parameters that determine the usefulness of TCOs are environmental stability, process-ing compatibility with other device elements and production cost etc. Indium (In) doped tin oxide also known as ITO is used as TCO in industries. Now a days, TCOs have already been largely investigated. Therefore, in the recent years, this has stimulated the development of new TCO materials like doped ZnO."

Book Conducting and Optical Properties of Transparent Conducting Indium Doped Zinc Oxide Thin Films by Sol Gel Processing

Download or read book Conducting and Optical Properties of Transparent Conducting Indium Doped Zinc Oxide Thin Films by Sol Gel Processing written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Transparent conducting oxides were successfully prepared from mixed zinc nitrate hexahydrate and indium nitrate hydrate solutions in ethylene glycol using sol-gel technique. The In content in the film was varied (0, 2, 10, 20, 40, 75 and 100 atom %). Films were prepared by spin coating of the liquid precursors followed by thermal decomposition at 400° C after each layer. According to X-ray diffraction (XRD) measurements, the pure ZnO and pure InO films (0 and at 100 % In) were crystalline as-deposited. The crystallinity was suppressed in mixed compositions such that the films with compositions between 10 and 75 at % were amorphous. All the films were transparent with the transmission cut-off frequency near 400 nm, which is characteristic of TCO materials. All as-deposited films were conductive with 0 and 100 atom % In having the lowest resistivities. The resistivity of all compositions were improved by post-deposition reducing anneal in pure Ar at 300° C. The lowest resistivity of 0.2?cm was obtained for the pure ZnO after Ar anneal. It was two-orders of magnitude higher than reported in the literature for the In-doped ZnO, which was attributed to the low processing temperature. The resistivities of as-deposited and annealed in Ar films were increased by consequent air anneal at 300° C.

Book The IoT Physical Layer

Download or read book The IoT Physical Layer written by Ibrahim (Abe) M. Elfadel and published by Springer. This book was released on 2018-09-03 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book documents some of the most recent advances on the physical layer of the Internet of Things (IoT), including sensors, circuits, and systems. The application area selected for illustrating these advances is that of autonomous, wearable systems for real-time medical diagnosis. The book is unique in that it adopts a holistic view of such systems and includes not only the sensor and processing subsystems, but also the power, communication, and security subsystems. Particular attention is paid to the integration of these IoT subsystems as well as the prototyping platforms needed for achieving such integration. Other unique features include the discussion of energy-harvesting subsystems to achieve full energy autonomy and the consideration of hardware security as a requirement for the integrity of the IoT physical layer. One unifying thread of the various designs considered in this book is that they have all been fabricated and tested in an advanced, low-power CMOS process, namely GLOBALFOUNDRIES 65nm CMOS LPe.

Book Transparent Conductive Zinc Oxide

Download or read book Transparent Conductive Zinc Oxide written by Klaus Ellmer and published by Springer. This book was released on 2009-09-02 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Zinc oxide (ZnO) belongs to the class of transparent conducting oxides that can be used as transparent electrodes in electronic devices or heated windows. In this book the material properties of, the deposition technologies for, and applications of zinc oxide in thin film solar cells are described in a comprehensive manner. Structural, morphological, optical and electronic properties of ZnO are treated in this review.

Book Functional Doped Metal Oxide Films

Download or read book Functional Doped Metal Oxide Films written by Abdelkader Nebatti Ech-Chergui and published by . This book was released on 2011 with total page 177 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Deposition of Al doped ZnO Films by High Power Impulse Magnetron Sputtering

Download or read book Deposition of Al doped ZnO Films by High Power Impulse Magnetron Sputtering written by Martin Mickan and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Transparent conducting oxides (TCOs) are an important class of materials with many applications such as low emissivity coatings, or transparent electrodes for photovoltaics and flat panel displays. Among the possible TCO materials, Al-doped ZnO (AZO) is studied due to its relatively low cost and abundance of the raw materials. Thin films of AZO are commonly produced using physical vapour deposition techniques such as magnetron sputtering. However, there is a problem with the homogeneity of the films using reactive direct current magnetron sputtering (DCMS). This homogeneity problem can be related to the bombardment of the growing film with negative oxygen ions, that can cause additional acceptor defects and the formation of insulating secondary phases. In this work AZO films are deposited by high power impulse magnetron sputtering (HiPIMS), a technique in which high instantaneous current densities are achieved by short pulses of low duty cycle. In the first part of this thesis, the possibility to improve the homogeneity of the deposited AZO films by using HiPIMS is demonstrated. This improvement can be related to the high instantaneous sputtering rate during the HiPIMS pulses, so the process can take place in the metal mode. This allows for a lower oxygen ion bombardment of the growing film, which can help to avoid the formation of secondary phases. Another problem of AZO is the stability of the properties in humid environments. To assess this problem, the degradation of the electrical properties after an aging procedure was investigated for films deposited by both DCMS and by HiPIMS. A method was proposed, to restore the properties of the films, using a low temperature annealing under N2 atmosphere. The improvement of the electrical properties of the films could be related to a diffusion process, where water is diffusing out of the films. Then, the influence of the substrate temperature on the properties of AZO films deposited by HiPIMS was studied. The electrical, optical and structural properties were found to improve with increasing substrate temperature up to 600° C. This improvement can be mostly explained by the increase in crystalline quality and the annealing of defects. Finally, the deposition of AZO films on flexible PET substrates was investigated. The films are growing as a thick porous layer of preferentially c-axis oriented columns on top of a thin dense seed layer. The evolution of the sheet resistance of the films after bending the films with different radii was studied. There is an increase in the sheet resistance of the films with decreasing bending radius, that is less pronounced for thicker films.

Book Optimization of the Process for Sol gel Derived ZnO

Download or read book Optimization of the Process for Sol gel Derived ZnO written by Matthew Nagorski and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Transparent and conducting Al-doped ZnO thin films with c-axis-preferred orientation were prepared on glass substrate via sol-gel route. The physical, optical and electrical properties were investigated to determine an optimal withdrawal speed, aluminum source and treatment in order to obtain a smooth, dense, highly crystalline, conductive and transparent thin film with a high figure of merit for transparent conducting oxide applications. An optimal withdrawal speed was found to be 2.5 cm/min. Optimal aluminum source and concentration was found to be 0.5 at.% using aluminum chloride hexahydrate. An additional treatment in an N2 environment was found to be the best method to improve the electrical properties of the films while maintaining high crystallinity and transparency.

Book Experimental Study of Wide Bandgap Transparent Conducting Oxide Thin Films

Download or read book Experimental Study of Wide Bandgap Transparent Conducting Oxide Thin Films written by Min Yan and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Highly oriented Ga doped ZnO nano-rod arrays were fabricated by PLD on GaN and sapphire substrates. X-ray diffraction revealed that these nano-rods are epitaxial c-plane ZnO. The growth of the ZnO nano-rods was found to be electric-field-assisted. The morphology of the ZnO nano-rods is mainly determined by the Ga doping level and the substrate temperature. These ordered ZnO nano-rod arrays are attractive for field emission and optoelectronic applications.