Download or read book X ray optics made by X ray lithography Process optimization and quality control written by Koch, Frieder Johannes and published by KIT Scientific Publishing. This book was released on 2017-10-16 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book X ray Optics Made by X ray Lithography written by Frieder Johannes Koch and published by . This book was released on 2020-10-09 with total page 158 pages. Available in PDF, EPUB and Kindle. Book excerpt: Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work. This work was published by Saint Philip Street Press pursuant to a Creative Commons license permitting commercial use. All rights not granted by the work's license are retained by the author or authors.
Download or read book Soft X ray Optics written by Eberhard Spiller and published by SPIE Press. This book was released on 1994 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text describes optics mainly in the 10 to 500 angstrom wavelength region. These wavelengths are 50 to 100 times shorter than those for visible light and 50 to 100 times longer than the wavelengths of medical x rays or x-ray diffraction from natural crystals. There have been substantial advances during the last 20 years, which one can see as an extension of optical technology to shorter wavelengths or as an extension of x-ray diffraction to longer wavelengths. Artificial diffracting structures like zone plates and multilayer mirrors are replacing the natural crystals of x-ray diffraction. Some of these structures can now be fabricated to have diffraction-limited resolution. The new possibilities are described in a simple, tutorial way.
Download or read book X ray Optics and Surface Science written by A. V. Vinogradov and published by . This book was released on 1995 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Download or read book X Ray Science and Technology written by Alan G. Michette and published by CRC Press. This book was released on 1993-06 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Suitable for graduate courses in x-ray physics and x-ray optics. Written by experienced lecturers, this book covers conventional and advanced x-ray sources. Includes sychrotron radiation, plasma sources and x-ray lasers, x-ray detectors, x-ray optics and the interaction of x-rays with matter and their applications in a variety of medical and technological contexts.
Download or read book Design and Microfabrication of Novel X ray Optics II written by Anatoly A. Snigirev and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Download or read book X ray Optics written by A. Authier and published by Springer. This book was released on 1977 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book X rays written by Alan G. Michette and published by . This book was released on 1996 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: The discovery of x–rays has revolutionized many areas of 20th century science. This book commemorates the 100th anniversary of the discovery of x–rays by Wilhelm Rontgen in 1895. Eminent scientists review historical aspects and discuss modern techniques and applications.
Download or read book Soft X Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Download or read book Nanoscale Photonic Imaging written by Tim Salditt and published by Springer Nature. This book was released on 2020-06-09 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: This open access book, edited and authored by a team of world-leading researchers, provides a broad overview of advanced photonic methods for nanoscale visualization, as well as describing a range of fascinating in-depth studies. Introductory chapters cover the most relevant physics and basic methods that young researchers need to master in order to work effectively in the field of nanoscale photonic imaging, from physical first principles, to instrumentation, to mathematical foundations of imaging and data analysis. Subsequent chapters demonstrate how these cutting edge methods are applied to a variety of systems, including complex fluids and biomolecular systems, for visualizing their structure and dynamics, in space and on timescales extending over many orders of magnitude down to the femtosecond range. Progress in nanoscale photonic imaging in Göttingen has been the sum total of more than a decade of work by a wide range of scientists and mathematicians across disciplines, working together in a vibrant collaboration of a kind rarely matched. This volume presents the highlights of their research achievements and serves as a record of the unique and remarkable constellation of contributors, as well as looking ahead at the future prospects in this field. It will serve not only as a useful reference for experienced researchers but also as a valuable point of entry for newcomers.
Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place
Download or read book X Ray Microscopy written by G. Schmahl and published by Springer. This book was released on 2013-04-17 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt: X-ray microscopy fills a gap between optical and electron microscopy. Using soft x-rays, a resolution higher than with visible light can be obtained. In comparison to electron microscopy, thick, wet, unstained specimens can be examined. This is especially advantageous for biological applications. The intense synchrotron radiation of electron storage rings and the de velopment of optical elements for soft x-rays render x-ray microscopy feasi ble for basic research. Wider applications will be possible in the future with the development of laboratory x-ray sources and microscopes. In 1979 a conference on x-ray microscopy was organized by the New York Academy of Sciences and in 1981 a symposium on high resolution soft x-ray optics was held at Brookhaven. The present volume contains the contributions to the sympos i um "X-Ray Microscopy", organ i zed by the Akademie der Wi ssen schaften in Gottingen in September 1983. In their capacity as conference chairmen, the editors would like to thank the Akademie der Wissenschaften, especially Prof. H.G. Wagner, Secretary of the Academy, and Mr. J. Pfahlert for organizing the symposium. We are in debted to the Stiftung Volkswagenwerk for financial support. The symposium was held at the Max-Planck-Institut fUr Stromungsforschung. We are grateful for their hospitality and assistance during the symposium. Thanks are due to all authors and to the Springer Verlag for their combined efforts. We thank Dipl.-Phys. P. Guttmann, Dr. B. Niemann and Mrs. A. Marienhagen for their assistance during the final preparation of the manuscripts.
Download or read book X ray waveguide optics written by Sarah Hoffmann-Urlaub and published by Göttingen University Press. This book was released on 2017 with total page 134 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern x-ray sources and analysis techniques such as lens less imaging combined with phase retrieval algorithms allow for resolving structure sizes in the nanometer range. For this purpose optics have to be employed, ensuring small focal spot dimensions simultaneously with high photon densities. Furthermore, the wave front behind the optics is required to be smooth enabling for high resolution imaging. Combining all these properties, x-ray waveguides are well suited to perform this task, since the intensity distribution behind the guide is restricted in two dimensions serving as a secondary quasi point-source without wave-front aberrations, showing also a high divergence, suitable for resolving fine features. Importantly, the radiation provided by the waveguide reveals a high degree of coherence, required by many imaging techniques. The waveguide itself consists of an air-filled channel embedded in a solid matrix; typical materials are silicon, germanium or quartz. While the entrance area is nano-sized, the channel length is in the millimeter-range, this way posing challenges to fabricate high aspect ratio geometries. Since the functioning of x-ray waveguides is based on the total reflection at small incident angles, the surface roughness of the channel walls must be as low as possible to avoid scattering and hence loss of intensity. To fulfill these demanding conditions, a process scheme involving spin-coating, electron beam lithography, wet development, reactive ion etching and wafer bonding is optimized within this work. To gain deeper insights into the principle of wave guiding finite difference simulations are performed, also opening access for advanced design considerations such as gratings, tapered and curved channels, or beamsplitters, enabling for constructing novel x-ray tools as for example time delay devices or interferometers. Waveguides in all geometries are tested at synchrotron sources, accomplishing new benchmarks in x-ray optical performance. Here, the x-ray beam leaving the channel, propagates out to a pixel array detector in the far-field region. From the recorded data the intensity distribution in the near-field directly behind the waveguide is reconstructed, revealing an outstanding agreement with the simulations and electron micrographs. Since the radiation field of the waveguide is well-characterized and also tunable to meet the requirements of both the measurement setup and the sample, they are suited of a broad field of applications in coherent x-ray imaging.
Download or read book X Rays From Laser Plasmas written by I. C. E. Turcu and published by John Wiley & Sons. This book was released on 1999 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt: Soft X-rays have great potential for use in a wide variety of applications, including the semiconductor industry and the life sciences. X-Rays from Laser Plasmas: Generation and Applications focuses exclusively and in detail on the science and technology of soft X-rays produced with non-synchrotron sources. Using a minimum of mathematical formulae, it discusses how such X-rays can be efficiently and economically generated from plasmas produced by lasers, and how they interact with matter. Authored by Dr Edmond Turcu, one of the pioneers in this field, X-Rays from Laser Plasmas: Generation and Applications will be of great interest to a wide variety of readers, including all those working in X-ray lithography, microscopy, and radiobiology.
Download or read book Eighth International Congress on X ray Optics and Microanalysis written by Donald Robert Beaman and published by . This book was released on 1980 with total page 690 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advances in Laboratory based X ray Sources and Optics written by and published by . This book was released on 2002 with total page 158 pages. Available in PDF, EPUB and Kindle. Book excerpt:
