Download or read book Understanding the Morphological Evolution of SI 111 Surfaces During Aqueous Etching written by Jaroslav Flidr and published by . This book was released on 1999 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book The Evolution of the Surface Morphology of Silicon During Aqueous Etching written by Theresa Anne Newton and published by . This book was released on 2000 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Understanding and Controlling the Step Bunching Instability in Aqueous Silicon Etching written by Hailing Bao and published by . This book was released on 2005 with total page 244 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Evolution of Silicon Surface Morphologies During Aqueous Fluorine Etching written by Yi-Chiau Huang and published by . This book was released on 2000 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Evolution of Thin Film Morphology written by Matthew Pelliccione and published by Springer Science & Business Media. This book was released on 2008-01-29 with total page 206 pages. Available in PDF, EPUB and Kindle. Book excerpt: The focus of this book is on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition. It will benefit those working in any discipline that requires an understanding of thin film growth processes.

Download or read book The Aqueous Etching of Silicon 100 written by Ian T. Clark and published by . This book was released on 2008 with total page 125 pages. Available in PDF, EPUB and Kindle. Book excerpt: An etchant that produces atomically flat or near-atomically flat Si(100) surfaces has been long been sought by the microelectronics industry; however, no such etchant has yet been demonstrated. In the following I describe a combined spectroscopic and morphological investigation of Si(100) surfaces etched in two aqueous etchants: aqueous ammonium fluoride and pure deoxygenated water. For both of these systems, the etch morphology was determined using ex situ ultrahigh vacuum scanning tunneling microscopy. Information on the chemical nature of the surface species was obtained using Fourier transform infrared absorption spectroscopy in the multiple-internal-reflection geometry. A new deconvolution method, which is described here, was applied to the spectroscopic data to maximize the information extracted from these spectra. The spectroscopic data were used in conjunction with morphological data from STM experiments to determine the atomic-scale structure of the etched surfaces. During ammonium fluoride etching, the Si(100) surface was found to achieve a near-atomically-flat steady-state etch morphology characterized by & sim;200-A-wide terraces populated by alternating rows of unstrained silicon dihydrides within 30 sec. In contrast, during H2O etching, the surface structure was found to evolve over the course days, developing a surprisingly homogeneous 4-fold-symmetric morphology dominated by orthogonally oriented "stripes" running along & lang;011 & rang; directions, atomically flat terraces and several-monolayer-height hillocks. The atomic-scale structure of both etch morphologies is described, and the role of inter-adsorbate strain in the formation of the etch morphologies is discussed. Finally, the development of an organic functionalization chemistry suitable for use in silicon-resonator-based frequency-detected chemical sensing is described. The composition of these organic monolayers were characterized using Fourier transform infrared absorption spectroscopy, and the affect of monolayer surface termination on the mechanical properties of single-crystal-silicon micromechanical resonators was determined.

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Download or read book Aqueous Etching of Microfabricated and Nanofabricated Surfaces written by Rikard Anton Wind and published by . This book was released on 2003 with total page 462 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Surface Morphology of SI 111 in Alkaline Etching Solutions written by Ismail Ali Shah and published by . This book was released on 2011 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Dissertation Abstracts International written by and published by . This book was released on 2004 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book The Chemical and Physical Mechanisms Determining the Morphology of Wet chemically Etched Si 100 written by Brandon Scott Aldinger and published by . This book was released on 2010 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Because harsh cleaning processes roughen silicon wafers, etchants that can produce smooth Si(100) surfaces have been a long-standing goal of the microelectronics industry. In this work, scanning tunneling microscopy was used to investigate the morphologies of wet-chemically-etched Si(100) surfaces, whereas the chemical composition was studied using infrared absorption spectroscopy coupled with a polarization deconvolution technique. Using this combined approach, aqueous ammonium fluoride etching of Si(100) is shown to produce near-atomically flat surfaces consisting of alternating rows of silicon dihydrides. A new assignment of the vibrational modes accounts for the presence of both strained and unstrained adsorbates on the etched surface. This smooth morphology was easily disrupted by the accumulation of hydrogen bubbles on the surface during etching. Roughening mechanisms created raised circular pillars and microfaceted etch pits if bubbles were not removed via one of several bubble-reduction techniques. In addition, density functional theory was used to predict the vibrational modes for a variety of hydrogen-terminated silicon surfaces. The calculated mode energies highlight the sensitivity of vibrational frequencies to interadsorbate strain, though in general, the calculated frequencies were not accurate enough to predict vibrational frequencies without substantial experimental confirmation. Lastly, the pH-dependence of buffered hydrofluoric acid (BHF) etching of Si(100) was examined. Below the critical pH of 7.8, etched surfaces became progressively rougher and covered with hillocks, whereas surfaces etched in solutions above this pH exhibit no change from the flat missing-row structure. Prominent stretching modes for the BHFetched H/Si(100) surfaces were also assigned based on trends observed in the pHmodified Si(100) spectra and previously well-characterized morphologies.

Download or read book Nanochemistry written by Xuan Wang and published by Walter de Gruyter GmbH & Co KG. This book was released on 2022-11-21 with total page 713 pages. Available in PDF, EPUB and Kindle. Book excerpt: The modernization of science and technology using nanomaterials will open a new paradigm to meet the increasing energy demand. This book provides an in-depth understanding of theoretical perspectives from molecular and atomic levels. The modern analytical techniques explored provide an understanding of the interactions of particles at interfaces. This book gives a holistic view of materials synthesis, analysis, application, and safe handling.

Download or read book Issues in Applied Physics 2011 Edition written by and published by ScholarlyEditions. This book was released on 2012-01-09 with total page 6150 pages. Available in PDF, EPUB and Kindle. Book excerpt: Issues in Applied Physics / 2011 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Applied Physics. The editors have built Issues in Applied Physics: 2011 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Applied Physics in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Issues in Applied Physics: 2011 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.

Download or read book Directory of Graduate Research written by and published by . This book was released on 2001 with total page 1850 pages. Available in PDF, EPUB and Kindle. Book excerpt: Faculties, publications and doctoral theses in departments or divisions of chemistry, chemical engineering, biochemistry and pharmaceutical and/or medicinal chemistry at universities in the United States and Canada.

Download or read book American Doctoral Dissertations written by and published by . This book was released on 1999 with total page 848 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Electrochemistry of Silicon and Its Oxide written by Xiaoge Gregory Zhang and published by Springer Science & Business Media. This book was released on 2007-05-08 with total page 525 pages. Available in PDF, EPUB and Kindle. Book excerpt: It may be argued that silicon, carbon, hydrogen, oxygen, and iron are among the most important elements on our planet, because of their involvement in geological, biol- ical, and technological processes and phenomena. All of these elements have been studied exhaustively, and voluminous material is available on their properties. Included in this material are numerous accounts of their electrochemical properties, ranging from reviews to extensive monographs to encyclopedic discourses. This is certainly true for C, H, O, and Fe, but it is true to a much lesser extent for Si, except for the specific topic of semiconductor electrochemistry. Indeed, given the importance of the elect- chemical processing of silicon and the use of silicon in electrochemical devices (e. g. , sensors and photoelectrochemical cells), the lack of a comprehensive account of the electrochemistry of silicon in aqueous solution at the fundamental level is surprising and somewhat troubling. It is troubling in the sense that the non-photoelectrochemistry of silicon seems “to have fallen through the cracks,” with the result that some of the electrochemical properties of this element are not as well known as might be warranted by its importance in a modern technological society. Dr. Zhang’s book, Electrochemical Properties of Silicon and Its Oxide, will go a long way toward addressing this shortcoming. As with his earlier book on the elect- chemistry of zinc, the present book provides a comprehensive account of the elect- chemistry of silicon in aqueous solution.

Download or read book Surface and Interface Science Volumes 7 and 8 written by Klaus Wandelt and published by John Wiley & Sons. This book was released on 2020-03-30 with total page 1002 pages. Available in PDF, EPUB and Kindle. Book excerpt: In ten volumes, this unique handbook covers all fundamental aspects of surface and interface science and offers a comprehensive overview of this research area for scientists working in the field, as well as an introduction for newcomers. Volume 1: Concepts and Methods Volume 2: Properties of Elemental Surfaces Volume 3: Properties of Composite Surfaces: Alloys, Compounds, Semiconductors Volume 4: Solid-Solid Interfaces and Thin Films Volume 5: Solid-Gas Interfaces I Volume 6: Solid-Gas Interfaces II Volume 7: Liquid and Biological Interfaces Volume 8: Interfacial Electrochemistry Volume 9: Applications of Surface Science I Volume 10: Applications of Surface Science II Content of Volumes 7 & 8: * Probing Liquid/Solid Interfaces at the Molecular Level * Structure and Dynamics of Liquid-Solid Interfaces * Adsorption of Biomolecules * Liquid Surfaces * Surfaces of Ionic Liquids * Superhydrophobicity * Cell Penetrating Peptides Targeting and Distorting Biological Membranes * Theory of Solid/Electrolyte Interfaces * Metal/Electrolyte Interfaces: An Atomic View * X-Ray Spectroscopy at Electro-Catalytic Interfaces * Fundamental Aspects of Electro-Catalysis * Non-Linear Processes at Solid/Liquid Interfaces