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Book Topical Meeting on Interactions of Low Pressure Plasmas with Solid Surfaces

Download or read book Topical Meeting on Interactions of Low Pressure Plasmas with Solid Surfaces written by J. Hertz and published by . This book was released on 1979 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Topical Meeting on Interactions of Low Pressure Plasmas with Solid Surfaces

Download or read book Topical Meeting on Interactions of Low Pressure Plasmas with Solid Surfaces written by V. Veprek and published by . This book was released on 1979 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Plasma Chemistry  Topical Meeting on Interactions of Low Pressure Plasmas with Solid Surfaces and Round Table on Thermal Plasma Processing

Download or read book Plasma Chemistry Topical Meeting on Interactions of Low Pressure Plasmas with Solid Surfaces and Round Table on Thermal Plasma Processing written by and published by . This book was released on 1979 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Conference Proceedings

Download or read book Conference Proceedings written by S. Vepřek and published by . This book was released on 1979 with total page 795 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book 4th International Symposium on Plasma Chemistry

Download or read book 4th International Symposium on Plasma Chemistry written by University of Zurich and published by . This book was released on 1979 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book 4th International Symposium on Plasma Chemistry

Download or read book 4th International Symposium on Plasma Chemistry written by S. Vepřek and published by . This book was released on 1979 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Fourth International Symposium on Plasma Chemistry

Download or read book Fourth International Symposium on Plasma Chemistry written by International Union of Pure and Applied Chemistry and published by . This book was released on 1979 with total page 475 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book 4th International Symposium on Plasma Chemistry

Download or read book 4th International Symposium on Plasma Chemistry written by J. Hertz and published by . This book was released on 1979 with total page 795 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Conference Proceedings

Download or read book Conference Proceedings written by S. Vepřek and published by . This book was released on 1979 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book 4th International Symposium on Plasma Chemistry

Download or read book 4th International Symposium on Plasma Chemistry written by S. Vepřek and published by . This book was released on 1979 with total page 864 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book National Union Catalog

Download or read book National Union Catalog written by and published by . This book was released on 1982 with total page 1032 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Subject Catalog

Download or read book Subject Catalog written by Library of Congress and published by . This book was released on 1981 with total page 1004 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Low Pressure Plasmas and Microstructuring Technology

Download or read book Low Pressure Plasmas and Microstructuring Technology written by Gerhard Franz and published by Springer Science & Business Media. This book was released on 2009-04-09 with total page 743 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the semiconductor industry is inconceivable wi- outthegiantprogressintheplasmatechnology.Moore’slawisnotcarvedinto 1 stone, and not only the ITRS map is subject to change every ?ve years but also new branches develop and others mingle together. Moreover, the quality of conventional materials can be improved by plasma treatment:Cottonbecomesmorecrease-resistant,leathermoredurable,andthe shrinking of wool ?bers during the washing process can be signi?cantly reduced. To cut a long story short: More than 150 years after the discovery of the sputtering e?ect by Grove, plasma-based processes are about to spread out into new ?elds of research and application [1]—no wonder that the market for etching machines kept growing by an annual rate of 17 % up to the burst of the internet bubble, and it took only some years of recovery to continue the voyage [2].

Book Scientific and Technical Aerospace Reports

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt: