Download or read book To Study the Modeling Analysis and Design of MEMS Gyroscope written by Amandeep Sharma and published by LAP Lambert Academic Publishing. This book was released on 2013 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a study of various MEMS Gyroscopes available in the world, their working principles/phenomenon and respective applications.It covers the various processes involved in the fabrication of MEMS gyroscopes.The book will help as a tutorial to model, simulate and thus analyse a MEMS Gyroscope using Coventorware 2010 MEMS+2(MEMS design tool). It will also elaborate the actual working principle of MEMS Gyroscopes used in the sensors, gadgets and instruments with intrinsic propertie

Download or read book Modeling Analysis and Design of a Vibrating Ring MEMS Gyroscope written by Erez Yotvat and published by . This book was released on 2011 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Analysis and Modeling of Capacitive MEMS Gyroscopes with Feedback Control written by Wei Cui and published by . This book was released on 2010 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Thermal MEMS Gyroscope Design and Characteristics Analysis written by Nilgoon Zarei and published by . This book was released on 2013 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thermal MEMS gyroscope characteristics have been studied to optimize gyroscope performance. Different parameters such as gas properties, heaters power and switching frequency have been optimized to increase the device sensitivity. A new Thermal MEMS gyroscope model referred to as "Forced Convection MEMS Gyroscope" has been introduced. In this design the output signal has been increased by adding external force to the system. Parameter optimization to increase the device efficiency has also been investigated. An experimental set up has been presented and the simulation study compared with experimental results. Another model referred to as the "Three-axis MEMS gyroscope" has been defined to measure rotation along three axes of rotation. In this design a single heater replaces the two heaters of previous models. Simulation results have shown that using this design it may be possible to distinguish the rotation signal from the buoyancy effects associated with acceleration.

Download or read book Design and Modeling of a Dual Mass SOI MEMS Gyroscope written by Ashwin A. Seshia and published by . This book was released on 1999 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Design and Dynamic Analysis of MEMS Gyroscopes written by Surender Reddy Poreddy and published by . This book was released on 2004 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this thesis, a novel design for a vibratory wheel micro gyroscope is presented. A DRIE thick structure has been realized. Thicker structure enables the proof masses to have more mass and hence more inertia and better performance. For the highest sensitivity of the gyroscope angular deflection is very important. The angular deflection achieved initially was very low. Using design optimization techniques a new gyro is developed with improved design and we could improve the angular deflection by an order of magnitude. Fabrication of MEMS devices is the most challenging part; hence an idea is put forth for the fabrication of the current model. While fabrication itself is challenging, fabrication defects are inevitably present. The effects of fabrication and the compensation methods are studied using a tuning fork gyro. Dynamic analysis has been carried out and we studied the effect of imperfect flexures on the gyroscopes performance. It has been found that, even if there are imperfections in the flexures the gyro can closely match the ideal gyroscope with some trade-offs in the design part of it.

Download or read book Dual Mass Linear Vibration Silicon Based MEMS Gyroscope written by Huiliang Cao and published by Springer Nature. This book was released on 2023-04-17 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Download or read book MEMS Vibratory Gyroscopes written by Cenk Acar and published by Springer Science & Business Media. This book was released on 2008-12-16 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Download or read book Design and Modeling of a MEMS based Accelerometer with Pull in Analysis written by and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis reports the design and modelling of a MEMS (Micro Electro Mechanical system) based inertial accelerometer. The main motivation to design a differential type of accelerometer is that such a kind of structure allows differential electrostatic actuation and capacitive sensing. They can be operated at the border of stability also so that the "pull in" operation mode can be explored. Such kinds of structures have a wide range of applications because of their high sensitivity. One is in the field of minimally invasive surgery where accelerometers will be combined with gyroscopes to be used in the navigation of surgical tools as a inertial micro unit (IMU). The choice for the design of a structure with 1 Degree ofFreedom(DOF), instead of a 2-DOF device was instigated by the simplicity of the design and by a more efficient 1-DOF dynamic model. The accelerometers were designed and optimized using the MATLAB simulator and COVENTORWARE simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs. The simulation tests show that the SOl accelerometer system yields 8.8kHz resonant frequency, with a quality factor of 10 and 2.l2mV/g sensitivity. To characterize the accelerometer a new semi automatic tool was formulated for the noise analysis and noise based optimization of the accelerometer design and the analysis estimation shows that there is a trade off between the SIN ratio and the sensitivity and for the given design could be made much better in terms of SIN by tuning its resonant frequency.

Download or read book Fabrication Testing and Characterization of MEMS Gyroscope written by Ridha Almikhlafi and published by . This book was released on 2017 with total page 50 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis presents the design, fabrication and characterization of two Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes fabricated using the Silicon-On-Insulator-Multi-User-MEMS Process (SOIMUMPs) and Polysilicon Multi-User-MEMS-Process (Poly-MUMPs). Firstly, relevant literature and background on static and dynamic analysis of MEMS gyroscopes are described. Secondly, the gyroscope analytical model is presented and numerically solved using Mathematica software. The lumped mass model was used to analytically design the gyroscope and predict their performance. Finite element analysis was carried out on the gyroscopes to verify the proposed designs. Thirdly, gyroscope fabrication using MEMSCAP's SOIMUMPs and PolyMUMPs processes is described. For the former, post-processing was carried out at the Quantum Nanofab Center (QNC) on a die-level in order to create the vibratory structural elements (cantilever beam). Following this, the PolyMUMPs gyroscopes are characterized optically by measuring their resonance frequencies and quality factor using a Laser Doppler Vibrometer (LDV). The drive resonance frequency was measured at 40 kHz and the quality factor as Q = 1. For the sense mode, the resonance frequency was measured at 55 kHz and the unity quality factor as Q = 1. The characterization results show large drive direction motions of 100 um/s in response to a voltage pulse of 10 V. The drive pull-in voltage was measured at 19 V. Finally, the ratio of the measured drive to sense mode velocities in response to a voltage pulse of 10 V was calculated at 1.375.

Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Download or read book Design and Modeling of Advanced Gyroscopes written by and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis reports on a design and modeling of a micro-machined gyroscope. The proposed sensor is a dual mass type, electro-statically driven to primary mode oscillation and senses, capacitively, the output signal. Full decoupling between drive and sense modes minimizes the mechanical crosstalk and based on this a novel gyroscope is designed and modeled which has separate sensing and driving masses. The dual mass gyroscope is designed such that driving and sensing resonant frequency is 23101 Hz with 0% mismatch (in simulation)with quality factor of 31.6227 and bandwidth of 730.51Hz. The gyroscope when actuated in simulation with 25V ac and 10V dc showed sensing capacitance variation of 126aF for 1 rad/s with base capacitance of 244.16fF. To the design of the gyroscope a new semi automatic tool was formulated for the noise analysis and noise based optimization of the resonant MEMS structures. Design of a sensitive gyroscope needs to take into account the noise shaping induced by damping phenomena at micro scale and is critical for optimization. The analysis was further extended to the design of the gyroscope and estimation shows that there is a trade of between the S/N ratio and the sensitivity and the design could be made much better in-terms of S/N by tuning its resonant frequency to 106Hz.

Download or read book Coriolis Vibratory Gyroscopes written by Vladislav Apostolyuk and published by Springer. This book was released on 2015-08-12 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the latest theoretical analysis and design methodologies of different types of Coriolis vibratory gyroscopes (CVG). Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance characteristics, and signal processing and control. Essential aspects of numerical simulation of CVG using Simulink® are also covered. This is an ideal book for graduate students, researchers, and engineers working in fields that require gyroscope application, including but not limited to: inertial sensors and systems, automotive and consumer electronics, small unmanned aircraft control systems, personal mobile navigation systems and related software development, and augmented and virtual reality systems.

Download or read book Design Analysis and Simulation of Microscale Solid Wave Gyroscopes written by Erdal Yilmaz and published by . This book was released on 2016 with total page 189 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this thesis, we focus on MEMS solid-wave gyroscopes operated in rateintegrating mode. In parallel to the miniaturization efforts of shell-type resonators, we address design and fabrication problems by analysis and simulation. We investigate vibrations of axisymmetric resonators using a shell theory and 2.5D elasticity. We employ classical finite element method and spectral methods. We describe effects of geometric imperfections on gyroscope dynamics and use mode-coupling to model vibration sensitivity. We also detail computations of temperature sensitivities of gyroscope parameters. We then formulate and solve example shape optimization problems based on these analyses. Lastly, we introduce thermomechanical noise squeezing to reduce angle random walk.

Download or read book Advanced Control Design of MEMS Vibratory Gyroscopes written by Juntao Fei and published by . This book was released on 2011-10 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilisation. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and advanced control design of MEMS gyroscope for the problem of angular velocity measurement and minimisation of the cross coupling between two axes.

Download or read book Advances in Gyroscope Technologies written by Mario N. Armenise and published by Springer. This book was released on 2014-10-07 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This monograph collects and critically reviews the main results obtained by the scientific community in gyroscope technologies research field. It describes architectures, design techniques and fabrication technology of angular rate sensors proposed in literature. MEMS, MOEMS, optical and mechanical technologies are discussed together with achievable performance. The book also consideres future research trends aimed to cover special applications. The book is intended for researchers and Ph.D. students interested in modelling, design and fabrication of gyros. The book may be a useful education support in some university courses focused on gyro technologies.