Download or read book Thermal Properties of CMOS Thin Films written by Martin von Arx and published by . This book was released on 1998 with total page 162 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Determining the Thermal Expansion Coefficient of Thin Films for a CMOS MEMS Process Using Test Cantilevers written by and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book CMOS Hotplate Chemical Microsensors written by Markus Graf and published by Springer Science & Business Media. This book was released on 2007-04-19 with total page 131 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Download or read book MEMS A Practical Guide of Design Analysis and Applications written by Jan Korvink and published by Springer Science & Business Media. This book was released on 2010-05-28 with total page 981 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
Download or read book Thermal Conductivity written by Terry M. Tritt and published by Springer Science & Business Media. This book was released on 2006-10-03 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: It has been almost thirty years since the publication of a book that is entirely dedicated to the theory, description, characterization and measurement of the thermal conductivity of solids. The recent discovery of new materials which possess more complex crystal structures and thus more complicated phonon scattering mechanisms have brought innovative challenges to the theory and experimental understanding of these new materials. With the development of new and novel solid materials and new measurement techniques, this book will serve as a current and extensive resource to the next generation researchers in the field of thermal conductivity. This book is a valuable resource for research groups and special topics courses (8-10 students), for 1st or 2nd year graduate level courses in Thermal Properties of Solids, special topics courses in Thermal Conductivity, Superconductors and Magnetic Materials, and to researchers in Thermoelectrics, Thermal Barrier Materials and Solid State Physics.
Download or read book CMOS MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 612 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.
Download or read book Thermoelectrics Handbook written by D.M. Rowe and published by CRC Press. This book was released on 2018-10-03 with total page 1008 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ten years ago, D.M. Rowe introduced the bestselling CRC Handbook of Thermoelectrics to wide acclaim. Since then, increasing environmental concerns, desire for long-life electrical power sources, and continued progress in miniaturization of electronics has led to a substantial increase in research activity involving thermoelectrics. Reflecting the latest trends and developments, the Thermoelectrics Handbook: Macro to Nano is an extension of the earlier work and covers the entire range of thermoelectrics disciplines. Serving as a convenient reference as well as a thorough introduction to thermoelectrics, this book includes contributions from 99 leading authorities from around the world. Its coverage spans from general principles and theoretical concepts to material preparation and measurements; thermoelectric materials; thermoelements, modules, and devices; and thermoelectric systems and applications. Reflecting the enormous impact of nanotechnology on the field-as the thermoelectric properties of nanostructured materials far surpass the performance of conventional materials-each section progresses systematically from macro-scale to micro/nano-scale topics. In addition, the book contains an appendix listing major manufacturers and suppliers of thermoelectric modules. There is no longer any need to spend hours plodding through the journal literature for information. The Thermoelectrics Handbook: Macro to Nano offers a timely, comprehensive treatment of all areas of thermoelectrics in a single, unified reference.
Download or read book Handbook of Thin Film Deposition written by Krishna Seshan and published by William Andrew. This book was released on 2012-12-06 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry
Download or read book Mechanical Properties of CMOS Thin Films written by Volker Ziebart and published by . This book was released on 2000 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Simulation of Semiconductor Devices and Processes written by Heiner Ryssel and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 515 pages. Available in PDF, EPUB and Kindle. Book excerpt: SISDEP ’95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process and device simulation. Continuously shrinking device dimensions, the use of new materials, and advanced processing steps in the manufacturing of semiconductor devices require new and improved software. The trend towards increasing complexity in structures and process technology demands advanced models describing all basic effects and sophisticated two and three dimensional tools for almost arbitrarily designed geometries. The book contains the latest results obtained by scientists from more than 20 countries on process simulation and modeling, simulation of process equipment, device modeling and simulation of novel devices, power semiconductors, and sensors, on device simulation and parameter extraction for circuit models, practical application of simulation, numerical methods, and software.
Download or read book Microscale Heat Conduction in Integrated Circuits and Their Constituent Films written by Y. Sungtaek Ju and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 115 pages. Available in PDF, EPUB and Kindle. Book excerpt: The study of thermal phenomena in microdevices has attracted significant attention recently. The interdisciplinary nature of this topic, however, makes it very difficult for researchers to fully understand details of research results presented in journal articles. For many researchers intending to be active in this field, therefore, a more comprehensive treatment, complete with sufficient background information, is urgently needed. Advances in semiconductor device technology render the thermal characterization and design of ICs increasingly more important. The present book discusses experimental and theoretical studies of heat transfer in transistors and interconnects. A novel optical thermometry technique captures temperature fields with high temporal and spatial failures in devices that are subjected to electrical overstress (EOS) and electrostatic discharge (ESD). Also reported are techniques for determining the thermal transport properties of dielectric passivation layers and ultra-thin silicon-on-insulator (SOI) layers. Theoretical analysis on the data yields insight into the dependence of thermal properties on film processing conditions. The techniques and data presented here will greatly aid the thermal engineering of interconnects and transistors.
Download or read book Ultrananocrystalline Diamond written by Olga A. Shenderova and published by William Andrew. This book was released on 2012-09-11 with total page 582 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrananocrystalline Diamond: Synthesis, Properties, and Applications is a unique practical reference handbook. Written by the leading experts worldwide it introduces the science of UNCD for both the R&D community and applications developers using UNCD in a diverse range of applications from macro to nanodevices, such as energy-saving ultra-low friction and wear coatings for mechanical pump seals and tools, high-performance MEMS/NEMS-based systems (e.g. in telecommunications), the next generation of high-definition flat panel displays, in-vivo biomedical implants, and biosensors. This work brings together the basic science of nanoscale diamond structures, with detailed information on ultra-nanodiamond synthesis, properties, and applications. The book offers discussion on UNCD in its two forms, as a powder and as a chemical vapor deposited film. Also discussed are the superior mechanical, tribological, transport, electrochemical, and electron emission properties of UNCD for a wide range of applications including MEMS/ NEMS, surface acoustic wave (SAW) devices, electrochemical sensors, coatings for field emission arrays, photonic and RF switching, biosensors, and neural prostheses, etc. Ultrananocrystalline Diamond summarises the most recent developments in the nanodiamond field, and presents them in a way that will be useful to the R&D community in both academic and corporate sectors. Coverage of both nanodiamond particles and films make this a valuable resource for both the nanotechnology community and the field of thin films / vacuum deposition. Written by the world's leading experts in nanodiamond, this second edition builds on its predecessor's reputation as the most up-to-date resource in the field.
Download or read book Thermal Control Thin Films written by Jia-wen Qiu and published by Walter de Gruyter GmbH & Co KG. This book was released on 2021-11-08 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book presents up-to-date thermal control film materials, technologies and applications in spacecraft. Commonly used thermal control film materials and devices for spacecraft are discussed in detail, including single-structure passive thermal control film materials, composite structure passive thermal control film materials, intelligent thermal control film materials, and microstructure thermal control thin film devices.
Download or read book Transducers 01 Eurosensors XV written by Ernst Obermeier and published by Springer. This book was released on 2016-05-12 with total page 1763 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.
Download or read book Microtransducer CAD written by Arokia Nathan and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 445 pages. Available in PDF, EPUB and Kindle. Book excerpt: Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.
Download or read book Fast Simulation of Electro Thermal MEMS written by Tamara Bechtold and published by Springer Science & Business Media. This book was released on 2006-11-01 with total page 185 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.
Download or read book Smart Sensor Systems written by Gerard Meijer and published by John Wiley & Sons. This book was released on 2008-11-26 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions from an internationally-renowned group of experts, this book uses a multidisciplinary approach to review recent developments in the field of smart sensor systems, providing complete coverage of all important system and design aspects, their building blocks and methods of signal processing. It examines topics over the whole range of sensor technology from the theory and constraints of basic elements, the applied techniques and electronic, up to the level of application-orientated issues. Developed as a complementary volume to ‘Smart Sensor Systems’ (Wiley 2008), which introduces the theoretical foundations, this volume focuses on practical applications, including: State-of-the-art techniques for designing smart sensors and smart sensor systems, with measurement techniques at system level, such as collaboration and trimming, and impedance-measurement techniques. Sensing elements and sensor systems for the measurement of mechanical quantities, and microarrays for DNA detection. Circuitdesign for sensor systems, such as the design of low-noise amplifiers, and measurement techniques at device level, such as dynamic offset cancellation and optical imagers. Implantable smart sensors for bio-medical applications and automotive sensors. A supplementary website hosts case studies and a solutions manual to the problems Smart Sensor Systems: Emerging Technologies and Applications will greatly benefit final year undergraduate and postgraduate students in the areas of electrical, mechanical and chemical engineering, and physics. Professional engineers and researchers in the microelectronics industry, including microsystem developers, will also find this a thorough and useful volume.
