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Book The Use of Electron Beam Position Modulation in Auger Depth Profile Analysis

Download or read book The Use of Electron Beam Position Modulation in Auger Depth Profile Analysis written by M. S. Leung and published by . This book was released on 1985 with total page 24 pages. Available in PDF, EPUB and Kindle. Book excerpt: By combining Auger analysis with ion etching, the scanning Auger microprobe (SAM) provides 'three-dimensional' composition information not readily obtainable from other analytical methods. As this technique is being applied to the analysis of microelectronic devices with increasingly smaller dimensions, two major limitations become evident: (1) features of interest in microelectronic circuits are often comparable in size to the beam diameter of commercial Auger microprobes, and (2) the electron beam tends to drift on the specimen surface because of mechanical instability and differential thermal expansion. Because Auger Depth profiling requires relatively low sputter rates for good depth resolution, depth profiles of small features can be seriously degraded by beam drift. In this report, we describe a technique that will eliminate the error and uncertainty caused by beam instability. In our technique, the analyzing beam is scanned repetitively across the feature to be profiled, and the Auger signal is synchronously detected at the scan frequency. The resultant Auger signal magnitude is shown to be unaffected by beam drift when compared to conventional detection methods. (Author).

Book Scientific and Technical Aerospace Reports

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1986 with total page 1162 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Physics Briefs

Download or read book Physics Briefs written by and published by . This book was released on 1993 with total page 1288 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Nanotechnologies  The Physics of Nanomaterials

Download or read book Nanotechnologies The Physics of Nanomaterials written by David Schmool and published by CRC Press. This book was released on 2021-07-09 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides a broad introduction to nanophysics and nanotechnologies, and the importance of low-dimensional and surface physics is discussed indepth. Chapters in Volume 1 covers the large range of physical preparation techniques available for the production of nanomaterials and nanostructuring.

Book Optical Properties of Narrow Gap Low Dimensional Structures

Download or read book Optical Properties of Narrow Gap Low Dimensional Structures written by Clivia M. Sotomayor Torres and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 357 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains the Proceedings of the NATO Advanced Research Workshop on "Optical Properties of Narrow-Gap Low-Dimensional Structures", held from July 29th to August 1st, 1986, in St. Andrews, Scotland, under the auspices of the NATO International Scientific Exchange Program. The workshop was not limited to optical properties of narrow-gap semiconductor structures (Part III). Sessions on, for example, the growth methods and characterization of III-V, II-VI, and IV-VI materials, discussed in Part II, were an integral part of the workshop. Considering the small masses of the carriers in narrow-gap low dimensional structures (LOS), in Part I the enhanced band mixing and magnetic field effects are explored in the context of the envelope function approximation. Optical nonlinearities and energy relaxation phenomena applied to the well-known systems of HgCdTe and GaAs/GaAIAs, respectively, are reviewed with comments on their extension to narrow gap LOS. The relevance of optical observations in quantum transport studies is illustrated in Part IV. A review of devices based on epitaxial narrow-gap materials defines a frame of reference for future ones based on two-dimensional narrow-gap semiconductors; in addition, an analysis of the physics of quantum well lasers provides a guide to relevant parameters for narrow-gap laser devices for the infrared (Part V). The roles and potentials of special techniques are explored in Part VI, with emphasis on hydrostatic pressure techniques, since this has a pronounced effect in small-mass, narrow-gap, non-parabolic structures.

Book European Particle Accelerator Conference  Epac 94   In 3 Volumes

Download or read book European Particle Accelerator Conference Epac 94 In 3 Volumes written by Christine Petit-jean-genaz and published by World Scientific. This book was released on 1994-11-26 with total page 2968 pages. Available in PDF, EPUB and Kindle. Book excerpt: These proceedings aim to provide a comprehensive overview of research, technology and applications in the field of accelerators. Contributions from the entire field of accelerators are presented, including low and high energy machines, and medical and industrial accelerators.

Book Auger Electron Spectroscopy

    Book Details:
  • Author : Donald T. Hawkins
  • Publisher : Springer Science & Business Media
  • Release : 2012-12-06
  • ISBN : 1468413872
  • Pages : 305 pages

Download or read book Auger Electron Spectroscopy written by Donald T. Hawkins and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 305 pages. Available in PDF, EPUB and Kindle. Book excerpt: Auger electron spectroscopy is rapidly developing into the single most powerful analytical technique in basic and applied science.for investigating the chemical and structural properties of solids. Its ex plosive growth beginning in 1967 was triggered by the development of Auger analyzers capable of de tecting one atom layer of material in a fraction of a second. Continued growth was guaranteed firstly by the commercial availability of apparatus which combined the capabilities of scanning electron mi croscopy and ion-mill depth profiling with Auger analysis, and secondly by the increasing need to know the atomistics of many processes in fundamental research and engineering applications. The expanding use of Auger analysis was accompanied by an increase in the number of publications dealing with it. Because of the developing nature of Auger spectroscopy, the articles have appeared in many different sources covering diverse disciplines, so that it is extremely difficult to discover just what has or has not been subjected to Auger analysis. In this situation, a comprehensive bibliography is obviou-sly useful to those both inside and outside the field. For those in the field, this bibliography should be a wonderful time saver for locating certain references, in researching a particular topic, or when considering various aspects of instrumentation or data analysis. This bibliography not only provides the most complete listing of references pertinent to surface Auger analysis available today, but it is also a basis for extrapolating from past trends to future expectations.

Book Government reports annual index

Download or read book Government reports annual index written by and published by . This book was released on 199? with total page 890 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Proceedings of the Seventh International Vacuum Congress and the Third International Conference on Solid Surfaces of the International Union for Vacuum Science  Technique and Applications

Download or read book Proceedings of the Seventh International Vacuum Congress and the Third International Conference on Solid Surfaces of the International Union for Vacuum Science Technique and Applications written by R. Dobrozemsky and published by . This book was released on 1977 with total page 944 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Low Energy Electrons and Surface Chemistry

Download or read book Low Energy Electrons and Surface Chemistry written by Gerhard Ertl and published by . This book was released on 1985 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Scanning Electron Microscopy

Download or read book Scanning Electron Microscopy written by and published by . This book was released on 1982 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: Vols. for 1968-77 include the proceedings of the annual Scanning Electron Microscope Symposium, sponsored by the IIT Research Institute, and other workshops.

Book Government Reports Announcements   Index

Download or read book Government Reports Announcements Index written by and published by . This book was released on 1990 with total page 1004 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Selected Papers on Prisms and Mirrors  design and Fabrication

Download or read book Selected Papers on Prisms and Mirrors design and Fabrication written by R. Hradaynath and published by . This book was released on 1993 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Optical Engineering

Download or read book Optical Engineering written by and published by . This book was released on 1991 with total page 1236 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publishes papers reporting on research and development in optical science and engineering and the practical applications of known optical science, engineering, and technology.