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Book Ion Implantation Techniques

    Book Details:
  • Author : H. Ryssel
  • Publisher : Springer Science & Business Media
  • Release : 2012-12-06
  • ISBN : 3642687792
  • Pages : 377 pages

Download or read book Ion Implantation Techniques written by H. Ryssel and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the application of ion implantation to semiconductors and other materials (Thousand Oaks 1970, Garmisch-Partenkirchen 1971, Osaka 1974, Warwick 1975, Boulder 1976, Budapest 1978, and Albany 1980). Another series of conferences was devoted more to implantation equipment and tech niques (Salford 1977, Trento 1978, and Kingston 1980). In connection with the Third International Conference on Ion Implantation: Equipment and Tech niques, held at Queen's University, ' Kingston, Ontario, Canada, July 8-11, 1980, a two-day instructional program was organized parallel to an implan tation conference for the first time. This implantation school concentra ted on aspects of implantation-equipment design. This book contains all lectures presented at the International Ion Implantation School organized in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, held at the Convention Center, Berchtesgaden, Germany, September 13-17, 1982. In con trast to the first .school, the main emphasis in thiS school was placed on practical aspects of implanter operation and application. In three chap ters, various machine aspects of ion implantation (general concepts, ion sources, safety, calibration, dOSimetry), range distributions (stopping power, range profiles), and measuring techniques (electrical and nonelec tri ca 1 measu ri ng techni ques, annea 1 i ng) are di scussed. In the appendi x, a review of the state of the art in modern implantation equipment is given.

Book SRIM  the Stopping and Range of Ions in Matter

Download or read book SRIM the Stopping and Range of Ions in Matter written by James F. Ziegler and published by Lulu.com. This book was released on 2008 with total page 683 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This is a textbook the gives the background of the stopping and range of ions in matter (www.SRIM.org). It is written to be the prime resource for those who use SRIM in scientific work."--Lulu.com.

Book The Stopping and Range of Ions in Solids

Download or read book The Stopping and Range of Ions in Solids written by James F. Ziegler and published by . This book was released on 1985 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Stopping and Range of Ions in Solids

Download or read book The Stopping and Range of Ions in Solids written by J. F. Ziegler and published by . This book was released on 1982 with total page 43 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The stopping and range of ions in solids

Download or read book The stopping and range of ions in solids written by James F. Ziegler and published by . This book was released on 1985 with total page 321 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Ion Solid Interactions

    Book Details:
  • Author : Michael Nastasi
  • Publisher : Cambridge University Press
  • Release : 1996-03-29
  • ISBN : 052137376X
  • Pages : 572 pages

Download or read book Ion Solid Interactions written by Michael Nastasi and published by Cambridge University Press. This book was released on 1996-03-29 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive guide to an important materials science technique for students and researchers.

Book The Stopping and Ranges of Ions in Matter

Download or read book The Stopping and Ranges of Ions in Matter written by J. F. Ziegler and published by . This book was released on 1977 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Stopping and Ranges of Ions in Matter

Download or read book The Stopping and Ranges of Ions in Matter written by J. F. Ziegler and published by . This book was released on 1977 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Ion Implantation Science and Technology

Download or read book Ion Implantation Science and Technology written by J.F. Ziegler and published by Elsevier. This book was released on 2012-12-02 with total page 649 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.

Book Structure Property Relationships in Surface Modified Ceramics

Download or read book Structure Property Relationships in Surface Modified Ceramics written by C.J. McHargue and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 517 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of ion beams for the modification of the structure and properties of the near-surface region of ceramics began in earnest in the early 19805. Since the mechanical properties of such materials are dominated by surface flaws and the surface stress state, the use of surface modification tech niques would appear to be an obvious application. As is often the case in research and development, most of the initial studies can be characterized as cataloging the response of various ceramic materials to a range of ion beam treatments. The systematic study of material and ion beam parameters is well underway and we are now designing experiments to provide specific information about the processing parameter - structure-property rela tionships. This NATO-Advanced Study Institute was convened in order to assess our current state of knowledge in this field, to identify opportunities and needs for further research, and to identify the potential of such processes for technological application. It became apparent that this class of inorganic compounds, loosely termed ceramics, presents many challenges to the understanding of ion-solid inter actions, the relationships among ion-beam parameters, materials parameters, and the resulting structures, as well as relationships between structure and properties. In many instances, this understanding will represent a major extension of that learned from the study of metals and semiconductors.

Book Energy Loss and Ion Ranges in Solids

Download or read book Energy Loss and Ion Ranges in Solids written by Muradin Abubekirovich Kumakhov and published by CRC Press. This book was released on 1981 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Principles Of Radiation Interaction In Matter And Detection  3rd Edition

Download or read book Principles Of Radiation Interaction In Matter And Detection 3rd Edition written by Claude Leroy and published by World Scientific. This book was released on 2011-09-23 with total page 1041 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, like the first and second editions, addresses the fundamental principles of interaction between radiation and matter and the principles of particle detection and detectors in a wide scope of fields, from low to high energy, including space physics and medical environment. It provides abundant information about the processes of electromagnetic and hadronic energy deposition in matter, detecting systems, performance of detectors and their optimization.The third edition includes additional material covering, for instance: mechanisms of energy loss like the inverse Compton scattering, corrections due to the Landau-Pomeranchuk-Migdal effect, an extended relativistic treatment of nucleus-nucleus screened Coulomb scattering, and transport of charged particles inside the heliosphere. Furthermore, the displacement damage (NIEL) in semiconductors has been revisited to account for recent experimental data and more comprehensive comparisons with results previously obtained.This book will be of great use to graduate students and final-year undergraduates as a reference and supplement for courses in particle, astroparticle, space physics and instrumentation. A part of the book is directed toward courses in medical physics. The book can also be used by researchers in experimental particle physics at low, medium, and high energy who are dealing with instrumentation.

Book Stopping of Heavy Ions

    Book Details:
  • Author : Peter Sigmund
  • Publisher : Springer Science & Business Media
  • Release : 2004-07-09
  • ISBN : 9783540222736
  • Pages : 180 pages

Download or read book Stopping of Heavy Ions written by Peter Sigmund and published by Springer Science & Business Media. This book was released on 2004-07-09 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a concise presentation of theoretical concepts characterizing and quantifying the slowing down of swift heavy ions in matter. Although the penetration of charged particles through matter has been studied for almost a hundred years, the quantitative theory for swift penetrating ions heavier than helium has been developed mainly during the past decade and is still progressing rapidly. The book addresses scientists and engineers working at accelerators with an interest in materials analysis and modification, medical diagnostics and therapy, mass spectrometry and radiation damage, as well as atomic and nuclear physicists. Although not a textbook, this monograph represents a unique source of state-of-the-art information that is useful to a university teacher in any course involving the interaction of charged particles with matter.

Book The Stopping and Ranges of Ions in Matter

Download or read book The Stopping and Ranges of Ions in Matter written by J.F. Ziegler and published by Elsevier. This book was released on 2013-10-22 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt: Hydrogen: Stopping Powers and Ranges in All Elements, Volume 3 of The Stopping and Ranges of Ions in Matter, provides a nearly complete presentation of absolute experimental energy loss data for hydrogen over the energy range 10 keV

Book Monte Carlo Transport of Electrons and Photons

Download or read book Monte Carlo Transport of Electrons and Photons written by T.M. Jenkins and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 637 pages. Available in PDF, EPUB and Kindle. Book excerpt: For ten days at the end of September, 1987, a group of about 75 scientists from 21 different countries gathered in a restored monastery on a 750 meter high piece of rock jutting out of the Mediterranean Sea to discuss the simulation of the transport of electrons and photons using Monte Carlo techniques. When we first had the idea for this meeting, Ralph Nelson, who had organized a previous course at the "Ettore Majorana" Centre for Scientific Culture, suggested that Erice would be the ideal place for such a meeting. Nahum, Nelson and Rogers became Co-Directors of the Course, with the help of Alessandro Rindi, the Director of the School of Radiation Damage and Protection, and Professor Antonino Zichichi, Director of the "Ettore Majorana" Centre. The course was an outstanding success, both scientifically and socially, and those at the meeting will carry the marks of having attended, both intellectually and on a personal level where many friendships were made. The scientific content of the course was at a very high caliber, both because of the hard work done by all the lecturers in preparing their lectures (e. g. , complete copies of each lecture were available at the beginning of the course) and because of the high quality of the "students", many of whom were accomplished experts in the field. The outstanding facilities of the Centre contributed greatly to the success. This volume contains the formal record of the course lectures.

Book Treatise on Heavy Ion Science

Download or read book Treatise on Heavy Ion Science written by D.A. Bromley and published by Springer. This book was released on 2012-11-01 with total page 429 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Particle Penetration and Radiation Effects

Download or read book Particle Penetration and Radiation Effects written by Peter Sigmund and published by Springer Science & Business Media. This book was released on 2006-03-16 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt: Drawing on the author’s forty-plus years of experience as a researcher in the interaction of charged particles with matter, this book emphasizes the theoretical description of fundamental phenomena. Special attention is given to classic topics such as Rutherford scattering; the theory of particle stopping; the statistical description of energy loss and multiple scattering and numerous more recent developments.