Download or read book The Silicon Oscillating Accelerometer A MEMS Inertial Instrument for Strategic Missile Guidance written by and published by . This book was released on 1998 with total page 13 pages. Available in PDF, EPUB and Kindle. Book excerpt: The intercontinental ballistic missile (ICBM) and submarine-launched ballistic missiles (SLBM) developed over the past 50 years have employed successive generations of increasingly accurate inertial guidance systems. The comparatively short time of guided flight and high acceleration levels characteristic of the ballistic missile application place a premium on accelerometer performance to achieve desired weapon system accuracy. To date, the accelerometer design of choice for strategic missiles has been the Pendulous Integrating Gyroscopic Accelerometer (PIGA) instrument, an accelerometer whose origins trace back to the German V2 rocket, and has been refined through several generations of development to achieve unsurpassed performance. The specialized technologies of PIGA accelerometers, such as gas bearing wheels, ultra-stable ball bearings, precision electromagnetic components, and "designer chemical" flotation fluids require a costly support infrastructure for production and system life-cycle maintenance. The Draper Laboratory is currently in the process of developing the Silicon Oscillating Accelerometer (SOA) a MEMS-based sensor that has the potential to achieve the ppm/ug performance stability required of the strategic missile application. The Microelectromechanical System (MEMS) technology is inherently low cost and offers a rapidly expanding commercial business base to leverage and sustain accelerometer production and deployment in next generation guidance systems.
Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Xu, Yong Ping and published by River Publishers. This book was released on 2019-02-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.
Download or read book Design Manufacturing And Mechatronics Proceedings Of The International Conference On Design Manufacturing And Mechatronics Icdmm2016 written by A Mehran Shahhosseini and published by World Scientific. This book was released on 2016-12-29 with total page 758 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 3rd Annual International Conference on Design, Manufacturing and Mechatronics (ICDMM2016) was successfully held in Wuhan, China in 2016.The ICDMM2016 covers a wide range of fundamental studies, technical innovations and industrial applications in industry design, manufacturing and mechatronics. The ICDMM2016 program consists of 4 keynote speeches, 96 oral and poster presentations. We were pleased to have more than 80 participants from China, South Korea, Taiwan, Japan, Malaysia, and Saudi Arabia. However, finally, only 83 articles were selected after peer review to be included in this proceedings.
Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.
Download or read book Dynamic Response Assessment for the MEMS Accelerometer Under Severe Shock Loads written by and published by . This book was released on 2001 with total page 80 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Aerospace America written by and published by . This book was released on 2000 with total page 690 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Toward Inertial Navigation on Chip written by Haoran Wen and published by Springer Nature. This book was released on 2019-09-14 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.
Download or read book Micro Mechanical Transducers written by Min-hang Bao and published by Elsevier. This book was released on 2000-10-16 with total page 393 pages. Available in PDF, EPUB and Kindle. Book excerpt: Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.
Download or read book IEEE Standard Specification Format Guide and Test Procedure for Linear Single axis Nongyroscopic Accelerometers written by Institute of Electrical and Electronics Engineers and published by . This book was released on 1999 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: The specification and test requirements for a linear, single-axis, nongyroscopic accelerometer for use in internal navigation, guidance, and leveling systems are defined. A standard specification guide and a compilation of recommended test procedures for such accelerometers are provided. Informative annexes are given on the various types of such accelerometers (force or pendulous torque rebalance with analog or digital output, vibrating beam, and micromechanical) and error effects, on filtering, noise, and transient analysis techniques, and on calibration and modeling techniques (multipoint tumble analysis, vibration and shock test analyses, and geophysical effects in inertial instrument testing). Keywords: accelerometer, inertial instrument, inertial sensor, pendulous accelerometer, vibrating beam accelerometer, micromechanical accelerometer, power spectal density, vibration and shock, geophysical effects, specification, testing.
Download or read book A Micromechanical Silicon Oscillating Accelerometer written by Kevin Augustine Gibbons and published by . This book was released on 1997-04-01 with total page 105 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis describes the design and testing of a silicon oscillating accelerometer (SOA). The SOA is a silicon, micromechanical, oscillating beam accelerometer. The accelerometer is configured with two silicon tuning fork oscillators that are electrostatically driven and sensed in their out of phase vibrational resonance. The oscillators move on flexure beams which are configured to have one end anchored and the other end fixed to a shared seismic mass. When the seismic mass experiences an input acceleration, one oscillator's vibrating beams are loaded in tension while the other oscillator's beams are loaded in compression. This loading causes an increase and decrease in the respective oscillator's natural frequency. This change in frequency is proportional to the input acceleration. Automatic gain control electronics regulate the oscillation amplitude at resonance. The two oscillator's frequency outputs are differenced to exploit common mode error rejection. The SOA has been fabricated from single crystal silicon using a bulk dissolved wafer on glass micromachining process. It is vacuum packaged in a leadless ceramic chip carrier to achieve high quality factor and thus a sharp resonance. Results of both closed form and finite element analyses are described and are in good agreement Sensors were fabricated and experimental data including quality factor, input acceleration sensitivity or scale factor, and oscillator temperature sensitivity results are presented. An oscillator frequency of 27 kHz, a Q factor over 100, 000, a scale factor of 4 Hz per g, and an oscillator temperature sensitivity of 0.4 Hz per degree Celsius have been achieved. The experimental data is shown to be in agreement with analysis results.
Download or read book Force Multiplier in a Microelectromechanical Silicon Oscillating Accelerometer written by Nathan Alan St. Michel and published by . This book was released on 2000 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Dual Mass Linear Vibration Silicon Based MEMS Gyroscope written by Huiliang Cao and published by Springer. This book was released on 2024-04-19 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Download or read book MEMS Accelerometers written by Ibrahim (Abe) M. Elfadel and published by . This book was released on 2019 with total page 1 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
Download or read book International Aerospace Abstracts written by and published by . This book was released on 1999 with total page 1020 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Global Positioning Systems Inertial Navigation and Integration written by Mohinder S. Grewal and published by John Wiley & Sons. This book was released on 2007-03-05 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: An updated guide to GNSS and INS, and solutions to real-world GPS/INS problems with Kalman filtering Written by recognized authorities in the field, this second edition of a landmark work provides engineers, computer scientists, and others with a working familiarity with the theory and contemporary applications of Global Navigation Satellite Systems (GNSS), Inertial Navigational Systems (INS), and Kalman filters. Throughout, the focus is on solving real-world problems, with an emphasis on the effective use of state-of-the-art integration techniques for those systems, especially the application of Kalman filtering. To that end, the authors explore the various subtleties, common failures, and inherent limitations of the theory as it applies to real-world situations, and provide numerous detailed application examples and practice problems, including GNSS-aided INS, modeling of gyros and accelerometers, and SBAS and GBAS. Drawing upon their many years of experience with GNSS, INS, and the Kalman filter, the authors present numerous design and implementation techniques not found in other professional references. This Second Edition has been updated to include: GNSS signal integrity with SBAS Mitigation of multipath, including results Ionospheric delay estimation with Kalman filters New MATLAB programs for satellite position determination using almanac and ephemeris data and ionospheric delay calculations from single and dual frequency data New algorithms for GEO with L1 /L5 frequencies and clock steering Implementation of mechanization equations in numerically stable algorithms To enhance comprehension of the subjects covered, the authors have included software in MATLAB, demonstrating the working of the GNSS, INS, and filter algorithms. In addition to showing the Kalman filter in action, the software also demonstrates various practical aspects of finite word length arithmetic and the need for alternative algorithms to preserve result accuracy.
Download or read book Theory Design and Applications of Unmanned Aerial Vehicles written by A. R. Jha, Ph.D. and published by CRC Press. This book was released on 2016-11-18 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a complete overview of the theory, design, and applications of unmanned aerial vehicles. It covers the basics, including definitions, attributes, manned vs. unmanned, design considerations, life cycle costs, architecture, components, air vehicle, payload, communications, data link, and ground control stations. Chapters cover types and civilian roles, sensors and characteristics, alternative power, communications and data links, conceptual design, human machine interface, sense and avoid systems, civil airspace issues and integration efforts, navigation, autonomous control, swarming, and future capabilities.
