Download or read book The Design and Fabrication of Micromachined Capacitive Micro Sensors for Pressure Measurement and Tactile Imaging written by Gegi George and published by . This book was released on 1994 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Mechanical Microsensors written by M. Elwenspoek and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

Download or read book MEMS Pressure Sensors Fabrication and Process Optimization written by Parvej Ahmad Alvi and published by Lulu.com. This book was released on 2014-07-14 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.

Download or read book MEMS Mechanical Sensors written by Stephen Beeby and published by Artech House. This book was released on 2004 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

Download or read book Soft Tactile Sensors for Mechanical Imaging written by Bin Li and published by . This book was released on 2016 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Tactile sensing aims to electronically capture physical attributes of an object via mechanical contact. It proves indispensable to many engineering tasks and systems, in areas ranging from manufacturing to medicine and autonomous robotics. Biological skin, which is highly compliant, is able to perform sensing under challenging and highly variable conditions with levels of performance that far exceed what is possible with conventional tactile sensors, which are normally fabricated with non-conforming materials. The development of stretchable, skin-like tactile sensors has, as a result, remained a longstanding goal of engineering. However, to date, artificial tactile sensors that might mimic both the mechanical and multimodal tactile sensory capabilities of biological skin remain far from realization, due to the challenges of fabricating spatially dense, mechanically robust, and compliant sensors in elastic media. Inspired by these demands, this dissertation addresses many aspects of the challenging problem of engineering skin-like electronic sensors. In the first part of the thesis, new methods for the design and fabrication of thin, highly deformable, high resolution tactile sensors are presented. The approach is based on a novel configuration of arrays of microfluidic channels embedded in thin elastomer membranes. To form electrodes, these channels are filled with a metal alloy, eutectic Gallium Indium, that remains liquid at room temperature. Using capacitance sensing techniques, this approach achieves sensing resolutions of 1 mm$^{-1}$. To fabricate these devices, an efficient and robust soft lithography method is introduced, based on a single step cast. An analytical model for the performance of these devices is derived from electrostatic theory and continuum mechanics, and is demonstrated to yield excellent agreement with measured performance. This part of the investigation identified fundamental limitations, in the form of nonmonotonic behavior at low strains, that is demonstrated to generically affect solid cast soft capacitive sensors. The next part of the thesis is an investigation of new methods for designing soft tactile sensors based on multi-layer heterogeneous 3D structures that combine active layers, containing embedded liquid metal electrodes, with passive and mechanically tunable layers, containing air cavities and micropillar geometric supports. In tandem with analytical and computational modeling, these methods are demonstrated to facilitate greater control over mechanical and electronic performance. A new soft lithography fabrication method is also presented, based on the casting, alignment, and fusion of multiple functional layers in a soft polymer substrate. Measurements indicate that the resulting devices achieve excellent performance specifications, and avoid the limiting nonmonotonic behavior identified in the first part of the thesis. In order to demonstrate the practical utility of the devices, we used them to perform dynamic two-dimensional tactile imaging under distributed indentation loads. The results reflect the excellent static and dynamic performance of these devices. The final part of the thesis investigates the utility of the tactile sensing methods pursued here for imaging lumps embedded in simulated tissue. In order to facilitate real-time sensing, an electronic system for fast, array based measurement of small, sub-picofarad (pF) capacitance levels was developed. Using this system, we demonstrated that it is possible to accurately capture strain images depicting small lumps embedded in simulated tissue with either an electronic imaging system or a sensor worn on the finger, supporting the viability of wearable sensors for tactile imaging in medicine. In conclusion, this dissertation confronts many of the most vexing problems arising in the pursuit of skin-like electronic sensors, including fundamental operating principles, structural and functional electronic design, mechanical and electronic modeling, fabrication, and applications to biomedical imaging. The thesis also contributes knowledge needed to enable applications of tactile sensing in medicine, an area that has served as a key source of motivation for this work, and aims to facilitate other applications in areas such as manufacturing, robotics, and consumer electronics.

Download or read book Masters Abstracts International written by and published by . This book was released on 1996 with total page 1000 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.

Download or read book Handbook of Microlithography Micromachining and Microfabrication Micromachining and microfabrication written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contains useful process details, recipes, tables, charts and includes numerous device applications.

Download or read book Thin Plates and Shells written by Eduard Ventsel and published by CRC Press. This book was released on 2001-08-24 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presenting recent principles of thin plate and shell theories, this book emphasizes novel analytical and numerical methods for solving linear and nonlinear plate and shell dilemmas, new theories for the design and analysis of thin plate-shell structures, and real-world numerical solutions, mechanics, and plate and shell models for engineering appli

Download or read book Capacitive Sensors written by Larry K. Baxter and published by John Wiley & Sons. This book was released on 1996-09-03 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive sensors produce spectacular resolution of movement to one part in 10-10 meters and maintain exceptional long-term stability in hostile environments. They are increasingly used for a variety of jobs in consumer and industrial equipment, including wall stud sensors, keypads, lamp dimmers, micrometers, calipers, rotation encoders, and more. The most focused, authoritative book available in the field, Capacitive Sensors brings you complete information on the research, design, and production of capacitive sensors. This all-in-one source provides detailed, comprehensive coverage of key topics, including underlying theory, electrode configuration, and practical circuits. In addition, you'll find reviews of a number of tested systems never before published. Capacitive Sensors is a must-have for product designers and mechanical and electrical engineers interested in using this fast-developing technology to get top price and performance advantages.

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Rational Design of Capacitive Sensors with Microstructured Dielectrics for Medical Devices and Robotics written by Sara Rachel Arussy Ruth and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Pressure and proximity sensors are widely used in the healthcare and robotics industries. Among other applications, they are used for patient monitoring and robotic surgery, playing an integral role in improving health and safety. Currently, there is an increasing demand for highly specialized sensors within these industries, but the path of designing such sensors can be very circular, requiring multiple redesigns. To better address this challenge, the process must be linearized by enabling more targeted sensor design. To achieve targeted design of sensors for specialized applications, there are five major objectives: (1) better understanding of current sensor technologies, (2) more reliable and reproducible sensor fabrication methods, (3) simple models to predict sensor performance, (4) design rules based on computational and experimental results to inform targeted sensor design, and (5) proven efficacy of the targeted design for specific applications. This dissertation goes through this process specifically for capacitive pressure and proximity sensors. Micro-engineered pressure sensors are of particular interest because of their high sensitivity, fast response, and low limits of detection. The micro-engineering techniques include micropatterned structures, porous layers, multilayered packed structures, and combined approaches, and are compared in terms of ease of fabrication, active layer uniformity, shape and size versatility and tunability, and scalability. Understanding the current sensor technologies, advantages of different sensor types, and fabrication methods led to a focus on capacitive pressure sensors with micropatterned structures. The fabrication method for capacitive pressure sensors was improved for consistency and reliability by introducing a lamination layer to anchor the micropatterned structures--pyramids in this case--to the second electrode. A series of equations modeling the dielectric layer as both a spring and electrical circuit was developed to predict sensor response and was confirmed experimentally. This model was then used to predict how a variety of design parameters impacted the sensitivity and initial capacitance of the sensor. Further, the model was expanded to include alternative microstructure geometries and more performance parameters, enabling a more extensive comparison of microstructure design. Once the dielectric layer of capacitive pressure sensors was better understood, an analysis of the effects of electrode design was investigated, specifically for fringe-field capacitive sensors capable of both pressure and proximity sensing. Four novel electrode designs were compared to a traditional parallel plate design. All fringe-field designs had proximity sensing capabilities, distinguish between pressure and proximity regimes, and distinguish between conductive and insulating materials, however only one could recapitulate most of the pressure sensing capabilities of the parallel plate capacitive sensor. Finally, the newly obtained sensor performance trends were applied to targetedly design a sensor for early detection and prevention of diseases after surgical vascular bypass or plaque removal. This sensor was effective in vitro, in vivo, and in a human cadaver without the need to redesign, thus demonstrating the efficacy of using the design guidelines developed for linear, targeted sensor design.

Download or read book Open Loop and Servo controlled Micromachined Capacitive Pressure Sensors written by Jae-Sung Park and published by . This book was released on 2002 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Design Fabrication and Testing of a Bulk Micromachined Fabry Perot Pressure Sensor written by Ryan D. Pooran and published by . This book was released on 2002 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Micro Mechanical Transducers written by Min-hang Bao and published by Elsevier. This book was released on 2000-10-16 with total page 393 pages. Available in PDF, EPUB and Kindle. Book excerpt: Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.

Download or read book Design and Fabrication of a Micromachined Tactile Sensor for Endoscopic Graspers written by Nakka Purushotham Rao and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Mechanical Microsensors written by Miko Elwenspoek and published by Springer. This book was released on 2012-11-28 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).