Download or read book The Creation of Boron Deep Levels by High Temperature Annealing of 4H SiC written by Hrishikesh Das and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Creation of semi-insulating layers in SiC is highly desirable for high voltage device fabrication. Specifically PiN diodes can be fabricated with a compensated semi-insulating layer that would be capable of blocking a large reverse voltage. Semi-insulating (SI) behavior in SiC has been traditionally achieved via passivation of shallow dopants with vanadium-related deep levels. Degraded electrical properties of SiC devices result from the use of vanadium compensated SiC because unintentional formation of additional defects due to vanadium segregation and stress generation in the material occur. In this work, the possibility of low doped or SI epilayers via engineering of the boron related defects in SiC is investigated. High temperature treatment (up to 2000 degree C) of boron doped samples is used to stimulate boron diffusion and formation of deep boron centers in concentration sufficient for compensation of shallow dopants, without simultaneous formation of undesirable shallow boron levels. High temperature annealing of both epitaxial layers in-situ doped with boron and boron implanted 4H-SiC is investigated. The possibility of diffusion from highly boron doped substrate is also investigated. The diffusion profiles are modeled and the diffusion coefficients extracted to give information about diffusion mechanisms. The boron D-center was observed using photoluminescence (PL) after high temperature annealing of the implanted samples. Clear temperature dependence of the creation of the D-center was observed. Compensated material was revealed after an Inductively Coupled Plasma (ICP) etch on an epi-over grown sample.
Download or read book THE CREATION OF BORON DEEP LEVELS BY HIGH TEMPERATURE ANNEALING OF 4H SIC written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Creation of semi-insulating layers in SiC is highly desirable for high voltage device fabrication. Specifically PiN diodes can be fabricated with a compensated semi-insulating layer that would be capable of blocking a large reverse voltage. Semi-insulating (SI) behavior in SiC has been traditionally achieved via passivation of shallow dopants with vanadium-related deep levels. Degraded electrical properties of SiC devices result from the use of vanadium compensated SiC because unintentional formation of additional defects due to vanadium segregation and stress generation in the material occur. In this work, the possibility of low doped or SI epilayers via engineering of the boron related defects in SiC is investigated. High temperature treatment (up to 2000°C) of boron doped samples is used to stimulate boron diffusion and formation of deep boron centers in concentration sufficient for compensation of shallow dopants, without simultaneous formation of undesirable shallow boron levels. High temperature annealing of both epitaxial layers in-situ doped with boron and boron implanted 4H-SiC is investigated. The possibility of diffusion from highly boron doped substrate is also investigated. The diffusion profiles are modeled and the diffusion coefficients extracted to give information about diffusion mechanisms. The boron D-center was observed using photoluminescence (PL) after high temperature annealing of the implanted samples. Clear temperature dependence of the creation of the D-center was observed. Compensated material was revealed after an Inductively Coupled Plasma (ICP) etch on an epi-over grown sample.
Download or read book Fundamentals of Silicon Carbide Technology written by Tsunenobu Kimoto and published by John Wiley & Sons. This book was released on 2014-09-23 with total page 565 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive introduction and up-to-date reference to SiC power semiconductor devices covering topics from material properties to applications Based on a number of breakthroughs in SiC material science and fabrication technology in the 1980s and 1990s, the first SiC Schottky barrier diodes (SBDs) were released as commercial products in 2001. The SiC SBD market has grown significantly since that time, and SBDs are now used in a variety of power systems, particularly switch-mode power supplies and motor controls. SiC power MOSFETs entered commercial production in 2011, providing rugged, high-efficiency switches for high-frequency power systems. In this wide-ranging book, the authors draw on their considerable experience to present both an introduction to SiC materials, devices, and applications and an in-depth reference for scientists and engineers working in this fast-moving field. Fundamentals of Silicon Carbide Technology covers basic properties of SiC materials, processing technology, theory and analysis of practical devices, and an overview of the most important systems applications. Specifically included are: A complete discussion of SiC material properties, bulk crystal growth, epitaxial growth, device fabrication technology, and characterization techniques. Device physics and operating equations for Schottky diodes, pin diodes, JBS/MPS diodes, JFETs, MOSFETs, BJTs, IGBTs, and thyristors. A survey of power electronics applications, including switch-mode power supplies, motor drives, power converters for electric vehicles, and converters for renewable energy sources. Coverage of special applications, including microwave devices, high-temperature electronics, and rugged sensors. Fully illustrated throughout, the text is written by recognized experts with over 45 years of combined experience in SiC research and development. This book is intended for graduate students and researchers in crystal growth, material science, and semiconductor device technology. The book is also useful for design engineers, application engineers, and product managers in areas such as power supplies, converter and inverter design, electric vehicle technology, high-temperature electronics, sensors, and smart grid technology.
Download or read book Materials for High Temperature Semiconductor Devices written by National Research Council and published by National Academies Press. This book was released on 1995-09-14 with total page 135 pages. Available in PDF, EPUB and Kindle. Book excerpt: Major benefits to system architecture would result if cooling systems for components could be eliminated without compromising performance. This book surveys the state-of-the-art for the three major wide bandgap materials (silicon carbide, nitrides, and diamond), assesses the national and international efforts to develop these materials, identifies the technical barriers to their development and manufacture, determines the criteria for successfully packaging and integrating these devices into existing systems, and recommends future research priorities.
Download or read book Properties and Applications of Silicon Carbide written by Rosario Gerhardt and published by BoD – Books on Demand. This book was released on 2011-04-04 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, we explore an eclectic mix of articles that highlight some new potential applications of SiC and different ways to achieve specific properties. Some articles describe well-established processing methods, while others highlight phase equilibria or machining methods. A resurgence of interest in the structural arena is evident, while new ways to utilize the interesting electromagnetic properties of SiC continue to increase.
Download or read book Diffusion and Defect Data written by and published by . This book was released on 2003 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Comprehensive Semiconductor Science and Technology written by and published by Newnes. This book was released on 2011-01-28 with total page 3572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors are at the heart of modern living. Almost everything we do, be it work, travel, communication, or entertainment, all depend on some feature of semiconductor technology. Comprehensive Semiconductor Science and Technology, Six Volume Set captures the breadth of this important field, and presents it in a single source to the large audience who study, make, and exploit semiconductors. Previous attempts at this achievement have been abbreviated, and have omitted important topics. Written and Edited by a truly international team of experts, this work delivers an objective yet cohesive global review of the semiconductor world. The work is divided into three sections. The first section is concerned with the fundamental physics of semiconductors, showing how the electronic features and the lattice dynamics change drastically when systems vary from bulk to a low-dimensional structure and further to a nanometer size. Throughout this section there is an emphasis on the full understanding of the underlying physics. The second section deals largely with the transformation of the conceptual framework of solid state physics into devices and systems which require the growth of extremely high purity, nearly defect-free bulk and epitaxial materials. The last section is devoted to exploitation of the knowledge described in the previous sections to highlight the spectrum of devices we see all around us. Provides a comprehensive global picture of the semiconductor world Each of the work's three sections presents a complete description of one aspect of the whole Written and Edited by a truly international team of experts
Download or read book Power Microelectronics Device And Process Technologies Second Edition written by Yung Chii Liang and published by World Scientific. This book was released on 2017-03-14 with total page 608 pages. Available in PDF, EPUB and Kindle. Book excerpt: 'This is an excellent reference book for graduates or undergraduates studying semiconductor technology, or for working professionals who need a reference for detailed theory and working knowledge of processes in the field of power semiconductor devices.'IEEE Electrical Insulation MagazineThis descriptive textbook provides a clear look at the theories and process technologies necessary for understanding the modern power semiconductor devices, i.e. from the fundamentals of p-n junction electrostatics, unipolar MOSFET and superjunction structures, bipolar IGBT, to the most recent wide bandgap SiC and GaN devices. It also covers their associated semiconductor process technologies. Real examples based on actual fabricated devices, with the process steps described in clear detail are especially useful. This book is suitable for university courses on power semiconductor or power electronic devices. Device designers and researchers will also find this book a good reference in their work, especially for those focusing on the advanced device development and design aspects.
Download or read book State of the Art Program on Compound Semiconductors 45 SOTAPOCS 45 and Wide Bandgap Semiconductor Materials and Devices 7 written by F. Ren and published by The Electrochemical Society. This book was released on 2006 with total page 491 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains papers from two symposia: State of the Art Program on Compound Semiconductors 45 and Wide Bandgap Semiconductor Materials and Devices VII.
Download or read book Silicon Carbide written by Chuan Feng Zhe and published by CRC Press. This book was released on 2003-10-30 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book will provide useful information to material growers and evaluators, device design and processing engineers as well as potential users of SiC technologies. This book will help identify remaining challenging issues to stimulate further investigation to realize the full potential of wide band gap SiC for optoelectronic and microelectronic applications.
Download or read book Silicon Carbide and Related Materials 2004 written by Roberta Nipoti and published by . This book was released on 2005 with total page 1134 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide (SiC), Gallium Nitride (GaN) and Diamond are examples of wide-bandgap semiconductors having chemical, electrical and optical properties which make them very attractive for the fabrication of high-power and high-frequency electronic devices, as well as of light-emitters and sensors which have to operate under harsh conditions. The book comprises the proceedings of the 5th edition of the European Conference on Silicon Carbide and Related Materials, held from the 31st August to the 4th September 2004 in Bologna, Italy. This conference series here continued its tradition of being the main European forum for exchanging results, and discussing progress, between those university and industry researchers who are most active in the fields of SiC and related materials. Attendees at the conference highlighted the progress made in material growth technology, characterization of material properties and technological processing for electronic applications. Many electronics devices were presented: including high-voltage, high power-density and high-temperature components; as well as microwave components. Radiation-hard sensors were also presented.These proceedings fully document the latest experimental and theoretical understanding of the growth of bulk and epitaxial layers, the properties of the resultant materials, the development of suitable processes and of electronic devices that can best exploit and benefit from the outstanding physical properties that are offered by wide-bandgap materials.
Download or read book Vertical GaN and SiC Power Devices written by Kazuhiro Mochizuki and published by Artech House. This book was released on 2018-04-30 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique new resource provides a comparative introduction to vertical Gallium Nitride (GaN) and Silicon Carbide (SiC) power devices using real commercial device data, computer, and physical models. This book uses commercial examples from recent years and presents the design features of various GaN and SiC power components and devices. Vertical verses lateral power semiconductor devices are explored, including those based on wide bandgap materials. The abstract concepts of solid state physics as they relate to solid state devices are explained with particular emphasis on power solid state devices. Details about the effects of photon recycling are presented, including an explanation of the phenomenon of the family tree of photon-recycling. This book offers in-depth coverage of bulk crystal growth of GaN, including hydride vapor-phase epitaxial (HVPE) growth, high-pressure nitrogen solution growth, sodium-flux growth, ammonothermal growth, and sublimation growth of SiC. The fabrication process, including ion implantation, diffusion, oxidation, metallization, and passivation is explained. The book provides details about metal-semiconductor contact, unipolar power diodes, and metal-insulator-semiconductor (MIS) capacitors. Bipolar power diodes, power switching devices, and edge terminations are also covered in this resource.
Download or read book Defects and Diffusion in Ceramics written by David J. Fisher and published by Trans Tech Publications Ltd. This book was released on 2000-02-03 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the second issue, following DDF164, to cover recent progress in this field. The contents are contiguous with those of DDF164, and extend to late November or December 1999 (depending upon journal publication dates). As usual, priority in abstracting has been given to the most accessible work and, in particular, to those papers which furnish original data or report important new techniques, phenomena or anomalies, although there is also extensive coverage of more qualitative features of diffusion and defect phenomena, and of the predictions of computer models.
Download or read book The Handbook of Photonics written by Mool C. Gupta and published by CRC Press. This book was released on 2018-10-03 with total page 1040 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reflecting changes in the field in the ten years since the publication of the first edition, The Handbook of Photonics, Second Edition explores recent advances that have affected this technology. In this new, updated second edition editor Mool Gupta is joined by John Ballato, strengthening the handbook with their combined knowledge and the continued contributions of world-class researchers. New in the Second Edition: Information on optical fiber technology and the economic impact of photonics Coverage of emerging technologies in nanotechnology Sections on optical amplifiers, and polymeric optical materials The book covers photonics materials, devices, and systems, respectively. An introductory chapter, new to this edition, provides an overview of photonics technology, innovation, and economic development. Resting firmly on the foundation set by the first edition, this new edition continues to serve as a source for introductory material and a collection of published data for research and training in this field, making it the reference of first resort.
Download or read book Silicon Carbide and Related Materials 2005 written by Robert P. Devaty and published by . This book was released on 2006 with total page 878 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide (SiC), Gallium Nitride (GaN) and Diamond are examples of wide-bandgap semiconductors having chemical, electrical and optical properties which make them very attractive for the fabrication of high-power and high-frequency electronic devices, as well as light-emitters and sensors which have to operate under harsh conditions.
Download or read book Defects and Diffusion in Ceramics written by and published by . This book was released on 2003 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book International Aerospace Abstracts written by and published by . This book was released on 1998 with total page 920 pages. Available in PDF, EPUB and Kindle. Book excerpt:
