Download or read book The characterization of diamond thin films grown by chemical vapour deposition written by Andr Venter and published by . This book was released on 1996 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electrical and Structural Characterization of Diamond Thin Films Grown by Chemical Vapor Deposition written by Ashish Shrotriya and published by . This book was released on 1993 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The Characterisation of Diamond Thin Films Grown by Chemical Vapour Deposition written by André Venter and published by . This book was released on 1996 with total page 189 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Characterization of Homoepitaxial Diamond Thin Films Grown by Hot Filament Assisted Chemical Vapor Deposition written by William Brock Alexander and published by . This book was released on 1995 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diamond Thin Films An Emerging Technology Past Present and Future written by Ashok Kumar Dua and published by Trans Tech Publications Ltd. This book was released on 2004-08-08 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond, as well as being a precious gem, is a versatile material par excellence. No other material comes anywhere near to matching its properties, which are both extreme, and also expressed in rare combinations. However, natural diamonds, and those synthesised under high sandpressure temperatures, are too expensive or small for many technological applications. These limitations can be overcome by using large-area diamond coatings; chemically bonded to inexpensive non-diamond surfaces. The consequent economic advantages provide the driving force for much diamond-related research and technology.
Download or read book Diamond Films written by Koji Kobashi and published by Elsevier. This book was released on 2010-07-07 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: - Discusses the most advanced techniques for diamond growth - Assists diamond researchers in deciding on the most suitable process conditions - Inspires readers to devise new CVD (chemical vapor deposition Ever since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.
Download or read book Thin Film Diamond written by A.H. Lettington and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work, written by leading international authorities, deals with nucleation growth and processing, characterization and electrical, thermal, optical and mechanical properties of thin film diamond. The final chapters are devoted to the broad range of applications of this material.
Download or read book Growth and Characterization of Diamond Thin Films written by Sattar Mirzakuchaki and published by . This book was released on 1996 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical vapor deposited (CVD) diamond thin films grown homoepitaxially as well as on non-diamond substrates have been the subject of intense investigation since the beginning of the last decade. Diamond's remarkable properties such as physical hardness, chemical inertness, high thermal conductivity, high breakdown voltage, and high carrier mobility are the main factors for the attention it has received from many researchers around the world. Although these properties are somewhat degraded in polycrystalline diamond films, they are still superior to many other materials. One of the most potentially useful applications of diamond thin films is in the semiconductor industry. Although a few prototype devices such as field effect transistors and Schottky diodes have been fabricated on diamond, some major obstacles remain to be overcome before full scale commercial applications of diamond as a semiconductor is possible. The high cost of large area monocrystalline diamond substrates has forced researchers to look for alternative substrates for the heteroepitaxial growth of diamond. So far only marginal results have been reported on the growth of highly oriented diamond films and on the heteroepitaxial growth involving substrates that are as costly as diamond. Silicon, as the dominant material in semiconductor industry, has been the subject of much research as a substrate for the growth of polycrystalline diamond. Another problem in development of diamond as a semiconductor is the effective doping of diamond, particularly for n-type conductivity. Although many researchers have studied boron-doped (p-type) diamond thin films in the past several years, there have been few reports on the effects of doping diamond films with phosphorous (n-type). Once these two issues have been solved, other fabrication steps such as oxidation, etching, masking, etc. may be attempted. The present work is a study directed toward solving some of these problems by looking at in-situ doping of n-type hot filament CVD (HFCVD) grown diamond films on silicon substrates. The study includes electrical characterization, stable metallic contacts, effect of silicon substrate surface pretreatment, and selective area deposition. A number of different techniques for inducing diamond nucleation on Si substrates are studied and the resulting diamond films characterized by common techniques such as Raman spectroscopy, X-ray diffraction, optical and scanning electron microscopy, and profilometery. The effect of doping the diamond films with different concentrations of phosphorous as well as calculation of the activation energy by temperature measurement was also carried out in this work. A new technique is presented for the selective deposition of diamond films onto silicon substrates.
Download or read book Synthesis and Characterization of Diamond Films Grown by the Hot Filament Chemical Vapor Deposition Technique written by Quan You and published by . This book was released on 1997 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book In Situ Real Time Characterization of Thin Films written by Orlando Auciello and published by John Wiley & Sons. This book was released on 2001 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: An in-depth look at the state of the art of in situ real-time monitoring and analysis of thin films With thin film deposition becoming increasingly critical in the production of advanced electronic and optical devices, scientists and engineers working in this area are looking for in situ, real-time, structure-specific analytical tools for characterizing phenomena occurring at surfaces and interfaces during thin film growth. This volume brings together contributed chapters from experts in the field, covering proven methods for in situ real-time analysis of technologically important materials such as multicomponent oxides in different environments. Background information and extensive references to the current literature are also provided. Readers will gain a thorough understanding of the growth processes and become acquainted with both emerging and more established methods that can be adapted for in situ characterization. Methods and their most useful applications include: * Low-energy time-of-flight ion scattering and direct recoil spectroscopy (TOF-ISRAS) for studying multicomponent oxide film growth processes * Reflection high-energy electron diffraction (RHEED) for determining the nature of chemical reactions at film surfaces * Spectrometric ellipsometry (SE) for use in the analysis of semiconductors and other multicomponent materials * Reflectance spectroscopy and transmission electron microscopy for monitoring epitaxial growth processes * X-ray fluorescence spectroscopy for studying surface and interface structures * And other cost-effective techniques for industrial application
Download or read book Thin Film Diamond I written by Christopher Nebel and published by Academic Press. This book was released on 2003-12-12 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume reviews the state of the art of thin film diamond, a very promising new semiconductor that may one day rival silicon as the material of choice for electronics. Diamond has the following important characteristics; it is resistant to radiation damage, chemically inert and biocompatible and it will become "the material" for bio-electronics, in-vivo applications, radiation detectors and high-frequency devices. Thin-Film Diamond is the first book to summarize state of the art of CVD diamond in depth. It covers the most recent results regarding growth and structural properties, doping and defect characterization, hydrogen in and on diamond as well as surface properties in general, applications of diamond in electrochemistry, as detectors, and in surface acoustic wave devices.· Accessible by both experts and non-experts in the field of semi-conductors research and technology, each chapter is written in a tutorial format· Helping engineers to manufacture devices with optimized electronic properties· Truly international, this volume contains chapters written by recognized experts representing academic and industrial institutions from Europe, Japan and the US
Download or read book Diamond and Diamond Like Film Applications written by Peter Gielisse and published by CRC Press. This book was released on 1998-05-05 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers nucleation and growth; modeling and phase equilibria; properties characterisation; diamond-like carbon; and wide bandgap nitrides and carbides of Diamond and Diamond-Film applications as presented as the proceedings of the third international symposium on Diamond Films in St.Petersburg, Russia June 16-19, 1996
Download or read book Synthesis of Diamond Thin Films by Atmospheric pressure Thermal Chemical Vapor Deposition and Their Characterization written by Y. Hirose and published by . This book was released on 1987 with total page 20 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Study of Polycrystalline Diamond Thin Films Grown in a Custom Built ECR PE CVD System written by Vidhya Sagar Jayaseelan and published by . This book was released on 2000 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt: The increasing importance of high temperature electronics has necessitated a search for new materials. Silicon provides low reliability or fails to function altogether at elevated (>500F /260(C) temperatures. Diamond, being a wide-band-gap semiconductor, is a very promising candidate for these applications as well as others that function in adverse conditions. However, the present day diamond film technology, with respect to quality and consistency of properties of the films, has not seen the advancement required for its commercial application. This research is an effort to investigate the growth of diamond thin films to enable their application for advanced electronic devices. The first objective of the research was to construct a state of the art Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition (ECR-MPCVD) system for processing diamond and diamond like materials. Such a facility is the most advanced and powerful tool for CVD of poly-crystalline diamond and cubic Boron Nitride. Important factors like ease of operation and maintenance, stability and reproducibility of process conditions, reliability, safety, cost etc were considered while constructing the machine. The system was subjected to a series of tests to ensure that these factors were adequately satisfied. The second objective of this project was to grow polycrystalline diamond films under various conditions of chamber pressure, substrate temperature, hydrogen flow rate, composition and substrate pretreatment. The properties of the films grown under these conditions were evaluated by various modern characterization techniques such as optical microscopy, scanning electron microscopy, Raman spectroscopy and X-ray diffraction. Optical microscopy is an inexpensive, quick and effective method for initial evaluation of the uniformity and general morphology of the films obtained. Scanning electron microscopy gives information about the grain size, thickness, growth rate, uniformity, faceting, roughness, and continuous nature of the film. Raman spectroscopy is probably the most important characterization method for diamond films for electronic applications. It helps to identify the presence of diamond and the nature of the film. Raman spectrum is used to evaluate the quality of the diamond grains in the film, defect concentration and crystallinity. It also gives information about the presence of the non-diamond graphite phase and hence indirectly the intrinsic conductivity. XRD is also a positive identification tool. It was also used to derive information about the grain orientation with respect to the silicon substrate. The properties of the films obtained were correlated with the growth parameters and conclusions were drawn about the effect of these parameters on the film properties. This also helped in the characterization of the MPCVD reactor and in determining an effective range of parameters for future studies on the selective growth, long term growth, or growth of films with oxygen addition to the precursor.
Download or read book Diamond Thin Films written by John I.B. Wilson and published by CRC Press. This book was released on 2015-03-15 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt: An understanding of thin-film diamond by physical and chemical vapour deposition CVD is of wide application in materials science. This book provides an account of the physical, mechanical and chemical properties of diamond thin films as well as examining the engineering techniques and problems required to exploit them successfully. "Diamond Thin Films" explores the application and measurement of CVD in existing applications and their potential for new usage. The properties of diamond and the techniques of synthesis are examined in detail, with particular emphasis on diamond growth by CVD and quality, shaping and reaction factors. The areas for future study and application are discussed in terms of current state-of-the-art materials and surface science. This book should be a valuable resource for materials scientists and physicists involved in the study of semi-conductor materials, thin films and surface science.
Download or read book Growth and Characterization of Diamond and Diamond like Films by Filament assisted Chemical Vapor Deposition written by Yijian Jin and published by . This book was released on 1993 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diamond Thin Films written by John I. B. Wilson and published by Wiley-VCH. This book was released on 1996-05-17 with total page 494 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume brings together some of the key components in what is an exciting scientific and technical challenge: to establish diamond as an engineering material that will revolutionise operations in optics, mechanics and electronics. The collection of papers gives a "snapshot" of a rapidly developing subject. It should attract comments and thoughts from those that have not previously considered thin-film diamond to be a maturing subject, as well as being stimulating to all of them already working in the area.
