Download or read book The Application of Submicron Lithography Defect Simulation to IC Yield Improvement written by Linda Milor and published by . This book was released on 1999 with total page 62 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: "Yield improvement efforts traditionally involve extensive experimental work aimed at diagnosis of defect sources. This paper proposes a methodology for supplementing such experimental work with defect simulation. In particular, it is shown that lithography defect simulation can provide insight into defect mechanisms that cause major distortions in photoresist profiles. The nature of the distorted patterns can assist us in yield improvement efforts, since by comparing simulation results with the observed photoresist profiles on wafers, defect sources may be identified. Several lithography defect diagnosis examples are presented to demonstrate the approach."

Download or read book Predictive Modeling of Integrated Circuit Manufacturing Variation written by Swamy V. Muddu and published by . This book was released on 2007 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: Continuous scaling of feature sizes in CMOS integrated circuits (IC) pushes the design performance envelope as well as design complexity higher with each successive technology node. Advancements in materials and optics of the manufacturing process enable the scaling and manufacturability of devices in ICs. As device feature dimensions approach the physical limits of lithography and the manufacturing process, the smallest geometric and material variations manifest as design-level performance and power variability. One of the main pathological effects of IC scaling is the increase in design variability as a fraction of performance with each technology node. This design variability directly affects IC parametric (i.e., performance-limited) and catastrophic (i.e., defect-limited) yield, and consequently, IC cost. To address the increase in manufacturing variability in deep-submicron (DSM) technologies and to improve IC yield, a new design for manufacturability (DFM) paradigm has emerged in the recent past. The DFM paradigm encompasses a set of design methodologies that address manufacturing and process non-idealities at the design level to make ICs more robust to variations. DFM is also interpreted as a set of post-layout design fixing techniques that enhance and ease manufacturability. In general, the objective of DFM is to improve IC yield and cost by increasing manufacturing-awareness in the design phase, as well as design-awareness in the manufacturing phase. To achieve this dual objective of DFM, design must be driven by models of variation in the manufacturing process and the manufacturing process, must be made aware of the design intent. Variations in the IC manufacturing process are manifested as (1) deviation from the intended shapes of IC geometries, and (2) variations in impurity (i.e., dopant) concentrations. These variations are composed of systematic and random components. The systematic component of variation can be attributed to specific sources in the manufacturing process, while the random component is usually a result of confounding of several sources of variation and cannot be attributed to specific sources. A significant fraction of the total variation in shapes of IC geometries is systematic in sources such as focus, exposure dose, lens aberrations, etc. The objective of this thesis is to model the impact of the raw sources of variation at the mask making and wafer pattern transfer phases in manufacturing. The primary goal in the associated research is to develop models that can drive systematic variation-aware design. We propose techniques to model the impact of mask-level and wafer-level sources of variation on IC geometries. At the mask-level, proximity effects and resist heating caused by electron-beam writing are the two main sources of mask critical dimension (CD) errors. We propose a novel methodology to model resist heating caused by electron-beam writing on the mask resist. We use the resist heating model to drive temperature-aware mask writing schedules that minimize resist temperature, and consequently minimize mask CD error. Sub-wavelength optical lithography in sub-100nm technology nodes is enabled by resolution enhancement techniques (RETs) that allow patterning of layout features on silicon wafers. Optical proximity correction (OPC) is the most prominent RET used to compensate a design layout for optical and process effects prior to mask making and lithography. OPC modifies the shapes of layout features, and consequently increases mask complexity and cost. We develop a model of post-OPC mask cost of design features, to drive design-aware mask cost optimization. Despite advanced RETs and illumination techniques, several sources of variation in the pattern transfer process result in variations in chip-level performance and power. At 45nm and below, accurate design-level performance and power analyses must consider litho-simulated non-idealities in patterning. However, the simulation of exposure, resist and etch processing steps in lithography is computationally expensive to perform at chip-scale, and essentially infeasible during iterative design optimization. In this thesis, We develop a predictive model of post-OPC linewidth of devices in standard cells across the process window. The predictive model is fast, accurate and highly scalable, enabling its use in the design phase at full-chip scale without actually performing OPC and litho simulation. Last, we demonstrate the use of predictive linewidth models in fast and accurate leakage estimation and optimization. First, We discuss the use of through-focus systematic linewidth models to achieve accurate leakage estimation. We then discuss a novel detailed placement perturbation approach that leverages systematic pitch and focus interactions to improve leakage in light of systematic linewidth variation. These two methods demonstrate the use of predictive models of variation in driving variation-aware design analysis and optimization.

Download or read book Wafer Level Integrated Systems written by Stuart K. Tewksbury and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: From the perspective of complex systems, conventional Ie's can be regarded as "discrete" devices interconnected according to system design objectives imposed at the circuit board level and higher levels in the system implementation hierarchy. However, silicon monolithic circuits have progressed to such complex functions that a transition from a philosophy of integrated circuits (Ie's) to one of integrated sys tems is necessary. Wafer-scale integration has played an important role over the past few years in highlighting the system level issues which will most significantly impact the implementation of complex monolithic systems and system components. Rather than being a revolutionary approach, wafer-scale integration will evolve naturally from VLSI as defect avoidance, fault tolerance and testing are introduced into VLSI circuits. Successful introduction of defect avoidance, for example, relaxes limits imposed by yield and cost on Ie dimensions, allowing the monolithic circuit's area to be chosen according to the natural partitioning of a system into individual functions rather than imposing area limits due to defect densities. The term "wafer level" is perhaps more appropriate than "wafer-scale". A "wafer-level" monolithic system component may have dimensions ranging from conventional yield-limited Ie dimensions to full wafer dimensions. In this sense, "wafer-scale" merely represents the obvious upper practical limit imposed by wafer sizes on the area of monolithic circuits. The transition to monolithic, wafer-level integrated systems will require a mapping of the full range of system design issues onto the design of monolithic circuit.

Download or read book Science Abstracts written by and published by . This book was released on 1995 with total page 1360 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Integrated Circuit Metrology Inspection and Process Control written by and published by . This book was released on 1993 with total page 622 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Integrated Circuit Metrology Inspection and Process Control II written by Kevin M. Monahan and published by . This book was released on 1988 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Microelectronics Manufacturing Diagnostics Handbook written by Abraham Landzberg and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 663 pages. Available in PDF, EPUB and Kindle. Book excerpt: The world of microelectronics is filled with cusses measurement systems, manufacturing many success stories. From the use of semi control techniques, test, diagnostics, and fail ure analysis. It discusses methods for modeling conductors for powerful desktop computers to their use in maintaining optimum engine per and reducing defects, and for preventing de formance in modem automobiles, they have fects in the first place. The approach described, clearly improved our daily lives. The broad while geared to the microelectronics world, has useability of the technology is enabled, how applicability to any manufacturing process of similar complexity. The authors comprise some ever, only by the progress made in reducing their cost and improving their reliability. De of the best scientific minds in the world, and fect reduction receives a significant focus in our are practitioners of the art. The information modem manufacturing world, and high-quality captured here is world class. I know you will diagnostics is the key step in that process. find the material to be an excellent reference in of product failures enables step func Analysis your application. tion improvements in yield and reliability. which works to reduce cost and open up new Dr. Paul R. Low applications and technologies. IBM Vice President and This book describes the process ofdefect re of Technology Products General Manager duction in the microelectronics world.

Download or read book Electrical Electronics Abstracts written by and published by . This book was released on 1997 with total page 1948 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advanced CMOS Process Technology written by J Pimbley and published by Elsevier. This book was released on 2012-12-02 with total page 305 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced CMOS Process Technology is part of the VLSI Electronics Microstructure Science series. The main topic of this book is complementary metal-oxide semiconductor or CMOS technology, which plays a significant part in the electronics systems. The topics covered in this book range from metallization, isolation techniques, reliability, and yield. The volume begins with an introductory chapter that discusses the microelectronics revolution of the 20th century. Then Chapter 2 puts focus on the CMOS devices and circuit background, discussing CMOS capacitors and field effect transistors. Metallization topics and concepts are covered in Chapter 3, while isolation techniques are tackled in Chapter 4. Long-term reliability of CMOS is the topic covered in Chapter 5. Finally, the ability of semiconductor technology to yield circuits is discussed in Chapter 6. The book is particularly addressed to engineers, scientists, and technical managers.

Download or read book Lithography Process Control written by Harry J. Levinson and published by SPIE Press. This book was released on 1999 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.

Download or read book The Engineering Index Annual written by and published by . This book was released on 1992 with total page 2264 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since its creation in 1884, Engineering Index has covered virtually every major engineering innovation from around the world. It serves as the historical record of virtually every major engineering innovation of the 20th century. Recent content is a vital resource for current awareness, new production information, technological forecasting and competitive intelligence. The world?s most comprehensive interdisciplinary engineering database, Engineering Index contains over 10.7 million records. Each year, over 500,000 new abstracts are added from over 5,000 scholarly journals, trade magazines, and conference proceedings. Coverage spans over 175 engineering disciplines from over 80 countries. Updated weekly.

Download or read book IEEE SEMI Advanced Semiconductor Manufacturing Conference and Workshop written by and published by Institute of Electrical & Electronics Engineers(IEEE). This book was released on 1992 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Design and Process Integration for Microelectronic Manufacturing written by and published by . This book was released on 2004 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Design and Process Integration for Microelectronic Manufacturing II sic written by Lars W. Liebmann and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Download or read book Index to IEEE Publications written by Institute of Electrical and Electronics Engineers and published by . This book was released on 1997 with total page 1462 pages. Available in PDF, EPUB and Kindle. Book excerpt: Issues for 1973- cover the entire IEEE technical literature.

Download or read book Automatic Optical Inspection written by Lionel R. Baker and published by . This book was released on 1986 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Defect Oriented Testing for Nano Metric CMOS VLSI Circuits written by Manoj Sachdev and published by Springer Science & Business Media. This book was released on 2007-06-04 with total page 343 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 2nd edition of defect oriented testing has been extensively updated. New chapters on Functional, Parametric Defect Models and Inductive fault Analysis and Yield Engineering have been added to provide a link between defect sources and yield. The chapter on RAM testing has been updated with focus on parametric and SRAM stability testing. Similarly, newer material has been incorporated in digital fault modeling and analog testing chapters. The strength of Defect Oriented Testing for nano-Metric CMOS VLSIs lies in its industrial relevance.