Download or read book Dissertation Abstracts International written by and published by . This book was released on 2003 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Kona written by and published by . This book was released on 2008 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advances in Chemical Mechanical Planarization CMP written by Babu Suryadevara and published by Woodhead Publishing. This book was released on 2021-09-10 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP cleaning challenges and tribology of CMP. This important book offers a systematic review of fundamentals and advances in the area. Part one covers CMP of dielectric and metal films, with chapters focusing on the use of current and emerging techniques and processes and on CMP of various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. New content addressed includes CMP challenges with tungsten, cobalt, and ruthenium as interconnect and barrier films, consumables for ultralow topography and CMP for memory devices. Part two addresses consumables and process control for improved CMP and includes chapters on CMP pads, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes and approaches for defection characterization, mitigation, and reduction. Advances in Chemical Mechanical Planarization (CMP), Second Edition is an invaluable resource and key reference for materials scientists and engineers in academia and R&D. - Reviews the most relevant techniques and processes for CMP of dielectric and metal films - Includes chapters devoted to CMP for current and emerging materials - Addresses consumables and process control for improved CMP, including post-CMP

Download or read book Microelectronic Applications of Chemical Mechanical Planarization written by Yuzhuo Li and published by John Wiley & Sons. This book was released on 2007-10-19 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips * Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP * Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP * Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.

Download or read book Nanoparticle Engineering for Chemical Mechanical Planarization written by Ungyu Paik and published by CRC Press. This book was released on 2019-04-15 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progressively becomes perceived less as black art and more as a cutting-edge technology, it is emerging as the technology for achieving higher performance devices. Nanoparticle Engineering for Chemical-Mechanical Planarization explains the physicochemical properties of nanoparticles according to each step in the CMP process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. They present design techniques using polymeric additives to improve CMP performance. The final chapter focuses on novel CMP slurry for the application to memory devices beyond 50nm technology. Most books published on CMP focus on the polishing process, equipment, and cleaning. Even though some of these books may touch on CMP slurries, the methods they cover are confined to conventional slurries and none cover them with the detail required for the development of next-generation devices. With its coverage of fundamental concepts and novel technologies, this book delivers expert insight into CMP for all current and next-generation systems.

Download or read book Nanofluid Flow in Porous Media written by Mohsen Sheikholeslami Kandelousi and published by BoD – Books on Demand. This book was released on 2020-08-19 with total page 246 pages. Available in PDF, EPUB and Kindle. Book excerpt: Studies of fluid flow and heat transfer in a porous medium have been the subject of continuous interest for the past several decades because of the wide range of applications, such as geothermal systems, drying technologies, production of thermal isolators, control of pollutant spread in groundwater, insulation of buildings, solar power collectors, design of nuclear reactors, and compact heat exchangers, etc. There are several models for simulating porous media such as the Darcy model, Non-Darcy model, and non-equilibrium model. In porous media applications, such as the environmental impact of buried nuclear heat-generating waste, chemical reactors, thermal energy transport/storage systems, the cooling of electronic devices, etc., a temperature discrepancy between the solid matrix and the saturating fluid has been observed and recognized.

Download or read book Nanoscale Materials written by Luis M. Liz-Marzán and published by Springer Science & Business Media. This book was released on 2007-05-08 with total page 506 pages. Available in PDF, EPUB and Kindle. Book excerpt: Organized nanoassemblies of inorganic nanoparticles and organic molecules are building blocks of nanodevices, whether they are designed to perform molecular level computing, sense the environment or improve the catalytic properties of a material. The key to creation of these hybrid nanostructures lies in understanding the chemistry at a fundamental level. This book serves as a reference book for researchers by providing fundamental understanding of many nanoscopic materials.

Download or read book Porosity written by Taher Ghrib and published by BoD – Books on Demand. This book was released on 2018-04-26 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses multiways in the porous materials. It involves materials with a large number of holes, and it highlights the synthesis, structure, and surface properties of porous materials closely related to more applications, such as support, catalyst, energy storage, chemical reactions, and optical applications. It studies the effect of the filling materials, the thermal treatments, and the porous density in the improvement of physical properties, electrical and energy efficiency, and the generation of new materials. Some synthetic process will be discussed with the effect of some parameters on the final characteristics of the prepared porous structures.

Download or read book Nanocatalysis written by Vivek Polshettiwar and published by John Wiley & Sons. This book was released on 2013-09-30 with total page 755 pages. Available in PDF, EPUB and Kindle. Book excerpt: Exhibiting both homogeneous and heterogeneous catalytic properties, nanocatalysts allow for rapid and selective chemical transformations, with the benefits of excellent product yield and ease of catalyst separation and recovery. This book reviews the catalytic performance and the synthesis and characterization of nanocatalysts, examining the current state of the art and pointing the way towards new avenues of research. Moreover, the authors discuss new and emerging applications of nanocatalysts and nanocatalysis, from pharmaceuticals to fine chemicals to renewable energy to biotransformations. Nanocatalysis features contributions from leading research groups around the world. These contributions reflect a thorough review of the current literature as well as the authors’ first-hand experience designing and synthesizing nanocatalysts and developing new applications for them. The book’s nineteen chapters offer a broad perspective, covering: Nanocatalysis for carbon-carbon and carbon-heteroatom coupling reactions Nanocatalysis for various organic transformations in fine chemical synthesis Nanocatalysis for oxidation, hydrogenation, and other related reactions Nanomaterial-based photocatalysis and biocatalysis Nanocatalysts to produce non-conventional energy such as hydrogen and biofuels Nanocatalysts and nano-biocatalysts in the chemical industry Readers will also learn about the latest spectroscopic and microscopy tools used in advanced characterization methods that shed new light on nanocatalysts and nanocatalysis. Moreover, the authors offer expert advice to help readers develop strategies to improve catalytic performance. Summarizing and reviewing all the most important advances in nanocatalysis over the last two decades, this book explains the many advantages of nanocatalysts over conventional homogeneous and heterogeneous catalysts, providing the information and guidance needed for designing green, sustainable catalytic processes.

Download or read book Silicon Carbide written by Wolfgang J. Choyke and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 911 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the 1997 publication of "Silicon Carbide - A Review of Fundamental Questions and Applications to Current Device Technology" edited by Choyke, et al., there has been impressive progress in both the fundamental and developmental aspects of the SiC field. So there is a growing need to update the scientific community on the important events in research and development since then. The editors have again gathered an outstanding team of the world's leading SiC researchers and design engineers to write on the most recent developments in SiC.

Download or read book Nanostructure Science and Technology written by Richard W. Siegel and published by Springer Science & Business Media. This book was released on 1999-09-30 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: Timely information on scientific and engineering developments occurring in laboratories around the world provides critical input to maintaining the economic and technological strength of the United States. Moreover, sharing this information quickly with other countries can greatly enhance the productivity of scientists and engineers. These are some of the reasons why the National Science Foundation (NSF) has been involved in funding science and technology assessments comparing the United States and foreign countries since the early 1980s. A substantial number of these studies have been conducted by the World Technology Evaluation Center (WTEC) managed by Loyola College through a cooperative agreement with NSF. The National Science and Technology Council (NSTC), Committee on Technology's Interagency Working Group on NanoScience, Engineering and Technology (CT/IWGN) worked with WTEC to develop the scope of this Nanostucture Science and Technology report in an effort to develop a baseline of understanding for how to strategically make Federal nanoscale R&D investments in the coming years. The purpose of the NSTC/WTEC activity is to assess R&D efforts in other countries in specific areas of technology, to compare these efforts and their results to U. S. research in the same areas, and to identify opportunities for international collaboration in precompetitive research. Many U. S. organizations support substantial data gathering and analysis efforts focusing on nations such as Japan. But often the results of these studies are not widely available. At the same time, government and privately sponsored studies that are in the public domain tend to be "input" studies.

Download or read book Copper Interconnect Technology written by Tapan Gupta and published by Springer Science & Business Media. This book was released on 2010-01-22 with total page 433 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transistors as well. During the last decade, however, the parasitic resistance, capacitance, and inductance associated with interconnections began to influence circuit performance and will be the primary factors in the evolution of nanoscale ULSI technology. Because metallic conductivity and resistance to electromigration of bulk copper (Cu) are better than aluminum, use of copper and low-k materials is now prevalent in the international microelectronics industry. As the feature size of the Cu-lines forming interconnects is scaled, resistivity of the lines increases. At the same time electromigration and stress-induced voids due to increased current density become significant reliability issues. Although copper/low-k technology has become fairly mature, there is no single book available on the promise and challenges of these next-generation technologies. In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.

Download or read book Properties of Porous Silicon written by Leigh T. Canham and published by Institution of Electrical Engineers. This book was released on 1997 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: A detailed insight into porous silicon and its diverse novel applications.

Download or read book Nanoparticle Technology Handbook written by Masuo Hosokawa and published by Elsevier. This book was released on 2007-10-19 with total page 645 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoparticle technology, which handles the preparation, processing, application and characterisation of nanoparticles, is a new and revolutionary technology. It becomes the core of nanotechnology as an extension of the conventional Fine Particle / Powder Technology. Nanoparticle technology plays an important role in the implementation of nanotechnology in many engineering and industrial fields including electronic devices, advanced ceramics, new batteries, engineered catalysts, functional paint and ink, Drug Delivery System, biotechnology, etc.; and makes use of the unique properties of the nanoparticles which are completely different from those of the bulk materials.This new handbook is the first to explain complete aspects of nanoparticles with many application examples showing their advantages and advanced development. There are handbooks which briefly mention the nanosized particles or their related applications, but no handbook describing the complete aspects of nanoparticles has been published so far.The handbook elucidates of the basic properties of nanoparticles and various nanostructural materials with their characterisation methods in the first part. It also introduces more than 40 examples of practical and potential uses of nanoparticles in the later part dealing with applications. It is intended to give readers a clear picture of nanoparticles as well as new ideas or hints on their applications to create new materials or to improve the performance of the advanced functional materials developed with the nanoparticles.* Introduces all aspects of nanoparticle technology, from the fundamentals to applications.* Includes basic information on the preparation through to the characterization of nanoparticles from various viewpoints * Includes information on nanostructures, which play an important role in practical applications.

Download or read book Logic Synthesis for Asynchronous Controllers and Interfaces written by J. Cortadella and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 279 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the result of a long friendship, of a broad international co operation, and of a bold dream. It is the summary of work carried out by the authors, and several other wonderful people, during more than 15 years, across 3 continents, in the course of countless meetings, workshops and discus sions. It shows that neither language nor distance can be an obstacle to close scientific cooperation, when there is unity of goals and true collaboration. When we started, we had very different approaches to handling the mys terious, almost magical world of asynchronous circuits. Some were more theo retical, some were closer to physical reality, some were driven mostly by design needs. In the end, we all shared the same belief that true Electronic Design Automation research must be solidly grounded in formal models, practically minded to avoid excessive complexity, and tested "in the field" in the form of experimental tools. The results are this book, and the CAD tool petrify. The latter can be downloaded and tried by anybody bold (or desperate) enough to tread into the clockless (but not lawless) domain of small-scale asynchronicity. The URL is http://www.lsi. upc. esr j ordic/petrify. We believe that asynchronous circuits are a wonderful object, that aban dons some of the almost militaristic law and order that governs synchronous circuits, to improve in terms of simplicity, energy efficiency and performance.

Download or read book Introduction to Glass Science and Technology written by James E Shelby and published by Royal Society of Chemistry. This book was released on 2015-11-06 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a concise and inexpensive introduction for an undergraduate course in glass science and technology. The level of the book has deliberately been maintained at the introductory level to avoid confusion of the student by inclusion of more advanced material, and is unique in that its text is limited to the amount suitable for a one term course for students in materials science, ceramics or inorganic chemistry. The contents cover the fundamental topics of importance in glass science and technology, including glass formation, crystallization, phase separation and structure of glasses. Additional chapters discuss the most important properties of glasses, including discussion of physical, optical, electrical, chemical and mechanical properties. A final chapter provides an introduction to a number of methods used to form technical glasses, including glass sheet, bottles, insulation fibre, optical fibres and other common commercial products. In addition, the book contains discussion of the effects of phase separation and crystallization on the properties of glasses, which is neglected in other texts. Although intended primarily as a textbook, Introduction to Glass Science and Technology will also be invaluable to the engineer or scientist who desires more knowledge regarding the formation, properties and production of glass.

Download or read book Nanotechnology in Industrial Wastewater Treatment written by Dr. Arup Roy and published by IWA Publishing. This book was released on 2015-01-15 with total page 182 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology in Industrial Wastewater Treatment is a state of the art reference book. The book is particularly useful for wastewater technology development laboratories and organizations. All professional and academic areas connected with environmental engineering, nanotechnology based wastewater treatment and related product design are incorporated and provide an essentialresource. The book describes the application and synthesis of Ca-based and magnetic nano-materials and their potential application for removal/treatment of heavy metals from wastewater. Nanotechnology in Industrial Wastewater Treatment discusses the rapid wastewater treatment methods using Ca-based nanomaterials and magnetic nanomaterials. This is an emerging area of new science and technology in wastewater treatment. The main audiences for the book are water industry professionals, research scholars and students in the area of Environmental Engineering and Nanotechnology. Authors: Dr. Arup Roy Department of Mining Engineering, Geo-Environmental Lab., Indian Institute of Technology, Kharagpur,India; and Professor Jayanta Bhattacharya, Department of Mining Engineering, Geo-Environmental Lab., Indian Institute of Technology, Kharagpur, India.