Download or read book Sub nanometer Interferometry for Aspheric Mirror Fabrication written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Aspheric mirrors for extreme ultraviolet lithography (EUVL) at a wavelength of 13nm require surface figure accuracy approaching 0.10 nm rms. A new type of interferometry, based on the fundamental process of diffraction, is described that has the intrinsically ability to achieve this accuracy on aspherical surfaces. However, care must be taken in the design and implementation of the optical system that images the aspheric mirror onto the CCD camera. Non-common paths of the measurement and reference wavefronts within the optical system, as well as distortion of the image of aspheric mirror on the CCD, must be addressed in order to realize sub-nanometer accuracy. The phase shifting diffraction interferometer and the mitigation of potential imaging errors are described for measuring the surface figure on aspheric mirrors.
Download or read book Nanofabrication written by Ampere A. Tseng and published by World Scientific. This book was released on 2008 with total page 583 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.
Download or read book Sub nanometer Interferometry and Precision Turning for Large Optical Fabrication written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: At Lawrence Livermore National Laboratory (LLNL), we have the unique combination of precision turning and metrology capabilities critical to the fabrication of large optical elements. We have developed a self-referenced interferometer to measure errors in aspheric optics to sub- nanometer accuracy over 200-millimeter apertures, a dynamic range of 5(approximately)10. We have utilized diamond turning to figure optics for X-ray to IR wavelengths and, with fast-tool-servo technology, can move optical segments from off-axis to on-axis. With part capacities to 2.3-meters diameter and the metrology described above, segments of very large, ultra-lightweight mirrors can potentially be figured to final requirements. precision of diamond-turning will carryover although the surface finish may be degraded. Finally, the most critical component of a fabrication process is the metrology that enables an accurate part. Well characterized machines are very repeatable and part accuracy must come from proper metrology. A self- referencing interferometer has been developed that can measure accurately to sub-nanometer values. As with traditional interferometers, measurements are fast and post- processed data provides useful feedback to the user. The simplicity of the device allows it to be used on large optics and systems.
Download or read book Pose varied Multi axis Optical Finishing Systems written by Haobo Cheng and published by Springer. This book was released on 2014-09-04 with total page 162 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on advanced optical finishing techniques and design for high-performance manufacturing systems. It provides numerous detailed examples of how advanced automation techniques have been applied to optical fabrication processes. The simulations, removal rate and accurate experimental results offer useful resources for engineering practice. Researchers, engineers and graduate students working in optical engineering and precision manufacture engineering will benefit from this book.
Download or read book Selected Topics in Nanoscience and Nanotechnology written by Andrew T. S. Wee and published by World Scientific. This book was released on 2009 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning probe techniques. Scanning probe microscopy based nanoscale patterning and fabrication / X. N. Xie, H. J. Chung and A. T. S. Wee. Nanoscale characterization by scanning tunneling microscopy / H. Xu ... [et al.] -- Nanofabrication. EUV lithography for semiconductor manufacturing and nanofabrication / H. Kinoshita. Synchrotron-radiation-supported high-aspect-ratio nanofabrication / A. Chen ... [et al.] -- Functional nanomaterials. Chemical interactions at noble metal nanoparticle surfaces - catalysis, sensors and devices / A. S. Nair. Diamond-like carbon : a new material base for nano-architectures / X. Li and D. H. C. Chua. Hotplate technique for nanomaterials / Y. Zhu and C. H. Sow -- Molecular engineering. [Pie symbol]-d interaction based molecular conducting magnets : how to increase the effects of the [Pie symbol]-d interaction / A. Miyazaki and T. Enoki. Recent developments on porphyrin assemblies / R. Charvet ... [et al.] -- Bionanotechnology and nanomedicine. Nanostructures from designer peptides / B. T. Ong, P. K. Ajikumar and S. Valiyaveettil. Nanotechnology and human diseases / G. Y. H. Lee and C. T. Lim. Nanomedicine : nanoparticles of biodegradable polymers for cancer diagnosis and treatment / S. S. Feng.
Download or read book Proceedings of the 3rd International Conference on Multimedia Technology ICMT 2013 written by Aly A. Farag and published by Springer Science & Business Media. This book was released on 2013-11-19 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the 3rd International Conference on Multimedia Technology (ICMT2013) focuses on both the theory and applications of multimedia technology. The recent advances, new research findings and applications in the fields of theoretical, experimental and applied image & video processing and multimedia technology presented at the conference are brought together in this book. It will serve as a valuable reference for scientists and engineers working in multimedia and related fields. Prof. Aly A. Farag works at the University of Louisville, USA; Prof. Jian Yang works at Tsinghua University, China; Dr. Feng Jiao works at Nanjing University of Information Science & Technology, China.
Download or read book Optical Fabrication Testing written by and published by . This book was released on 2002 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Emerging Lithographic Technologies written by and published by . This book was released on 2003 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advanced Optics Using Aspherical Elements written by Bernhard Braunecker and published by SPIE Press. This book was released on 2008 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern optical systems rely on leading-edge production technologies, especially when using aspherical optical elements. Due to the inherent complexity of aspheres, all efforts to push the technological limits are risky. Thus, to minimize risk, clear decisions based on a good understanding of technology are indispensable. This compendium is written as an optical technology reference book for development and production engineers. With contributions from worldwide experts, this book aids in mitigating the risk in adopting new asphere production technologies.
Download or read book Optical Interferometry written by Alexandr Banishev and published by BoD – Books on Demand. This book was released on 2017-02-15 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical methods of measurements are the most sensitive techniques of noncontact investigations, and at the same time, they are fast as well as accurate which increases reproducibility of observed results. In recent years, the importance of optical interferometry methods for research has dramatically increased, and applications range from precise surface testing to finding extrasolar planets. This book covers various aspects of optical interferometry including descriptions of novel apparatuses and methods, application interferometry for studying biological objects, surface qualities, materials characterization, and optical testing. The book includes a series of chapters in which experts share recent progress in interferometry through original research and literature reviews.
Download or read book Handbook of Optical Metrology written by Toru Yoshizawa and published by CRC Press. This book was released on 2009-02-25 with total page 746 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals. Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications. With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.
Download or read book Microfabrication and Nanomanufacturing written by Mark J. Jackson and published by CRC Press. This book was released on 2005-11-10 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Download or read book Optical Fabrication Metrology and Material Advancements for Telescopes written by Eli Atad-Ettedgui and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Download or read book Nanometer Profile Measurement Method of Large Aspheric Optical Surface by Scanning Deflectometry written by Muzheng Xiao and published by . This book was released on 2019* with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book EUV Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2009 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.
Download or read book Encyclopedia of Optical and Photonic Engineering Print Five Volume Set written by Craig Hoffman and published by CRC Press. This book was released on 2015-09-22 with total page 3726 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first edition of the Encyclopedia of Optical and Photonic Engineering provided a valuable reference concerning devices or systems that generate, transmit, measure, or detect light, and to a lesser degree, the basic interaction of light and matter. This Second Edition not only reflects the changes in optical and photonic engineering that have occurred since the first edition was published, but also: Boasts a wealth of new material, expanding the encyclopedia’s length by 25 percent Contains extensive updates, with significant revisions made throughout the text Features contributions from engineers and scientists leading the fields of optics and photonics today With the addition of a second editor, the Encyclopedia of Optical and Photonic Engineering, Second Edition offers a balanced and up-to-date look at the fundamentals of a diverse portfolio of technologies and discoveries in areas ranging from x-ray optics to photon entanglement and beyond. This edition’s release corresponds nicely with the United Nations General Assembly’s declaration of 2015 as the International Year of Light, working in tandem to raise awareness about light’s important role in the modern world. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail) [email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail) [email protected]
Download or read book Optical Fabrication and Testing written by Roland Geyl and published by . This book was released on 1999 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sixty-one papers on topics surrounding optical fabrication and testing.
