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Book Sputtering Materials for VLSI and Thin Film Devices

Download or read book Sputtering Materials for VLSI and Thin Film Devices written by Jaydeep Sarkar and published by William Andrew. This book was released on 2010-12-13 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . - Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements - Practical information on technology trends, role of sputtering and major OEMs - Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. - Practical case-studies on target performance and troubleshooting - Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry

Book Tungsten

    Book Details:
  • Author : Erik Lassner
  • Publisher : Springer Science & Business Media
  • Release : 2012-12-06
  • ISBN : 1461549078
  • Pages : 432 pages

Download or read book Tungsten written by Erik Lassner and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Why does someone write a book about Tungsten? There are several reasons and precedents for this, the most important of which is that the last book on tungsten was written more than 20 years ago, in 1977, by St. W H. Yih and Ch T. Wang. During the intervening period there have been many new scientific and technological developments and innova tions, so it was not only our opinion but the view of many other members of the "tungsten family" that it was time to start writing a new book about tungsten. Preparations of the new book began in 1994. further impetus to the project was provided by the realization that in spite of this new knowledge having been presented at seminars or published in the technical press, a general acknowledgement of it by the majority of technicians and scientists is still far from being realized. It is our hope that this book will significantly contribute to a broader acceptance of recent scientific and technological innovations. An important prerequisite for such a project is the availability of a recently retired, experienced person willing to devote his time and talents to the tedious part of the exercise.

Book Oxidation of Tungsten

Download or read book Oxidation of Tungsten written by Vincent David Barth and published by . This book was released on 1961 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: The report presents a detailed review of available information on the oxidation of W and its alloys. W is relatively inert below 700 C. As the temperature is increased above this level, however, oxidation becomes progressively more rapid, reaching catastrophic rates at temperatures around 1200 C and above. Various theories for the mechanism and rates of W oxidation at different temperatures are reviewed, and the effect of pressure and water vapor on the stability of W oxides is discussed in detail. The elevatedtemperature reactions of W with other materials, such as refractory oxides, and with gases other than oxygen also are covered. Information on the protection of W by alloying and coating is included. (Author).

Book Silicon Heterojunction Solar Cells

Download or read book Silicon Heterojunction Solar Cells written by W.R. Fahrner and published by Trans Tech Publications Ltd. This book was released on 2006-08-15 with total page 204 pages. Available in PDF, EPUB and Kindle. Book excerpt: The world of today must face up to two contradictory energy problems: on the one hand, there is the sharply growing consumer demand in countries such as China and India. On the other hand, natural resources are dwindling. Moreover, many of those countries which still possess substantial gas and oil supplies are politically unstable. As a result, renewable natural energy sources have received great attention. Among these, solar-cell technology is one of the most promising candidates. However, there still remains the problem of the manufacturing costs of such cells. Many attempts have been made to reduce the production costs of “conventional” solar cells (manufactured from monocrystalline silicon using diffusion methods) by instead using cheaper grades of silicon, and simpler pn-junction fabrication. That is the ‘hero’ of this book; the heterojunction solar cell.

Book Electrochromic Materials and Devices

Download or read book Electrochromic Materials and Devices written by Roger J. Mortimer and published by John Wiley & Sons. This book was released on 2015-10-26 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electrochromic materials can change their properties under the influence of an electrical voltage or current. Different classes of materials show this behavior such as transition metal oxides, conjugated polymers, metal-coordinated complexes and organic molecules. As the color change is persistent, the electric field needs only to be applied to initiate the switching, allowing for applications such as low-energy consumption displays, light-adapting mirrors in the automobile industry and smart windows for which the amount of transmitted light and heat can be controlled. The first part of this book describes the different classes and processing techniques of electrochromic materials. The second part highlights nanostructured electrochromic materials and device fabrication, and the third part focuses on the applications such as smart windows, adaptive camouflage, biomimicry, wearable displays and fashion. The last part rounds off the book by device case studies and environmental impact issues.

Book Reactive Sputter Deposition

Download or read book Reactive Sputter Deposition written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Book Thin Film Materials

Download or read book Thin Film Materials written by L. B. Freund and published by Cambridge University Press. This book was released on 2004-01-08 with total page 772 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film mechanical behavior and stress presents a technological challenge for materials scientists, physicists and engineers. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation, surface evolution and allied effects in thin film materials. Physical phenomena are examined from the continuum down to the sub-microscopic length scales, with the connections between the structure of the material and its behavior described. Theoretical concepts are underpinned by discussions on experimental methodology and observations. Fundamental scientific concepts are embedded through sample calculations, a broad range of case studies with practical applications, thorough referencing, and end of chapter problems. With solutions to problems available on-line, this book will be essential for graduate courses on thin films and the classic reference for researchers in the field.

Book Glancing Angle Deposition of Thin Films

Download or read book Glancing Angle Deposition of Thin Films written by Matthew M. Hawkeye and published by John Wiley & Sons. This book was released on 2014-07-03 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a highly practical treatment of Glancing Angle Deposition (GLAD), a thin film fabrication technology optimized to produce precise nanostructures from a wide range of materials. GLAD provides an elegant method for fabricating arrays of nanoscale helices, chevrons, columns, and other porous thin film architectures using physical vapour deposition processes such as sputtering or evaporation. The book gathers existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers: Development and description of GLAD techniques for nanostructuring thin films Properties and characterization of nanohelices, nanoposts, and other porous films Design and engineering of optical GLAD films including fabrication and testing, and chiral films Post-deposition processing and integration to optimize film behaviour and structure Deposition systems and requirements for GLAD fabrication A patent survey, extensive relevant literature, and a survey of GLAD's wide range of material properties and diverse applications.

Book Sputtering by Particle Bombardment

Download or read book Sputtering by Particle Bombardment written by Rainer Behrisch and published by Springer Science & Business Media. This book was released on 2007-07-26 with total page 527 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.

Book Electrochromism

    Book Details:
  • Author : Paul M. S. Monk
  • Publisher : John Wiley & Sons
  • Release : 2008-09-26
  • ISBN : 3527615369
  • Pages : 239 pages

Download or read book Electrochromism written by Paul M. S. Monk and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electrochromic devices have a number of important commercial applications, for instance in displays, as optical shutters, and as modulators for mirrors, windows, and sun-glasses. Electrochromism - Fundamentals and Applications is the first in-depth treatise on the topic. Written by leading scientists in the field, it is a state-of-the-art account of all aspects of electrochromism, presented at a level accessible to chemists, physicists, materials scientists and engineers. Both the physical and chemical background of electrochromic phenomena are described and a comprehensive survey of both organic and inorganic compounds and systems is given. Special emphasis is placed on providing detailed, hands-on information on applications and potential uses of electrochromic systems. This book is essential reading for scientists active in the field and for anyone wishing to enter the field. An extensive list of carefully chosen references rounds off this valuable reference source.

Book Metallurgical Microscopy

Download or read book Metallurgical Microscopy written by Helfrid Modin and published by Elsevier. This book was released on 2016-01-22 with total page 485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metallurgical Microscopy provides the general principles, methods, and techniques in metallurgical microscopy. The book initially provides the techniques for specimen preparation for macroscopic and microscopic examination. Subsequent chapters are devoted to the discussion of light-optical microscopy and photography, interferometry and contrast-raising methods, and microhardness measurement. Topics on high-temperature microscopy, a brief review of the electron microprobe and its applications, and the construction, properties and applications of the electron microscope are presented as well. Metallurgists and materials scientists will find the book very informative and useful.

Book Interstitial Alloys

Download or read book Interstitial Alloys written by H. J. Goldschmidt and published by Elsevier. This book was released on 2016-01-22 with total page 643 pages. Available in PDF, EPUB and Kindle. Book excerpt: Interstitial Alloys covers the significant progress in the development and understanding of the principles and applications of interstitial alloys. Interstitial alloy refers to the existence of a pure metal lattice, which the metal-metal atom bond remains the dominant one, and the non-metal atoms are sufficiently small to be accommodated within the metal lattice without, or with only a limited degree of, distortion from metal-type symmetry. This book contains 10 chapters and begins with a brief introduction to the basic principles of interstitial alloys. The next two chapters describe the physical properties of these alloys, along with their behavior in solid solutions. The remaining chapters deal with a specific interstitial alloy, its structure, physico-chemical properties, preparation, and application. This work specifically considers carbide, nitride, boride, silicide, oxide, hydride, and mixed interstitial alloys. This book will be of value to chemists and physicists.

Book Adhesion Measurement of Films and Coatings

Download or read book Adhesion Measurement of Films and Coatings written by K. L. Mittal and published by VSP. This book was released on 1995-04 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book chronicles the proceedings of the International Symposium on Adhesion Measurement of Films and Coatings, held in Boston. The articles in this book were previously published in three special issues of the Journal of Adhesion Science and Technology. Films and coatings are used for a variety of purposes and their adequate adhesion to the underlying substrates is of cardinal importance from practical consideration. In the last two decades there has been brisk activity in devising new ways to measure adhesion or ameliorating the existing techniques.

Book Oxidation of Metals

    Book Details:
  • Author : Karl Hauffe
  • Publisher : Springer Science & Business Media
  • Release : 2012-12-06
  • ISBN : 1468489208
  • Pages : 460 pages

Download or read book Oxidation of Metals written by Karl Hauffe and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the translation, the author had the opportunity to re view several chapters, taking into consideration the more recent literature. As far as possible all new theoretical concepts and experi mental data published before 1963 have been quoted and discussed under the theoretical viewpoint of this book. A new chapter "Passivity and Inhibition During High-Tempera ture Oxidation" was introduced. Section 4.8 was enlarged by a dis cussion of the transition from internal to external oxidation. The author very much appreciates the cooperation of the trans lator and of Plenum Press. Gottingen, April 1.965 Karl Hauffe v Preface The number of publications concerned with oxidation and cor rosion processes has become so copious that many engineers and scientists find it practically impossible to obtain an overall view of the growing body of knowledge and to bring order to the confusing multiplicity of experimental data. As a result the need for a compre hensive survey of the present state of research in this field has be come more and more urgent.

Book The Basics of Crystallography and Diffraction

Download or read book The Basics of Crystallography and Diffraction written by Christopher Hammond and published by OUP Oxford. This book was released on 2009-05-07 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a clear introduction to topics which are essential to students in a wide range of scientific disciplines but which are otherwise only covered in specialised and mathematically detailed texts. It shows how crystal structures may be built up from simple ideas of atomic packing and co-ordination, it develops the concepts of crystal symmetry, point and space groups by way of two dimensional examples of patterns and tilings, it explains the concept of the reciprocal lattice in simple terms and shows its importance in an understanding of light, X-ray and electron diffraction. Practical examples of the applications of these techniques are described and also the importance of diffraction in the performance of optical instruments. The book is also of value to the general reader since it shows, by biographical and historical references, how the subject has developed and thereby indicates some of the excitement of scientific discovery.

Book Transition Metal Carbides and Nitrides

Download or read book Transition Metal Carbides and Nitrides written by Louis Toth and published by Elsevier. This book was released on 2014-04-11 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: Refractory Materials, Volume 7: Transition Metal Carbides and Nitrides discusses the developments in transition metal carbide and nitride research. This volume is organized into nine chapters that emphasize the mechanical and superconducting properties of these compounds. The introductory chapters deal with the general properties, preparation techniques, characterization, crystal chemistry, phase relationships, and thermodynamics of transition metal carbides and nitrides. The following chapter highlights the mechanical properties of these compounds, such as elastic and plastic deformation, fracture, strengthening mechanisms, and hardness. The discussion then shifts to specific electrical and magnetic properties, including electrical resistivity, Hall coefficient, and magnetic susceptibility. A separate chapter is devoted to carbides and nitrides as superconductors. The concluding chapters explore certain theories that explain the mechanisms of band structure and bonding in carbides and nitrides. This volume is of great value to research workers in metallurgy, ceramics, physics, chemistry, and related fields, as well as to advanced students investigating problems concerning high temperature materials or interstitial compounds.

Book Sputtered Thin Films

    Book Details:
  • Author : Frederick Madaraka Mwema
  • Publisher : Engineering Materials
  • Release : 2023-09-25
  • ISBN : 9780367513603
  • Pages : 0 pages

Download or read book Sputtered Thin Films written by Frederick Madaraka Mwema and published by Engineering Materials. This book was released on 2023-09-25 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an overview of sputtered thin films and demystifies the concept of fractal theory in analysis of sputtered thin films. It simplifies the use of fractal tools in studying the growth and properties of thin films during sputtering processes.