Download or read book Soft X Ray Microscopy and Metrology written by and published by . This book was released on 2001 with total page 47 pages. Available in PDF, EPUB and Kindle. Book excerpt: This AFOSR grant has been used to support graduate students in the areas of coherence and microscopy at soft x-ray wavelengths. Techniques were developed for characterizing the spatial coherence of undulator radiation, table top soft x-ray lasers, and high harmonic generation of femtosecond pulses at short wavelengths, all in the 1-50 nm wavelength regime. With varying additional attributes, all three sources provide radiation exhibiting a high degree of spatial coherence. In the area of high resolution soft x-ray microscopy, a spatial resolution of 23 nanometers has been demonstrated using new, best-in-the-world, Fresnel zone plate lenses, special nanometer test patterns, and bending magnet radiation in the 1-4 nm region. State-of-the-art images have been obtained of magnetic recording materials with sub-5O nm domains, cryo-prepared biological samples showing detailed views of cells and sub-cellular structures, and modern nanochip interconnects. A new text has been published: D. Attwood, "Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications" (Cambridge Univ. Press, UK 2000). Several reprints are attached: "Soft X-ray Microscopy to 25 nm with Applications to Biology and Magnetic Materials" (NIM A, v467-468, p841-844, 2001); "Spatial Coherence and Properties of Undulator Radiation Based on Thompson-Wolf Two-pinhole Measurement" (NIM A, v467-468, p913-916, 2001); "Spatial Coherence Characterization of Undulator Radiation" (Optics Communications, v182, p25-34, 2000); "Achievement of Essentially Full Spatial Coherence in a High-Average-Power Soft X-ray Laser" (Phys. Rev. A, v63 n3, p33802-1 to 33802-5, 2001); "Nanofabrication and Diffractive Optics for High-Resolution X-ray Applications" (J. Vac. Sci. Technol. B, v18 n6, p2970-2975, Nov-Dec 2000); "High-Resolution Soft X-ray Microscopy" (Proc. of SPIE Reprint, v4146, p171-175, 2000); "Experimental Analysis of High-Resolution Soft X-ray Microscopy" (Proc. of SPIE Reprint, v4499, p134-141, 2001).7.

Download or read book X Ray Metrology in Semiconductor Manufacturing written by D. Keith Bowen and published by CRC Press. This book was released on 2018-10-03 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.

Download or read book X ray Microscope Assemblies Final Report and Metrology Report written by and published by . This book was released on 1981 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the Final Report and Metrology Report prepared under Lawrence Livermore Laboratory Subcontract 9936205, X-ray Microscope Assemblies. The purpose of this program was to design, fabricate, and perform detailed metrology on an axisymmetric grazing-incidence x-ray microscope (XRMS) to be used as a diagnostic instrument in the Lawrence Livermore Laser Fusion Program. The optical configuration chosen for this device consists of two internally polished surfaces of revolution: an hyperboloid facing the object; and a confocal, co-axial elliposid facing the image. This arrangement is known as the Wolter Type-I configuration. The grazing angle of reflection for both surfaces is approximately 1°. The general optical performance goals under this program were to achieve a spatial resolution in the object plane in the soft x-ray region of approximately 1 micron, and to achieve an effective solid collecting angle which is an appreciable fraction of the geometric solid collecting angle.

Download or read book Optical Systems for Soft X Rays written by A.G. Michette and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt: A fundamental problem in cell biology is the cause of aging. The solution to this problem has not yet been obtained because,(l) until recently, it was not possible to image living cells directly. The use of low-energy (soft) X rays has made such imaging possible, perhaps thereby allowing the aging process to be understood and possibly overcome (a result that may well generate further social, moral, and ethical problems). Fortun ately this is not the only aspect of cell biology amenable to soft X-ray imaging, and it is envisaged that many less controversial studies--such as investigations of the detailed differences between healthy and diseased or malignant cells (in their natural states) and processes of cell division and growth-will be made possible. The use of soft X rays is not limited to biological studies-many applications are possible in, for example, fusion research, materials science, and astronomy. Such studies have only recently begun in earnest because several difficulties had to be overcome, major among these being the lack (for some purposes) of sufficiently intense sources, and the technological difficulties associated with making efficient optical systems. As is well known, the advent of dedicated synchrotron radiation sources, in particular, has alleviated the first of these difficulties, not just for the soft X-ray region. It is the purpose of this book to consider progress in the second.

Download or read book Optical Systems for Soft X Rays written by A.G. Michette and published by Springer. This book was released on 1884 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: A fundamental problem in cell biology is the cause of aging. The solution to this problem has not yet been obtained because,(l) until recently, it was not possible to image living cells directly. The use of low-energy (soft) X rays has made such imaging possible, perhaps thereby allowing the aging process to be understood and possibly overcome (a result that may well generate further social, moral, and ethical problems). Fortun ately this is not the only aspect of cell biology amenable to soft X-ray imaging, and it is envisaged that many less controversial studies--such as investigations of the detailed differences between healthy and diseased or malignant cells (in their natural states) and processes of cell division and growth-will be made possible. The use of soft X rays is not limited to biological studies-many applications are possible in, for example, fusion research, materials science, and astronomy. Such studies have only recently begun in earnest because several difficulties had to be overcome, major among these being the lack (for some purposes) of sufficiently intense sources, and the technological difficulties associated with making efficient optical systems. As is well known, the advent of dedicated synchrotron radiation sources, in particular, has alleviated the first of these difficulties, not just for the soft X-ray region. It is the purpose of this book to consider progress in the second.

Download or read book Handbook of Metrology and Applications written by Dinesh K. Aswal and published by Springer Nature. This book was released on 2023-08-23 with total page 2504 pages. Available in PDF, EPUB and Kindle. Book excerpt: ​This handbook provides comprehensive and up-to-date information on the topic of scientific, industrial and legal metrology. It discusses the state-of-art review of various metrological aspects pertaining to redefinition of SI Units and their implications, applications of time and frequency metrology, certified reference materials, industrial metrology, industry 4.0, metrology in additive manufacturing, digital transformations in metrology, soft metrology and cyber security, optics in metrology, nano-metrology, metrology for advanced communication, environmental metrology, metrology in biomedical engineering, legal metrology and global trade, ionizing radiation metrology, advanced techniques in evaluation of measurement uncertainty, etc. The book has contributed chapters from world’s leading metrologists and experts on the diversified metrological theme. The internationally recognized team of editors adopt a consistent and systematic approach and writing style, including ample cross reference among topics, offering readers a user-friendly knowledgebase greater than the sum of its parts, perfect for frequent consultation. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only metrology but also mechanical/material science, optics, physics, chemistry, biomedical and more. This handbook is ideal for academic and professional readers in the traditional and emerging areas of metrology and related fields.

Download or read book Surface Figure Metrology for X Ray Optics written by W. T. Estler and published by . This book was released on 1992 with total page 2 pages. Available in PDF, EPUB and Kindle. Book excerpt: A soft-X-ray projection lithography system will require diffraction limited performance at wavelengths near 13 nm. A typical conceptual design for such a system consists of an x-ray source, a reflecting mask, and a series of normal incidence, multilayer coated mirrors used to image the mask upon a resist-coated wafer. System throughput and image field flatness demands will require aspheric mirrors with figure accuracies of A/200 or better at 633 nm. Commercial phase measuring interferometers (PMIs) offer A/1000 resolution and, with care, A /300 repeatability. For flats and spheres, absolute figure accuracy is limited by one's knowledge of the reference optics, since such PMIs are differential devices. At the National Institute of Standards and Technology (NIST) our present absolute figure uncertainty is about A/20 for flats up to 150 mm in diameter and no better than A/10 or so for spheres. For an asphere, compared with a reference sphere of no more than a few waves of figure departure, we can perhaps attain an absolute accuracy of A/5 or so, but we are fundamentally limited by errors in the interferometer system due to non-common mode optical paths of the test and reference beams. At NIST, we are in the initial phases of a five-year program aimed at improving the accuracy of optical figure measurements as a part of an Institute Competence Program in support of X-ray projection lithography.

Download or read book Soft X ray Microscopy written by James E. Trebes and published by SPIE-International Society for Optical Engineering. This book was released on 1993 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Soft X ray Optics written by Eberhard Spiller and published by SPIE Press. This book was released on 1994 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text describes optics mainly in the 10 to 500 angstrom wavelength region. These wavelengths are 50 to 100 times shorter than those for visible light and 50 to 100 times longer than the wavelengths of medical x rays or x-ray diffraction from natural crystals. There have been substantial advances during the last 20 years, which one can see as an extension of optical technology to shorter wavelengths or as an extension of x-ray diffraction to longer wavelengths. Artificial diffracting structures like zone plates and multilayer mirrors are replacing the natural crystals of x-ray diffraction. Some of these structures can now be fabricated to have diffraction-limited resolution. The new possibilities are described in a simple, tutorial way.

Download or read book X ray Microscopy written by Ping-chin Cheng and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 429 pages. Available in PDF, EPUB and Kindle. Book excerpt: In 1979, a conference on x-ray microscopy was organized by the New York Academy of Sciences, and in 1983, the Second Interna tional Symposium on X-ray Imaging was organized by the Akademie der Wissenschaften in Gottingen, Federal Republic of Germany. This volume contains the contributions to the symposium "X-ray Microscopy '86", held in Taipei, Taiwan, the Republic of China in August 1986. This is the first volume which intends to provide up-to date information on x-ray imaging to biologists, therefore, emphasis was given to specimen preparation techniques and image interpreta tion. Specimen preparation represents a major part of every microscopy work, therefore, it should be strongly emphasized in this emerging field of x-ray microscopy. Theoretically, x-ray microscopy offers the potential for the study of unfixed, hydrated biological ma terials. Since very few biological system can be directly observed without specimen preparation, we would like to emphasize that new information on biological specimens can only be obtained if the speci men is properly prepared. In the past decade, many of the published x-ray images were obtained from poorly prepared biological speci mens, mainly air-dried materials. Therefore, one of the goals of this conference is to bring the importance of specimen preparation to the attention of x-ray microscopy community. X-ray microscopy can be subdivided into several major areas. They are the classic x-ray projection microscope, x-ray contact imag ing (microradiography) and the more recent x-ray scanning micro scope, x-ray photoelectron microscope and x-ray imaging microscope.

Download or read book The Art of Measurement written by Bernhard Kramer and published by John Wiley & Sons. This book was released on 1988 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book surveys metrology and its interplay with fundamental and applied physics. Precision as the outstanding characteristic of the art of measurement is the thread which connects the fourteen articles in this book. They are based on papers presented by international experts at a symposium on the occasion of the 100th anniversary of the 'Physikalisch-Technische Bundesanstalt' at Braunschweig, West Germany. The topics range from laser experiments, condensed matter research, realization of standards, and measurement of fundamental constants to precision measurements in medicine. In accordance with the broad scope of the book's contents, physicists at universities, research institutes and in industry, physics students, and even physicians will benefit greatly from it.

Download or read book X ray Microscopy in Clinical and Experimental Medicine written by Theodore Alvin Hall and published by Charles C. Thomas Publisher. This book was released on 1972 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book X ray Tomography in Industrial Metrology written by Ralf Christoph and published by . This book was released on 2011 with total page 94 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Metrology and Mechanics for Manufacturing Space based X ray Grating Spectrometers written by Jungki Song and published by . This book was released on 2021 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: Small errors in critical dimensions (CDs) or deformation of optical components can lead to severe performance degradation in high-resolution imaging and spectroscopy tools. Consistent innovations towards more precise optical elements and assembly procedures have led to high-resolution optical systems in many fields - including telescope, microscopy, lithography, and display technologies. A space x-ray telescope needs more stringent requirements as it observes distant space objects using a limited number of x-ray photons in a harsh space environment. The optical instruments for x-ray telescopes need to be high-resolution, efficient in collecting x-ray photons, and lightweight. Optical elements in x-ray telescopes have large-apertures (typically around 1-2 m2) which are realized by populating them with > 1000 high-quality optical sub-elements (i.e., mirrors or gratings). In this thesis, we limit our attention to an xray grating spectrometer, one of the essential elements in x-ray telescopes. It is placed downstream of the focusing optics and prior to the x-ray detector to disperse nonmonochromatic x rays from distant sources for space-based x-ray spectroscopy. A critical-angle transmission (CAT) grating, a lightweight, freestanding, high-aspect ratio x-ray grating with 200-nm period and 4 [mu]m depth, is a building block for grating spectrometers. More than 1000 high-quality CAT gratings need to be manufactured and precisely aligned within tolerance to build future CAT grating spectrometers. This thesis attacks this manufacturing challenge through 1) inventing metrologies for characterizing CDs, 2) developing alignment processes, and 3) performing design and analysis of CAT grating structural supports. First, a metrology to characterize period variation of CAT gratings was developed. Metrology repeatability of 0.004 nm rms was achieved, successfully characterizing period variations of 0.018 nm rms (1 sigma) over large-area CAT gratings patterned with traditional interference lithography. The demonstrated metrology uncertainty and period variations fulfill the requirements for future x-ray telescope missions. Second, alignment metrology and protocols were developed, demonstrating an ability to align multiple CAT gratings to satisfy alignment requirements ( 6 arcmin or 0.1 deg). The developed alignment protocol is reliable and scalable for flight-level alignment, for which a large volume (1000) of CAT gratings need to be aligned in a fast and accurate manner. Third, a metrology to characterize grating bar tilt variations was developed using small-angle x-ray scattering and a laser setup. The developed metrology demonstrated repeatability of

Download or read book X Ray Optics and X Ray Microanalysis written by H. H. Pattee and published by Elsevier. This book was released on 2013-10-22 with total page 641 pages. Available in PDF, EPUB and Kindle. Book excerpt: X-ray Optics and X-ray Microanalysis covers the proceedings of the Symposium on X-ray Optics and X-ray Microanalysis, held at Stanford University on August 22-24, 1962. The book focuses on X-ray microscopy, microradiography, radiation and irradiation, and X-ray microanalysis. The selection first offers information on the methods of X-ray microscopy and X-ray absorption microanalysis. Discussions focus on X-ray scanning microscopy, contact microradiography, point projection microscopy, and total dry-weight determinations. The text then takes a look at X-ray microanalysis in biology and medicine; electron microscopic enlargements of X-ray absorption micrographs; and automation in microradiography. The publication examines the production of Fresnel zone plates for extreme ultraviolet and soft X radiation; quantitative microradiographic studies of human epidermis; and irradiation effect on total organic nerve-cell material determined by integrating X-ray absorption. The manuscript then reviews the calculation of fluorescence excited by characteristic radiation in the X-ray microanalyzer and the method for calculating the absorption correction in electron-probe microanalysis. The selection is a valuable reference for readers interested in X-ray technology.

Download or read book X Ray Lasers 2004 written by J Zhang and published by CRC Press. This book was released on 2005-06-15 with total page 736 pages. Available in PDF, EPUB and Kindle. Book excerpt: X-Ray Lasers 2004 comprises invited, contributed, and poster papers presented at the 9th International Conference on X-Ray Lasers (ICXRL2004) held in Beijing in May 2004. Some 120 participants from 13 countries and regions met in Beijing to compare results and exchange views on future developments in x-ray lasers and related fields. The book covers the following topics: overviews of x-ray lasers research, collisionally pumped x-ray lasers, capillary discharge-pumped x-ray lasers, OFI and photo-pumped x-ray lasers, high-order harmonics XUV radiation, grazing incidence pumping x-ray lasers, theory and simulations of x-ray lasers and plasma media, free-electron lasers and accelerator-based x-ray sources, alternative pumping schemes for x-ray lasers, applications of x-ray lasers and other bright x-ray sources, x-ray optics and instrumentation, investigations of x-ray laser media, and developments of x-ray laser drivers. X-Ray Lasers 2004 provides not only an overview and an up-to-date progress report on this fast moving field, but also important reference material on which future work can be built.

Download or read book X ray Microscopy written by Chris Jacobsen and published by Cambridge University Press. This book was released on 2019-12-19 with total page 595 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a pioneer in the field, this text provides a complete introduction to X-ray microscopy, providing all of the technical background required to use, understand and even develop X-ray microscopes. Starting from the basics of X-ray physics and focusing optics, it goes on to cover imaging theory, tomography, chemical and elemental analysis, lensless imaging, computational methods, instrumentation, radiation damage, and cryomicroscopy, and includes a survey of recent scientific applications. Designed as a 'one-stop' text, it provides a unified notation, and shows how computational methods in different areas are linked with one another. Including numerous derivations, and illustrated with dozens of examples throughout, this is an essential text for academics and practitioners across engineering, the physical sciences and the life sciences who use X-ray microscopy to analyze their specimens, as well as those taking courses in X-ray microscopy.