Download or read book Single fluid Radiation hydrodynamic Modeling of Laser driven EUV emitting Plasmas written by and published by . This book was released on 2023 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: State-of-the-art nanolithography machines employ extreme ultraviolet (EUV) light to pattern nanometer-scale features on silicon wafers for the production of integrated circuits. This radiation is generated in a laser-produced plasma formed on tin microdroplet targets. This thesis presents work on radiation-hydrodynamic simulations of tin droplet-based laser-produced plasmas, including plasma characterization, plasma expansion, and subsequent early-time droplet dynamics. The work is closely connected to experimental measurements, be it to successfully validate the simulation results on plasma expansion and droplet dynamics, or to guide future experiments towards optimal EUV emission conditions. It is shown that, after validation, the simulations can provide additional insight into (i) non-trivial plasma dynamics leading to the measured ion kinetic energy distributions and (ii) the plasma impulse shaping the early-time droplet dynamics that ultimately determines the late-time droplet morphology. Moreover, the simulations can successfully explore a broad range of laser wavelengths and intensities. Finally, these investigations aim to complement efforts to increase the performance of the EUV source system: the conversion efficiency of laser pulses to in-band EUV radiation as well as the lifetime of the collector mirror, which may be affected by ionic or liquid debris.
Download or read book Spectral Characterization of Solid state Laser driven Plasma Sources of EUV Light written by and published by . This book was released on 2021 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this thesis, the fundamental limits of converting laser radiation via tin plasmas into EUV light in a 2% bandwidth around 13.5nm, relevant to nanolithographic applications, are experimentally investigated. In particular, plasma generation using near- to mid-infrared lasers is studied. This laser wavelength region, in combination with available energy-efficient solid-state laser technology, shows promising opportunities to achieve high plasma-brightness in combination with high overall efficiencies of converting electrical power to useful EUV radiation. In terms of light source optimization, we investigate the effects of varying target morphologies and laser irradiation parameters, e.g., laser wavelength, laser intensity, and beam spot size on key experimental observables such as EUV spectra, the conversion efficiency of laser energy into industrially useful 13.5nm light (CE), the purity of the spectral emission (SP) and the plasma's optical depth. In Chapter 1, the radiative properties of plasmas formed by irradiating spherical tin droplets with high-energy, 1-um-wavelength laser pulses are investigated. Using pulses of constant intensity in space and time the plasma is homogeneously heated. A significant growth of CE and of the overall efficiency in radiating EUV light is found with increasing laser intensity, droplet size and laser pulse duration. Through optimization of these parameters, CE’s of up to 3.2% are obtained. In Chapter 2, the EUV spectra from Chapter 1 are analyzed in the context of the plasma’s optical depth using a one-dimensional, analytic radiation transport model. Using this model, we find an increase in optical depth with increasing droplet diameter and laser pulse duration. This increase in optical depth is explained in terms of a larger plasma scale length.
Download or read book Laser Plasma Theory and Simulation written by Hector A. Baldis and published by CRC Press. This book was released on 1994-06-01 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers recent developments in laser plasma physics such as absorption, instability, energy transport and radiation from the standpoint of theory and simulation for plasma corona, showing how the elements for the high density compression depend on the interaction physics and heat transport.
Download or read book Laser Plasma Theory and Simulation written by Hector A. Baldis and published by CRC Press. This book was released on 2020-05-05 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers recent developments in laser plasma physics such as absorption, instability, energy transport and radiation from the standpoint of theory and simulation for plasma corona, showing how the elements for the high density compression depend on the interaction physics and heat transport.
Download or read book Heights Integrated Model as Instrument for Simulation of Hydrodynamic Radiation Transport and Heat Conduction Phenomena of Laser produced Plasma in EUV Applications written by and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The HEIGHTS integrated model has been developed as an instrument for simulation and optimization of laser-produced plasma (LPP) sources relevant to extreme ultraviolet (EUV) lithography. The model combines three general parts: hydrodynamics, radiation transport, and heat conduction. The first part employs a total variation diminishing scheme in the Lax-Friedrich formulation (TVD-LF); the second part, a Monte Carlo model; and the third part, implicit schemes with sparse matrix technology. All model parts consider physical processes in three-dimensional geometry. The influence of a generated magnetic field on laser plasma behavior was estimated, and it was found that this effect could be neglected for laser intensities relevant to EUV (up to (almost equal to)1012 W/cm2). All applied schemes were tested on analytical problems separately. Benchmark modeling of the full EUV source problem with a planar tin target showed good correspondence with experimental and theoretical data. Preliminary results are presented for tin droplet- and planar-target LPP devices. The influence of three-dimensional effects on EUV properties of source is discussed.
Download or read book X Ray Lasers 2008 written by Ciaran Lewis and published by Springer Science & Business Media. This book was released on 2009-09-29 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 11th International Conference on X-Ray Lasers had contributions in the following topical areas: Transient Collisional X-Ray Lasers, Table-Top High Repetition Rate X-Ray Lasers, Optical-Field Ionised (OFI) X-Ray Lasers, Theory and Simulation of X-Ray Lasers, High Order Harmonic Generation, XUV Optics and X-Ray Laser Applications, Capillary Discharge X-Ray Lasers, Alternative Sources of coherent XUV Radiation. The proceedings of this conference constitute a comprehensive source of reference for scientists involved in researching the development and application of coherent X-Ray sources.
Download or read book Modelling of Intense Line Radiation from Laser produced Plasmas written by and published by . This book was released on 1990 with total page 18 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this paper, we discuss modelling of Lyman-[alpha] (i.e. Ly-[alpha]) radiation emitted from laser-produced plasmas. We are interested in the application of one of these line radiations to pump a transition of an ion in a different plasma spatially separated from the emitting source. The interest is in perturbing the plasma rather than just probing it as in some backlighting experiments. As a result of pumping, the populations of certain excited levels are inverted. The resulting gain coefficients depend strongly on the population inversion density which in turn depends on the brightness of the pump radiation. As a result, we must produce an intense bright radiation source. In addition, to pump a transition effectively, we also need a pump line with a width larger than the mismatch of the resonance since the widths of the pumped transitions are rather narrow.
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2002 with total page 862 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Download or read book INIS Atomindex written by and published by . This book was released on 1987 with total page 1120 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Documentation of Plasma Physics Pt 1 Experimental Plasma Physics and Theoretical Plasma Physics written by and published by . This book was released on 1975 with total page 774 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Emerging Lithographic Technologies written by and published by . This book was released on 2005 with total page 644 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The Physics of Inertial Fusion written by Stefano Atzeni and published by OUP Oxford. This book was released on 2004-06-03 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is on inertial confinement fusion, an alternative way to produce electrical power from hydrogen fuel by using powerful lasers or particle beams. It involves the compression of tiny amounts (micrograms) of fuel to thousand times solid density and pressures otherwise existing only in the centre of stars. Thanks to advances in laser technology, it is now possible to produce such extreme states of matter in the laboratory. Recent developments have boosted laser intensities again with new possibilities for laser particle accelerators, laser nuclear physics, and fast ignition of fusion targets. This is a reference book for those working on beam plasma physics, be it in the context of fundamental research or applications to fusion energy or novel ultra-bright laser sources. The book combines quite different areas of physics: beam target interaction, dense plasmas, hydrodynamic implosion and instabilities, radiative energy transfer as well as fusion reactions. Particular attention is given to simple and useful modelling, including dimensional analysis and similarity solutions. Both authors have worked in this field for more than 20 years. They want to address in particular those teaching this topic to students and all those interested in understanding the technical basis.
Download or read book Physics Briefs written by and published by . This book was released on 1993 with total page 1058 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Modern Methods in Collisional Radiative Modeling of Plasmas written by Yuri Ralchenko and published by Springer. This book was released on 2016-02-25 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a compact yet comprehensive overview of recent developments in collisional-radiative (CR) modeling of laboratory and astrophysical plasmas. It describes advances across the entire field, from basic considerations of model completeness to validation and verification of CR models to calculation of plasma kinetic characteristics and spectra in diverse plasmas. Various approaches to CR modeling are presented, together with numerous examples of applications. A number of important topics, such as atomic models for CR modeling, atomic data and its availability and quality, radiation transport, non-Maxwellian effects on plasma emission, ionization potential lowering, and verification and validation of CR models, are thoroughly addressed. Strong emphasis is placed on the most recent developments in the field, such as XFEL spectroscopy. Written by leading international research scientists from a number of key laboratories, the book offers a timely summary of the most recent progress in this area. It will be a useful and practical guide for students and experienced researchers working in plasma spectroscopy, spectra simulations, and related fields.
Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2692 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Science written by National Academies of Sciences Engineering and Medicine and published by . This book was released on 2021-02-28 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Science and Engineering transforms fundamental scientific research into powerful societal applications, from materials processing and healthcare to forecasting space weather. Plasma Science: Enabling Technology, Sustainability, Security and Exploration discusses the importance of plasma research, identifies important grand challenges for the next decade, and makes recommendations on funding and workforce. This publication will help federal agencies, policymakers, and academic leadership understand the importance of plasma research and make informed decisions about plasma science funding, workforce, and research directions.
