Download or read book Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator Project Supported by the National Natural Science Foundation of China Nos 61274119 61306141 61335008 and the Natural Science Foundation of Jiangsu Province No BK20131099 written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: In this paper, we present the simulation and fabrication of a thin film bulk acoustic resonator (FBAR). In order to improve the accuracy of simulation, an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration. The resonators were fabricated by the eight inch CMOS process, and the measurements show that the improved Mason model is more accurate than a simple Mason model. The Q s ( Q at series resonance), Q p ( Q at parallel resonance), Q max and k t 2 of the FBAR were measured to be 695, 814, 1049, and 7.01% respectively, showing better performance than previous reports.

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by . This book was released on 2013 with total page 152 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Design Modeling and Fabrication of Shear Mode Bulk Acoustic Wave Sensor as a Potential Biosensor written by Chi-Jung Cheng and published by . This book was released on 2012 with total page 117 pages. Available in PDF, EPUB and Kindle. Book excerpt: There has been an increasing interest in development of thin film bulk acoustic wave resonator devices for chemical and biological sensing applications in the environmental and biomedical industries. The zinc oxide thin film FBAR devices provide attractive advantages, such as high resonant frequency, small size, and rapid response. Typically, the ZnO-based FBAR devices are operated in the longitudinal wave mode where the ZnO crystallites are perpendicular to the substrate. However, the longitudinal wave mode is adversely affected when used in liquid environments. To overcome this limitation, the shear mode solidly mounted film bulk acoustic wave resonator device is presented in this dissertation.