Download or read book Sensors for In Situ Process Monitoring and Process Control written by and published by . This book was released on 1996 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report presents the results of the development of an ultrasonic sensor for in-situ monitoring of silicon wafer temperature. The sensor is based on the measurement of the velocity of ultrasonic Lamb waves in the wafer, and relating this velocity to temperature. We present a method for efficient excitation and detection of Lamb waves in the wafer, a theoretical model for relating the variation of velocity as a function of temperature, and an electronic implementation for the sensor. Our results indicate the ability to measure the temperature with an accuracy of 10C in most integrated circuit processing environments. The sensor has also been used in a tomographic configuration to allow the measurement of spatial distribution of temperature. Finally, we highlight the potential for simultaneous measurement of temperature and film thickness in-situ.
Download or read book Expanding the Vision of Sensor Materials written by Committee on New Sensor Technologies: Materials and Applications and published by National Academies Press. This book was released on 1995-07-06 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in materials science and engineering have paved the way for the development of new and more capable sensors. Drawing upon case studies from manufacturing and structural monitoring and involving chemical and long wave-length infrared sensors, this book suggests an approach that frames the relevant technical issues in such a way as to expedite the consideration of new and novel sensor materials. It enables a multidisciplinary approach for identifying opportunities and making realistic assessments of technical risk and could be used to guide relevant research and development in sensor technologies.
Download or read book Unit Manufacturing Processes written by National Research Council and published by National Academies Press. This book was released on 1995-01-03 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt: Manufacturing, reduced to its simplest form, involves the sequencing of product forms through a number of different processes. Each individual step, known as an unit manufacturing process, can be viewed as the fundamental building block of a nation's manufacturing capability. A committee of the National Research Council has prepared a report to help define national priorities for research in unit processes. It contains an organizing framework for unit process families, criteria for determining the criticality of a process or manufacturing technology, examples of research opportunities, and a prioritized list of enabling technologies that can lead to the manufacture of products of superior quality at competitive costs. The study was performed under the sponsorship of the National Science Foundation and the Defense Department's Manufacturing Technology Program.
Download or read book Sensors Sampling and Simulation for Process Control written by Brian G. Thomas and published by John Wiley & Sons. This book was released on 2011-04-12 with total page 182 pages. Available in PDF, EPUB and Kindle. Book excerpt: This symposium aims to explore the current state of the art in control of industrial processes in the field of extraction and processing of metals and materials. New sensor technologies, more advanced real-time models, and faster computers are enabling better control systems for these processes. Specific topics include but are not limited to: (1) novel sensors for hostile-environment materials processes, such as online inclusion detection, temperature, and velocity in molten materials, surface condition of hot moving products, etc.; (2) innovative online sampling and analysis techniques, (3) models for real-time process control and quality monitoring systems; (4) process automation, scheduling, and plant-wide logistics optimization, (5) control of composition, temperature, microstructure, and morphology in sintering, smelting, refining, solidification, reheating, deformation, and transport of ores, slags, mattes, metals, materials, and aqueous solutions; (6) prediction, monitoring, control, and optimization of process parameters in these systems; (7) control in manufacturing processes, including casting, annealing, forging, rolling, extrusion, powder metallurgy, electronic materials, welding, etc.; (8) control of impurities and environmentally undesirable components in product and waste streams.
Download or read book Soft Sensors for Monitoring and Control of Industrial Processes written by Luigi Fortuna and published by Springer Science & Business Media. This book was released on 2007-05-31 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews current design paths for soft sensors, and guides readers in evaluating different choices. The book presents case studies resulting from collaborations between the authors and industrial partners. The solutions presented, some of which are implemented on-line in industrial plants, are designed to cope with a wide range of applications from measuring system backup and what-if analysis through real-time prediction for plant control to sensor diagnosis and validation.
Download or read book Monitoring and Control of Semiconductor Manufacturing Using Acoustic Techniques written by Frances R. Williams and published by . This book was released on 2003 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Since semiconductor fabrication processes require numerous steps, cost and yield are critical concerns. In-situ monitoring is therefore vital for process control. However, this goal is currently restricted by the shortage of available sensors capable of performing in this manner. The goal of this research therefore, was to investigate the use of acoustic signals for monitoring and control of semiconductor fabrication equipment and processes. Currently, most methods for process monitoring (such as optical emission or interferometric techniques) rely on "looking" at a process to monitor its status. What was investigated here involved "listening" to the process. Using acoustic methods for process monitoring enhances the amount and sensitivity of data collection to facilitate process diagnostics and control. A silicon acoustic sensor was designed, fabricated, and implemented as a process monitor. Silicon acoustic sensors are favorable because of their utilization of integrated circuit and micromachining processing techniques; thus, enabling miniature devices with precise dimensions, batch fabrication of sensors, good reproducibility, and low costs. The fabricated sensor was used for in-situ monitoring of nickel-iron electrochemical deposition processes. During this process, changes occur in its plating bath as the alloy is being deposited. It is known that changes in the process medium affect the acoustic response. Thus, the sensor was implemented in an electroplating set-up and its response was observed during depositions. By mapping the sensor response received to the film thickness measured at certain times, a predictive model of the plated alloy thickness was derived as a function of sensor output and plating time. Such a model can lead to real-time monitoring of nickel-iron thickness.
Download or read book Additive Manufacturing Technologies written by Ian Gibson and published by Springer. This book was released on 2014-11-26 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers in detail the various aspects of joining materials to form parts. A conceptual overview of rapid prototyping and layered manufacturing is given, beginning with the fundamentals so that readers can get up to speed quickly. Unusual and emerging applications such as micro-scale manufacturing, medical applications, aerospace, and rapid manufacturing are also discussed. This book provides a comprehensive overview of rapid prototyping technologies as well as support technologies such as software systems, vacuum casting, investment casting, plating, infiltration and other systems. This book also: Reflects recent developments and trends and adheres to the ASTM, SI, and other standards Includes chapters on automotive technology, aerospace technology and low-cost AM technologies Provides a broad range of technical questions to ensure comprehensive understanding of the concepts covered
Download or read book Condition Monitoring and Control for Intelligent Manufacturing written by Lihui Wang and published by Springer Science & Business Media. This book was released on 2006-08-02 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: Condition modelling and control is a technique used to enable decision-making in manufacturing processes of interest to researchers and practising engineering. Condition Monitoring and Control for Intelligent Manufacturing will be bought by researchers and graduate students in manufacturing and control and engineering, as well as practising engineers in industries such as automotive and packaging manufacturing.
Download or read book Reference Data for Engineers written by Mac E. Van Valkenburg and published by Elsevier. This book was released on 2001-10-19 with total page 1689 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reference Data for Engineers is the most respected, reliable, and indispensable reference tool for technical professionals around the globe. Written by professionals for professionals, this book is a complete reference for engineers, covering a broad range of topics. It is the combined effort of 96 engineers, scientists, educators, and other recognized specialists in the fields of electronics, radio, computer, and communications technology. By providing an abundance of information on essential, need-to-know topics without heavy emphasis on complicated mathematics, Reference Data for Engineers is an absolute "must-have" for every engineer who requires comprehensive electrical, electronics, and communications data at his or her fingertips. Featured in the Ninth Edition is updated coverage on intellectual property and patents, probability and design, antennas, power electronics, rectifiers, power supplies, and properties of materials. Useful information on units, constants and conversion factors, active filter design, antennas, integrated circuits, surface acoustic wave design, and digital signal processing is also included. The Ninth Edition also offers new knowledge in the fields of satellite technology, space communication, microwave science, telecommunication, global positioning systems, frequency data, and radar.* Widely acclaimed as the most practical reference ever published for a wide range of electronics and computer professionals, from technicians through post-graduate engineers.* Provides a great way to learn or review the basics of various technologies, with a minimum of tables, equations, and other heavy math.
Download or read book Proceedings of the Symposium Om Process Control Diagnostics and Modeling in Semiconductor Manufacturing written by M. Meyyappan and published by The Electrochemical Society. This book was released on 1995 with total page 644 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Sensors Applications Sensors in Manufacturing written by Ichiro Inasaki and published by Wiley-VCH. This book was released on 2001-05-03 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: A treatment of on-line monitoring techniques for optimizing various manufacturing processes while also making them safer. The book looks at the latest developments in sensors for quality control or preventing downtime, as well as environmental protection in the form of emission monitoring and waste reduction. Although the text concentrates on practical applications, it also provides readers with the necessary basic principles.
Download or read book Intelligent Modeling Diagnosis And Control Of Manufacturing Processes written by B-t Chu and published by World Scientific. This book was released on 1992-08-31 with total page 273 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume demonstrates that the key to the modeling, diagnosis and control of the next generation manufacturing processes is to integrate knowledge-based systems with traditional techniques. An up-to-date study is given here of this relatively recent development.The book is for those working primarily with traditional techniques and those working in the knowledge-based systems field. Both sets of readers will find it to be a source of many specific ideas about the integration of knowledge-based systems with traditional techniques, and carrying a wealth of useful references.
Download or read book Soft Sensors for Process Monitoring of Complex Processes written by Mitchell Roy Serpas and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Soft sensors are an essential component of process systems engineering schemes. While soft sensor design research is important, investigation into the relationships between soft sensors and other areas of advanced monitoring and control is crucial as well. This dissertation presents two new techniques that enhance the performance of fault detection and sensor network design by integration with soft sensor technology. In addition, a chapter is devoted to the investigation of the proper implementation of one of the most often used soft sensors. The performance advantages of these techniques are illustrated with several cases studies. First, a new approach for fault detection which involves soft sensors for process monitoring is developed. The methodology presented here deals directly with the state estimates that need to be monitored. The advantage of such an approach is that the nonlinear effect of abnormal process conditions on the state variables can be directly observed. The presented technique involves a general framework for using soft sensor design and computation of the statistics that represent normal operating conditions. Second, a method for determining the optimal placement of multiple sensors for processes described by a class of nonlinear dynamic systems is described. This approach is based upon maximizing a criterion, i.e., the determinant, applied to the empirical observability gramian in order to optimize certain properties of the process state estimates. The determinant directly accounts for redundancy of information, however, the resulting optimization problem is nontrivial to solve as it is a mixed integer nonlinear programming problem. This paper also presents a decomposition of the optimization problem such that the formulated sensor placement problem can be solved quickly and accurately on a desktop PC. Many comparative studies, often based upon simulation results, between Extended Kalman filters (EKF) and other estimation methodologies such as Moving Horizon Estimation or Unscented Kalman Filter have been published over the last few years. However, the results returned by the EKF are affected by the algorithm used for its implementation and some implementations may lead to inaccurate results. In order to address this point, this work provides a comparison of several different algorithms for implementation.
Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Download or read book Industrial Crystallization Process Monitoring and Control written by Angelo Chianese and published by John Wiley & Sons. This book was released on 2012-04-06 with total page 253 pages. Available in PDF, EPUB and Kindle. Book excerpt: Crystallization is an important technique for separation and purification of substances as well as for product design in chemical, pharmaceutical and biotechnological process industries. This ready reference and handbook draws on research work and industrial practice of a large group of experts in the various areas of industrial crystallization processes, capturing the essence of current trends, the markets, design tools and technologies in this key field. Along the way, it outlines trouble free production, provides laboratory controls, analyses case studies and discusses new challenges. First the instrumentation and techniques used to measure the crystal size distribution, the nucleation and solubility points, and the chemical composition of the solid and liquid phase are outlined. Then the main techniques adopted to control industrial crystallizers, starting from fundamental approaches to the most advanced ones, including the multivariable predictive control are described. An overview of the main crystallizer types is given with details of the main control schemes adopted in industry as well as the more suitable sensors and actuators.
Download or read book Process Equipment and Materials Control in Integrated Circuit Manufacturing written by and published by . This book was released on 1996 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Soft Sensors for Monitoring and Control of Industrial Processes written by Luigi Fortuna and published by Springer. This book was released on 2010-10-21 with total page 271 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews current design paths for soft sensors, and guides readers in evaluating different choices. The book presents case studies resulting from collaborations between the authors and industrial partners. The solutions presented, some of which are implemented on-line in industrial plants, are designed to cope with a wide range of applications from measuring system backup and what-if analysis through real-time prediction for plant control to sensor diagnosis and validation.
