Download or read book Robust H infinity Control of Piezoelectric Actuators in Nano positioning and Atomic Force Microscopy written by Ning Chuang and published by . This book was released on 2011 with total page 196 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this thesis is to show how the robust H1 control method can be applied to fast tracking position control problems in nano-positioning and atomic force microscopy. The key component used in the nano-positioning system and atomic force microscope positioning system is a piezoelectric actuator which makes motion control at the sub-nanometer level possible. A significant challenging issue in the use of piezoelectric actuators is the existence of hysteresis nonlinearity which limits the accuracy of position control. This research involves designing three robust H1 tracking controllers for three different systems: controlling hysteresis nonlinearity in a piezoelectric stack actuator using a charge output, controlling displacement tracking in a nano-positioning system, and improving fast tracking in a position control problem for an atomic force microscope (AFM). The approach considered in this research is to utilize H1 control theory to control piezoelectric actuator systems with hysteresis nonlinearity. These robust H1 controllers were designed based on physical models for these three systems considering both mechanical and electrical sides separately. The parameters used in the nonlinear models were obtained from experimental measurements. Experimental results showed that the robust H1 controller yields highly accurate tracking of displacement and also significantly reduces the nonlinear hysteresis. Each robust H1 controller was implemented in a dSpace DSP system. The experimental results obtained using the robust H1 controllers have been analysed and discussed in this thesis. This research has provided good evidence to demonstrate that high levels of accuracy in tracking displacement can be achieved by using the robust H1 control method in nano-positioning systems.

Download or read book Smart Materials Based Actuators at the Micro Nano Scale written by Micky Rakotondrabe and published by Springer Science & Business Media. This book was released on 2013-06-28 with total page 277 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Materials-Based Actuators at the Micro/Nano-Scale: Characterization, Control, and Applications gives a state of the art of emerging techniques to the characterization and control of actuators based on smart materials working at the micro/nano scale. The book aims to characterize some commonly used structures based on piezoelectric and electroactive polymeric actuators and also focuses on various and emerging techniques employed to control them. This book also includes two of the most emerging topics and applications: nanorobotics and cells micro/nano-manipulation.

Download or read book Advanced Control of Piezoelectric Micro Nano Positioning Systems written by Qingsong Xu and published by Springer. This book was released on 2015-08-28 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explores emerging methods and algorithms that enable precise control of micro-/nano-positioning systems. The text describes three control strategies: hysteresis-model-based feedforward control and hysteresis-model-free feedback control based on and free from state observation. Each paradigm receives dedicated attention within a particular part of the text. Readers are shown how to design, validate and apply a variety of new control approaches in micromanipulation: hysteresis modelling, discrete-time sliding-mode control and model-reference adaptive control. Experimental results are provided throughout and build up to a detailed treatment of practical applications in the fourth part of the book. The applications focus on control of piezoelectric grippers. Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems will assist academic researchers and practising control and mechatronics engineers interested in suppressing sources of nonlinearity such as hysteresis and drift when combining position and force control of precision systems with piezoelectric actuation.

Download or read book Nanopositioning Technologies written by Changhai Ru and published by Springer. This book was released on 2015-12-22 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Download or read book Design Modeling and Control of Nanopositioning Systems written by Andrew J. Fleming and published by Springer. This book was released on 2014-05-15 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

Download or read book Nonlinear Control Design for a Piezoelectric Driven Nanopositioning Stage written by and published by . This book was released on 2005 with total page 32 pages. Available in PDF, EPUB and Kindle. Book excerpt: A model-based nonlinear optimal control design is developed and applied to a piezoelectric-driven nanopositioning stage to demonstrate high accuracy displacement control when ferroelectric nonlinearities, hysteresis and relaxation behavior are present in the piezoelectric actuator. The nonlinear control design is compared to Proportional-Integral-Derivative (PID) control to illustrate performance enhancements when ferroelectric material behavior is directly incorporated into the control design. A multi-scale ferroelectric constitutive law is used to model the nonlinear, hysteretic and relaxation behavior of the piezoelectric actuator. The constitutive model is implemented in a structural model of a nanopositioning stage that used piezoelectric stack actuators. Both moderate frequency (100 Hz) and quasi-static (0.2 Hz) operating regimes are considered to address issues associated with high accuracy atomic force microscopy applications. The nonlinear control design includes and open-loop nonlinear control input determined from finite-dimensional optimal control theory and linear perturbation feedback determined from Proportional Integral (PI) control. The Hybrid control design reduces errors by over two orders of magnitude when nonlinearities, hysteresis and relaxation behavior is present. Additionally, the magnitude of control input is considerably smaller when the hybrid control design is implemented.

Download or read book Control Technologies for Emerging Micro and Nanoscale Systems written by Evangelos Eleftheriou and published by Springer. This book was released on 2011-07-15 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprises a selection of the presentations made at the “Workshop on Dynamics and Control of Micro and Nanoscale Systems” held at IBM Research – Zurich, Switzerland, on the 10th and 11th of December 2009. The aim of the workshop was to bring together some of the leading researchers in the field of dynamics and control of micro- and nanoscale systems. It proved an excellent forum for discussing new ideas and approaches.

Download or read book Piezoelectric Actuators written by Seung-Bok Choi and published by CRC Press. This book was released on 2016-04-19 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: Currently, many smart materials exhibit one or multifunctional capabilities that are being effectively exploited in various engineering applications, but these are only a hint of what is possible. Newer classes of smart materials are beginning to display the capacity for self-repair, self-diagnosis, self-multiplication, and self-degradation. Ultimately, what will make them practical and commercially viable are control devices that provide sufficient speed and sensitivity. While there are other candidates, piezoelectric actuators and sensors are proving to be the best choice. Piezoelectric Actuators: Control Applications of Smart Materials details the authors’ cutting-edge research and development in this burgeoning area. It presents their insights into optimal control strategies, reflecting their latest collection of refereed international papers written for a number of prestigious journals. Piezoelectric materials are incorporated in devices used to control vibration in flexible structures. Applications include beams, plates, and shells; sensors and actuators for cabin noise control; and position controllers for structural systems such as the flexible manipulator, engine mount, ski, snowboard, robot gripper, ultrasonic motors, and various type of sensors including accelerometer, strain gage, and sound pressure gages. The contents and design of this book make it useful as a professional reference for scientists and practical engineers who would like to create new machines or devices featuring smart material actuators and sensors integrated with piezoelectric materials. With that goal in mind, this book: Describes the piezoelectric effect from a microscopic point of view Addresses vibration control for flexible structures and other methods that use active mount Covers control of flexible robotic manipulators Discusses application to fine-motion and hydraulic control systems Explores piezoelectric shunt technology This book is exceptionally valuable as a reference for professional engineers working at the forefront of numerous industries. With its balanced presentation of theory and application, it will also be of special interest to graduate students studying control methodology.

Download or read book Piezoelectric Based Vibration Control written by Nader Jalili and published by Springer Science & Business Media. This book was released on 2009-11-25 with total page 519 pages. Available in PDF, EPUB and Kindle. Book excerpt: “Piezoelectric-Based Vibration-control Systems: Applications in Micro/Nano Sensors and Actuators” covers: Fundamental concepts in smart (active) materials including piezoelectric and piezoceramics, magnetostrictive, shape-memory materials, and electro/magneto-rheological fluids; Physical principles and constitutive models of piezoelectric materials; Piezoelectric sensors and actuators; Fundamental concepts in mechanical vibration analysis and control with emphasis on distributed-parameters and vibration-control systems; and Recent advances in piezoelectric-based microelectromechanical and nanoelectromechanical systems design and implementation.

Download or read book Piezoelectric Actuators written by Hu Huang and published by BoD – Books on Demand. This book was released on 2021-12-08 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt: Taking advantage of high resolution, rapid response, and compact structure, piezoelectric actuators are widely employed for achieving precision positioning in both scientific research and industrial application. With the development of science and technology, the requirements for precision positioning are increasing. Accordingly, great efforts have been made to improve the performances of piezoelectric actuators, and significant progress has been achieved. This book discusses some recent achievements and developments of piezoelectric actuators, in terms of piezoelectric material, driving principle, structural design, modeling, and control, as well as applications.

Download or read book Nonlinear Optimal Tracking Control of a Piezoelectric Nanopositioning Stage written by and published by . This book was released on 2006 with total page 13 pages. Available in PDF, EPUB and Kindle. Book excerpt: High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range. Piezoelectric materials, which are typically employed in nanopositioning stages, provide excellent position control when driven at relatively low frequency and low field levels. However, in applications where the stage operates over a relatively large region (microns to millimeters) and broad frequency range (Hz - kHz), piezoelectric materials often exhibit nonlinear and rate-dependent hystereis which require control designs that can effectively accommodate such behavior. In this paper, a nonlinear, thermal-relaxation, piezoelectric constitutive law is incorporated into an open loop optimal tracking control design to accurately track a desired reference signal when nonlinearities, thermal relaxation and hysteresis are present. A comparison between linear optimal control and the nonlinear optimal control design is given to illustrate performance enhancements when the constitutive behavior is included in the control design.

Download or read book Proceedings of the ASME Conference on Smart Materials Adaptive Structures and Intelligent Systems written by and published by . This book was released on 2008 with total page 744 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Robust Hysteresis Compensation for Nanopositioning Control written by Yasir Khudhair Al-Nadawi and published by . This book was released on 2021 with total page 158 pages. Available in PDF, EPUB and Kindle. Book excerpt: Piezoelectric and other smart material-based actuators are widely used in micro- and nano positioning applications. However, the intrinsic hysteretic behavior of these actuators deteriorates their tracking performance. This dissertation, composed of three parts, is focused on nonlinear control methods for compensating the hysteresis and achieving high-precision control in the presence of model uncertainties. An inversion-based adaptive conditional servocompensator (ACS) is first proposed, where a nanopositioning system represented as a linear system preceded with a hysteresis nonlinearity modeled with a Modified Prandtl-Ishlinskii (MPI) operator. With an approximate inverse MPI operator as a compensator, the resulting system takes a semi-affine form. The proposed controller consists of two parts, a continuously-implemented sliding mode control (SMC) law followed by an ASC. The hysteresis inversion error is treated as a matched disturbance and its analytical bound is used to minimize the conservativeness of the SMC design. Under mild assumptions, the well-posedness and periodic stability of the closed-loop system are established. The second part of the dissertation focuses on designing an inversion-free ACS to achieve precise tracking control of systems with hysteresis, without requiring explicit inversion of the hysteresis. To facilitate the control design, the MPI operator is rearranged into a form comprised of three parts: a linear term, a nominal hysteretic term represented by a classical Prandtl-Ishlinskii (PI) operator, and a hysteretic perturbation. The bound on the hysteretic perturbation is further derived based on the parameter uncertainty of the MPI operator. To properly ``cancel'' the nominal hysteresis effect without inversion, a technique involving a low-pass filter is introduced. It is shown that, with persistent excitation, the closed-loop variables are ultimately bounded and the tracking error approaches a neighborhood of zero, where the neighborhood can be made arbitrarily small via the choice of the SMC boundary layer width parameter and the servocompensator order. In the third part, an output feedback-based hysteresis compensation approach is used using dynamic inversion and extended high-gain observers. With mild assumptions on the properties of the hysteresis nonlinearity, the system can be represented as an uncertain, non-affine, nonlinear system containing a hysteretic perturbation. Dynamic inversion is used to deal with the non-affine input, uncertainties, and the hysteretic perturbation, where the latter two are estimated using an extended high-gain observer. Analysis of the closed-loop system under output feedback shows that the tracking error converges to a small neighborhood near the origin, which can be made arbitrarily small via proper choice of time-scale parameters of dynamic inversion and the observer, respectively. The efficacy of the three proposed controllers is verified experimentally on a commercial nanopositioning device under different types of periodic reference inputs, via comparison with multiple inversion-based and inversion-free approaches.

Download or read book Modeling and adaptive robust motion control of piezoelectric actuators written by Jinghua Zhong and published by . This book was released on 2014 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Dynamics Modeling and Control of Piezoelectric Actuators for Micro positioning Applications written by Musabah Muheil Al-Hattali and published by . This book was released on 2018 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Modeling and Control of Piezoelectric Tube Actuators and Dynamic Atomic Force Microscopes written by Johannes Maess and published by . This book was released on 2009 with total page 135 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Position Sensing and Control of Piezoelectric Tubes for the Atomic Force Microscope written by Andrew N. Daniele and published by . This book was released on 2000 with total page 66 pages. Available in PDF, EPUB and Kindle. Book excerpt: