Download or read book Resist and Masking Techniques written by Peter Beard and published by University of Pennsylvania Press. This book was released on 1996-10-29 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: A well illustrated, clearly explained guide to using a wide variety of materials as masks and resists to achieve unusual finishes on clay.
Download or read book Electron Beam Technology in Microelectronic Fabrication written by George Brewer and published by Elsevier. This book was released on 2012-12-02 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.
Download or read book Applied Digital Optics written by Bernard C. Kress and published by John Wiley & Sons. This book was released on 2009-11-04 with total page 638 pages. Available in PDF, EPUB and Kindle. Book excerpt: Miniaturization and mass replications have begun to lead the optical industry in the transition from traditional analog to novel digital optics. As digital optics enter the realm of mainstream technology through the worldwide sale of consumer electronic devices, this timely book aims to present the topic of digital optics in a unified way. Ranging from micro-optics to nanophotonics, and design to fabrication through to integration in final products, it reviews the various physical implementations of digital optics in either micro-refractives, waveguide (planar lightwave chips), diffractive and hybrid optics or sub-wavelength structures (resonant gratings, surface plasmons, photonic crystals and metamaterials). Finally, it presents a comprehensive list of industrial and commercial applications that are taking advantage of the unique properties of digital optics. Applied Digital Optics is aimed primarily at optical engineers and product development and technical marketing managers; it is also of interest to graduate-level photonics students and micro-optic foundries. Helps optical engineers review and choose the appropriate software tools to design, model and generate fabrication files. Gives product managers access to an exhaustive list of applications available in today’s market for integrating such digital optics, as well as where the next potential application of digital optics might be. Provides a broad view for technical marketing managers in all aspects of digital optics, and how such optics can be classified. Explains the numerical implementation of optical design and modelling techniques. Enables micro-optics foundries to integrate the latest fabrication and replication techniques, and accordingly fine tune their own fabrication processes.
Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2011-06-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Download or read book FUNDAMENTALS OF MODERN MANUFACTURING written by Mikell P. Groover and published by JOHN WILEY & SONS, INC.. This book was released on 2002 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d
Download or read book Fine Line Lithography written by R Newman and published by Elsevier. This book was released on 2012-12-02 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials Processing - Theory and Practices, Volume 1: Fine Line Lithography reviews technical information as well as the theory and practices of materials processing. It looks at very large scale integration (VLSI) technology, with emphasis on the creation of fine line patterned structures that make up the devices and interconnects of complex functional circuits. It also describes a variety of other technologies that provide finer patterns, from modified versions of optical methods to electron-optic systems, non-plus-ultra of X-ray techniques, and dry processing that uses the chemical or kinetic energies of gas molecules or ions. Organized into five chapters, this volume begins with an overview of the fundamentals of electron and X-ray lithography, with a focus on resists and the way they function, and how they are used in microfabrication. It then discusses electron scattering and its effects on resist exposure and development, electron-beam lithography equipment, X-ray lithography, and optical methods for fine line lithography. It systematically introduces the reader to electron-beam projection techniques, dry processing methods, and application of electron-beam technology to large-scale integrated circuits. Other chapters focus on contact and proximity printing, projection printing, deep-UV lithography, and shadow printing with electrons and ions. The book describes reactive plasma etching and ion beam etching before concluding with a look at factors affecting the performance of the scanning-probe type of systems. This book is a valuable resource for materials engineers and processing engineers, as well as those in the academics and industry.
Download or read book Polymers for Electronic Photonic Application written by C. P. Wong and published by Elsevier. This book was released on 2013-10-22 with total page 676 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most recent advances in the use of polymeric materials by the electronic industry can be found in Polymers for Electronic and Photonic Applications. This bookprovides in-depth coverage of photoresis for micro-lithography, microelectronic encapsulants and packaging, insulators, dielectrics for multichip packaging,electronic and photonic applications of polymeric materials, among many other topics. Intended for engineers and scientists who design, process, and manufacturemicroelectronic components, this book will also prove useful for hybrid and systems packaging managers who want to be informed of the very latest developments inthis field. * Presents most recent advances in the use of polymeric materials by the electronic industry* Contributions by foremost experts in the field
Download or read book Integrated Optics Theory and Technology written by Robert G. Hunsperger and published by Springer. This book was released on 2013-11-11 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: Our intent in producing this book was to provide a text that would be comprehensive enough for an introductory course in integrated optics, yet concise enough in its mathematical derivations to be easily readable by a practicing engineer who desires an overview of the field. The response to the first edition has indeed been gratifying; unusually strong demand has caused it to be sold out during the initial year of publication, thus providing us with an early opportunity to produce this updated and improved second edition. This development is fortunate, because integrated optics is a very rapidly progressing field, with significant new research being regularly reported. Hence, a new chapter (Chap. 17) has been added to review recent progress and to provide numerous additional references to the relevant technical literature. Also, thirty-five new problems for practice have been included to supplement those at the ends of chapters in the first edition. Chapters I through 16 are essentially unchanged, except for brief updating revisions and corrections of typographical errors. Because of the time limitations imposed by the need to provide an uninterrupted supply of this book to those using it as a course text, it has been possible to include new references and to briefly describe recent developments only in Chapter 17. However, we hope to provide details of this continuing progress in a future edition.
Download or read book Advances in Resist Technology and Processing written by and published by . This book was released on 1992 with total page 708 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Integrated Optics written by Robert G. Hunsperger and published by Springer Science & Business Media. This book was released on 2002 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: "In this fifth edition all chapters have been revised and updated. The chapters on Polymer and Fiber Integrated Optics, Optical Amplifiers, Micro-Optical-Electro-Mechanical Devices, and Photonic and Microwave Wireless Systems are completely new."--BOOK JACKET.
Download or read book Nontraditional Manufacturing Processes written by Gary F. Benedict and published by Routledge. This book was released on 2017-10-19 with total page 375 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a convenient, single source of information on advanced machining, material forming, and joining processes. It describes available technologies that use tools, such as high velocity material jets, pulsed magnetic fields, light beams, electrochemical reactions, and more. Organized by type of process (mechanical, chemical, electrochemical, and thermal), the book discusses 31 important nontraditional processes and covers each process’s principles, equipment, capabilities, and operating parameters. The author includes a list of nontraditional manufacturing firms, nearly 250 figures that clearly illustrate the technologies, and numerous bibliographic citations for additional reading.
Download or read book Modern Machining Technology written by Bijoy Bhattacharyya and published by Academic Press. This book was released on 2019-09-17 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern Machining Technology: Advanced, Hybrid, Micro Machining and Super Finishing Technology explores complex and precise components with challenging shapes that are increasing in demand in industry. As the first book to cover all major technologies in this field, readers will find the latest technical developments and research in one place, allowing for easy comparison of specifications. Technologies covered include mechanical, thermal, chemical, micro and hybrid machining processes, as well as the latest advanced finishing technologies. Each topic is accompanied by a basic overview, examples of typical applications and studies of performance criteria. In addition, readers will find comparative advantages, model questions and solutions. Addresses a broad range of modern machining techniques, providing specifications for easy comparison Includes descriptions of the main applications for each method, along with the materials or products needed Provides the very latest research in processes, including hybrid machining
Download or read book An Introduction to Thin Films written by Leon I. Maissel and published by CRC Press. This book was released on 1973 with total page 314 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Chemical Vapor Deposition Growth written by Ralph Powers Ruth and published by . This book was released on 1976 with total page 104 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Sultans of Deccan India 1500 1700 written by Navina Najat Haidar and published by Metropolitan Museum of Art. This book was released on 2015-04-13 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The vast Deccan plateau of south-central India stretches from the Arabian Sea to the Bay of Bengal. In the sixteenth and seventeenth centuries, the region was home to several major Muslim kingdoms and became a nexus of international trade — most notably in diamonds and textiles, through which the sultanates attained remarkable wealth. The opulent art of the Deccan courts, invigorated by cultural connections to the Middle East, Africa, and Europe, developed an otherworldly character distinct from that of the contemporary Mughal north: in painting, a poetic lyricism and audacious use of color; in the decorative arts, lively creations of inlaid metalware and painted and dyed textiles; and in architecture, a somber grandeur still visible today in breathtaking monuments throughout the plateau. The first book to fully explore the history and legacy of these kingdoms, Sultans of Deccan India elucidates the predominant themes in Deccani art—the region’s diverse spiritual traditions, its exchanges with the outside world, and the powerful styles of expression that evolved under court patronage—with fresh insights and new scholarship. Alongside the discussion of the art, lively, engaging essays by some of the field’s leading scholars offer perspectives on the cycles of victory and conquest as dynasties competed with one another, vied with Vijayanagara, a great empire to the south, and finally succumbed to the Mughals from the north. Featuring some 200 of the finest works from the Deccan sultanates, as well as spectacular site photographs and informative maps, this magnificently illustrated catalogue provides the most comprehensive examination of this world to date and constitutes a pioneering resource for specialists and general readers alike.
Download or read book Ion Implantation Equipment and Techniques written by H. Ryssel and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Fourth International Conference on Ion Implantation: Equipment and Tech niques was held at the Convention Center in Berchtesgaden, Bavaria, Germany, from September 13 to 17, 1982. It was attended by more than 200 participants from over 20 different countries. Severa1 series of conferences have dealt with the app1ication of ion implantation to semiconductors and other materials (Thousand Oaks, 1970; Garmisch-Partenkirchen, 1971; Osaka, 1974; Warwick, 1975; Bou1der, 1975; Budapest, 1978; and Albany, 1980). Another series of conferences has been devoted to implantation equipment and techniques (S- ford, 1977; Trento, 1978; and Kingston, 1980). This conference was the fourth in the 1atter series. Twe1ve invited papers and 55 contributed papers covered the areas of ion implantation equipment, measuring techniques, and app1ica tions of implantation to metals and semiconductors. A schoo1 on ion implantation was held in connection with the conference, and the 1ectures presented at this schoo1 were pub1ished as Vo1. 10 of the Springer Series in E1ectrophysics under the tit1e Ion Implantation Techniques (edited by H. Rysse1 and H. G1awischnig). During the conference, space was also provided for presentations and demonstrations by manufacturers of ion implantation equipment. Once again, this conference provided a forum for free discussion among implantation specia1ists in industry as we11 as research institutions. Espe cially effective in stimulating a free exchange of information was the daily get-together over free beer at the "Bier Adam". Many people contributed to the success of this conference.
